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1. 发明专利

JP2007078702A X-ray reflectometric apparatus 审中-公开
标题翻译： X射线反射仪
公开(公告)号：JP2007078702A
公开(公告)日：2007-03-29
申请号：JP2006297410
申请日：2006-11-01
申请人： Jordan Valley Applied Radiation Ltd , ヨルダンバレー・アプライド・ラジエーション・リミテッドJordan Valley Applied Radiation Ltd.
发明人： YOKHIN BORIS , DIKOPOLTSEV ALEXANDER , MAZOR ISAAC , BERMAN DAVID
IPC分类号： G01N23/201 , G01B15/02 , G01N21/00 , G01N23/20 , G01N23/223 , G01T1/24 , G01T1/36 , G21K1/04 , G21K1/06 , H05G1/56
CPC分类号： G01T1/36 , G01B15/02 , G01B2210/56 , G01N23/20 , G01N23/201 , G21K1/04 , H01J35/045 , H01J2235/087
摘要： PROBLEM TO BE SOLVED: To provide a reflectometric apparatus of which surface reflection ratio at a low angle (near 0°) is considerably larger than the surface reflection ratio at a high angle. SOLUTION: The reflectometric apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles, relative to a surface of the sample and a detecting assembly positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive to the radiation and a shutter adjustably positioned to intercept the radiation. The shutter is provided at a blocking position where the radiation in a lower angle portion of the range is blocked so that only the radiation in a higher angle portion of the range can reach array and open position, where the radiation in the lower angle portion of the range is not blocked and substantially reaches the array. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种反射测量装置，其中低角度（接近0°）的表面反射率远大于大角度的表面反射率。解决方案：反射测量装置包括辐射源，其适于相对于样品的表面在一定角度范围内辐射样品，以及检测组件，其定位成接收在样品的范围内从样品反射的辐射并且产生响应于辐射的信号和可调节地定位成遮挡辐射的快门。快门设置在阻挡位置处，其中该范围的较低角度部分中的辐射被阻挡，使得仅该范围的较高角度部分中的辐射可以达到阵列和打开位置，其中在下角部分中的辐射该范围不被阻塞并且基本上到达阵列。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2006091017A X-ray reflectometer combined with diffractometer 有权
$X-ray reflectometer combined with diffractometer$
标题翻译： X射线反射计与DIFFRACTOMETER组合
公开(公告)号：JP2006091017A
公开(公告)日：2006-04-06
申请号：JP2005273641
申请日：2005-09-21
申请人： Jordan Valley Applied Radiation Ltd , ジョーダンバリーアプライドレイディエイションリミティド
发明人： YOKHIN BORIS , MAZOR ISAAC , RAFAELI TZACHI
IPC分类号： G01N23/201 , G01B15/02 , G01B15/08 , H01L21/66
CPC分类号： G01N23/20008
摘要： PROBLEM TO BE SOLVED: To provide a system and a method for analysis, based on quick XRR and XRD of a sample.
SOLUTION: This system for sample analysis contains a radiation source, matching for guiding a converged beam of X-rays toward the surface of the sample. Also at least one detector array is formed on it so as to detect the X-rays scattered from the sample, as a function of elevation angle throughout the range of the elevation angle and then generate output signal, in response to these scattered X-rays. This detector array is equipped with a 1st structure for detecting X-rays reflected from surface of the sample at a grazing angle, and the 2nd structure for detecting X-rays diffracted from the surface near the Bragg angle of the sample. Thus a signal processor processes this output signal, in order to determine the characteristics in the surface layer of the sample.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供基于样品的快速XRR和XRD的分析系统和方法。解决方案：该样品分析系统包含一个辐射源，用于将X射线的会聚束引向样品表面。此外，在其上形成至少一个检测器阵列，以便检测从样品散射的X射线，作为仰角角度的函数，并且响应于这些散射X射线产生输出信号。该检测器阵列配备有用于以掠射角检测从样品表面反射的X射线的第一结构，以及用于检测从样品的布拉格角附近的表面衍射的X射线的第二结构。因此，信号处理器处理该输出信号，以便确定样品的表面层中的特性。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2006058293A Inspection method and inspection apparatus for sample, and manufacturing device for microelectronic device 审中-公开
标题翻译：样品检验方法及检验装置及微电子器件的制造装置
公开(公告)号：JP2006058293A
公开(公告)日：2006-03-02
申请号：JP2005221372
申请日：2005-07-29
申请人： Jordan Valley Applied Radiation Ltd , ジョーダンバリーアプライドレイディエイションリミティド
发明人： BERMAN DAVID , MAZOR ISAAC , YOKHIN BORIS , GVIRTZMAN AMOS
IPC分类号： G01B15/02 , G01N23/201 , H01L21/66
CPC分类号： G01N23/203 , G01B15/02
摘要： PROBLEM TO BE SOLVED: To provide an inspection method and an inspection apparatus for a sample equipped with a surface layer.
SOLUTION: The inspection method includes obtaining of a first reflectivity spectrum of the sample 22, while the sample 22 is irradiated with parallel X-rays, and processing the first reflectivity spectrum, in order to measure the diffuse reflection characteristics of the sample 22. While the sample 22 is irradiated with convergent X-rays, the second reflectivity spectrum of the sample 22 is obtained. The second reflectivity spectrum is analyzed, using the diffuse reflection characteristic in order to determine the characteristics of the surface layer of the sample 22.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有表面层的样品的检查方法和检查装置。解决方案：检查方法包括获得样品22的第一反射光谱，同时用平行X射线照射样品22，并处理第一反射光谱，以测量样品的漫反射特性当样品22被会聚X射线照射时，获得样品22的第二反射光谱。使用漫反射特性分析第二反射光谱，以确定样品22的表面层的特性。（C）2006年，JPO和NCIPI

4. 发明专利

JP2002148222A X-RAY FLUORESCENCE ANALYZER 失效
公开(公告)号：JP2002148222A
公开(公告)日：2002-05-22
申请号：JP2000325757
申请日：2000-10-25
申请人： JORDAN VALLEY APPLIED RADIATION LTD
发明人： MAZOR ISAAC , GVIRTZMAN AMOS , YOKHIN BORIS
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To provide an X-ray fluorescence analyzer by which X-ray fluorescence emitted from a sample irradiated with X-rays is detected with satisfactory efficiency. SOLUTION: A plurality of semiconductor detectors 18 which capture fluorescent X-ray photons and which generate a plurality of electric pulses suitable for the analysis of the sample so as to correspond to the photons are arranged around a spot 26. A multiple input processing unit 20 which receives and analyzes the plurality of pulses is arranged in such a way that the pulses from the respective detectors 18 are received at separate input ends. The unit 20 responds to the photons within an energy range common to all the detectors 18 so as to generate an output by using the pulses received from all the detectors 18.

5. 发明专利

JP2006138837A Multifunction x-ray analysis system 有权
标题翻译：多功能X射线分析系统
公开(公告)号：JP2006138837A
公开(公告)日：2006-06-01
申请号：JP2005274293
申请日：2005-09-21
申请人： Jordan Valley Applied Radiation Ltd , ジョルダンバレーアプライドラディエイションリミテッド
发明人： YOKHIN BORIS , KROKHMAL ALEXANDER , RAFAELI TZACHI , MAZOR ISAAC , GVIRTZMAN AMOS
IPC分类号： G01N23/201 , G01B15/02 , G01N23/207 , G21K1/06
摘要： PROBLEM TO BE SOLVED: To provide an apparatus capable of easily performing measurement of small angle scattering, X-ray diffraction, or reflectance by use of one apparatus. SOLUTION: The apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample and to direct a second collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processing part receives and processes output signals from the detector assembly so as to determine a characteristic of the sample. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种使用一种装置能够容易地进行小角度散射，X射线衍射或反射率的测量的装置。解决方案：用于分析样品的装置包括辐射源，其适于将X射线的会聚束引导到样品的表面，并将X射线的第二准直束引向表面的样品。运动组件使辐射源在X射线以掠射角朝向样品表面的第一源位置和第二源位置之间移动，在该第二源位置，X射线朝向表面样品的布拉格角附近。检测器组件在辐射源处于第一和第二源配置中的任一个中以及在第一和第二源位置中的任一个中时，感测从样品散射的X射线作为角度的函数。信号处理部分接收并处理来自检测器组件的输出信号，以便确定样品的特性。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2005106815A Optical alignment of x-ray microanalyzer 审中-公开
标题翻译： X射线微量水平仪的光学对准
公开(公告)号：JP2005106815A
公开(公告)日：2005-04-21
申请号：JP2004259737
申请日：2004-09-07
申请人： Jordan Valley Applied Radiation Ltd , ジョーダン・バレー・アプライド・ラディエーション・リミテッド
发明人： RAFAELI TZACHI , MAZOR ISAAC
IPC分类号： G01N23/223 , A61B6/08 , G01N23/22
CPC分类号： G01N23/22
摘要： PROBLEM TO BE SOLVED: To accurately align an X-ray spot on a sample at a characterized portion of interest, in an X-ray microanalyzer.
SOLUTION: The X-ray microanalyzer comprises an X-ray excitation source for irradiating a spot on the sample by an X-ray beam; at least one X-ray detector arranged so that a ring with a gap is formed around the spot, and receiving an X-ray photon from the spot on the sample, and generating a first signal indicating characteristics of the sample according to the received X-ray photon; an optical radiation source aligned with the X-ray excitation source so that the spot on the sample is radiated by the beam; and an optical radiation detector positioned in the gap inside the ring for receiving the beam reflected by the sample, and generating a second signal which indicates the alignment of the spot to a target area of the sample.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：在X射线微量分析仪中，在感兴趣的特征部分的样品上精确对准X射线斑点。解决方案：X射线微量分析仪包括用于通过X射线束照射样品上的斑点的X射线激发源; 至少一个X射线检测器被布置成使得围绕该点形成具有间隙的环，并从样品上的点接收X射线光子，并且根据所接收的X生成指示样本特征的第一信号射线光子与X射线激发源对准的光辐射源，使得样品上的斑点被光束辐射; 以及位于所述环内的所述间隙内的光学辐射探测器，用于接收由所述样品反射的光束，并产生指示所述光点对准所述样品的目标区域的对准的第二信号。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2004191376A Beam centering method and angle calibration method for x-ray reflectometer 有权
标题翻译：用于X射线反射计的光束中心方法和角度校准方法
公开(公告)号：JP2004191376A
公开(公告)日：2004-07-08
申请号：JP2003409151
申请日：2003-12-08
申请人： Jordan Valley Applied Radiation Ltd , ジョーダン・バレー・アプライド・ラディエーション・リミテッド
发明人： YOKHIN BORIS , MAZOR ISAAC , BERMAN DAVID
IPC分类号： G01B15/00 , G01B15/08 , G01N23/20 , G01N23/201
CPC分类号： G01B15/00 , G01N23/20
摘要： PROBLEM TO BE SOLVED: To provide an improved method and system for x-rays reflectometers.
SOLUTION: The sample surface testing method comprises the step of irradiating radiation beams having a focusing region on a place to introduce the beams close thereto, so that the radiation beams are reflected from the plane. In order to change the position of the focusing region with respect to the plane, at least one focusing region and sample are adjusted through a plurality of adjusting stages in an adjustment range. The angle profiles of the radiation beams reflected from the place at the adjusting stages are measured. The angel profiles are compared with each other in order for the plane to select the adjustment in the range in a desired alignment for the beams.
COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：提供一种改进的x射线反射计的方法和系统。解决方案：样品表面测试方法包括在位置上照射具有聚焦区域的辐射束以将光束靠近其的方式，使得辐射束从平面反射。为了改变聚焦区域相对于平面的位置，通过调节范围内的多个调节台来调节至少一个聚焦区域和样本。测量从调整阶段的位置反射的辐射束的角度分布。将天体轮廓彼此进行比较，以便平面在波束的期望对准中在范围内选择调节。版权所有（C）2004，JPO＆NCIPI

8. 发明专利

JP2003004670A X-ray reflecting device 有权
标题翻译： X射线反射装置
公开(公告)号：JP2003004670A
公开(公告)日：2003-01-08
申请号：JP2002110785
申请日：2002-04-12
申请人： Jordan Valley Applied Radiation Ltd , ヨルダンバレー・アプライド・ラジエーション・リミテッド
发明人： YOKHIN BORIS , DIKOPOLTSEV ALEXANDER , MAZOR ISAAC , BERMAN DAVID
IPC分类号： G01N23/201 , G01B15/02 , G01N21/00 , G01N23/20 , G01N23/223 , G01T1/36 , G21K1/04 , G21K1/06 , H05G1/56
CPC分类号： G01T1/36 , G01B15/02 , G01B2210/56 , G01N23/20 , G01N23/201 , G21K1/04 , H01J35/045 , H01J2235/087
摘要： PROBLEM TO BE SOLVED: To make a surface reflectance at a low angle (near 0°) larger than a surface reflectance at a high angle in a reflecting device.
SOLUTION: The reflecting device comprises a radiation source which is constituted in such a way that a sample is irradiated with a radiation at an angle in a definite range with reference to the surface of the sample, a detection assembly which is arranged so as to receive the radiation reflected from the sample at the angle in the range and which generates a signal responding to the radiation, and a shutter. The shutter is arranged to be adjustable so as to cut off the radiation as the shutter which cuts off the radiation in a low-angle region at the angle in the range, and has a cutoff position enabling only the radiation reflected in a high-angle region in the range to reach an array and an open position enabling the radiation in the low-angle region in the range to reach the array without being cut off.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：在反射装置中使得比在大角度的表面反射率大的角度（接近0度）的表面反射率。解决方案：反射装置包括一个辐射源，它以这样一种方式构成，使样品相对于样品的表面以一定角度以一定的角度辐射，一个检测组件被布置成接收以范围内的角度从样品反射的辐射，并产生响应于辐射的信号，以及快门。快门被布置为可调节的，以便切断辐射作为快门，其在该范围内的角度处切断在小角度区域中的辐射，并且具有切断位置，使得仅能够以高角度反射的辐射区域，以达到阵列和打开位置，使得能够在范围内的低角度区域中的辐射到达阵列而不被切断。

9. 发明专利

AU1730001A Detection of voids in semiconductor wafer processing 未知
公开(公告)号：AU1730001A
公开(公告)日：2001-06-25
申请号：AU1730001
申请日：2000-12-05
申请人： JORDAN VALLEY APPLIED RADIATION LTD , MAZOR ISAAC , VU LONG
发明人： MAZOR ISAAC , VU LONG
IPC分类号： G01N23/223 , H01L21/66 , H01L21/768 , G01N23/20 , H01L21/283 , H01L21/31 , G02B5/124
摘要： A method for testing the deposition and/or the removal of a material within a recess on the surface of a sample. An excitation beam is directed onto a region of the sample in a vicinity of the recess, and an intensity of X-ray fluorescence, emitted from the region in a spectral range in which the material is known to fluoresce, is measured. A quantity of the material that is deposited within the recess is determined responsive to the measured intensity.

10. 发明专利

AU7442900A X-ray array detector 未知
公开(公告)号：AU7442900A
公开(公告)日：2001-04-30
申请号：AU7442900
申请日：2000-09-20
申请人： JORDAN VALLEY APPLIED RADIATION LTD
发明人： MAZOR ISAAC , GVIRTZMAN AMOS , YOKHIN BORIS , DOVRAT AMI
IPC分类号： G01N23/203 , G01N23/20 , G01T1/24 , G21K1/06
摘要： Apparatus for X-ray analysis of a sample includes an X-ray source, which irradiates the sample, and an X-ray detector device, which receives X-rays from the sample responsive to the irradiation. The device includes an array of radiation-sensitive detectors, which generate electrical signals responsive to radiation photons incident thereon. Processing circuitry of the device includes a plurality of signal processing channels, each coupled to process the signals from a respective one of the detectors so as to generate an output dependent upon a rate of incidence of the photons on the respective detector and upon a distribution of the energy of the incident photons.

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