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1. 发明授权

US07378062B2 Object processing apparatus and plasma facility comprising the same 有权
标题翻译：对象处理装置和包括该对象处理装置的等离子体设备
公开(公告)号：US07378062B2
公开(公告)日：2008-05-27
申请号：US10276301
申请日：2001-05-28
申请人： Ryohei Itatani , Mikio Deguchi , Bencherki Mebarki , Toshihiko Toda , Heitaro Ban , Ryohei Itatani, legal representative
发明人： Toshiaki Ishikawa
IPC分类号： B01J19/08
CPC分类号： B01D53/70 , B01D53/323 , B01D2257/204 , B01D2257/2062 , B01D2257/2064 , B01D2257/2066 , B01D2257/30 , B01D2257/40 , B01D2259/818 , H05H1/46 , H05H2001/466 , H05H2245/1215 , Y02C20/30
摘要： A processing apparatus for subject of the present invention uses a high voltage electrode and a ground electrode, and generates plasma under atmospheric pressure in a reaction passage through which a to-be-processed subject passes. For example, even fluorocompound such as PFC including CF4 can effectively be decomposed because the fluorocompound is brought into contact with plasma in a small space for sufficient time, and the apparatus has a small and simple structure. Therefore, the apparatus can be added to each process chamber.
摘要翻译：本发明的主题的处理装置使用高电压电极和接地电极，在被处理对象通过的反应通道中，在大气压下产生等离子体。例如，即使氟化合物如包含CF 4 N的PFC也可以有效地分解，因为氟化合物在小空间中与等离子体接触足够的时间，并且该装置具有小而简单的结构。因此，可以将该装置添加到每个处理室。

2. 发明授权

US5363019A Variable color discharge device 失效
标题翻译：可变色放电装置
公开(公告)号：US5363019A
公开(公告)日：1994-11-08
申请号：US953100
申请日：1992-09-29
申请人： Ryohei Itatani , Masatoshi Ryoko , Tatsushi Fujino
发明人： Ryohei Itatani , Masatoshi Ryoko , Tatsushi Fujino
IPC分类号： H01J61/06 , H01J61/38 , H01J61/92 , H01J61/95 , H05B41/392 , G09G3/10
CPC分类号： H05B41/3921 , H01J61/95 , Y10S315/05
摘要： A discharge tube including a tubular vessel which is filled with gases, and including a first gas and second gas, the first and second gases being different in excitation level and luminous color from each other. A first electrode unit axially applies an electric field to the vessel to generate a positive column in the vessel. A second electrode unit applies an electric field to the vessel to generate a negative glow in an area, the area extending substantially along a wall surface of the vessel and confronting the positive column generated by the electric field applied by the first electrode.
摘要翻译：一种放电管，其包括填充有气体的管状容器，并且包括第一气体和第二气体，所述第一和第二气体的激发水平和发光颜色彼此不同。第一电极单元向容器轴向施加电场以在容器中产生正列。第二电极单元向容器施加电场以在区域中产生负辉光，该区域基本上沿着容器的壁表面延伸并且面对由第一电极施加的电场产生的正极。

3. 发明授权

US5132590A Gas discharge tube capable of lighting in different colors 失效
标题翻译：气体放电管能够以不同的颜色照明
公开(公告)号：US5132590A
公开(公告)日：1992-07-21
申请号：US600167
申请日：1990-10-17
申请人： Masaaki Kimoto , Ryohei Itatani , Ryohko Masatoshi
发明人： Masaaki Kimoto , Ryohei Itatani , Ryohko Masatoshi
IPC分类号： H01J61/42 , H01J61/44 , H01J61/72 , H05B41/36
CPC分类号： H05B41/36 , H01J61/42 , H01J61/44 , H01J61/72
摘要： A gas discharge tube that is capable of lighting in different colors. The gas discharge tube, which may contain neon and mercury vapor, and which has its inner surface coated with a photoluminescent layer, is energized with a pulse current. The resultant color of the light emitted from the gas discharge tube depends on the combination of the pulse shapes and duty factors constituting the pulse current.
摘要翻译：一种能够以不同颜色照明的气体放电管。可能含有氖气和汞蒸气并且其内表面涂有光致发光层的气体放电管被脉冲电流激励。从气体放电管发出的光的合成颜色取决于构成脉冲电流的脉冲形状和占空比的组合。

4. 发明授权

US4321506A Discharge lamp and lighting equipment 失效
标题翻译：放电灯和照明设备
公开(公告)号：US4321506A
公开(公告)日：1982-03-23
申请号：US104804
申请日：1979-12-18
申请人： Michihiro Tsuchihashi , Ryohei Itatani , Masatoshi Ryohko , Yutaka Murai
发明人： Michihiro Tsuchihashi , Ryohei Itatani , Masatoshi Ryohko , Yutaka Murai
IPC分类号： H01J61/92 , H01J61/56 , H01J7/44 , H01J17/34 , H01J19/78 , H01K1/62
CPC分类号： H01J61/56
摘要： A discharge lamp comprises a high pressure arc tube for high pressure and a low pressure arc tube for low pressure which is electrically connected in parallel to said high pressure arc tube in an outer tube.A lighting equipment comprises a high pressure arc tube for high pressure discharge and a low pressure arc tube for low pressure which is electrically connected in parallel to said high pressure arc tube; and a high frequency lighting starter having 1 KHz to 100 KHz for starting the discharge of said high pressure arc tube.
摘要翻译：放电灯包括用于高压的高压电弧管和用于低压的低压电弧管，其在外管中与所述高压电弧管并联电连接。照明设备包括用于高压放电的高压电弧管和与所述高压电弧管并联电连接的用于低压的低压电弧管; 以及具有1KHz至100KHz的用于开始所述高压电弧管的放电的高频照明起动器。

5. 发明授权

US4985213A Exhaust gas treating apparatus 失效
标题翻译：废气处理装置
公开(公告)号：US4985213A
公开(公告)日：1991-01-15
申请号：US355660
申请日：1989-05-23
申请人： Takashi Ooe , Shinji Ogawa , Akiko Miura , Ryohei Itatani
发明人： Takashi Ooe , Shinji Ogawa , Akiko Miura , Ryohei Itatani
IPC分类号： B01D53/34 , B01D53/32 , B01D53/46
CPC分类号： B01D53/32 , B01D53/46
摘要： An exhaust gas treating apparatus comprised of a discharge tube consisting of a tubular chamber having a gas introduction opening and a gas withdrawal opening and a cathode and an anode provided therein so as to form a gas flow passage, and a dc or ac power supply connected to the electrodes. The cathode is a cathode pair composed of at least one pair of cathodes positioned opposite to each other nearly parallel to the gas flow passage, and a space defined by the cathode pair communicates at one end with the gas introduction opening and at the other with the gas withdrawal opening. The anode is an anode pair composed of at least one pair of anodes positioned opposite to each other within the above space in a direction approximately at right angles to the cathodes and without contact with the cathodes. A magnetic field applying means for forming a dc or ac magnetic field is provided in a direction opposing the cathode. Optionally, at least one auxiliary anode is provided nearly parallel to the anode pair within the space defined by the cathode pair and the anode pair.

6. 发明授权

US4780645A Electronic light radiation tube 失效
标题翻译：电子灯辐射管
公开(公告)号：US4780645A
公开(公告)日：1988-10-25
申请号：US948003
申请日：1986-12-31
申请人： Makoto Toho , Koji Hiramatsu , Tadao Uetsuki , Ryohei Itatani
发明人： Makoto Toho , Koji Hiramatsu , Tadao Uetsuki , Ryohei Itatani
IPC分类号： H01J63/08 , H01J63/00
CPC分类号： H01J63/08
摘要： An electronic light radiation tube wherein a cathode and an anode disposed as spaced from each other by a small spacing are housed in an envelope enclosing therein a luminous gas, and a magnetic field is applied to the envelope so as to cause magnetic lines of force of the magnetic field to pass through the envelope, while the magnetic lines of force which have passed through the cathode are prevented from passing through the anode, whereby electrons emitted from the cathode are caused to collide at a high efficiency with the luminous gas throughout the entire interior space of the envelope to excite the gas, and highly uniform light radiation can be realized over the entire envelope.
摘要翻译：一种电子光辐射管，其中阴极和阳极彼此隔开间隔很小的电子灯辐射管被容纳在封闭有发光气体的信封中，并且磁场被施加到信封上，以便产生磁力线磁场通过包络线，同时防止通过阴极的磁力线穿过阳极，由此使从阴极发射的电子以高效率与整个发光气体发生碰撞信封的内部空间以激发气体，并且可以在整个信封上实现高度均匀的光辐射。

7. 发明授权

US5410216A Gas discharge tube capable of lighting in different colors 失效
标题翻译：气体放电管能够以不同的颜色照明
公开(公告)号：US5410216A
公开(公告)日：1995-04-25
申请号：US866437
申请日：1992-04-10
申请人： Masaaki Kimoto , Ryohei Itatani , Masatoshi Ryohko
发明人： Masaaki Kimoto , Ryohei Itatani , Masatoshi Ryohko
IPC分类号： H01J61/42 , H01J61/44 , H01J61/72 , H05B41/36 , H01J1/62
CPC分类号： H01J61/42 , H01J61/44 , H01J61/72 , H05B41/36
摘要： A gas discharge tube that is capable of lighting in different colors. The gas discharge tube, which may contain neon and mercury vapor, and which has its inner surface coated with a photoluminescent layer, is energized with a pulse current. The resultant color of the light emitted from the gas discharge tube depends in part on the frequency of the pulse current.
摘要翻译：一种能够以不同颜色照明的气体放电管。可能含有氖气和汞蒸气并且其内表面涂有光致发光层的气体放电管被脉冲电流激励。从气体放电管发出的光的合成颜色部分地取决于脉冲电流的频率。

8. 发明授权

US5270616A Microwave plasma generating apparatus 失效
标题翻译：微波等离子体发生装置
公开(公告)号：US5270616A
公开(公告)日：1993-12-14
申请号：US969531
申请日：1992-10-30
申请人： Ryohei Itatani
发明人： Ryohei Itatani
IPC分类号： H05H1/46 , H01J7/24
CPC分类号： H01J37/32266 , H01J37/32623 , H05H1/46
摘要： A microwave plasma generating apparatus radiates a microwave to a source gas to produce a plasma. A plurality of spaced fins are disposed in a path of travel of the microwave, from the microwave guide to an area of origin of the plasma within the plasma generating chamber to lie in a direction perpendicular to the direction of an electric field of the microwave, for the purpose of locking the position at which the plasma has been produced.
摘要翻译：微波等离子体发生装置将微波辐射到源气体以产生等离子体。多个隔开的翅片设置在微波的行进路径中，从微波引导到等离子体发生室内的等离子体的原点区域，以位于垂直于微波电场方向的方向上，为了锁定已经产生等离子体的位置。

9. 发明授权

US5200043A Method for treating waste gas 失效
标题翻译：废气处理方法
公开(公告)号：US5200043A
公开(公告)日：1993-04-06
申请号：US814800
申请日：1991-12-31
申请人： Takashi Ooe , Hiroyasu Minoshima , Akiko Miura , Toshinori Matsuda , Ryohei Itatani
发明人： Takashi Ooe , Hiroyasu Minoshima , Akiko Miura , Toshinori Matsuda , Ryohei Itatani
IPC分类号： B01D53/32 , B01D53/46 , B01J19/08
CPC分类号： B01D53/323 , B01D53/46 , B01J19/088
摘要： A waste gas treating apparatus including a discharge tube comprising a tubular container having a gas introduction opening and a gas leading opening and at least one pair of an anodes and a cathodes placed within the container, a dc or ac power supply connected to said electrodes, and a gas flow passage formed in the discharge tube whereinat least a pair of anodes is provided opposite to each other in the flow passage,at least a pair of cathodes is provided opposite to the anodes in a direction nearly at right angles to the anodes without contacting the anodes in a space including the pair of anodes;a set of electrodes is composed of said pair of anodes and said pair of cathodes;a part or the whole of said anodes and said cathodes are composed of a plurality of plates or pillars and they are electroconductively connected integrally; anda device for forming a magnetic field application device forming a dc or ac magnetic field in the opposing direction of the cathodes is fixed to the discharge tube.
摘要翻译：一种废气处理装置，包括：放电管，包括具有气体引入开口和气体引导开口的管状容器和放置在容器内的至少一对阳极和阴极;连接到所述电极的直流或交流电源，以及形成在放电管中的气体流路，其中至少一对阳极在流动通道中彼此相对地设置，至少一对阳极设置成与阳极大致垂直于阳极的方向相对的阳极而不会在包括一对阳极的空间中接触阳极; 一组电极由所述一对阳极和所述一对阴极组成; 所述阳极和所述阴极的一部分或全部由多个板或柱组成，并且它们一体地导电连接; 并且用于形成在阴极的相反方向上形成直流或交流磁场的磁场施加装置的装置被固定到放电管。

10. 发明授权

US5188862A Microwave plasma generating apparatus and process for the preparation of diamond thin film utilizing same 失效
标题翻译：微波等离子体生成装置及其制备利用其的金刚石薄膜的方法
公开(公告)号：US5188862A
公开(公告)日：1993-02-23
申请号：US587130
申请日：1990-09-24
申请人： Ryohei Itatani , Kazuyuki Fukumoto
发明人： Ryohei Itatani , Kazuyuki Fukumoto
IPC分类号： B23P5/00 , C23C16/26 , C23C16/27 , C23C16/50 , C23C16/511 , C30B29/04 , H01J37/32 , H05H1/46
CPC分类号： C23C16/274 , B23P5/00 , C23C16/277 , C23C16/511 , H01J37/32192 , H01J37/32229 , H01J37/32266 , H05H1/46 , Y10T117/1004
摘要： A microwave plasma generating apparatus for generating plasma by radiating microwave into a space in which electric discharge takes place contains a plurality of microwave radiating means for radiating a plurality of microwaves having different directions of electric fields from each other. This microwave plasma generating apparatus can produce a diamond thin film by exciting a carbon source gas supplied into the space and bringing the excited gas into contact with a substrate to be formed thereon with the diamond thin film, the substrate being disposed in the space in which the electric discharge is performed. This apparatus can produce a large volume of plasma in a stable fashion and, as a result, provide a diamond thin film in a large area as a whole.

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