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1. 发明申请

US20070121785A1 X-ray optical element 有权
公开(公告)号：US20070121785A1
公开(公告)日：2007-05-31
申请号：US11491462
申请日：2006-07-21
申请人： Reiner Dietsch , Thomas Holz
发明人： Reiner Dietsch , Thomas Holz
IPC分类号： G21K1/06
CPC分类号： G21K1/06 , B82Y10/00 , G21K2201/061 , G21K2201/064
摘要： An X-ray optical element for and influencing of X-ray beam characteristics in two dimensions includes two reflective, curved elements arranged side-by-side to receive X-ray radiation from an X-ray beam source so that the radiation is directed onto both reflective elements and then reflected from one element onto the other element, wherein the two reflective elements are curved at different angles and have different focal lengths.

2. 发明授权

US6146714A Method of forming metal, ceramic or ceramic/metal layers on inner surfaces of hollow bodies using pulsed laser deposition 有权
标题翻译：使用脉冲激光沉积在中空体的内表面上形成金属，陶瓷或陶瓷/金属层的方法
公开(公告)号：US6146714A
公开(公告)日：2000-11-14
申请号：US235978
申请日：1999-01-22
申请人： Steffen Beyer , Reiner Dietsch , Hermann Mai , Wolfgang Pompe
发明人： Steffen Beyer , Reiner Dietsch , Hermann Mai , Wolfgang Pompe
IPC分类号： B32B15/04 , B32B18/00 , C23C14/04 , C23C14/28 , F02K9/62 , H01J37/32 , C23C16/48
CPC分类号： H01J37/32321 , C23C14/046 , C23C14/28
摘要： A pulsed laser deposition (PLD) process is used for forming a functional metal, ceramic, or ceramic/metal layer on an inner wall of a hollow body. Simultaneously with the deposition process, a thin-film laser treatment is carried out, whereby a laser beam impinges on the coating layer as it is being formed to achieve a rapid heating followed by a rapid cooling and solidification of the deposited coating layer. In this context, the energy and material flux densities are prescribed and controlled as a function of the spacing of the condensation region from the substrate surface. Laser pulses having an energy of 1 to 2 Joules and a pulse repetition rate of 10 to 50 Hz are used. The pulse duration as well as the residual gas atmosphere in the vacuum deposition chamber are controlled so that the generated plasma flux forms the desired layered grain structure, namely a glassy amorphous structure, a columnar structure, or a polycrystalline structure. The coating or target material can be made of a conducting material and/or an insulating material. By continuously or discretely varying process parameters, it is possible to form graded layer coating systems having properties that vary through the thickness of the coating.
摘要翻译：脉冲激光沉积（PLD）工艺用于在中空体的内壁上形成功能金属，陶瓷或陶瓷/金属层。与沉积工艺同时进行薄膜激光处理，由此激光束在其形成时照射在涂层上以实现快速加热，随后沉积涂层的快速冷却和固化。在本文中，能量和物质通量密度是根据冷凝区域与衬底表面间隔的函数来规定和控制的。使用具有1至2焦耳的能量和10至50Hz的脉冲重复频率的激光脉冲。控制真空沉积室中的脉冲持续时间和残余气体气氛，使得产生的等离子体通量形成所需的层状晶粒结构，即玻璃态无定形结构，柱状结构或多晶结构。涂层或靶材料可以由导电材料和/或绝缘材料制成。通过连续或离散地改变工艺参数，可以形成具有通过涂层厚度变化的特性的分层涂层体系。

3. 发明授权

US5672211A Apparatus for depositing a thin layer on a substrate by laser pulse vapor deposition 失效
标题翻译：用于通过激光脉冲气相沉积在衬底上沉积薄层的装置
公开(公告)号：US5672211A
公开(公告)日：1997-09-30
申请号：US691568
申请日：1996-08-02
申请人： Hermann Mai , Reiner Dietsch , Klaus Schubert
发明人： Hermann Mai , Reiner Dietsch , Klaus Schubert
IPC分类号： C23C14/28 , C23C14/00
CPC分类号： C23C14/28
摘要： A method for depositing a thin layer on a substrate by laser pulse vapor deposition provides a substantially cylindrical target having a cylinder axis and a curved target surface. A pulsed laser beam is generated having an initial path section and an initial path section axis and is capable of producing a plasma plume from the target when the pulsed laser beam impinges on the curved target surface. A first mirror located between the target and the initial path section of the laser beam is provided having a plurality of reflective interior surfaces and a first mirror axis substantially coincident with an initial path section axis of the laser beam. The laser beam is deflected so as to impinge on the reflective interior surface of the first mirror and subsequently to be reflected and to impinge on the curved target surface by controlling a plane reflective mirror that intersects the first mirror axis and is located on a side of the first mirror opposite from the target. The plane reflective mirror is tilted at an angle to the laser beam axis and is rotatable about a rotation axis substantially coincident with the first mirror axis. The laser beam is focussed on a center of the target to produce the plasma plume on the curved target surface. The plasma plume is moved on the curved target surface over a track by moving a position where the laser beam impinges on the reflective interior surface of the first mirror step-by-step rotation of the plane reflective mirror about the rotation axis, with a thin layer being deposited with a substantially uniform thickness on the substrate by contact of the plasma plume with the substrate. The first mirror includes a plurality of plane mirrors connected in a cylindrical manner.
摘要翻译：通过激光脉冲气相沉积在衬底上沉积薄层的方法提供了具有气缸轴线和弯曲目标表面的大致圆柱形的靶。生成具有初始路径部分和初始路径截面轴线的脉冲激光束，并且当脉冲激光束照射在弯曲目标表面上时能够从目标产生等离子体羽流。提供了位于激光束的目标和初始路径部分之间的第一反射镜，其具有多个反射内表面和与激光束的初始路径截面轴线基本一致的第一反射镜轴。激光束被偏转以便撞击在第一反射镜的反射内表面上并且随后被反射并且通过控制与第一镜像轴相交的平面反射镜并且位于第一反射镜的一侧上而撞击在弯曲的目标表面上与目标相反的第一个镜子。平面反射镜以与激光束轴成一定角度倾斜并且可绕与第一镜轴基本一致的旋转轴线旋转。激光束聚焦在目标的中心，以在弯曲的目标表面上产生等离子体羽流。通过将激光束照射在第一镜的反射内表面上的位置，通过使平面反射镜围绕旋转轴逐步旋转，等离子体羽流在弯曲的目标表面上在轨道上移动，层通过等离子体羽毛与基底的接触而以基本上均匀的厚度沉积在基底上。第一反射镜包括以圆柱形方式连接的多个平面反射镜。

4. 发明授权

US07298822B2 X-ray optical element 有权
标题翻译： X射线光学元件
公开(公告)号：US07298822B2
公开(公告)日：2007-11-20
申请号：US11491462
申请日：2006-07-21
申请人： Reiner Dietsch , Thomas Holz
发明人： Reiner Dietsch , Thomas Holz
IPC分类号： G21K1/02
CPC分类号： G21K1/06 , B82Y10/00 , G21K2201/061 , G21K2201/064
摘要： An X-ray optical element for and influencing of X-ray beam characteristics in two dimensions includes two reflective, curved elements arranged side-by-side to receive X-ray radiation from an X-ray beam source so that the radiation is directed onto both reflective elements and then reflected from one element onto the other element, wherein the two reflective elements are curved at different angles and have different focal lengths.
摘要翻译：用于并影响X射线光束特性的X射线光学元件在二维中包括并排布置的两个反射弯曲元件，以接收来自X射线束源的X射线辐射，使得辐射被引导到两个反射元件然后从一个元件反射到另一个元件上，其中两个反射元件以不同的角度弯曲并且具有不同的焦距。

5. 发明授权

US5578350A Method for depositing a thin layer on a substrate by laser pulse vapor deposition 失效
标题翻译：通过激光脉冲气相沉积在衬底上沉积薄层的方法
公开(公告)号：US5578350A
公开(公告)日：1996-11-26
申请号：US478861
申请日：1995-06-07
申请人： Hermann Mai , Reiner Dietsch , Klaus Schubert
发明人： Hermann Mai , Reiner Dietsch , Klaus Schubert
IPC分类号： C23C14/28 , C23C14/30 , H05B7/00
CPC分类号： C23C14/28
摘要： A method for depositing a thin layer on a substrate by laser pulse vapor deposition provides a substantially cylindrical target having a cylinder axis and a curved target surface. A pulsed laser beam is generated having an initial path section and an initial path section axis and is capable of producing a plasma plume from the target when the pulsed laser beam impinges on the curved target surface. A first mirror located between the target and the initial path section of the laser beam is provided having a plurality of reflective interior surfaces and a first mirror axis substantially coincident with an initial path section axis of the laser beam. The laser beam is deflected so as to impinge on the reflective interior surface of the first mirror and subsequently to be reflected and to impinge on the curved target surface by controlling a plane reflective mirror that intersects the first mirror axis and is located on a side of the first mirror opposite from the target. The plane reflective mirror is tilted at an angle to the laser beam axis and is rotatable about a rotation axis substantially coincident with the first mirror axis. The laser beam is focussed on a center of the target to produce the plasma plume on the curved target surface. The plasma plume is moved on the curved target surface over a track by moving a position where the laser beam impinges on the reflective interior surface of the first mirror step-by-step rotation of the plane reflective mirror about the rotation axis, with a thin layer being deposited with a substantially uniform thickness on the substrate by contact of the plasma plume with the substrate. The first mirror includes a plurality of plane mirrors connected in a cylindrical manner.
摘要翻译：通过激光脉冲气相沉积在衬底上沉积薄层的方法提供了具有气缸轴线和弯曲目标表面的大致圆柱形的靶。生成具有初始路径部分和初始路径截面轴线的脉冲激光束，并且当脉冲激光束照射在弯曲目标表面上时能够从目标产生等离子体羽流。提供了位于激光束的目标和初始路径部分之间的第一反射镜，其具有多个反射内表面和与激光束的初始路径截面轴线基本一致的第一反射镜轴。激光束被偏转以便撞击在第一反射镜的反射内表面上并且随后被反射并且通过控制与第一镜像轴相交的平面反射镜并且位于第一反射镜的一侧上而撞击在弯曲的目标表面上与目标相反的第一个镜子。平面反射镜以与激光束轴成一定角度倾斜并且可绕与第一镜轴基本一致的旋转轴线旋转。激光束聚焦在目标的中心，以在弯曲的目标表面上产生等离子体羽流。通过将激光束照射在第一镜的反射内表面上的位置，通过使平面反射镜围绕旋转轴逐步旋转，等离子体羽流在弯曲的目标表面上在轨道上移动，层通过等离子体羽毛与基底的接触而以基本上均匀的厚度沉积在基底上。第一反射镜包括以圆柱形方式连接的多个平面反射镜。

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