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JP2005140771A Method and device for inspecting sample 有权
标题翻译：检测样品的方法和装置
公开(公告)号：JP2005140771A
公开(公告)日：2005-06-02
申请号：JP2004306239
申请日：2004-10-20
申请人： Jordan Valley Applied Radiation Ltd , ジョーダンバリーアプライドレイディエイションリミティド
发明人： BERMAN DAVID , DIKOPOLTSEV ALEX
IPC分类号： G01N23/201 , G01N23/20 , H01L21/31 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a method for inspecting a sample with a first layer having a known reflection characteristic and a second layer formed on the first layer.
SOLUTION: This method includes directing radiation toward a surface of the sample and sensing the radiation reflected from the surface so as to generate a reflectance signal as a function of elevation angle relative to the surface. A feature due to reflection of the radiation from the first layer is identified in the reflectance signal. The reflectance signal is calibrated responsively to the identified feature and to the known reflectance property of the first layer. The calibrated reflectance signal is analyzed to determine a characteristic of the second layer. Other enhanced inspection methods are disclosed, as well.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于检查具有已知反射特性的第一层和在第一层上形成的第二层的样品的方法。解决方案：该方法包括将辐射引向样品的表面并感测从表面反射的辐射，以产生作为相对于表面的仰角的函数的反射信号。在反射信号中识别由于来自第一层的辐射的反射的特征。响应于所识别的特征和第一层的已知反射特性来校准反射信号。分析校准的反射信号以确定第二层的特性。还公开了其他增强的检查方法。版权所有（C）2005，JPO＆NCIPI

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