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    • 5. 发明授权
    • Wafer-level packaging cutting method capable of protecting contact pads
    • 晶圆级封装切割方法能够保护接触垫
    • US07622334B2
    • 2009-11-24
    • US12100392
    • 2008-04-09
    • Chun-Wei TsaiShih-Feng Shao
    • Chun-Wei TsaiShih-Feng Shao
    • H01L21/44
    • B81C1/00873B81C2203/0118H01L23/10H01L23/3114H01L2924/0002H01L2924/00
    • A cutting method for wafer-level packaging capable of protecting the contact pad, in which several cavities and precutting lines are formed at the front surface of a cap wafer, and the depth of each precutting line is lesser than the thickness of the cap wafer, followed by the bonding of the cap wafer to the device wafer, which has several devices and several bonding pads disposed on the surface of the device wafer, followed by performing a wafer dicing process, along the precutting lines cutting through the cap wafer, and after removing a portion of the cap wafer that is not bonded to the device wafer, for exposing the bonding pads at the surface of the device wafer, and finally performing a dicing process for forming many packaged dies.
    • 一种用于晶片级封装的切割方法,其能够保护接触焊盘,其中在盖晶片的前表面处形成有多个空腔和预切割线,并且每个预切割线的深度小于盖晶片的厚度, 接着将盖晶片与装置晶片的接合,该器件晶片具有设置在器件晶片表面上的若干器件和多个焊盘,随后沿切割穿过盖晶片的预切割线进行晶片切割处理,之后 去除未结合到器件晶片的盖晶片的一部分,用于暴露器件晶片表面处的接合焊盘,并且最后进行用于形成许多封装管芯的切割工艺。