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    • 1. 发明授权
    • Substrate treatment apparatus, substrate treatment method and non-transitory storage medium
    • 底物处理装置,底物处理方法和非暂时性储存介质
    • US08885140B2
    • 2014-11-11
    • US13598924
    • 2012-08-30
    • Tomohiro NakashimaShin InoueYoshitaka HaraIzumi HasegawaKunie OgataTakuya Mori
    • Tomohiro NakashimaShin InoueYoshitaka HaraIzumi HasegawaKunie OgataTakuya Mori
    • G03B27/32H01L21/67
    • H01L21/67288
    • The present invention is a substrate treatment apparatus for performing solution treatment on a substrate, performing post-treatment in a treatment module subsequent to the solution treatment, including: a solution treatment section including a plurality of nozzles prepared for respective kinds of treatment solutions corresponding to lots of substrates; a transfer mechanism for transferring the substrate; a monitoring section monitoring whether there is a failure in discharge of the treatment solution in the nozzle; and a control unit outputting a control signal to prohibit the solution treatment in the solution treatment section for a substrate scheduled to be treated using a nozzle determined to have a failure by the monitoring section and to perform the solution treatment in the solution treatment section for a substrate scheduled to be treated using a nozzle other than the nozzle determined to have a failure.
    • 本发明是一种在基板上进行固溶处理的基板处理装置,在固溶处理后的处理模块中进行后处理,其特征在于,包括:固溶处理部,其具有为各种对应于 大量的底物; 用于转移衬底的转移机构; 监视部,监视喷嘴中处理液的排出是否失败; 以及控制单元,其输出控制信号,以禁止在待处理的基板的固溶处理部中进行固溶处理,所述基板通过由所述监视部确定为具有故障的喷嘴进行处理,并且在所述固溶处理部中执行所述固溶处理 预定使用被确定为失效的喷嘴以外的喷嘴进行处理的基板。
    • 4. 发明授权
    • Electrical connector for an electrical cable
    • 电缆用电连接器
    • US4820175A
    • 1989-04-11
    • US938082
    • 1986-11-28
    • Izumi HasegawaTakashi Kamono
    • Izumi HasegawaTakashi Kamono
    • H01R24/00H01R13/648H01R13/658H01R4/66
    • H01R12/775H01R12/59H01R12/77H01R13/6471H01R13/648H01R13/6585
    • An electrical connector comprises a plurality of signal contacts (20,30) disposed in two rows in an insulating housing (10) and each having one end for connection to respective signal wires (S) in an electric cable (1) and another end for connection with a signal terminal of a member to which the connector is to be connected, a plurality of ground contacts (62) disposed in a row between the two rows of signal contacts (20,30) and having one end for connection to ground wires (G) in the cable (1) and another end for connection with a ground terminal of the member to which the connector is connected, and a shield member (60) disposed between the signal contacts to prevent crosstalk therebetween.
    • PCT No.PCT / US86 / 00595 Sec。 一九八六年十一月二十八日 102(e)1986年11月28日PCT PCT Fils 3月24日PCT公布。 公开号WO86 / 06553 日期:1986年11月6日。电连接器包括在绝缘壳体(10)中设置成两排的多个信号触头(20,30),每个信号触头的一端用于连接到电缆中的各个信号线(S) (1)和与所述连接器将要连接的构件的信号端子连接的另一端;多个接地触头(62),布置在所述两行信号触头(20,30)之间的行中,并且具有 用于连接到电缆(1)中的接地线(G)的一端和用于与连接器所连接的构件的接地端子连接的另一端以及设置在信号触点之间以防止串扰的屏蔽构件(60) 之间。
    • 5. 发明申请
    • Electrical connector assembly
    • 电连接器总成
    • US20050142922A1
    • 2005-06-30
    • US11014010
    • 2004-12-16
    • Junya AkasakaIzumi Hasegawa
    • Junya AkasakaIzumi Hasegawa
    • H01R13/28H01R12/02H01R12/71H01R13/625H01R13/64H01R13/642
    • H01R12/716
    • An electrical connector assembly comprises a first connector and a second connector. The first connector and the second connector each have a housing with a contact receiving wall. Contacts are disposed in the housings of the first and second connectors. Each of the contacts has a contact portion, a terminal, a convex projection, and a press-fit portion. The convex projection is arranged between the contact portion and the press-fit portion. The convex projection abuts the contact receiving wall in the housing in which the contact is disposed to space the contact from the contact receiving wall when the first and second connectors are mated. A protective lip is formed on the contact receiving walls of the first and second connectors. The protective lip is formed adjacent to the contact portions of the contacts.
    • 电连接器组件包括第一连接器和第二连接器。 第一连接器和第二连接器各自具有带有接触壁的壳体。 接触件设置在第一和第二连接器的壳体中。 每个触点具有接触部分,端子,凸起凸起和压入部分。 凸起突起设置在接触部分和压配合部分之间。 所述凸出的突起抵靠所述壳体中的所述触点接收壁,所述接触件设置在所述壳体中,以在所述第一和第二连接器配合时将所述触点从所述触点接收壁定位。 在第一和第二连接器的接触接触壁上形成保护唇缘。 保护唇形成在触头的接触部分附近。
    • 6. 发明申请
    • Electrical connector and electrical connector assembly
    • 电气连接器和电气连接器组件
    • US20050142909A1
    • 2005-06-30
    • US11018021
    • 2004-12-21
    • Junya AkasakaIzumi Hasegawa
    • Junya AkasakaIzumi Hasegawa
    • H01R13/648H01R13/46H01R13/658H01R24/00H01R107/00
    • H01R13/6585H01R12/57H01R12/716
    • The invention provides an electrical connector assembly that is constituted by a first connector and a second connector, each of the first and second connectors having signal contacts disposed in two rows, a grounding member disposed between the rows of signal contacts and a housing that holds the signal contacts and the grounding member and being engaged with each other, and an electrical connector that constitutes the electrical connector assembly. The electrical connector and electrical connector assembly increase the reliability of a grounding path, require only a small number of component parts and are suitable for high-speed signal transmission. A first grounding plate and a second grounding plate that constitute the grounding member are disposed in the immediate vicinity of rows of signal contacts that are disposed in two rows and the housing has a through opening. Therefore, a connection section that constitutes the grounding member can be visually checked.
    • 本发明提供了一种由第一连接器和第二连接器构成的电连接器组件,每个第一和第二连接器具有设置在两排中的信号触点,布置在信号触头行之间的接地部件和保持 信号触点和接地构件并且彼此接合,以及构成电连接器组件的电连接器。 电连接器和电连接器组件增加了接地路径的可靠性,只需要少量的部件,并且适用于高速信号传输。 构成接地部件的第一接地板和第二接地板配置在配置成两排的信号触头列的紧邻处,并且壳体具有贯通孔。 因此,可以目视检查构成接地部件的连接部。
    • 8. 发明授权
    • Electrical connector and electrical connector assembly
    • 电气连接器和电气连接器组件
    • US06984137B2
    • 2006-01-10
    • US11018021
    • 2004-12-21
    • Junya AkasakaIzumi Hasegawa
    • Junya AkasakaIzumi Hasegawa
    • H01R13/648
    • H01R13/6585H01R12/57H01R12/716
    • The invention provides an electrical connector assembly that is constituted by a first connector and a second connector, each of the first and second connectors having signal contacts disposed in two rows, a grounding member disposed between the rows of signal contacts and a housing that holds the signal contacts and the grounding member and being engaged with each other, and an electrical connector that constitutes the electrical connector assembly. The electrical connector and electrical connector assembly increase the reliability of a grounding path, require only a small number of component parts and are suitable for high-speed signal transmission. A first grounding plate and a second grounding plate that constitute the grounding member are disposed in the immediate vicinity of rows of signal contacts that are disposed in two rows and the housing has a through opening. Therefore, a connection section that constitutes the grounding member can be visually checked.
    • 本发明提供了一种由第一连接器和第二连接器构成的电连接器组件,每个第一和第二连接器具有设置在两排中的信号触点,布置在信号触头行之间的接地部件和保持 信号触点和接地构件并且彼此接合,以及构成电连接器组件的电连接器。 电连接器和电连接器组件增加了接地路径的可靠性,只需要少量的部件,并且适用于高速信号传输。 构成接地部件的第一接地板和第二接地板配置在配置成两排的信号触头列的紧邻处,并且壳体具有贯通孔。 因此,可以目视检查构成接地部件的连接部。
    • 9. 发明授权
    • Coating apparatus
    • 涂装设备
    • US06391111B1
    • 2002-05-21
    • US09231659
    • 1999-01-15
    • Akihiro FujimotoKazuo SakamotoNobukazu IshizakaIzumi Hasegawa
    • Akihiro FujimotoKazuo SakamotoNobukazu IshizakaIzumi Hasegawa
    • B05B1302
    • B05C11/1034B05C11/08B05C11/1026B05C11/1047H01L21/6715H01L21/67253
    • To provide a coating apparatus which is capable of making short a lag time up to action of a valve and making operate a discharging pump and a valve with the best timing. By employing electric-air regulators ER1 and ER2 of small size and high response speed as a speed controller for controlling a switching speed of a switching valve AV or a suck-back valve SV, total flowing course is made short, thereby a time lag up to operation of a valve is made short. Further, by detecting the pressure of a resist liquid being discharged from a discharging pump 120 by a pressure sensor 123, and by controlling the operation of each device of a discharging pump 120, a switching valve AV, and a suck-back valve SV through a controller 180, a discharging pump 120, a switching valve AV, and a suck-back valve SV can be operated with the best timings, and generation of particles due to dripping of a resist liquid at a tip end of a resist nozzle 60 is prevented from occurring.
    • 提供一种涂覆装置,其能够使阀的作用更短的滞后时间,并且以最佳时机操作排出泵和阀。 通过采用小型,高响应速度的电气调节器ER1和ER2作为用于控制切换阀AV或回吸阀SV的切换速度的速度控制器,总流程减短,从而时间延迟 使阀门的操作变短。 此外,通过检测由压力传感器123从排出泵120排出的抗蚀剂液体的压力,并且通过控制排出泵120,切换阀AV和回吸阀SV的每个装置的操作,通过 控制器180,排出泵120,切换阀AV和回吸阀SV可以以最佳的时机运行,并且由于抗蚀剂喷嘴60的尖端处的抗蚀剂液体的滴落而产生的颗粒是 防止发生。
    • 10. 发明授权
    • Noise filter connector
    • 噪声滤波器连接器
    • US4995834A
    • 1991-02-26
    • US450694
    • 1989-12-14
    • Izumi Hasegawa
    • Izumi Hasegawa
    • H01R12/50H01R13/7197
    • H01R13/7197H01R12/716
    • A filter electrical connector comprises a dielectric housing (12), a metal shield case (13) covering the outside of the housing (12), aligned holes (21, 24) in rear walls (18, 19) of the housing (12) and the case (13), capacitors (14) secured in the holes (24) of wall (19) of case (13) and disposed in larger sections (22) of holes (21) in wall (18) of housing (12) without engaging the walls thereof, and electrical contacts (15) having contact sections (15a) extending through the capacitors (14) and extending through smaller sections (23) of the holes (21) without engaging the walls thereof and into housing (12). Post sections (15b) of the contacts (15) extend exteriorly from the rear wall (19) of case (13) and extend through apertures (26) of an inductor (16).
    • 滤波器电连接器包括绝缘壳体(12),覆盖壳体(12)外部的金属屏蔽壳(13),壳体(12)的后壁(18,19)中的对准孔(21,24) 和壳体(13),固定在壳体(13)的壁(19)的孔(24)中并且设置在壳体(12)的壁(18)中的孔(21)的较大部分(22)中的电容器 (15),其具有延伸穿过电容器(14)并且延伸穿过孔(21)的较小部分(23)的接触部分(15a),而不将其壁壁接合到壳体(12)中 )。 触头(15)的后部(15b)从外壳(13)的后壁(19)向外延伸并延伸穿过电感器(16)的孔(26)。