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1. 发明申请

WO2008096802A1 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MAKING THE SAME 审中-公开
标题翻译：非挥发性半导体存储器件及其制造方法
公开(公告)号：WO2008096802A1
公开(公告)日：2008-08-14
申请号：PCT/JP2008/051999
申请日：2008-01-31
申请人： KABUSHIKI KAISHA TOSHIBA , KIDOH, Masaru , TANAKA, Hiroyasu , KITO, Masaru , KATSUMATA, Ryota , AOCHI, Hideaki , SATO, Mitsuru
发明人： KIDOH, Masaru , TANAKA, Hiroyasu , KITO, Masaru , KATSUMATA, Ryota , AOCHI, Hideaki , SATO, Mitsuru
IPC分类号： H01L27/115 , H01L27/105 , H01L21/8246
CPC分类号： H01L27/11578 , G11C16/0483 , H01L21/8221 , H01L27/0688 , H01L27/105 , H01L27/11568 , H01L27/11575 , H01L27/11582
摘要： A non-volatile semiconductor memory device according to the present invention includes a substrate; a first word-line provided above the substrate surface, the first word-line having a plate shape in an area where a memory cell is formed; a second word-line provided above the first word-line surface, the second word-line having a plate shape; a plurality of metal wirings connecting the first and second word-lines with a driver circuit; and a plurality of contacts connecting the first and second word-lines with the metal wirings. The contact of the first word-line is formed in a first word-line contact area. The contact of the second word-line is formed in a second word-line contact area. The first word-line contact area is provided on a surface of the first word-line that is drawn to the second word-line contact area.
摘要翻译：根据本发明的非易失性半导体存储器件包括：衬底; 设置在所述衬底表面上方的第一字线，所述第一字线在形成存储器单元的区域中具有板形; 设置在所述第一字线表面上方的第二字线，所述第二字线具有板形; 将第一和第二字线与驱动电路连接的多个金属布线; 以及将第一和第二字线与金属布线连接的多个触点。第一字线的接触形成在第一字线接触区域中。第二字线的接触形成在第二字线接触区域中。第一字线接触区域被提供在第一字线的被拉到第二字线接触区域的表面上。

2. 发明申请

WO2004051380A8 METHOD FOR FORMING RESIST PATTERN AND RESIST PATTERN 审中-公开
标题翻译：形成电阻图案和电阻图案的方法
公开(公告)号：WO2004051380A8
公开(公告)日：2004-11-25
申请号：PCT/JP0315427
申请日：2003-12-02
申请人： TOKYO OHKA KOGYO CO LTD , HITACHI SCIENCE SYSTEMS LTD , HITACHI HIGH TECH CORP , KUBOTA NAOTAKA , ISHIKAWA KIYOSHI , SATO MITSURU , MATSUMIYA TASUKU , FUJII KAZUHIRO , SATO KENICHI
发明人： KUBOTA NAOTAKA , ISHIKAWA KIYOSHI , SATO MITSURU , MATSUMIYA TASUKU , FUJII KAZUHIRO , SATO KENICHI
IPC分类号： G03F7/039 , G03F7/30 , G03F7/32 , G03F7/40 , H01L21/027
CPC分类号： G03F7/32 , G03F7/0397 , G03F7/40
摘要： A method for forming a resist pattern, which comprises a step of applying a positive resist composition comprising a resin component (A) containing an alkali-soluble unit in an mount less than 20 mol % and having an acid-dissociative group inhibiting the dissolution thereof in an alkali and thus exhibiting the enhancement in the solubility in an alkaline solution by the action of an acid, a component (B) generating an acid by the exposure to a light, and an organic solvent (C) capable of dissolving (A) and (B) components on a substrate, steps of pre-baking, selective exposure, heating after exposure, and an alkali development, a replacement step of at least once replacing a liquid present on the substrate at least once with a liquid for replacement and replacing the liquid for replacement with a liquid for the critical drying, and then a drying step of drying the liquid for the critical drying through a critical state. The method can be employed, in a process of forming a resist pattern, for preventing a fine resist pattern from falling down in a drying step after developing.
摘要翻译：一种形成抗蚀剂图案的方法，其包括将包含含有碱溶性单元的树脂组分（A）的正性抗蚀剂组合物涂布在小于20mol％的载体中并具有抑制其溶解的酸解离基团的步骤在碱中，因此通过酸，通过曝光产生酸的组分（B）和能够溶解（A）的有机溶剂（C）表现出在碱性溶液中的溶解度增强，和（B）基材上的组分，预烘焙，选择性曝光，曝光后加热和碱显影的步骤，至少一次用待更换的液体代替基板上存在的液体至少一次的更换步骤; 用用于临界干燥的液体替换用于替换的液体，然后进行干燥步骤，以将临界干燥的液体干燥至临界状态。在形成抗蚀剂图案的过程中，可以采用该方法，以防止在显影之后的干燥步骤中精细的抗蚀剂图案掉落。

3. 发明申请

WO2004050725A1 POLYMER COMPOUND, RESIST COMPOSITION AND DISSOLUTION INHIBITOR AGENT CONTAINING THE POLYMER COMPOUND 审中-公开
标题翻译：聚合物化合物，耐酸性组合物和溶解抑制剂包含聚合物化合物
公开(公告)号：WO2004050725A1
公开(公告)日：2004-06-17
申请号：PCT/JP2003/015247
申请日：2003-11-28
申请人： TOKYO OHKA KOGYO CO., LTD. , OGATA, Toshiyuki , ENDO, Kotaro , TSUJI, Hiromitsu , YOSHIDA, Masaaki , HADA, Hideo , TAKASU, Ryoichi , SATO, Mitsuru
发明人： OGATA, Toshiyuki , ENDO, Kotaro , TSUJI, Hiromitsu , YOSHIDA, Masaaki , HADA, Hideo , TAKASU, Ryoichi , SATO, Mitsuru
IPC分类号： C08F20/22
CPC分类号： G03F7/0046 , C08F20/22 , G03F7/0397 , Y10S430/108
摘要： Provided are a polymer compound having high transparency for use in a photoresist composition for microfabrication of the next generation, a resist composition using the polymer compound as a base polymer, and a dissolution inhibitor agent composed of the polymer compound. To ensure etching resistance, an alicyclic group is introduced into a side chain portion. Hydrogen atoms on the ring of the alicyclic group are highly fluorinated to ensure transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 mm-1. As the alicyclic group, a polycyclic group is preferably used. Hydrogen atoms are highly fluorinated by preferably substituting all hydrogen atoms on the ring by fluorine atoms, that is, forming a perfluoroalicyclic group. The resist composition is formed by using the polymer compound as a base polymer and further, the dissolution inhibitor agent is formed of the polymer compound.
摘要翻译：提供一种用于下一代微细加工的光致抗蚀剂组合物的高透明度的高分子化合物，使用该高分子化合物作为基础聚合物的抗蚀剂组合物和由该高分子化合物构成的溶解抑制剂。为了确保耐蚀刻性，将脂环族基团引入侧链部分。脂环族基团上的氢原子被高度氟化，以确保由等于或小于3.0mm -1的吸附系数表示的157纳米波长的透明度。作为脂环基，优选使用多环基。通过优选用氟原子代替环上的所有氢原子，即形成全氟环脂基，氢原子被高度氟化。抗蚀剂组合物通过使用高分子化合物作为基础聚合物形成，并且该溶解抑制剂由高分子化合物形成。

4. 发明专利

JPH11141509A FASTENING METAL FITTING FOR PLATE MATERIAL WITH SLIT 失效
公开(公告)号：JPH11141509A
公开(公告)日：1999-05-25
申请号：JP30876097
申请日：1997-11-11
申请人： SATO MITSURU
发明人： SATO MITSURU
IPC分类号： F16B5/02 , F16B35/04
摘要： PROBLEM TO BE SOLVED: To facilitate work setting a fastening metal fitting in an inner through slit. SOLUTION: In the press plate piece 10 of a fastening metal fitting A one pair of turning end edges 15 disposed at a 180 deg. rotation symmetry position centering the center point (a) of the press plate piece 10 having a shape of the cutting-off vicinities of the apexes of its corner portions are formed so that the length d5 of a line segment (b) joining an arbitrary point (f) and the center point (a) is 1/2 of the slit width d3 of the inner through slit 4 of plate material B with slit or less. A turning operation turning the direction of the press plate piece 10 in the inner through slit 4 is made to be possible.

5. 发明专利

JP2002241628A SALT-RESISTANT POLYMERIC GEL 失效
公开(公告)号：JP2002241628A
公开(公告)日：2002-08-28
申请号：JP2001045933
申请日：2001-02-22
申请人： SATO MITSURU
发明人： SATO MITSURU
IPC分类号： C09K17/20 , C08F8/00 , C08F12/24 , C08L101/14 , C09K101/00
摘要： PROBLEM TO BE SOLVED: To provide a polymeric gel retaining its swelling degree equivalent to that in water in various aqueous salt solutions irrespective of their salt concentrations. SOLUTION: This polymeric gel is obtained from a polymeric part having phenolic hydroxy group and a hydrophilic crosslinking agent.

6. 发明专利

JP2001301952A INSTRUMENT FOR INSPECTING CONDITION OF ARTICLE HAVING STEP DIFFERENCE, INSPECTION SORTER FOR ARTICLE HAVING STEP DIFFERENCE, INSTRUMENT FOR INSPECTING CONDITION OF CAPSULE, AND INSPECTION SORTER FOR CAPSULE 失效
公开(公告)号：JP2001301952A
公开(公告)日：2001-10-31
申请号：JP2000046875
申请日：2000-02-24
申请人： SATO MITSURU
发明人： SATO MITSURU
IPC分类号： B07C5/02 , B65G47/24
摘要： PROBLEM TO BE SOLVED: To accurately and surely inspect a condition such as a direction of a capsule. SOLUTION: A sorting member 4 having through parts 4a, 4b penetrated through a body part CB but not penetrated through a cap part CC, a means 5 for feeding the capsule C and the like into the through parts 4a, 4b from one side thereof along a longitudinal direction, a sensor 6 for detecting the presence of the article in the one side and the other side in a penetrated direction of the through parts 4a, 4b, and distributing feeding-out means 5, 14 for sorting only the capsules C and bodies CB or the cap parts CC fed to the sorting member 4 into at least two kinds to be fed out. Whether the capsule C is fed in under a condition to make the body part CB directed to a front side or not is detected based on a detection result of the sensor 6, and the capsule C is fed out to the first transfer passage 11 by the means 5, 14 when the condition directed to the front side is detected.

7. 发明专利

JPH10167449A DIRECTION CHANGE MECHANISM OF ARTICLE HAVING LEVEL DIFFERENCE 失效
公开(公告)号：JPH10167449A
公开(公告)日：1998-06-23
申请号：JP32718896
申请日：1996-12-06
申请人： SATO MITSURU
发明人： SATO MITSURU
IPC分类号： B65B35/56 , B65G47/14
摘要： PROBLEM TO BE SOLVED: To simplify a structure by retreating a projection member and throwing from a small diameter part into a discharge route after pushing a large diameter part by the projection member and rotating the article with a step difference in a posture control space, when the tip of the late diameter part is engaged with a primary stop part and the small diameter part can not be received. SOLUTION: A direction change mechanism is composed of an entrance 5 and an exit 6 allowing the passage of an article 1, a primary stop part 85 for receiving the small diameter part 3 of the article 1 by connecting to the entrance 5 and engaging with a large diameter part 2 and a direction conversion part 7 providing a discharge route 9 allowing the passage of the article 1 removed from the primary stop part 8. As the article 1 is engaged with the primary stop part 8 by receiving the small diameter part 3, when the small diameter part 3 is thrown in as a top from the entrance 5, the article is pushed out to the discharge route 9 by a projection member 11 and sent to the exit 6. When the tip of the large diameter part 32 is engaged with the primary stop part 8 and the small diameter part 3 can not be received, the tip of the large diameter part 2 is pushed by the projection member 11 and the article 1 is rotated and converted its direction at a posture control space 10.

8. 发明专利

JPS5489399A VICE 失效
公开(公告)号：JPS5489399A
公开(公告)日：1979-07-16
申请号：JP15657277
申请日：1977-12-27
申请人： SATO MITSURU
发明人： SATOU MITSURU
IPC分类号： B25B1/10 , B25B1/06

9. 发明专利

JPS5314050A STUDY TOY 失效
公开(公告)号：JPS5314050A
公开(公告)日：1978-02-08
申请号：JP8789776
申请日：1976-07-23
申请人： SATO MITSURU
发明人： SATOU MITSURU
IPC分类号： A63F3/00 , A63F9/00 , A63F9/08 , A63F9/10 , A63H33/00

10. 发明专利

JPH06254138A DEFECTIVE CAPSULE SELECT DEVICE 失效
公开(公告)号：JPH06254138A
公开(公告)日：1994-09-13
申请号：JP6753193
申请日：1993-03-03
申请人： SATO MITSURU , SHUDO HATSUO
发明人： SATO MITSURU , SHUDO HATSUO
IPC分类号： A23L1/00 , A61J3/07 , B07B13/00
摘要： PURPOSE:To provide a device capable of discriminating between a capsule and a defective capsule easily, surely and efficiently. CONSTITUTION:A nail bed 1 is cylindrically provided on a rotor 2, and the nail bed is rotated to carry a bad capsule overlapping the nail 4 upward and drop the same from that position to be received by a chute 34.

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