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    • 2. 发明授权
    • Microelectronic device packaging containing a liquid and method
    • 含有液体的微电子器件封装和方法
    • US5477084A
    • 1995-12-19
    • US367628
    • 1995-01-03
    • Brian A. WebbRobert M. Wentworth
    • Brian A. WebbRobert M. Wentworth
    • H01L21/54H01L23/22H01L23/42H01L25/04
    • H01L23/22H01L21/54H01L23/42H01L2924/0002Y10T29/49146
    • A method for manufacturing a liquid-containing microelectronic device package. The method includes steps of providing (32) a base (16) including a microelectronic device (22) and a seal area disposed peripherally about the base (16), providing (34) a lid (12) and providing (34) a sealant (14) disposed between the base (16) and lid (12). The method also includes steps of immersing (36) the base (16), sealant (14) and lid (12) in a liquid (24) having a temperature above a sealant activation temperature and maintaining (38) the base (16), sealant (14) and lid (12) in the liquid (24) for a time sufficient to allow the liquid (24) to enter between the base (16) and lid (12) and to heat and thereby activate the sealant (14). The method further includes removing (40) the base (16), lid (12) and sealant (14) from the liquid (24) to provide a sealed, liquid-containing microelectronic device package (10).
    • 一种含液体微电子器件封装的制造方法。 该方法包括以下步骤:提供(32)包括微电子器件(22)的底座(16)和围绕基座(16)围绕设置的密封区域,提供(34)盖子(12)并提供(34)密封剂 (14)设置在基部(16)和盖(12)之间。 该方法还包括以下步骤:将基底(16),密封剂(14)和盖(12)浸入温度高于密封剂活化温度的液体(24)中并保持(38)基底(16), 密封剂(14)和液体(24)中的盖子(12)足以允许液体(24)进入基部(16)和盖(12)之间的时间,并加热并由此激活密封剂(14) 。 该方法还包括从液体(24)中移除(40)底座(16),盖子(12)和密封剂(14)以提供密封的含液体的微电子器件封装(10)。
    • 3. 发明授权
    • Method of making microelectronic device package containing a liquid
    • 制造含有液体的微电子器件封装的方法
    • US5413965A
    • 1995-05-09
    • US119555
    • 1993-09-13
    • Brian A. WebbRobert M. Wentworth
    • Brian A. WebbRobert M. Wentworth
    • H01L21/54H01L23/22H01L23/42H01L21/56
    • H01L23/22H01L21/54H01L23/42H01L2924/0002Y10T29/49146
    • A method for manufacturing a liquid-containing microelectronic device package. The method includes steps of providing (32) a base (16) including a microelectronic device (22) and a seal area disposed peripherally about the base (16), providing (34) a lid (12) and providing (34) a sealant (14) disposed between the base (16) and lid (12). The method also includes steps of immersing (36) the base (16), sealant (14) and lid (12) in a liquid (24) having a temperature above a sealant activation temperature and maintaining (38) the base (16), sealant (14) and lid (12) in the liquid (24) for a time sufficient to allow the liquid (24) to enter between the base (16) and lid (12) and to heat and thereby activate the sealant (14). The method further includes removing (40) the base (16), lid (12) and sealant (14) from the liquid (24) to provide a sealed, liquid-containing microelectronic device package (10).
    • 一种含液体微电子器件封装的制造方法。 该方法包括以下步骤:提供(32)包括微电子器件(22)的底座(16)和围绕基座(16)围绕设置的密封区域,提供(34)盖子(12)并提供(34)密封剂 (14)设置在基部(16)和盖(12)之间。 该方法还包括以下步骤:将基底(16),密封剂(14)和盖(12)浸入温度高于密封剂活化温度的液体(24)中并保持(38)基底(16), 密封剂(14)和液体(24)中的盖子(12)足以允许液体(24)进入基部(16)和盖(12)之间的时间,并加热并由此激活密封剂(14) 。 该方法还包括从液体(24)中移除(40)底座(16),盖子(12)和密封剂(14)以提供密封的含液体的微电子器件封装(10)。
    • 4. 发明授权
    • Capacitive pressure sensor and method of making it
    • 电容式压力传感器及其制作方法
    • US4184189A
    • 1980-01-15
    • US933318
    • 1978-08-14
    • Earl K. DavisKent W. HansenScot W. TaylorRobert M. Wentworth
    • Earl K. DavisKent W. HansenScot W. TaylorRobert M. Wentworth
    • G01L9/12C03C8/24C03C27/06G01L9/00C03B23/20
    • G01L9/0075C03C27/06C03C8/245Y10T29/43
    • An inexpensive glass capacitive pressure sensor. Conductive capacitor electrodes are disposed on two flat glass plates, one serving as a diaphragm, the other as a substrate. The electrodes are positioned in a spaced apart, substantially parallel relationship to form the plates of a parallel plate capacitor. The glass plates are sealed together with a sealing glass mixture to bound a volume between the conductors. The volume is at a reference pressure, preferably a substantial vacuum. Differences between the pressure to be measured and this reference pressure cause a flexing of the glass diaphragm which is detected by measuring the capacitance between the two electrodes. A suitable sealing glass mixture which provides a hermetic seal between the glass plates is comprised of, in weight percent, 8-10 SiO.sub.2, 1-2 Al.sub.2 O.sub.3, 55-60 PbO, 7-9 PbF.sub.2, 7-10 ZnO, 4-6 CdO, and 10-15 B.sub.2 O.sub.3. The sealing glass mixture must be vacuum fined to permit hermetic sealing within a vacuum.
    • 廉价的玻璃电容式压力传感器。 导电电容器电极设置在两个平板玻璃板上,一个用作隔膜,另一个用作基板。 电极以间隔开的基本平行的关系定位,以形成平行板电容器的板。 玻璃板与密封玻璃混合物一起密封在一起以结合导体之间的体积。 体积处于参考压力,优选实质上真空。 要测量的压力与该参考压力之间的差异导致通过测量两个电极之间的电容而检测的玻璃隔膜的弯曲。 在玻璃板之间提供气密密封的合适的密封玻璃混合物以重量百分数包含8-10SiO 2,1-2 Al 2 O 3,55-60PbO,7-9 PbF 2,7-10 ZnO,4-6 CdO和10-15B2O3。 密封玻璃混合物必须真空处理,以在真空中进行气密封装。