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1. 发明申请

US20100170346A1 SENSOR ELEMENT FOR CAPACITIVE DIFFERENTIAL-PRESSURE SENSING 有权
标题翻译：传感器元件用于电容式差压检测
公开(公告)号：US20100170346A1
公开(公告)日：2010-07-08
申请号：US12644331
申请日：2009-12-22
申请人： Bernhard Opitz , Christian Doering , Hans Artmann , Janpeter Wolff , Remigius Niekrawietz
发明人： Bernhard Opitz , Christian Doering , Hans Artmann , Janpeter Wolff , Remigius Niekrawietz
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , B81B3/0078 , B81B2201/0264 , G01L13/025
摘要： A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For that purpose, the micromechanical sensor element includes a deflectable diaphragm structure which is provided with at least one deflectable electrode, and a fixed support structure for at least one fixed counter-electrode which is located opposite the deflectable electrode. The diaphragm structure includes two mutually parallel configured diaphragms that are joined rigidly to one another via at least one connecting crosspiece, so that each application of force to one of the two diaphragms is directly transmitted to the respective other diaphragm. The first diaphragm is able to be pressurized by a first measuring pressure emanating from the front side of the sensor element, and the second diaphragm is able to be pressurized by a second measuring pressure emanating from the rear side of the sensor element. The fixed counter-electrode is located in the sealed volume between the two diaphragms of the diaphragm structure.
摘要翻译：传感器设计分别是用于电容式相对压力测量的微机械传感器结构，即使在苛刻的，充满颗粒的测量环境中，也能够将极小的压差可靠地记录在高绝对压力下。为此目的，微机械传感器元件包括可偏转的膜结构，其具有至少一个可偏转电极，以及用于至少一个与可偏转电极相对的固定对置电极的固定支撑结构。隔膜结构包括通过至少一个连接横档彼此刚性地连接的两个相互平行的构造的隔膜，使得对两个隔膜中的一个的每个施加的力直接传递到相应的另一个隔膜。第一隔膜能够通过从传感器元件的前侧发出的第一测量压力被加压，并且第二隔膜能够被从传感器元件的后侧发出的第二测量压力加压。固定对置电极位于隔膜结构的两个隔膜之间的密封体积中。

2. 发明授权

US07992443B2 Sensor element for capacitive differential-pressure sensing 有权
标题翻译：传感器元件用于电容式差压检测
公开(公告)号：US07992443B2
公开(公告)日：2011-08-09
申请号：US12644331
申请日：2009-12-22
申请人： Bernhard Opitz , Christian Doering , Hans Artmann , Janpeter Wolff , Remigius Niekrawietz
发明人： Bernhard Opitz , Christian Doering , Hans Artmann , Janpeter Wolff , Remigius Niekrawietz
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , B81B3/0078 , B81B2201/0264 , G01L13/025
摘要： A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For that purpose, the micromechanical sensor element includes a deflectable diaphragm structure which is provided with at least one deflectable electrode, and a fixed support structure for at least one fixed counter-electrode which is located opposite the deflectable electrode. The diaphragm structure includes two mutually parallel configured diaphragms that are joined rigidly to one another via at least one connecting crosspiece, so that each application of force to one of the two diaphragms is directly transmitted to the respective other diaphragm. The first diaphragm is able to be pressurized by a first measuring pressure emanating from the front side of the sensor element, and the second diaphragm is able to be pressurized by a second measuring pressure emanating from the rear side of the sensor element. The fixed counter-electrode is located in the sealed volume between the two diaphragms of the diaphragm structure.
摘要翻译：传感器设计分别是用于电容式相对压力测量的微机械传感器结构，即使在苛刻的，充满颗粒的测量环境中，也能够将极小的压差可靠地记录在高绝对压力下。为此目的，微机械传感器元件包括可偏转的膜结构，其具有至少一个可偏转电极，以及用于至少一个与可偏转电极相对的固定对置电极的固定支撑结构。隔膜结构包括通过至少一个连接横档彼此刚性地连接的两个相互平行的构造的隔膜，使得对两个隔膜中的一个的每个施加的力直接传递到相应的另一个隔膜。第一隔膜能够通过从传感器元件的前侧发出的第一测量压力被加压，并且第二隔膜能够被从传感器元件的后侧发出的第二测量压力加压。固定对置电极位于隔膜结构的两个隔膜之间的密封体积中。

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