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    • 1. 发明授权
    • Piezoelectric inkjet head
    • 压电喷墨头
    • US08038263B2
    • 2011-10-18
    • US11927743
    • 2007-10-30
    • Se-young OhSang-kwon WeeMi-Jeong Song
    • Se-young OhSang-kwon WeeMi-Jeong Song
    • B41J2/045
    • B41J2/14233B41J2002/14467B41J2002/14475
    • A piezoelectric inkjet head includes a plurality of pressure chambers filled with ink that is to be ejected, a manifold to supply ink to the pressure chambers and extending in both sides of each of the pressure chambers parallel to a direction in which the pressure chambers are arranged, a restrictor to connect the manifold to each of the pressure chambers, and to be connected to both ends of each of the pressure chambers in a longitudinal direction, a plurality of piezoelectric actuators respectively corresponding to the pressure chambers, and at least one nozzle respectively connected to each of the pressure chambers, and to be symmetrically arranged with respect to the centerline in a longitudinal direction of each of the pressure chamber. The at least one nozzle includes a first nozzle and at least two second nozzles, the first nozzle is disposed to correspond to the centerline in the longitudinal direction of each of the pressure chambers, and the second nozzles are disposed in both sides of the first nozzle.
    • 一种压电式喷墨打印头,包括:多个压力室,填充有要喷射的油墨;多个歧管,用于将油墨供应到压力室,并且在每个压力室的两侧平行于压力室排列的方向延伸 连接歧管到每个压力室的限制器,并且连接到纵向方向上的每个压力室的两端,分别对应于压力室的多个压电致动器和至少一个喷嘴 连接到每个压力室,并且在每个压力室的纵向方向上相对于中心线对称布置。 所述至少一个喷嘴包括第一喷嘴和至少两个第二喷嘴,所述第一喷嘴设置成对应于每个压力室的纵向方向上的中心线,并且所述第二喷嘴设置在所述第一喷嘴的两侧 。
    • 5. 发明授权
    • Inkjet head having piezoelectric actuator for restrictor, and image forming method and apparatus having the same
    • 具有用于限制器的压电致动器的喷墨头,以及具有该喷墨头的图像形成方法和装置
    • US08052253B2
    • 2011-11-08
    • US11758270
    • 2007-06-05
    • Sang-kwon WeeSe-young OhJae-woo Chung
    • Sang-kwon WeeSe-young OhJae-woo Chung
    • B41J2/045
    • B41J2/055B41J2/14233B41J2002/14338
    • A piezoelectric inkjet head having piezoelectric actuators for restrictors includes a flow channel plate including an ink inlet through which ink enters, a plurality of pressure chambers into which ink to be ejected is filled, a manifold which is a path to receive ink from the ink inlet and to supply the received ink to the pressure chambers, a plurality of restrictors that connect the manifold to the pressure chambers, and a plurality of nozzles to eject ink from the pressure chambers to an outside thereof. The piezoelectric inkjet head also includes a plurality of first piezoelectric actuators formed on the flow channel plate corresponding to positions of the pressure chambers to provide a driving force to each of the pressure chambers to eject ink to the outside. The piezoelectric inkjet head also includes a plurality of second piezoelectric actuators formed on the flow channel plate corresponding to positions of the restrictors to change cross-sectional areas of the restrictors.
    • 具有用于限制器的压电致动器的压电式喷墨头包括:流路板,其包括墨入口的墨入口,填充有待喷射墨的多个压力室,作为从墨入口接收墨的路径的歧管 并且将接收到的墨水供应到压力室,将歧管连接到压力室的多个限制器,以及用于将墨从压力室喷射到其外部的多个喷嘴。 压电喷墨头还包括形成在流道板上的多个第一压电致动器,其对应于压力室的位置,以向每个压力室提供驱动力以将油墨喷射到外部。 压电喷墨头还包括形成在流道板上的多个第二压电致动器,其对应于限制器的位置以改变限制器的横截面积。
    • 6. 发明授权
    • Piezoelectric inkjet head and method of manufacturing the same
    • 压电喷墨头及其制造方法
    • US07891064B2
    • 2011-02-22
    • US11768293
    • 2007-06-26
    • Sung-gyu KangYoung-ki HongJae-woo ChungSe-young Oh
    • Sung-gyu KangYoung-ki HongJae-woo ChungSe-young Oh
    • H01L41/22B41J2/045
    • B41J2/14233B41J2/055B41J2/161B41J2/1628B41J2/1629B41J2/1631B41J2/1632B41J2/1642B41J2002/14403B41J2002/14419B41J2202/03B41J2202/11Y10T29/42
    • A piezoelectric inkjet head and a method of manufacturing the piezoelectric inkjet head. The piezoelectric inkjet head includes three single crystal silicon substrates bonded to each other. An upper substrate includes an ink inlet, a plurality of pressure chambers, and a plurality of piezoelectric actuators, a middle substrate includes a manifold, a plurality of restrictors, and a plurality of first dampers, and a lower substrate includes a plurality of nozzles. The middle substrate also includes a membrane that is formed under the manifold to mitigate a rapid pressure change in the manifold and if formed of a material different from the material used for forming the middle substrate. A cavity located under the membrane and at least one venting channel that connects the cavity to the outside are formed in the middle substrate or the lower substrate. Due to the above configuration, the membrane having flexibility mitigates a rapid pressure change in the manifold caused by backflow of ink, and thus, cross-talk between adjacent pressure chambers during ink ejection can be effectively prevented.
    • 压电喷墨头和压电喷墨头的制造方法。 压电喷墨头包括彼此结合的三个单晶硅衬底。 上基板包括墨入口,多个压力室和多个压电致动器,中间基板包括歧管,多个限流器和多个第一阻尼器,下基板包括多个喷嘴。 中间基板还包括形成在歧管下方的膜,以减轻歧管中的快速压力变化,并且如果由不同于用于形成中间基板的材料形成的材料形成。 在中间基板或下基板中形成位于膜下方的空腔和将空腔连接到外部的至少一个通气通道。 由于上述结构,具有柔性的膜减轻了由于油墨的回流引起的歧管中的快速压力变化,因此可以有效地防止在喷墨期间相邻压力室之间的串扰。
    • 7. 发明授权
    • Restrictors with structure to prevent back flow and inkjet head having the same
    • 具有防止回流的结构的限流器和具有相同的喷墨头
    • US07802874B2
    • 2010-09-28
    • US11756061
    • 2007-05-31
    • Sang-kwon WeeSe-young OhJae-woo ChungMi-jeong Song
    • Sang-kwon WeeSe-young OhJae-woo ChungMi-jeong Song
    • B41J2/45
    • B41J2/055B41J2/14233B41J2002/14306B41J2202/11
    • A restrictor with a structure to prevent a back flow of ink and an inkjet head including the restrictor. In the inkjet head, an ink channel is formed in a channel plate, and the ink channel includes an ink inlet, a plurality of pressure chambers, a manifold, a plurality of restrictors respectively connecting the pressure chambers to the manifold, and a plurality of nozzles. Piezoelectric actuators are formed on the channel plate. Each of the restrictors includes a plurality of protrusions formed on an inner surface thereof in a structure suitable to increase a flow resistance of the restrictor when ink flows from the pressure chamber to the manifold through the restrictor. Each of the protrusions includes a first surface facing a flow of ink moving through the restrictor in a direction from the manifold to the pressure chamber, and a second surface facing a flow of ink moving through the restrictor in a direction from the pressure chamber to the manifold. The first surface has a low flow resistance, and the second surface has a high flow resistance. Therefore, a black flow of ink is restricted when ink is ejected, and sufficient ink can be supplied through the restrictor during an ink refill process.
    • 具有防止墨回流的结构的限流器和包括限流器的喷墨头。 在喷墨头中,在通道板中形成墨水通道,墨水通道包括墨水入口,多个压力室,歧管,分别将压力室连接到歧管的多个限流器,以及多个 喷嘴。 压电致动器形成在通道板上。 每个限流器包括形成在其内表面上的多个突起,其结构适于当油墨通过限制器从压力室流到歧管时增加限流器的流动阻力。 每个突起包括面向墨水流的第一表面,所述第一表面沿着从歧管到压力室的方向移动通过限流器;以及第二表面,所述第二表面面向墨水流动,所述第二表面沿着从所述压力室到所述压力室的方向移动通过所述限制器 多数。 第一表面具有低流动阻力,第二表面具有高流动阻力。 因此,当墨水喷射时,墨水的黑色流动受到限制,并且在填墨过程中可以通过限流器供应足够的墨水。
    • 8. 发明申请
    • Apparatus for OPC Automation and Method for Fabricating Semiconductor Device Using the Same
    • 用于OPC自动化的装置和使用其的半导体器件的制造方法
    • US20090113376A1
    • 2009-04-30
    • US12260178
    • 2008-10-29
    • Se Young Oh
    • Se Young Oh
    • G06F17/50
    • G06F17/5068G06F2217/04G06F2217/12Y02P90/265
    • An OPC automation apparatus and manufacturing method of a semiconductor device using the same, being capable of improving the fabrication yield of a semiconductor device by establishing a system and an OPC automation apparatus in which an engineer computer and a work station are connected to one database such that all OPC tasks are monitored in the engineer computer and the OPC task is automatically performed. An OPC automation apparatus may include a first computer that receives a first OPC information from outside to store; and a second computer that receives the first OPC information from the first computer to perform an OPC process, generates a second OPC information from the result of the performance of an OPC process, and delivers the second OPC information to the first computer, wherein the second computer delivers the second OPC information to the first computer such that the first computer is able to compare and analyze the first OPC information with the second OPC information.
    • 一种OPC自动化设备及其使用该半导体器件的半导体器件的制造方法,其能够通过建立系统和OPC自动化设备来提高半导体器件的制造成本,其中工程计算机和工作站连接到一个数据库,例如 在工程师计算机中监视所有OPC任务,并自动执行OPC任务。 OPC自动化设备可以包括从外部接收第一OPC信息以存储的第一计算机; 以及第二计算机,其从所述第一计算机接收所述第一OPC信息以执行OPC处理,从所述执行OPC处理的结果生成第二OPC信息,并将所述第二OPC信息传送到所述第一计算机,其中所述第二计算机 计算机将第二OPC信息传递给第一计算机,使得第一计算机能够与第二OPC信息比较和分析第一OPC信息。
    • 9. 发明申请
    • RESTRICTORS WITH STRUCTURE TO PREVENT BACK FLOW AND INKJET HEAD HAVING THE SAME
    • 具有结构防止背部流动的限制器和具有其的注射头
    • US20080129798A1
    • 2008-06-05
    • US11756061
    • 2007-05-31
    • Sang-kwon WeeSe-young OhJae-woo ChungMi-jeong Song
    • Sang-kwon WeeSe-young OhJae-woo ChungMi-jeong Song
    • B41J2/045B41J2/175
    • B41J2/055B41J2/14233B41J2002/14306B41J2202/11
    • A restrictor with a structure to prevent a back flow of ink and an inkjet head including the restrictor. In the inkjet head, an ink channel is formed in a channel plate, and the ink channel includes an ink inlet, a plurality of pressure chambers, a manifold, a plurality of restrictors respectively connecting the pressure chambers to the manifold, and a plurality of nozzles. Piezoelectric actuators are formed on the channel plate. Each of the restrictors includes a plurality of protrusions formed on an inner surface thereof in a structure suitable to increase a flow resistance of the restrictor when ink flows from the pressure chamber to the manifold through the restrictor. Each of the protrusions includes a first surface facing a flow of ink moving through the restrictor in a direction from the manifold to the pressure chamber, and a second surface facing a flow of ink moving through the restrictor in a direction from the pressure chamber to the manifold. The first surface has a low flow resistance, and the second surface has a high flow resistance. Therefore, a black flow of ink is restricted when ink is ejected, and sufficient ink can be supplied through the restrictor during an ink refill process.
    • 具有防止墨回流的结构的限流器和包括限流器的喷墨头。 在喷墨头中,在通道板中形成墨水通道,墨水通道包括墨水入口,多个压力室,歧管,分别将压力室连接到歧管的多个限流器,以及多个 喷嘴。 压电致动器形成在通道板上。 每个限流器包括形成在其内表面上的多个突起,其结构适于当油墨通过限制器从压力室流到歧管时增加限流器的流动阻力。 每个突起包括面向墨水流的第一表面,所述第一表面沿着从歧管到压力室的方向移动通过限流器;以及第二表面,所述第二表面面向墨水流动,所述第二表面沿着从所述压力室到所述压力室的方向移动通过所述限制器 多数。 第一表面具有低流动阻力,第二表面具有高流动阻力。 因此,当墨水喷射时,墨水的黑色流动受到限制,并且在填墨过程中可以通过限流器供应足够的墨水。