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1. 发明授权

US5951196A Frictional mount for engaging a monitor in a process chamber and method of using 失效
标题翻译：用于使处理室中的监视器接合的摩擦安装和使用方法
公开(公告)号：US5951196A
公开(公告)日：1999-09-14
申请号：US74872
申请日：1998-05-08
申请人： Chih-Yuan Ke , Tung-Li Lee , Chien-Rong Huang , Sheng-Kuo Huang
发明人： Chih-Yuan Ke , Tung-Li Lee , Chien-Rong Huang , Sheng-Kuo Huang
IPC分类号： H01J37/32 , E04H17/14
CPC分类号： H01J37/32458 , H01J37/32935 , Y10T403/455 , Y10T403/557 , Y10T403/7069
摘要： The present invention discloses a frictional mount for engaging a monitor to a process chamber by utilizing a base member that has at least three apertures therethrough adapted for mounting at least one monitor and two fastening devices, a compressible member formed of a deformable material that has at least three apertures adapted for the at least one monitor and the two fastening devices to pass through, the compressible member is positioned in intimate contact with the base member, and a pressing member that is in intimate contact with the compressible member and has at least one aperture adapted for the at least one monitor to be mounted therethrough and two apertures adapted for receiving two fastening devices such that when the two fastening devices are engaged, the compressible member expands in a lateral direction and frictionally engages the internal peripheral surfaces of a recessed window in the process chamber.
摘要翻译：本发明公开了一种用于通过利用具有至少三个穿过其中的孔的基座构件将监视器接合到处理室的摩擦支架，其适于安装至少一个监视器和两个紧固装置，由可变形材料形成的可压缩构件，该可变形材料具有至少三个孔适于所述至少一个监视器并且所述两个紧固装置通过，所述可压缩构件定位成与所述基座构件紧密接触;以及按压构件，其与所述可压缩构件紧密接触并且具有至少一个适于至少一个监视器安装的孔，以及两个适于接收两个紧固装置的孔，使得当两个紧固装置接合时，可压缩构件沿横向方向膨胀并且摩擦地接合凹入窗的内周面在处理室中。

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