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1. 发明专利

JP2007078702A X-ray reflectometric apparatus 审中-公开
标题翻译： X射线反射仪
公开(公告)号：JP2007078702A
公开(公告)日：2007-03-29
申请号：JP2006297410
申请日：2006-11-01
申请人： Jordan Valley Applied Radiation Ltd , ヨルダンバレー・アプライド・ラジエーション・リミテッドJordan Valley Applied Radiation Ltd.
发明人： YOKHIN BORIS , DIKOPOLTSEV ALEXANDER , MAZOR ISAAC , BERMAN DAVID
IPC分类号： G01N23/201 , G01B15/02 , G01N21/00 , G01N23/20 , G01N23/223 , G01T1/24 , G01T1/36 , G21K1/04 , G21K1/06 , H05G1/56
CPC分类号： G01T1/36 , G01B15/02 , G01B2210/56 , G01N23/20 , G01N23/201 , G21K1/04 , H01J35/045 , H01J2235/087
摘要： PROBLEM TO BE SOLVED: To provide a reflectometric apparatus of which surface reflection ratio at a low angle (near 0°) is considerably larger than the surface reflection ratio at a high angle. SOLUTION: The reflectometric apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles, relative to a surface of the sample and a detecting assembly positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive to the radiation and a shutter adjustably positioned to intercept the radiation. The shutter is provided at a blocking position where the radiation in a lower angle portion of the range is blocked so that only the radiation in a higher angle portion of the range can reach array and open position, where the radiation in the lower angle portion of the range is not blocked and substantially reaches the array. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种反射测量装置，其中低角度（接近0°）的表面反射率远大于大角度的表面反射率。解决方案：反射测量装置包括辐射源，其适于相对于样品的表面在一定角度范围内辐射样品，以及检测组件，其定位成接收在样品的范围内从样品反射的辐射并且产生响应于辐射的信号和可调节地定位成遮挡辐射的快门。快门设置在阻挡位置处，其中该范围的较低角度部分中的辐射被阻挡，使得仅该范围的较高角度部分中的辐射可以达到阵列和打开位置，其中在下角部分中的辐射该范围不被阻塞并且基本上到达阵列。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2004245840A X-ray reflectance measurement including small angle scattering measurement 有权
公开(公告)号：JP2004245840A
公开(公告)日：2004-09-02
申请号：JP2004035270
申请日：2004-02-12
申请人： Jordan Valley Applied Radiation Ltd , ジョーダン・バレー・アプライド・ラディエーション・リミテッド
发明人： YOKHIN BORIS , DIKOPOLTSEV ALEXANDER , RAFAELI TZACHI , GVIRTZMAN AMOS
IPC分类号： G01N23/201 , G01N23/20
CPC分类号： G01N23/20
摘要： PROBLEM TO BE SOLVED: To provide a method and a system for measurement for a sample combined with an X-ray reflectance and small angle scattering. SOLUTION: An inspection device for the sample has a radiation source, and a detecting element array arranged to receive a radiation from a surface due to irradiation in an area of the surface by the radiation source. The array has the first operative configuration for analyzing the radiation received along the first axis perpendicular to the surface, and the second operative configuration for analyzing the radiation received along the second axis in parallel to the surface. A signal processor processes a signal from the detector array in the two configurations to determine the reflectance in response to an elevation angle with respect to the surface, and a scattering profile on the surface in response to an azimuth angle on a plane of the surface. COPYRIGHT: (C)2004,JPO&NCIPI

3. 发明专利

JP2002148222A X-RAY FLUORESCENCE ANALYZER 失效
公开(公告)号：JP2002148222A
公开(公告)日：2002-05-22
申请号：JP2000325757
申请日：2000-10-25
申请人： JORDAN VALLEY APPLIED RADIATION LTD
发明人： MAZOR ISAAC , GVIRTZMAN AMOS , YOKHIN BORIS
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To provide an X-ray fluorescence analyzer by which X-ray fluorescence emitted from a sample irradiated with X-rays is detected with satisfactory efficiency. SOLUTION: A plurality of semiconductor detectors 18 which capture fluorescent X-ray photons and which generate a plurality of electric pulses suitable for the analysis of the sample so as to correspond to the photons are arranged around a spot 26. A multiple input processing unit 20 which receives and analyzes the plurality of pulses is arranged in such a way that the pulses from the respective detectors 18 are received at separate input ends. The unit 20 responds to the photons within an energy range common to all the detectors 18 so as to generate an output by using the pulses received from all the detectors 18.

4. 发明专利

JP2006091017A X-ray reflectometer combined with diffractometer 有权
$X-ray reflectometer combined with diffractometer$
标题翻译： X射线反射计与DIFFRACTOMETER组合
公开(公告)号：JP2006091017A
公开(公告)日：2006-04-06
申请号：JP2005273641
申请日：2005-09-21
申请人： Jordan Valley Applied Radiation Ltd , ジョーダンバリーアプライドレイディエイションリミティド
发明人： YOKHIN BORIS , MAZOR ISAAC , RAFAELI TZACHI
IPC分类号： G01N23/201 , G01B15/02 , G01B15/08 , H01L21/66
CPC分类号： G01N23/20008
摘要： PROBLEM TO BE SOLVED: To provide a system and a method for analysis, based on quick XRR and XRD of a sample.
SOLUTION: This system for sample analysis contains a radiation source, matching for guiding a converged beam of X-rays toward the surface of the sample. Also at least one detector array is formed on it so as to detect the X-rays scattered from the sample, as a function of elevation angle throughout the range of the elevation angle and then generate output signal, in response to these scattered X-rays. This detector array is equipped with a 1st structure for detecting X-rays reflected from surface of the sample at a grazing angle, and the 2nd structure for detecting X-rays diffracted from the surface near the Bragg angle of the sample. Thus a signal processor processes this output signal, in order to determine the characteristics in the surface layer of the sample.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供基于样品的快速XRR和XRD的分析系统和方法。解决方案：该样品分析系统包含一个辐射源，用于将X射线的会聚束引向样品表面。此外，在其上形成至少一个检测器阵列，以便检测从样品散射的X射线，作为仰角角度的函数，并且响应于这些散射X射线产生输出信号。该检测器阵列配备有用于以掠射角检测从样品表面反射的X射线的第一结构，以及用于检测从样品的布拉格角附近的表面衍射的X射线的第二结构。因此，信号处理器处理该输出信号，以便确定样品的表面层中的特性。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2006058293A Inspection method and inspection apparatus for sample, and manufacturing device for microelectronic device 审中-公开
标题翻译：样品检验方法及检验装置及微电子器件的制造装置
公开(公告)号：JP2006058293A
公开(公告)日：2006-03-02
申请号：JP2005221372
申请日：2005-07-29
申请人： Jordan Valley Applied Radiation Ltd , ジョーダンバリーアプライドレイディエイションリミティド
发明人： BERMAN DAVID , MAZOR ISAAC , YOKHIN BORIS , GVIRTZMAN AMOS
IPC分类号： G01B15/02 , G01N23/201 , H01L21/66
CPC分类号： G01N23/203 , G01B15/02
摘要： PROBLEM TO BE SOLVED: To provide an inspection method and an inspection apparatus for a sample equipped with a surface layer.
SOLUTION: The inspection method includes obtaining of a first reflectivity spectrum of the sample 22, while the sample 22 is irradiated with parallel X-rays, and processing the first reflectivity spectrum, in order to measure the diffuse reflection characteristics of the sample 22. While the sample 22 is irradiated with convergent X-rays, the second reflectivity spectrum of the sample 22 is obtained. The second reflectivity spectrum is analyzed, using the diffuse reflection characteristic in order to determine the characteristics of the surface layer of the sample 22.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有表面层的样品的检查方法和检查装置。解决方案：检查方法包括获得样品22的第一反射光谱，同时用平行X射线照射样品22，并处理第一反射光谱，以测量样品的漫反射特性当样品22被会聚X射线照射时，获得样品22的第二反射光谱。使用漫反射特性分析第二反射光谱，以确定样品22的表面层的特性。（C）2006年，JPO和NCIPI

6. 发明专利

JP2005140771A Method and device for inspecting sample 有权
标题翻译：检测样品的方法和装置
公开(公告)号：JP2005140771A
公开(公告)日：2005-06-02
申请号：JP2004306239
申请日：2004-10-20
申请人： Jordan Valley Applied Radiation Ltd , ジョーダンバリーアプライドレイディエイションリミティド
发明人： BERMAN DAVID , DIKOPOLTSEV ALEX
IPC分类号： G01N23/201 , G01N23/20 , H01L21/31 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a method for inspecting a sample with a first layer having a known reflection characteristic and a second layer formed on the first layer.
SOLUTION: This method includes directing radiation toward a surface of the sample and sensing the radiation reflected from the surface so as to generate a reflectance signal as a function of elevation angle relative to the surface. A feature due to reflection of the radiation from the first layer is identified in the reflectance signal. The reflectance signal is calibrated responsively to the identified feature and to the known reflectance property of the first layer. The calibrated reflectance signal is analyzed to determine a characteristic of the second layer. Other enhanced inspection methods are disclosed, as well.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于检查具有已知反射特性的第一层和在第一层上形成的第二层的样品的方法。解决方案：该方法包括将辐射引向样品的表面并感测从表面反射的辐射，以产生作为相对于表面的仰角的函数的反射信号。在反射信号中识别由于来自第一层的辐射的反射的特征。响应于所识别的特征和第一层的已知反射特性来校准反射信号。分析校准的反射信号以确定第二层的特性。还公开了其他增强的检查方法。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP3995515B2 X-ray reflecting device 有权
标题翻译：空值
公开(公告)号：JP3995515B2
公开(公告)日：2007-10-24
申请号：JP2002110785
申请日：2002-04-12
申请人：ヨルダンバレー・アプライド・ラジエーション・リミテッドJordan Valley Applied Radiation Ltd.
发明人：アイザック・メイザー , アレクサンダー・ディコポルツェフ , デイビッド・ベルマン , ボリス・ヨーキン
IPC分类号： G01N23/201 , G01B15/02 , G01N21/00 , G01N23/20 , G01N23/223 , G01T1/36 , G21K1/04 , G21K1/06 , H05G1/56
CPC分类号： G01T1/36 , G01B15/02 , G01B2210/56 , G01N23/20 , G01N23/201 , G21K1/04 , H01J35/045 , H01J2235/087
摘要： Reflectometry apparatus includes a pulsed X-ray source, adapted to irradiate a sample with a sequence of pulses of radiation over a range of angles relative to a surface of the sample. An array of detector elements is positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal indicative of respective charges accumulated by the detector elements due to photons of the radiation that are incident on the elements. Timing circuitry is coupled to the array so as to cause the charges to be cleared from the detector elements immediately before each of the pulses in the sequence, and to cause the signal from the elements to be sampled shortly after each of the pulses.
摘要翻译：反射仪装置包括脉冲X射线源，其适于在相对于样品表面的一定角度范围内照射具有辐射脉冲序列的样本。检测器元件的阵列被定位成在角度范围内接收从样本反射的辐射，并产生指示由于入射在元件上的辐射的光子而由检测器元件积累的相应电荷的信号。定时电路耦合到阵列，以使得电荷在紧接在序列中的每个脉冲之前从检测器元件中清除，并且使得来自元件的信号在每个脉冲之后不久被采样。

8. 发明专利

JP2006138837A Multifunction x-ray analysis system 有权
标题翻译：多功能X射线分析系统
公开(公告)号：JP2006138837A
公开(公告)日：2006-06-01
申请号：JP2005274293
申请日：2005-09-21
申请人： Jordan Valley Applied Radiation Ltd , ジョルダンバレーアプライドラディエイションリミテッド
发明人： YOKHIN BORIS , KROKHMAL ALEXANDER , RAFAELI TZACHI , MAZOR ISAAC , GVIRTZMAN AMOS
IPC分类号： G01N23/201 , G01B15/02 , G01N23/207 , G21K1/06
摘要： PROBLEM TO BE SOLVED: To provide an apparatus capable of easily performing measurement of small angle scattering, X-ray diffraction, or reflectance by use of one apparatus. SOLUTION: The apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample and to direct a second collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processing part receives and processes output signals from the detector assembly so as to determine a characteristic of the sample. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种使用一种装置能够容易地进行小角度散射，X射线衍射或反射率的测量的装置。解决方案：用于分析样品的装置包括辐射源，其适于将X射线的会聚束引导到样品的表面，并将X射线的第二准直束引向表面的样品。运动组件使辐射源在X射线以掠射角朝向样品表面的第一源位置和第二源位置之间移动，在该第二源位置，X射线朝向表面样品的布拉格角附近。检测器组件在辐射源处于第一和第二源配置中的任一个中以及在第一和第二源位置中的任一个中时，感测从样品散射的X射线作为角度的函数。信号处理部分接收并处理来自检测器组件的输出信号，以便确定样品的特性。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2005140777A Sample inspection method, its device, cluster tool for manufacturing microelectronics device, and device for manufacturing microelectronics device 有权
标题翻译：样品检查方法，其装置，用于制造微电子器件的集成工具，以及用于制造微电子器件的装置
公开(公告)号：JP2005140777A
公开(公告)日：2005-06-02
申请号：JP2004313877
申请日：2004-10-28
申请人： Jordan Valley Applied Radiation Ltd , ジョーダン・バレー・アプライド・ラディエーション・リミテッド
发明人： YOKHIN BORIS
IPC分类号： G01N23/20 , G01N23/201 , H01L21/66
CPC分类号： G01N23/201
摘要： PROBLEM TO BE SOLVED: To perform sample inspection with high sensitivity and high throughput.
SOLUTION: This sample inspection method includes irradiating a sample with a pleochroic beam of X rays including X-ray photons having photon energy within one range. X rays scattered from the sample are received at a plurality of scattering angles by using one or more sensors for generating output signals denoting photon energy of each of X-ray photons entering the sample. The output signals are analyzed based on the photon energy to determine the scatter profile of the sample based on photon energy selected within the above range.
COPYRIGHT: (C)2005,JPO&NCIPI

10. 发明专利

JP2005106815A Optical alignment of x-ray microanalyzer 审中-公开
标题翻译： X射线微量水平仪的光学对准
公开(公告)号：JP2005106815A
公开(公告)日：2005-04-21
申请号：JP2004259737
申请日：2004-09-07
申请人： Jordan Valley Applied Radiation Ltd , ジョーダン・バレー・アプライド・ラディエーション・リミテッド
发明人： RAFAELI TZACHI , MAZOR ISAAC
IPC分类号： G01N23/223 , A61B6/08 , G01N23/22
CPC分类号： G01N23/22
摘要： PROBLEM TO BE SOLVED: To accurately align an X-ray spot on a sample at a characterized portion of interest, in an X-ray microanalyzer.
SOLUTION: The X-ray microanalyzer comprises an X-ray excitation source for irradiating a spot on the sample by an X-ray beam; at least one X-ray detector arranged so that a ring with a gap is formed around the spot, and receiving an X-ray photon from the spot on the sample, and generating a first signal indicating characteristics of the sample according to the received X-ray photon; an optical radiation source aligned with the X-ray excitation source so that the spot on the sample is radiated by the beam; and an optical radiation detector positioned in the gap inside the ring for receiving the beam reflected by the sample, and generating a second signal which indicates the alignment of the spot to a target area of the sample.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：在X射线微量分析仪中，在感兴趣的特征部分的样品上精确对准X射线斑点。解决方案：X射线微量分析仪包括用于通过X射线束照射样品上的斑点的X射线激发源; 至少一个X射线检测器被布置成使得围绕该点形成具有间隙的环，并从样品上的点接收X射线光子，并且根据所接收的X生成指示样本特征的第一信号射线光子与X射线激发源对准的光辐射源，使得样品上的斑点被光束辐射; 以及位于所述环内的所述间隙内的光学辐射探测器，用于接收由所述样品反射的光束，并产生指示所述光点对准所述样品的目标区域的对准的第二信号。版权所有（C）2005，JPO＆NCIPI

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