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    • 2. 发明申请
    • MICROELECTRONIC COMPONENT
    • 微电子元件
    • US20130026659A1
    • 2013-01-31
    • US13639370
    • 2011-03-22
    • Mehmet KaynakBernd TillackRene Scholz
    • Mehmet KaynakBernd TillackRene Scholz
    • H01L23/522H01L21/768
    • B81C1/00587B81B2207/015B81B2207/07B81C2201/014
    • A method for producing a MEMS component including the steps of simultaneously embedding structure elements during producing the multi-level conductive path layer stack which structure elements are to be subsequently exposed, subsequently producing a recess that extends from a substrate backside to the multi-level conductive path layer stack, exposing the micromechanical structure elements in the multi-level conductive path layer stack through the recess. In order to increase process precision a reference mask for defining a lateral position or a lateral extension of the micromechanical structure elements to be exposed is produced, wherein the reference mask is either arranged on the substrate front side between the substrate and the multi-level conductive path layer stack or in a layer of the multi-level conductive path layer stack which layer is more proximal to the substrate than the structure element to be exposed.
    • 一种用于制造MEMS部件的方法,包括以下步骤:在制造多级导电路径层堆叠期间同时嵌入结构元件,该结构元件随后将被暴露,随后产生从背衬延伸到多层导电 路径层堆叠,通过凹槽暴露多层导电路径层堆叠中的微机械结构元件。 为了提高加工精度,产生用于限定要暴露的微机械结构元件的横向位置或横向延伸的参考掩模,其中参考掩模或者被布置在基板和多层导电 路径层堆叠或者在多层导电路径层堆叠的层中,该层比要暴露的结构元件更靠近衬底。