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1. 发明授权

US06651703B2 Transportation and storage of ultra-high purity products 有权
标题翻译：运输和储存超高纯度产品
公开(公告)号：US06651703B2
公开(公告)日：2003-11-25
申请号：US10101340
申请日：2002-03-19
申请人： Vladimir Yliy Gershtein , Robert William Ford , Christopher R. Butler , Eugene Y. Ngai
发明人： Vladimir Yliy Gershtein , Robert William Ford , Christopher R. Butler , Eugene Y. Ngai
IPC分类号： B65B104
CPC分类号： F17C13/083 , F17C13/04 , F17C2201/0119 , F17C2205/0107 , F17C2205/0323 , F17C2205/0329 , F17C2205/0379 , F17C2221/012 , F17C2221/037 , F17C2223/0153 , F17C2223/0161 , Y02E60/321 , Y10T137/6877
摘要： A system for the transportation and storage of a product comprising a tank including a cylindrical wall section and two ends which define a cylindrical tank periphery, wherein the tank periphery has an interior and an exterior; a recessed valve box including one or more side walls, a bottom wall, and a removable, sealable top cover which can be attached to the one or more side walls to seal the valve box, wherein the valve box side walls are sealably joined to the cylindrical wall section such that the valve box extends through the cylindrical wall section into the interior of the tank periphery and is partially or totally disposed in the interior of the tank periphery; and one or more valves disposed in the valve box. Each valve has a first and a second end, wherein each first end may be connected to a pipe which passes through a wall of the valve box for introducing product into the tank or withdrawing product from the tank, wherein the valves are disposed partially or totally within the tank periphery, and wherein the tank has a rigid framework surrounding the tank and valve box, wherein the framework is attached to and supports the tank, and wherein the framework defines a periphery which encloses the periphery of the tank. The product in the tank can be isolated from the atmosphere surrounding the tank when the valves are closed.
摘要翻译：一种用于运输和储存产品的系统，包括一个包括圆柱形壁部分和一个限定圆柱形罐周边的两个端部的罐，其中罐周边具有内部和外部; 包括一个或多个侧壁的底部阀箱，底壁和可移除的可密封的顶盖，其可以附接到一个或多个侧壁以密封阀箱，其中阀箱侧壁可密封地连接到圆柱形壁部分，使得阀盒通过圆筒壁部分延伸进入罐周边的内部，并且部分或全部设置在罐周边的内部; 以及设置在阀箱中的一个或多个阀。每个阀具有第一端和第二端，其中每个第一端可以连接到通过阀箱的壁的管道，用于将产品引入箱中或从箱中取出产品，其中阀部分地或全部地设置在罐周边内，并且其中所述罐具有围绕所述罐和阀箱的刚性框架，其中所述框架附接到所述罐并且支撑所述罐，并且其中所述框架限定围绕所述罐的周边的周边。当阀关闭时，罐中的产品可以与罐周围的气氛隔离。

2. 发明授权

US06217659B1 Dynamic blending gas delivery system and method 有权
公开(公告)号：US06217659B1
公开(公告)日：2001-04-17
申请号：US09174196
申请日：1998-10-16
申请人： Alexandre de Almeida Botelho , Thomas Anthony Del Prato , Robert William Ford
发明人： Alexandre de Almeida Botelho , Thomas Anthony Del Prato , Robert William Ford
IPC分类号： C23C1600
CPC分类号： B01F15/00344 , B01F3/026 , B01F15/00136 , B01F15/00162 , B01F15/04 , B01F2015/062 , F17C13/04 , Y02E60/321
摘要： A dynamic blending gas delivery system and method are disclosed. A blended gaseous mixture produced in accordance with the method is used in chemical vapor deposition tools or similar process tools. One embodiment is a multi-step method for processing a plurality of fluids to form a blended gaseous mixture and supplying the blended gaseous mixture to a distribution header from which the blended gaseous mixture is delivered to at least one tool. The first step is to supply a first fluid. The second step is to heat the first fluid to a temperature where at least some portion of the first fluid is a vapor. The third step is to superheat the vapor portion of the first fluid to a temperature sufficient to avoid condensation of the blended gaseous mixture delivered to the at least one tool. The fourth step is to supply a second fluid. The fifth step is to heat the second fluid to a temperature sufficient to avoid condensation of the superheated vapor portion of the first fluid when the superheated vapor portion comes in contact with the second fluid. The sixth step is to combine the heated second fluid and the superheated vapor portion of the first fluid to form a blended gaseous mixture having desired physical and chemical properties for chemical vapor deposition, epitaxial film growth, or a similar process. The final step is to deliver the blended gaseous mixture to the distribution header. In the preferred embodiment, the first fluid is trichlorosilane and the second fluid is hydrogen.

3. 发明授权

US06938654B2 Monitoring of ultra-high purity product storage tanks during transportation 有权
标题翻译：在运输过程中监测超高纯度产品储罐
公开(公告)号：US06938654B2
公开(公告)日：2005-09-06
申请号：US10680267
申请日：2003-10-06
申请人： Vladimir Yliy Gershtein , Robert William Ford , John Frederick Cirucci
发明人： Vladimir Yliy Gershtein , Robert William Ford , John Frederick Cirucci
IPC分类号： B65G65/30 , B65D90/48 , B65G51/36 , F17C1/14 , F17C3/00 , F17C3/12 , F17C13/00 , F17C13/02 , F17C13/04 , F17C13/08 , B65B1/04
CPC分类号： F17C13/083 , F17C1/14 , F17C3/00 , F17C3/12 , F17C13/004 , F17C13/025 , F17C13/026 , F17C13/04 , F17C2201/0104 , F17C2201/035 , F17C2201/052 , F17C2201/054 , F17C2203/0617 , F17C2203/0643 , F17C2205/0107 , F17C2205/0126 , F17C2205/0157 , F17C2205/0308 , F17C2205/0311 , F17C2205/0323 , F17C2205/0329 , F17C2205/0352 , F17C2205/0379 , F17C2205/0391 , F17C2205/0394 , F17C2209/221 , F17C2209/228 , F17C2221/01 , F17C2221/012 , F17C2221/014 , F17C2221/016 , F17C2221/03 , F17C2221/031 , F17C2221/033 , F17C2221/037 , F17C2221/05 , F17C2223/0123 , F17C2223/0146 , F17C2223/0153 , F17C2223/0192 , F17C2223/033 , F17C2223/035 , F17C2223/043 , F17C2223/045 , F17C2223/047 , F17C2225/0123 , F17C2225/0153 , F17C2225/033 , F17C2225/035 , F17C2225/043 , F17C2225/045 , F17C2225/047 , F17C2227/0192 , F17C2227/03 , F17C2227/044 , F17C2250/043 , F17C2250/0439 , F17C2250/0447 , F17C2250/0626 , F17C2260/035 , F17C2270/0105 , F17C2270/0171 , F17C2270/0173 , F17C2270/0189 , Y02E60/321 , Y10T137/6877
摘要： System for the transportation and storage of a product which comprises a tank including cylindrical wall section and two ends, wherein the cylindrical wall section and two ends define a cylindrical tank periphery, and wherein the tank periphery has an interior and an exterior. The system utilizes a valve box that includes one or more side walls, a bottom wall, and a removable, sealable top cover which can be attached to the one or more side walls to seal the valve box, wherein the valve box side walls are sealably joined to the cylindrical wall. One or more process valves are disposed in the valve box, wherein each valve has a first and a second end, wherein each first end is connected to a pipe which passes through a wall of the valve box for introducing product into the tank or withdrawing product from the tank. A purge valve and pressure measurement means are installed in fluid communication with the valve box. The product in the tank is isolated from the atmosphere surrounding the tank when the valve box is sealed.
摘要翻译：一种用于运输和储存产品的系统，包括一个包括圆柱形壁部分和两个端部的罐，其中圆柱形壁部分和两个端部限定圆柱形罐周边，并且其中罐周边具有内部和外部。该系统利用一个阀箱，该阀箱包括一个或多个侧壁，底壁和可移除的可密封的顶盖，该顶盖可附接到一个或多个侧壁以密封阀箱，其中阀箱侧壁是可密封的连接到圆柱形壁。一个或多个过程阀设置在阀箱中，其中每个阀具有第一和第二端，其中每个第一端连接到通过阀箱的壁的管道，用于将产品引入罐或抽出物从坦克。清洗阀和压力测量装置安装成与阀箱流体连通。当阀箱密封时，罐中的产品与罐周围的气氛隔离。

4. 发明授权

US06814092B2 Systems and methods for conditioning ultra high purity gas bulk containers 有权
标题翻译：用于调节超高纯度气体散装容器的系统和方法
公开(公告)号：US06814092B2
公开(公告)日：2004-11-09
申请号：US10607897
申请日：2003-06-27
申请人： Anthony J. Lachawiec, Jr. , Vladimir Yliy Gershtein , Ronald Martin Pearlstein , Robert William Ford
发明人： Anthony J. Lachawiec, Jr. , Vladimir Yliy Gershtein , Ronald Martin Pearlstein , Robert William Ford
IPC分类号： B08B908
CPC分类号： B08B7/0064 , B08B3/00 , B08B9/08
摘要： A process and system for conditioning a bulk container for ultra-high purity liquefied gas. Vapor is generated in the container from a conditioning quantity of the ultra-high purity liquefied gas by imposing a temperature difference on the container so that the vapor condenses when a temperature difference is achieved. The resulting liquid reflux, e.g., the condensed liquid drips or flows back to the conditioning quantity of the liquified gas, washes or removes contaminants, e.g., particles, metal and moisture, from the interior surface of the container. A portion of the vapor is vented from the container for reclamation. The used conditioning liquid may also be reclaimed.

5. 发明授权

US06616769B2 Systems and methods for conditioning ultra high purity gas bulk containers 有权
标题翻译：用于调节超高纯度气体散装容器的系统和方法
公开(公告)号：US06616769B2
公开(公告)日：2003-09-09
申请号：US09966195
申请日：2001-09-28
申请人： Anthony J. Lachawiec, Jr. , Vladimir Yliy Gershtein , Ronald Martin Pearlstein , Robert William Ford
发明人： Anthony J. Lachawiec, Jr. , Vladimir Yliy Gershtein , Ronald Martin Pearlstein , Robert William Ford
IPC分类号： B08B908
CPC分类号： B08B7/0064 , B08B3/00 , B08B9/08
摘要： A process and system for conditioning a bulk container for ultra-high purity liquefied gas. Vapor is generated in the container from a conditioning quantity of the ultra-high purity liquefied gas by imposing a temperature difference on the container so that the vapor condenses when a temperature difference is achieved. The resulting liquid reflux, e.g., the condensed liquid drips or flows back to the conditioning quantity of the liquified gas, washes or removes contaminants, e.g., particles, metal and moisture, from the interior surface of the container. A portion of the vapor is vented from the container for reclamation. The used conditioning liquid may also be reclaimed.
摘要翻译：用于调节超高纯液化气体散装容器的方法和系统。通过在容器上施加温度差使超高纯度液化气体的调节量在容器中产生蒸汽，使得当达到温差时蒸汽冷凝。所产生的液体回流，例如冷凝的液体滴落或流回到液化气体的调节量，从容器的内表面洗涤或去除污染物，例如颗粒，金属和水分。蒸气的一部分从容器中排出用于回收。所使用的调理液也可以回收。

6. 发明授权

US06614009B2 High flow rate transportable UHP gas supply system 有权
标题翻译：高流量输送UHP气体供应系统
公开(公告)号：US06614009B2
公开(公告)日：2003-09-02
申请号：US09966197
申请日：2001-09-28
申请人： Vladimir Yliy Gershtein , Alexandre De Almeida Botelho , Bruce H. Greenawald , Mark A. Lusignea , Kevin J. McMahon , Robert William Ford
发明人： Vladimir Yliy Gershtein , Alexandre De Almeida Botelho , Bruce H. Greenawald , Mark A. Lusignea , Kevin J. McMahon , Robert William Ford
IPC分类号： H05B302
CPC分类号： F17C9/02 , F17C2201/0109 , F17C2201/035 , F17C2201/052 , F17C2203/0304 , F17C2203/0617 , F17C2205/0111 , F17C2205/0126 , F17C2205/0323 , F17C2205/0394 , F17C2221/05 , F17C2223/0153 , F17C2223/033 , F17C2223/043 , F17C2225/0123 , F17C2225/033 , F17C2227/0304 , F17C2227/0383 , F17C2227/0386 , F17C2250/0404 , F17C2250/0439 , F17C2250/0631 , F17C2250/0636 , F17C2250/072 , F17C2260/025 , F17C2260/033 , F17C2260/056 , F17C2265/05 , F17C2270/0105 , F17C2270/0171 , F17C2270/0189 , F17C2270/05 , F17C2270/0518
摘要： A high flow rate, transportable, ultra high purity gas vaporization and supply system is provided which includes a vessel suitable for carrying large quantities of a liquefied gas, valves to operate with liquid or gas phases, a loading/unloading unit disposed on the vessel for loading and unloading the liquefied gas to be supplied, and a heater containing heating elements permanently positioned on the vessel to supply energy into the liquefied gas. The heater causes the liquefied gas to be supplied through the loading/unloading unit as a gas. A heater controller is also provided which uses process variables feedback for regulating the heating elements to maintain and regulate gas output.
摘要翻译：提供了高流量，可运输，超高纯度的气体蒸发和供应系统，其包括适于携带大量液化气体的容器，用于液体或气相操作的阀门，设置在容器上的装载/卸载单元装载和卸载待供应的液化气体，以及加热器，其包含永久定位在容器上的加热元件，以向液化气体供应能量。加热器使得液化气体作为气体通过装载/卸载单元供应。还提供加热器控制器，其使用过程变量反馈来调节加热元件以维持和调节气体输出。

7. 发明授权

US06637469B2 Product delivery system for stationary or portable bulk containers 有权
标题翻译：固定式或便携式散装集装箱的产品运送系统
公开(公告)号：US06637469B2
公开(公告)日：2003-10-28
申请号：US10101339
申请日：2002-03-19
申请人： Steven W. Hoffman , Vladimir Yliy Gershtein , Alexandre De Almeida Botelho , Robert William Ford , Paul David Kottler
发明人： Steven W. Hoffman , Vladimir Yliy Gershtein , Alexandre De Almeida Botelho , Robert William Ford , Paul David Kottler
IPC分类号： B65D8800
CPC分类号： F17C13/04 , F17C3/00 , F17C13/083 , F17C2201/0109 , F17C2201/035 , F17C2201/054 , F17C2203/0617 , F17C2205/0107 , F17C2205/0126 , F17C2205/0323 , F17C2205/0379 , F17C2205/0394 , F17C2221/05 , F17C2223/0153 , F17C2223/033 , F17C2223/047 , F17C2225/047 , F17C2260/018 , F17C2270/0518 , Y10T137/7039 , Y10T137/86372
摘要： A container for holding a solid, liquid and/or gaseous phase product therein and for use within a transportable or stationary support structure. The container maximizes the compressed product volume contained therein and prevents liquid and/or contaminant entrainment during gaseous product delivery from liquid phase product. The system allows for product withdraw when the level is above the delivery valves using, at a minimum, two delivery legs linked by a compartment or housing that connects the delivery point and a container head space via a removable manway.
摘要翻译：用于将固体，液体和/或气相产物保持在其中并用于可移动或固定的支撑结构内的容器。容器使包含在其中的压缩产品体积最大化，并防止在气相产物从液相产物输送期间的液体和/或污染物夹带。当水位高于输送阀时，该系统允许产品退出，至少使用通过可移除的通道连接输送点和容器头部空间的隔室或外壳连接的两个输送腿。

8. 发明授权

US06514564B2 Dynamic blending gas delivery system and method 有权
标题翻译：动态混合气体输送系统及方法
公开(公告)号：US06514564B2
公开(公告)日：2003-02-04
申请号：US09799644
申请日：2001-03-06
申请人： Alexandre de Almeida Botelho , Thomas Anthony Del Prato , Robert William Ford
发明人： Alexandre de Almeida Botelho , Thomas Anthony Del Prato , Robert William Ford
IPC分类号： C23C16448
CPC分类号： B01F15/00344 , B01F3/026 , B01F15/00136 , B01F15/00162 , B01F15/04 , B01F2015/062 , F17C13/04 , Y02E60/321
摘要： A dynamic blending gas delivery system and method are disclosed. A blended gaseous mixture produced in accordance with the method is used in chemical vapor deposition tools or similar process tools. One embodiment is a multi-step method for processing a plurality of fluids to form a blended gaseous mixture and supplying the blended gaseous mixture to a distribution header from which the blended gaseous mixture is delivered to at least one tool. The first step is to supply a first fluid. The second step is to heat the first fluid to a temperature where at least some portion of the first fluid is a vapor. The third step is to superheat the vapor portion of the first fluid to a temperature sufficient to avoid condensation of the blended gaseous mixture delivered to the at least one tool. The fourth step is to supply a second fluid. The fifth step is to heat the second fluid to a temperature sufficient to avoid condensation of the superheated vapor portion of the first fluid when the superheated vapor portion comes in contact with the second fluid. The sixth step is to combine the heated second fluid and the superheated vapor portion of the first fluid to form a blended gaseous mixture having desired physical and chemical properties for chemical vapor deposition, epitaxial film growth, or a similar process. The final step is to deliver the blended gaseous mixture to the distribution header. In the preferred embodiment, the first fluid is trichlorosilane and the second fluid is hydrogen.
摘要翻译：公开了一种动态混合气体输送系统和方法。根据该方法制备的混合气体混合物用于化学气相沉积工具或类似的工艺工具中。一个实施方案是用于处理多种流体以形成混合的气体混合物并将混合的气态混合物供应到分配集流器的多步骤方法，将混合的气体混合物从该混合物输送到至少一个工具。第一步是提供第一流体。第二步是将第一流体加热至第一流体的至少一部分是蒸汽的温度。第三步骤是将第一流体的蒸汽部分过热到足以避免输送到至少一个工具的混合气体混合物冷凝的温度。第四步是提供第二种流体。第五步是当第二流体与第二流体接触时，将第二流体加热到足以避免第一流体的过热蒸汽部分冷凝的温度。第六步骤是将加热的第二流体和第一流体的过热蒸汽部分组合以形成具有用于化学气相沉积，外延膜生长或类似工艺的所需物理和化学性质的混合气体混合物。最后一步是将混合气体混合物输送到分配头。在优选实施方案中，第一流体是三氯硅烷，第二流体是氢气。

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