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    • 1. 发明授权
    • Liquid applicator and a clicking mechanism at the tail end of the same
    • 液体涂抹器和尾端的点击机构
    • US5707164A
    • 1998-01-13
    • US654683
    • 1996-05-29
    • Yukio IwamotoShin Inoue
    • Yukio IwamotoShin Inoue
    • A45D34/04B43K5/18B43K8/00
    • A45D34/042B43K5/1863
    • An applicator or a tail clicking structure used in various modes of the applicators includes: a barrel cylinder storing a liquid in its inside; a clicking portion formed at the tail; a valve rod connected to the front end of a small-diameter pipe which is connected at its rear end to the clicking portion; a valve seat which is fixed at the front end opening of the barrel cylinder and slidably holds the valve rod at a position behind a large-diameter portion so that the large-diameter portion abuts or separates from the seat. The applicator further includes: a valve spring which is abutted at its rear end against the large-diameter portion so as to urge the valve rod backward; a spring receiver which is fitted into the front part of the valve seat so as to support the front end of the valve spring and has a guide hole for guiding the front end of the valve rod; and a pen tip to which the liquid inside the barrel cylinder is supplied during clicking operations.
    • 在施用器的各种模式中使用的涂抹器或尾巴结构包括:桶体,其在其内部存储液体; 在尾部形成的点击部分; 连接到小直径管的前端的阀杆,该小直径管的后端与止动部连接; 阀座固定在筒体的前端开口处并可滑动地将阀杆保持在大直径部分的后面,使得大直径部分与座椅抵接或分离。 所述涂抹器还包括:阀弹簧,其在其后端抵靠所述大直径部分抵靠,以便向后推动所述阀杆; 弹簧接收器,其装配在阀座的前部中,以支撑阀弹簧的前端,并具有用于引导阀杆前端的引导孔; 以及在点击操作期间供应桶筒内的液体的笔尖。
    • 3. 发明授权
    • Substrate treatment apparatus, substrate treatment method and non-transitory storage medium
    • 底物处理装置,底物处理方法和非暂时性储存介质
    • US08885140B2
    • 2014-11-11
    • US13598924
    • 2012-08-30
    • Tomohiro NakashimaShin InoueYoshitaka HaraIzumi HasegawaKunie OgataTakuya Mori
    • Tomohiro NakashimaShin InoueYoshitaka HaraIzumi HasegawaKunie OgataTakuya Mori
    • G03B27/32H01L21/67
    • H01L21/67288
    • The present invention is a substrate treatment apparatus for performing solution treatment on a substrate, performing post-treatment in a treatment module subsequent to the solution treatment, including: a solution treatment section including a plurality of nozzles prepared for respective kinds of treatment solutions corresponding to lots of substrates; a transfer mechanism for transferring the substrate; a monitoring section monitoring whether there is a failure in discharge of the treatment solution in the nozzle; and a control unit outputting a control signal to prohibit the solution treatment in the solution treatment section for a substrate scheduled to be treated using a nozzle determined to have a failure by the monitoring section and to perform the solution treatment in the solution treatment section for a substrate scheduled to be treated using a nozzle other than the nozzle determined to have a failure.
    • 本发明是一种在基板上进行固溶处理的基板处理装置,在固溶处理后的处理模块中进行后处理,其特征在于,包括:固溶处理部,其具有为各种对应于 大量的底物; 用于转移衬底的转移机构; 监视部,监视喷嘴中处理液的排出是否失败; 以及控制单元,其输出控制信号,以禁止在待处理的基板的固溶处理部中进行固溶处理,所述基板通过由所述监视部确定为具有故障的喷嘴进行处理,并且在所述固溶处理部中执行所述固溶处理 预定使用被确定为失效的喷嘴以外的喷嘴进行处理的基板。