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1. 发明授权

US06614009B2 High flow rate transportable UHP gas supply system 有权
标题翻译：高流量输送UHP气体供应系统
公开(公告)号：US06614009B2
公开(公告)日：2003-09-02
申请号：US09966197
申请日：2001-09-28
申请人： Vladimir Yliy Gershtein , Alexandre De Almeida Botelho , Bruce H. Greenawald , Mark A. Lusignea , Kevin J. McMahon , Robert William Ford
发明人： Vladimir Yliy Gershtein , Alexandre De Almeida Botelho , Bruce H. Greenawald , Mark A. Lusignea , Kevin J. McMahon , Robert William Ford
IPC分类号： H05B302
CPC分类号： F17C9/02 , F17C2201/0109 , F17C2201/035 , F17C2201/052 , F17C2203/0304 , F17C2203/0617 , F17C2205/0111 , F17C2205/0126 , F17C2205/0323 , F17C2205/0394 , F17C2221/05 , F17C2223/0153 , F17C2223/033 , F17C2223/043 , F17C2225/0123 , F17C2225/033 , F17C2227/0304 , F17C2227/0383 , F17C2227/0386 , F17C2250/0404 , F17C2250/0439 , F17C2250/0631 , F17C2250/0636 , F17C2250/072 , F17C2260/025 , F17C2260/033 , F17C2260/056 , F17C2265/05 , F17C2270/0105 , F17C2270/0171 , F17C2270/0189 , F17C2270/05 , F17C2270/0518
摘要： A high flow rate, transportable, ultra high purity gas vaporization and supply system is provided which includes a vessel suitable for carrying large quantities of a liquefied gas, valves to operate with liquid or gas phases, a loading/unloading unit disposed on the vessel for loading and unloading the liquefied gas to be supplied, and a heater containing heating elements permanently positioned on the vessel to supply energy into the liquefied gas. The heater causes the liquefied gas to be supplied through the loading/unloading unit as a gas. A heater controller is also provided which uses process variables feedback for regulating the heating elements to maintain and regulate gas output.
摘要翻译：提供了高流量，可运输，超高纯度的气体蒸发和供应系统，其包括适于携带大量液化气体的容器，用于液体或气相操作的阀门，设置在容器上的装载/卸载单元装载和卸载待供应的液化气体，以及加热器，其包含永久定位在容器上的加热元件，以向液化气体供应能量。加热器使得液化气体作为气体通过装载/卸载单元供应。还提供加热器控制器，其使用过程变量反馈来调节加热元件以维持和调节气体输出。

2. 发明授权

US07264013B2 Enhanced purge effect in gas conduit 有权
标题翻译：在气体管道中增强吹扫效果
公开(公告)号：US07264013B2
公开(公告)日：2007-09-04
申请号：US11128515
申请日：2005-05-13
申请人： Joseph Raymond Barker , Alexandre De Almeida Botelho , John Timothy Collins , Andrew Joseph Toth , Ronald Martin Pearlstein
发明人： Joseph Raymond Barker , Alexandre De Almeida Botelho , John Timothy Collins , Andrew Joseph Toth , Ronald Martin Pearlstein
IPC分类号： G05D7/00
CPC分类号： F17C13/04 , F17C2221/05 , F17C2223/0123 , F17C2223/035 , F17C2227/044 , F17C2227/045 , F17C2250/0452 , F17C2260/044 , F17C2270/0518 , Y02E60/321 , Y10T137/0419 , Y10T137/4259
摘要： The present invention provides a gas transfer apparatus designed for enhanced purging of a pigtail conduit and a process for effecting such purging. The apparatus comprises a surge chamber having a first end, a body and a second end, the first end in communication with the pigtail conduit. A body section of the surge chamber has a cross-section larger than the cross-section of the pigtail conduit. The second end is in communication with a vessel containing a gas source. The apparatus includes a purge gas source for delivery of a purge gas to the pigtail conduit whereby during an alternating cycle of pressurization of the pigtail conduit with the purge gas and depressurization, impurities can be removed from within the pigtail conduit.
摘要翻译：本发明提供一种气体输送装置，其设计用于增强猪尾管的清洗和进行这种净化的方法。该装置包括具有第一端，主体和第二端的缓冲室，第一端与尾纤管道连通。缓冲室的主体部分的横截面大于尾纤导管的横截面。第二端与含有气源的容器连通。该设备包括用于将净化气体输送到尾纤管道的净化气体源，由此在猪尾管道与净化气体的加压交替循环和减压期间，杂质可以从猪尾管内被去除。

3. 发明授权

US07150299B2 Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor 失效
标题翻译：用于容纳，接收和存储流体并用于从具有集成流体限流器的流体控制和气体输送组件分配气体的组装和方法
公开(公告)号：US07150299B2
公开(公告)日：2006-12-19
申请号：US10661267
申请日：2003-09-12
申请人： Benjamin Lee Hertzler , Robert Harrison Shay , Alexandre de Almeida Botelho
发明人： Benjamin Lee Hertzler , Robert Harrison Shay , Alexandre de Almeida Botelho
IPC分类号： B65B1/30
CPC分类号： F17C13/04 , F17C2205/0338 , F17C2205/035 , F17C2205/0391 , F17C2227/044 , F17C2227/048 , F17C2270/0518 , Y10T137/87249
摘要： A fluid control and gas delivery assembly and method for containing, receiving and storing hazardous fluids and for dispensing gas comprising a container, a fluid fill path, a gas dispensing path, a first shut-off valve, a pressure reducer, a fluid flow restrictor, a second shut-off valve and a fluid outlet connector. The first shut-off valve is positioned in said gas dispensing path upstream of a pressure reducer. A fluid flow restrictor downstream of the pressure reducer has a fluid flow restriction path configured to restrict the flow of the fluid delivered to the fluid flow restrictor at the delivery pressure to a maximum mass flow rate that is equal to or less than the allowable mass flow rate standard for the hazardous fluid. The second shut-off valve is positioned in said gas dispensing path downstream of said pressure reducer.
摘要翻译：用于容纳，接收和存储危险流体并用于分配气体的流体控制和气体输送组件和方法，包括容器，流体填充路径，气体分配路径，第一截止阀，减压器，流体限流器，第二截止阀和流体出口连接器。第一截止阀位于减压器上游的所述气体分配路径中。减压器下游的流体限流器具有流体流动限制路径，其被配置为将输送压力下输送到流体限流器的流体的流量限制在等于或小于允许质量流量的最大质量流量危险液体的标准。第二截止阀位于所述减压器下游的所述气体分配路径中。

4. 发明授权

US06217659B1 Dynamic blending gas delivery system and method 有权
公开(公告)号：US06217659B1
公开(公告)日：2001-04-17
申请号：US09174196
申请日：1998-10-16
申请人： Alexandre de Almeida Botelho , Thomas Anthony Del Prato , Robert William Ford
发明人： Alexandre de Almeida Botelho , Thomas Anthony Del Prato , Robert William Ford
IPC分类号： C23C1600
CPC分类号： B01F15/00344 , B01F3/026 , B01F15/00136 , B01F15/00162 , B01F15/04 , B01F2015/062 , F17C13/04 , Y02E60/321
摘要： A dynamic blending gas delivery system and method are disclosed. A blended gaseous mixture produced in accordance with the method is used in chemical vapor deposition tools or similar process tools. One embodiment is a multi-step method for processing a plurality of fluids to form a blended gaseous mixture and supplying the blended gaseous mixture to a distribution header from which the blended gaseous mixture is delivered to at least one tool. The first step is to supply a first fluid. The second step is to heat the first fluid to a temperature where at least some portion of the first fluid is a vapor. The third step is to superheat the vapor portion of the first fluid to a temperature sufficient to avoid condensation of the blended gaseous mixture delivered to the at least one tool. The fourth step is to supply a second fluid. The fifth step is to heat the second fluid to a temperature sufficient to avoid condensation of the superheated vapor portion of the first fluid when the superheated vapor portion comes in contact with the second fluid. The sixth step is to combine the heated second fluid and the superheated vapor portion of the first fluid to form a blended gaseous mixture having desired physical and chemical properties for chemical vapor deposition, epitaxial film growth, or a similar process. The final step is to deliver the blended gaseous mixture to the distribution header. In the preferred embodiment, the first fluid is trichlorosilane and the second fluid is hydrogen.

5. 发明授权

US06637469B2 Product delivery system for stationary or portable bulk containers 有权
标题翻译：固定式或便携式散装集装箱的产品运送系统
公开(公告)号：US06637469B2
公开(公告)日：2003-10-28
申请号：US10101339
申请日：2002-03-19
申请人： Steven W. Hoffman , Vladimir Yliy Gershtein , Alexandre De Almeida Botelho , Robert William Ford , Paul David Kottler
发明人： Steven W. Hoffman , Vladimir Yliy Gershtein , Alexandre De Almeida Botelho , Robert William Ford , Paul David Kottler
IPC分类号： B65D8800
CPC分类号： F17C13/04 , F17C3/00 , F17C13/083 , F17C2201/0109 , F17C2201/035 , F17C2201/054 , F17C2203/0617 , F17C2205/0107 , F17C2205/0126 , F17C2205/0323 , F17C2205/0379 , F17C2205/0394 , F17C2221/05 , F17C2223/0153 , F17C2223/033 , F17C2223/047 , F17C2225/047 , F17C2260/018 , F17C2270/0518 , Y10T137/7039 , Y10T137/86372
摘要： A container for holding a solid, liquid and/or gaseous phase product therein and for use within a transportable or stationary support structure. The container maximizes the compressed product volume contained therein and prevents liquid and/or contaminant entrainment during gaseous product delivery from liquid phase product. The system allows for product withdraw when the level is above the delivery valves using, at a minimum, two delivery legs linked by a compartment or housing that connects the delivery point and a container head space via a removable manway.
摘要翻译：用于将固体，液体和/或气相产物保持在其中并用于可移动或固定的支撑结构内的容器。容器使包含在其中的压缩产品体积最大化，并防止在气相产物从液相产物输送期间的液体和/或污染物夹带。当水位高于输送阀时，该系统允许产品退出，至少使用通过可移除的通道连接输送点和容器头部空间的隔室或外壳连接的两个输送腿。

6. 发明授权

US06514564B2 Dynamic blending gas delivery system and method 有权
标题翻译：动态混合气体输送系统及方法
公开(公告)号：US06514564B2
公开(公告)日：2003-02-04
申请号：US09799644
申请日：2001-03-06
申请人： Alexandre de Almeida Botelho , Thomas Anthony Del Prato , Robert William Ford
发明人： Alexandre de Almeida Botelho , Thomas Anthony Del Prato , Robert William Ford
IPC分类号： C23C16448
CPC分类号： B01F15/00344 , B01F3/026 , B01F15/00136 , B01F15/00162 , B01F15/04 , B01F2015/062 , F17C13/04 , Y02E60/321
摘要： A dynamic blending gas delivery system and method are disclosed. A blended gaseous mixture produced in accordance with the method is used in chemical vapor deposition tools or similar process tools. One embodiment is a multi-step method for processing a plurality of fluids to form a blended gaseous mixture and supplying the blended gaseous mixture to a distribution header from which the blended gaseous mixture is delivered to at least one tool. The first step is to supply a first fluid. The second step is to heat the first fluid to a temperature where at least some portion of the first fluid is a vapor. The third step is to superheat the vapor portion of the first fluid to a temperature sufficient to avoid condensation of the blended gaseous mixture delivered to the at least one tool. The fourth step is to supply a second fluid. The fifth step is to heat the second fluid to a temperature sufficient to avoid condensation of the superheated vapor portion of the first fluid when the superheated vapor portion comes in contact with the second fluid. The sixth step is to combine the heated second fluid and the superheated vapor portion of the first fluid to form a blended gaseous mixture having desired physical and chemical properties for chemical vapor deposition, epitaxial film growth, or a similar process. The final step is to deliver the blended gaseous mixture to the distribution header. In the preferred embodiment, the first fluid is trichlorosilane and the second fluid is hydrogen.
摘要翻译：公开了一种动态混合气体输送系统和方法。根据该方法制备的混合气体混合物用于化学气相沉积工具或类似的工艺工具中。一个实施方案是用于处理多种流体以形成混合的气体混合物并将混合的气态混合物供应到分配集流器的多步骤方法，将混合的气体混合物从该混合物输送到至少一个工具。第一步是提供第一流体。第二步是将第一流体加热至第一流体的至少一部分是蒸汽的温度。第三步骤是将第一流体的蒸汽部分过热到足以避免输送到至少一个工具的混合气体混合物冷凝的温度。第四步是提供第二种流体。第五步是当第二流体与第二流体接触时，将第二流体加热到足以避免第一流体的过热蒸汽部分冷凝的温度。第六步骤是将加热的第二流体和第一流体的过热蒸汽部分组合以形成具有用于化学气相沉积，外延膜生长或类似工艺的所需物理和化学性质的混合气体混合物。最后一步是将混合气体混合物输送到分配头。在优选实施方案中，第一流体是三氯硅烷，第二流体是氢气。

7. 发明授权

US06474077B1 Vapor delivery from a low vapor pressure liquefied compressed gas 有权
标题翻译：来自低蒸汽压的液化压缩气体的蒸汽输送
公开(公告)号：US06474077B1
公开(公告)日：2002-11-05
申请号：US10015495
申请日：2001-12-12
申请人： Alexandre De Almeida Botelho , Ali Fouad El-Agha
发明人： Alexandre De Almeida Botelho , Ali Fouad El-Agha
IPC分类号： F25J100
CPC分类号： C23C16/45561 , C23C16/4485 , F17C7/04 , F17C2203/0648 , F17C2205/0338 , F17C2221/011 , F17C2221/012 , F17C2221/014 , F17C2221/017 , F17C2221/033 , F17C2221/035 , F17C2223/0153 , F17C2225/0123 , F17C2227/0302 , F17C2227/0337 , F17C2227/0383 , F17C2250/0636 , F17C2265/012 , F17C2270/0518 , Y02E60/321
摘要： Method for delivering a vapor component product to an end user from a storage system which contains the component in coexisting liquid and vapor phases. The method comprises withdrawing from the storage system a component stream comprising vapor at a first total pressure and a first temperature, passing the component stream through a transfer line to a reservoir having an inlet and an outlet, and condensing vapor in the reservoir to provide a liquid component at a second total pressure and a second temperature at the outlet of the reservoir. The liquid component is withdrawn from the outlet of the reservoir and vaporized to yield the vapor component, which is provided to the end user. The invention includes apparatus to effect the steps of this method.
摘要翻译：从含有共存的液相和蒸汽相中的组分的储存系统将蒸汽成分产物输送到终端用户的方法。该方法包括从储存系统中取出包含第一总压力和第一温度的蒸气的组分流，使组分流通过传输管线到具有入口和出口的储存器，并将蒸气冷凝在储存器中以提供液体组分在第二总压力和第二温度在储存器的出口处。液体组分从储存器的出口排出并蒸发，以产生提供给最终用户的蒸气成分。本发明包括实现该方法的步骤的装置。

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