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    • 3. 发明申请
    • SYSTEMS AND METHODS FOR FACILITATING LIFT-OFF PROCESSES
    • 促进提升过程的系统和方法
    • US20120293474A1
    • 2012-11-22
    • US13233667
    • 2011-09-15
    • I-Shan SunFrancois HebertRick Carlton Jerome
    • I-Shan SunFrancois HebertRick Carlton Jerome
    • G09G5/10B05D1/36B05D5/06G01J1/42G01J1/02
    • G01J1/0488G01J1/42G01J1/4204G09G2360/144
    • Systems and methods for facilitating lift-off processes are provided. In one embodiment, a method for pattering a thin film on a substrate comprises: depositing a first sacrificial layer of photoresist material onto a substrate such that one or more regions of the substrate are exposed through the first sacrificial layer; depositing a protective layer over at least part of the first sacrificial layer; partially removing the first sacrificial layer to form at least one gap between the protective layer and the substrate; depositing an optical coating over the protective layer and the one or more regions of the substrate exposed through the first sacrificial layer, wherein the optical coating deposited over the protective layer is separated by the at least one gap from the optical coating deposited over the regions of the substrate exposed through the first sacrificial layer; and removing the first sacrificial layer.
    • 提供了用于促进剥离过程的系统和方法。 在一个实施例中,用于在衬底上图案化薄膜的方法包括:将光致抗蚀剂材料的第一牺牲层沉积到衬底上,使得衬底的一个或多个区域通过第一牺牲层暴露; 在第一牺牲层的至少一部分上沉积保护层; 部分地去除所述第一牺牲层以在所述保护层和所述衬底之间形成至少一个间隙; 在所述保护层上沉积光学涂层,并且通过所述第一牺牲层暴露出所述衬底的所述一个或多个区域,其中沉积在所述保护层上的所述光学涂层被所述光学涂层的所述至少一个间隙与沉积在 所述衬底通过所述第一牺牲层暴露; 以及去除所述第一牺牲层。
    • 4. 发明授权
    • Method for mitigating imprint in a ferroelectric memory
    • 减轻铁电存储器印记的方法
    • US08081500B2
    • 2011-12-20
    • US12415918
    • 2009-03-31
    • Craig TaylorFan ChuShan Sun
    • Craig TaylorFan ChuShan Sun
    • G11C11/22
    • G11C11/22G11C7/1006G11C7/12G11C11/223G11C2207/002G11C2207/005
    • An array of ferroelectric memory cells that allows imprint mitigation includes ferroelectric memory cells respectively coupled to word lines, plate lines, and bit lines; a word line driver for driving the word lines; a plate line driver for driving the plate lines; a bit line driver for driving the bit lines; and an isolation device driver for driving isolation devices coupled between the bit lines and a plurality of bit lines. The method for mitigating imprint includes coupling the bit lines to a respective plurality of sense amplifiers, turning on a word line and pulsing a plate line associated with a row of ferroelectric memory cells, disconnecting the bit lines from the respective sense amplifiers, driving the plate line low and the bit lines high, driving the plate line high and the bit lines low, driving the plate line low and floating the bit lines, driving the bit lines with the sense amplifier, and turning off the word line and precharging the bit lines. The method can be performed after each memory access, or can be performed whenever convenient with a counter and a rejuvenate command.
    • 允许压印缓解的铁电存储器单元的阵列包括分别耦合到字线,板线和位线的铁电存储器单元; 用于驱动字线的字线驱动器; 用于驱动板线的板线驱动器; 用于驱动位线的位线驱动器; 以及用于驱动耦合在位线和多个位线之间的隔离装置的隔离装置驱动器。 减轻印记的方法包括将位线耦合到相应的多个读出放大器,打开字线并且脉冲与一排铁电存储器单元相关联的板线,将位线与相应的读出放大器断开,驱动板 线低,位线高,驱动板线高位,位线低,驱动板线低电平,浮置位线,用读出放大器驱动位线,关闭字线并预充电位线 。 该方法可以在每次存储器访问之后执行,或者每当方便使用计数器和恢复命令时都可以执行该方法。
    • 6. 发明申请
    • METHOD FOR MITIGATING IMPRINT IN A FERROELECTRIC MEMORY
    • 减少电磁记忆中印痕的方法
    • US20100246238A1
    • 2010-09-30
    • US12415918
    • 2009-03-31
    • Craig TaylorFan ChuShan Sun
    • Craig TaylorFan ChuShan Sun
    • G11C11/22G11C7/00G11C8/08
    • G11C11/22G11C7/1006G11C7/12G11C11/223G11C2207/002G11C2207/005
    • An array of ferroelectric memory cells that allows imprint mitigation includes ferroelectric memory cells respectively coupled to word lines, plate lines, and bit lines; a word line driver for driving the word lines; a plate line driver for driving the plate lines; a bit line driver for driving the bit lines; and an isolation device driver for driving isolation devices coupled between the bit lines and a plurality of bit lines. The method for mitigating imprint includes coupling the bit lines to a respective plurality of sense amplifiers, turning on a word line and pulsing a plate line associated with a row of ferroelectric memory cells, disconnecting the bit lines from the respective sense amplifiers, driving the plate line low and the bit lines high, driving the plate line high and the bit lines low, driving the plate line low and floating the bit lines, driving the bit lines with the sense amplifier, and turning off the word line and precharging the bit lines. The method can be performed after each memory access, or can be performed whenever convenient with a counter and a rejuvenate command.
    • 允许压印缓解的铁电存储器单元的阵列包括分别耦合到字线,板线和位线的铁电存储器单元; 用于驱动字线的字线驱动器; 用于驱动板线的板线驱动器; 用于驱动位线的位线驱动器; 以及用于驱动耦合在位线和多个位线之间的隔离装置的隔离装置驱动器。 减轻印记的方法包括将位线耦合到相应的多个读出放大器,打开字线并且脉冲与一排铁电存储器单元相关联的板线,将位线与相应的读出放大器断开,驱动板 线低,位线高,驱动板线高位,位线低,驱动板线低电平,浮置位线,用读出放大器驱动位线,关闭字线并预充电位线 。 该方法可以在每次存储器访问之后执行,或者每当方便使用计数器和恢复命令时都可以执行该方法。
    • 8. 发明授权
    • Circuit for generating a centered reference voltage for a 1T/1C ferroelectric memory
    • 用于产生1T / 1C铁电存储器的居中参考电压的电路
    • US07313010B2
    • 2007-12-25
    • US11426165
    • 2006-06-23
    • Shan SunXiao-Hong DuFan ChuBob Sommervold
    • Shan SunXiao-Hong DuFan ChuBob Sommervold
    • G11C11/22
    • G11C11/22G11C7/12G11C7/14
    • A ferroelectric reference circuit generates a reference voltage proportional to (P+U)/2 and is automatically centered between the bit line voltages corresponding to the P term and the U term across wide temperature and voltage ranges. To avoid fatiguing the reference ferroelectric capacitors generating (P+U)/2, the reference voltage is refreshed once every millisecond. To eliminate the variation of the reference voltage due to the leakage in the ferroelectric capacitors during this period of time, the reference voltage generated from the reference ferroelectric capacitors is digitized when it is refreshed. The digital value is fixed and converted to an analog value which is then fed into sense amplifiers for resolving the data states. The reference voltage is automatically at the center of the switching (P) and non-switching (U) signals and therefore the signal margin is maximized.
    • 铁电参考电路产生与(P + U)/ 2成比例的参考电压,并且在宽温度和电压范围内自动居中对应于P项和U项的位线电压。 为了避免产生(P + U)/ 2的参考铁电电容器疲劳,参考电压每毫秒刷新一次。 为了消除在这段时间内由于铁电电容器的泄漏引起的参考电压的变化,当刷新时,从参考铁电电容器产生的参考电压被数字化。 数字值被固定并转换为模拟值,然后将其馈送到读出放大器中以解析数据状态。 参考电压自动处于开关(P)和非开关(U)信号的中心,因此信号余量最大化。
    • 10. 发明申请
    • Polysilicon sidewall spacer lateral bipolar transistor on SOI
    • SOI上的多晶硅侧壁间隔物横向双极晶体管
    • US20060060941A1
    • 2006-03-23
    • US11210881
    • 2005-08-25
    • I-Shan SunWai NgKoji Kanekiyo
    • I-Shan SunWai NgKoji Kanekiyo
    • H01L29/00
    • H01L29/0821H01L29/1008H01L29/42304H01L29/66265H01L29/7317
    • Consistent with an aspect of the present invention, a lateral bipolar transistor is provided that exhibits similar performance as that of high speed vertical bipolar junction transistors. The lateral bipolar transistor includes a polysilicon side-wall-spacer (PSWS) that forms a contact with the base of the transistor, and thus avoids the process step of aligning a contact mask to a relatively thin base region. The side wall spacer allows self-alignment of the base/emitter region, and has reduced base resistance and junction capacitance. Accordingly, improved cutoff frequency (fτ) and maximum oscillation frequency (fmax) can be achieved. Moreover, this novel topology enables the realization of Bipolar CMOS (BiCMOS) technology on insulating substrates, such as SOI.
    • 根据本发明的一个方面,提供了一种横向双极晶体管,其表现出与高速垂直双极结型晶体管相似的性能。 横向双极晶体管包括与晶体管的基极形成接触的多晶硅侧壁间隔物(PSWS),从而避免了将接触掩模对准相对薄的基极区域的工艺步骤。 侧壁间隔物允许基极/发射极区域的自对准,并且具有降低的基极电阻和结电容。 因此,可以实现改进的截止频率(ftau)和最大振荡频率(fmax)。 此外,这种新颖的拓扑结构使得能够在诸如SOI的绝缘衬底上实现双极CMOS(BiCMOS)技术。