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    • 4. 发明授权
    • Method for fabricating a DRAM capacitor
    • 制造DRAM电容器的方法
    • US6133089A
    • 2000-10-17
    • US314201
    • 1999-05-19
    • Tse Yao HuangShih-Chi HsuYinan ChenHsing-Chuan Tsai
    • Tse Yao HuangShih-Chi HsuYinan ChenHsing-Chuan Tsai
    • H01L21/02H01L21/8242
    • H01L28/91H01L27/10852
    • A method for fabricating a DRAM capacitor is described. First, a semiconductor substrate having a capacitor contact is provided. Next, a first polysilicon layer is formed. Then, an oxide layer and a silicon oxy-nitride layer are sequentially formed over the first polysilicon layer. Next, the silicon oxy-nitride layer, the oxide layer, and the first polysilicon layer are selectively etched to leave a rectangular stack layer. Afterwards, the oxide layer and the first polysilicon layer of the rectangular stack layer are etched from the sidewall direction to leave a double T-shaped stack layer. Then, second polysilicon layer is formed on the upper surface and the sidewall of the double T-shaped stack layer. Next, the second polysilicon layer is selectively removed. The remaining second and first polysilicon layer are used as the bottom electrode. Afterwards, a dielectric layer and an upper electrode are formed on the bottom electrode.
    • 描述制造DRAM电容器的方法。 首先,提供具有电容器触点的半导体衬底。 接下来,形成第一多晶硅层。 然后,在第一多晶硅层上依次形成氧化物层和氮氧化硅层。 接下来,选择性地蚀刻硅氮氧化物层,氧化物层和第一多晶硅层以留下矩形堆叠层。 然后,从侧壁方向蚀刻矩形堆叠层的氧化物层和第一多晶硅层,留下双T型堆叠层。 然后,在双T型堆叠层的上表面和侧壁上形成第二多晶硅层。 接下来,选择性地去除第二多晶硅层。 剩余的第二和第一多晶硅层用作底部电极。 之后,在底部电极上形成电介质层和上部电极。