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1. 发明申请

US20050000949A1 Heating device and heating method 失效
标题翻译：加热装置及加热方式
公开(公告)号：US20050000949A1
公开(公告)日：2005-01-06
申请号：US10831658
申请日：2004-04-26
申请人： Reiki Watanabe , Fumio Watanabe
发明人： Reiki Watanabe , Fumio Watanabe
IPC分类号： H05B7/16 , H01L21/00 , H01L21/324 , H05B7/148 , B23K10/00
CPC分类号： H01L21/67109
摘要： The present invention relates to a heating device and a heating method, by which a object subject to heating is heated using glow discharge. The constitution is that the heating device comprises (i) a structural body having (a) a first conductive substance, and (b) a second conductive substance provided so as to surround said first conductive substance, where said conductive substances form a space substantially isolated from outside air; and (ii) an exhaust port formed on said structural body to decompress said space, wherein electric power is applied between said first conductive substance and said second conductive substance to generate electric discharge in said decompressed space, the electric discharge is maintained to increase the temperature of said second conductive substance, and said second conductive substance is used as means for heating an object subject to heating.
摘要翻译：加热装置和加热方法技术领域本发明涉及加热装置和加热方法，通过该加热装置和加热方法，使用辉光放电来加热被加热物体。结构是加热装置包括（i）具有（a）第一导电物质的结构体和（b）设置成围绕所述第一导电物质的第二导电物质，其中所述导电物质形成基本隔离的空间从外面的空气; 和（ii）形成在所述结构体上以对所述空间进行减压的排气口，其中在所述第一导电物质和所述第二导电物质之间施加电力以在所述减压空间中产生放电，保持放电以增加温度的所述第二导电物质，并且所述第二导电物质用作加热被加热物体的装置。

2. 发明授权

US07332714B2 Quadrupole mass spectrometer and vacuum device using the same 失效
标题翻译：四极杆质谱仪和使用相同的真空装置
公开(公告)号：US07332714B2
公开(公告)日：2008-02-19
申请号：US11375063
申请日：2006-03-15
申请人： Fumio Watanabe , Reiki Watanabe
发明人： Fumio Watanabe , Reiki Watanabe
IPC分类号： H01J49/42 , H01J49/28
CPC分类号： H01J49/147 , H01J41/10 , H01J49/4215
摘要： In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.
摘要翻译：在根据离子电流强度根据真空系统中的气体类型测量分压强度的四极杆质谱仪中，具有总压力测量电极的四极质谱仪具有用于检查设置在分界空间中的离子密度的总压力测量电极其由栅电极和离子聚焦电极组成。并且，仅具有四极质谱仪的真空系统，其根据离子电流强度根据真空系统中的气体类型测量分压强度，并且除四极质谱仪之外不具有电离真空计。

3. 发明授权

US07741852B2 Ionization vacuum gauge 有权
标题翻译：电离真空计
公开(公告)号：US07741852B2
公开(公告)日：2010-06-22
申请号：US11920085
申请日：2006-05-08
申请人： Fumio Watanabe , Reiki Watanabe
发明人： Fumio Watanabe , Reiki Watanabe
IPC分类号： G01L21/32
CPC分类号： G01L21/32 , H01J41/04
摘要： An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with a heating device for heating the ion collector.
摘要翻译：在与真空装置连通的真空容器（4）中具有格栅（2），电子源（3）和离子收集器（1）的至少三个电极的电离真空计振荡器在电网（2）内和外部的电子源（3）通过振荡的电子电离飞入栅格（2）的气体分子，通过离子收集器（1）补充电离离子以转换成电流信号，并测量根据获得的电流强度在真空装置中的气体分子密度（压力），其中离子收集器（1）设置有用于加热离子收集器的加热装置。

4. 发明申请

US20090096460A1 IONIZATION VACUUM GAUGE 有权
标题翻译：离子真空计
公开(公告)号：US20090096460A1
公开(公告)日：2009-04-16
申请号：US11920085
申请日：2006-05-08
申请人： Fumio Watanabe , Reiki Watanabe
发明人： Fumio Watanabe , Reiki Watanabe
IPC分类号： G01L21/32
CPC分类号： G01L21/32 , H01J41/04
摘要： An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted from the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with heating means for heating the ion collector.
摘要翻译：在与真空装置连通的真空容器（4）中具有格栅（2），电子源（3）和离子收集器（1）的至少三个电极的电离真空计振荡从在电网（2）内和外部的电子源（3）通过振荡的电子电离飞入栅格（2）的气体分子，通过离子收集器（1）补充电离离子以转换成电流信号，并测量根据获得的电流强度，真空装置中的气体分子密度（压力），其中离子收集器（1）设置有用于加热离子收集器的加热装置。

5. 发明授权

US07091443B2 Heating device and heating method 失效
标题翻译：加热装置及加热方式
公开(公告)号：US07091443B2
公开(公告)日：2006-08-15
申请号：US10831658
申请日：2004-04-26
申请人： Reiki Watanabe , Fumio Watanabe
发明人： Reiki Watanabe , Fumio Watanabe
IPC分类号： B23K10/00
CPC分类号： H01L21/67109
摘要： A heating device includes a first electrode and a second electrode including a planar portion providing a support surface for supporting an object to be heated in an external gaseous atmosphere to which the object to be heated and the support surface are exposed. The second electrode is formed as an enclosure enclosing and spaced from at least a portion of first electrode to define an interior space therebetween isolated from the external gaseous atmosphere. An exhaust port provides communication with the interior space for reducing the pressure within the interior space. A power supplies current between the first and second electrodes to produce an electric discharge within the internal space, thereby heating the second electrode and the object supported thereon.
摘要翻译：加热装置包括第一电极和第二电极，第二电极包括平面部分，该平面部分提供用于支撑被加热物体和支撑表面暴露于的外部气体气氛中的被加热物体的支撑表面。第二电极形成为封闭并与第一电极的至少一部分间隔开的外壳，以在其间隔开与外部气体气氛隔离的内部空间。排气口提供与内部空间的连通以减小内部空间内的压力。 A在第一和第二电极之间提供电流，以在内部空间内产生放电，从而加热第二电极和支撑在其上的物体。

6. 发明申请

US20060226355A1 Quadrupole mass spectrometer and vacuum device using the same 失效
标题翻译：四极杆质谱仪和使用相同的真空装置
公开(公告)号：US20060226355A1
公开(公告)日：2006-10-12
申请号：US11375063
申请日：2006-03-15
申请人： Fumio Watanabe , Reiki Watanabe
发明人： Fumio Watanabe , Reiki Watanabe
IPC分类号： H01J49/28
CPC分类号： H01J49/147 , H01J41/10 , H01J49/4215
摘要： In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.
摘要翻译：在根据离子电流强度根据真空系统中的气体类型测量分压强度的四极杆质谱仪中，具有总压力测量电极的四极质谱仪具有用于检查设置在分界空间中的离子密度的总压力测量电极其由栅电极和离子聚焦电极组成。并且，仅具有四极质谱仪的真空系统，该四极质谱仪根据离子电流强度根据真空系统中的气体类型测量分压强度，并且除四极质谱仪之外不具有电离真空计。

7. 发明专利

JP2005101101A Treatment device and treatment method 有权
标题翻译：治疗装置和治疗方法
公开(公告)号：JP2005101101A
公开(公告)日：2005-04-14
申请号：JP2003330361
申请日：2003-09-22
申请人： Fec:Kk , Reiki Watanabe , 株式会社エフイーシー , 励起渡辺
发明人： WATANABE REIKI
IPC分类号： C23C16/44 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a treatment device which is capable of shortening a time required for one cycle of laminating an atomic layer, can be controlled by a computer, easily undergoes maintenance including the attachment or detachment of a component, and is easily disassembled and cleaned. SOLUTION: The treatment device is equipped with a rotator 5a where a vent hole through which active gas penetrates is formed, a reactive gas supply chamber 102a where the rotator 5a is capable of rotating along its inner wall, a treatment chamber 101 equipped with a substrate holder 12 and an exhaust vent 13, and a reactive gas flow path Rra which connects the treatment chamber 101 to the reactive gas supply chamber 102a. When the vent hole of the rotator 5a is set coincident with the opening Ara of the reactive gas flow path Rra to the gas supply chamber 102a by controlling the rotation of the rotator 5a, the reactive gas can be introduced into the treatment chamber 101 through the reactive gas flow path Rra. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供能够缩短一个层叠原子层的周期所需的时间的处理装置，可以由计算机控制，容易进行维护，包括部件的安装或拆卸，以及容易拆卸和清洁。解决方案：处理装置配备有旋转体5a，其中形成有活性气体穿过的通气孔，反应性气体供应室102a，其中旋转体5a能够沿其内壁旋转，设置有处理室101 具有衬底保持器12和排气口13以及将处理室101连接到反应气体供应室102a的反应气体流路Rra。当转子5a的通气孔通过控制转子5a的旋转而被设定成与反应气体流路Rra的开口Ara相对于气体供给室102a时，反应气体可以通过反应气体流路Rra。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2004204339A Apparatus and method for treatment 有权
公开(公告)号：JP2004204339A
公开(公告)日：2004-07-22
申请号：JP2002378183
申请日：2002-12-26
申请人： Fec:Kk , Shinku Jikkenshitsu:Kk , Takano Seiki Kk , Reiki Watanabe , 有限会社真空実験室 , 株式会社エフイーシー , 励起渡辺 , 高野精器有限会社
发明人： WATANABE REIKI
IPC分类号： C23C16/455 , C23C16/00 , C23C16/44 , C23C16/52 , H01L21/00 , H01L21/205 , H01L21/3065 , H01L21/687
CPC分类号： H01L21/68792 , C23C16/4401 , C23C16/4412 , C23C16/45544 , C23C16/45574 , C23C16/52 , H01L21/67017
摘要： PROBLEM TO BE SOLVED: To provide a treatment apparatus which shortens the time required per cycle for depositing a single atomic layer, can be controlled by a computer and enables easy maintenance including installation and de-installation of apparatus components and easy dismantlement and cleaning of the apparatus, and to provide a treatment method. SOLUTION: The treatment apparatus has a vessel having one or more gas outlets 12a-15a, a substrate holder 4 installed inside the vessel and a rotor 2 which is installed between the substrate holder 4 and the side wall 1 of the vessel, rotates around the substrate holder 4 and has one or more vent holes or vent notches. When the rotor 2 rotates and the positions of the vent holes 16, etc. of the rotor 2 match those of the gas outlets 12a-15a, the gas outlets 12a-15a discharge gas toward the substrate holder 4. COPYRIGHT: (C)2004,JPO&NCIPI

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