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    • 7. 发明授权
    • Apparatus for depositing a thin layer on a substrate by laser pulse
vapor deposition
    • 用于通过激光脉冲气相沉积在衬底上沉积薄层的装置
    • US5672211A
    • 1997-09-30
    • US691568
    • 1996-08-02
    • Hermann MaiReiner DietschKlaus Schubert
    • Hermann MaiReiner DietschKlaus Schubert
    • C23C14/28C23C14/00
    • C23C14/28
    • A method for depositing a thin layer on a substrate by laser pulse vapor deposition provides a substantially cylindrical target having a cylinder axis and a curved target surface. A pulsed laser beam is generated having an initial path section and an initial path section axis and is capable of producing a plasma plume from the target when the pulsed laser beam impinges on the curved target surface. A first mirror located between the target and the initial path section of the laser beam is provided having a plurality of reflective interior surfaces and a first mirror axis substantially coincident with an initial path section axis of the laser beam. The laser beam is deflected so as to impinge on the reflective interior surface of the first mirror and subsequently to be reflected and to impinge on the curved target surface by controlling a plane reflective mirror that intersects the first mirror axis and is located on a side of the first mirror opposite from the target. The plane reflective mirror is tilted at an angle to the laser beam axis and is rotatable about a rotation axis substantially coincident with the first mirror axis. The laser beam is focussed on a center of the target to produce the plasma plume on the curved target surface. The plasma plume is moved on the curved target surface over a track by moving a position where the laser beam impinges on the reflective interior surface of the first mirror step-by-step rotation of the plane reflective mirror about the rotation axis, with a thin layer being deposited with a substantially uniform thickness on the substrate by contact of the plasma plume with the substrate. The first mirror includes a plurality of plane mirrors connected in a cylindrical manner.
    • 通过激光脉冲气相沉积在衬底上沉积薄层的方法提供了具有气缸轴线和弯曲目标表面的大致圆柱形的靶。 生成具有初始路径部分和初始路径截面轴线的脉冲激光束,并且当脉冲激光束照射在弯曲目标表面上时能够从目标产生等离子体羽流。 提供了位于激光束的目标和初始路径部分之间的第一反射镜,其具有多个反射内表面和与激光束的初始路径截面轴线基本一致的第一反射镜轴。 激光束被偏转以便撞击在第一反射镜的反射内表面上并且随后被反射并且通过控制与第一镜像轴相交的平面反射镜并且位于第一反射镜的一侧上而撞击在弯曲的目标表面上 与目标相反的第一个镜子。 平面反射镜以与激光束轴成一定角度倾斜并且可绕与第一镜轴基本一致的旋转轴线旋转。 激光束聚焦在目标的中心,以在弯曲的目标表面上产生等离子体羽流。 通过将激光束照射在第一镜的反射内表面上的位置,通过使平面反射镜围绕旋转轴逐步旋转,等离子体羽流在弯曲的目标表面上在轨道上移动, 层通过等离子体羽毛与基底的接触而以基本上均匀的厚度沉积在基底上。 第一反射镜包括以圆柱形方式连接的多个平面反射镜。
    • 8. 发明授权
    • Process for manufacturing finely structured bodies such as heat
exchangers
    • 用于制造诸如热交换器的精细结构体的方法
    • US5249359A
    • 1993-10-05
    • US854065
    • 1992-03-19
    • Klaus SchubertWilhelm BierGerd LinderPeter SchmidPeter BichlerWinfried BrunnerWolfgang Simon
    • Klaus SchubertWilhelm BierGerd LinderPeter SchmidPeter BichlerWinfried BrunnerWolfgang Simon
    • B01D25/00B01J19/00B01J35/04B23B1/00B23C3/00B23P15/26C02F3/10F28D9/00G02B5/18B23D15/00
    • G02B5/1852B01D25/001B01J19/0093B01J35/04B23B1/00B23C3/00B23P15/26F28D9/00F28D9/0037F28F13/185B01D2201/46C02F3/101F28F2260/00Y02W10/15Y10T29/301Y10T29/307Y10T29/4935Y10T29/49366Y10T29/49826
    • A method of producing a finely structured body which includes a plurality of stacked, cut sections of foil at least one of which is provided with grooves in a selected groove direction on at least one surface thereof, and which has a plurality of closely juxtaposed, channel-like perforations with high shape accuracy, true dimensions and high surface quality. The method includes: a. providing a vacuum clamping means comprised of a ground, sintered metal plate which is connected to a vacuum source and which is positioned on a work table which is movable in two mutually perpendicular directions X and Y; b. positioning a machinable foil on the ground, sintered metal plate and clamping the machinable foil thereto by applying an effective amount of vacuum; c. cutting a plurality of parallel grooves into the surface of the machinable foil by means of at least one shaping diamond positioned on a cutting spindle and adjustable in a direction Z, each groove of the plurality of grooves having a groove length, a groove width, and a cross-sectional shape that is constant over the groove length and freely selectable; d. cutting the grooved machinable foil into cut sections having selected lengths and widths; and e. stacking the cut sections, wherein the plurality of grooves have a form precision such that, for groove lengths of more than 1000 .mu.m, the groove width has an accuracy of about +1 .mu.m for land widths which equal or exceed about 15 .mu.m.
    • 一种制造精细结构体的方法,其包括多个层叠的切割部分的箔,其至少一个在其至少一个表面上沿选定的凹槽方向设置有凹槽,并且具有多个紧密并置的通道 类似的穿孔具有高的形状精度,真实的尺寸和高的表面质量。 该方法包括:a。 提供真空夹紧装置,其包括接地的烧结金属板,该金属板连接到真空源并且位于可在两个相互垂直的方向X和Y上移动的工作台上; b。 将可机加工的箔定位在地面上,烧结金属板,并通过施加有效量的真空将可机加工的箔夹紧在其上; C。 通过位于切割轴上的至少一个成形金刚石将多个平行凹槽切割成可加工箔的表面,并且可沿方向Z调节,多个凹槽中的每个凹槽具有凹槽长度,凹槽宽度和 在槽长度上恒定的横截面形状并且可自由选择; d。 将切槽的可加工箔切割成具有选定长度和宽度的切割部分; 和e。 堆叠切割部分,其中多个凹槽具有形状精度,使得对于大于1000μm的凹槽长度,对于等于或超过约15μm的凹槽宽度,凹槽宽度具有约+1μm的精度 。