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1. 发明授权

US08142738B2 Bottle top dispenser for handling liquids 有权
标题翻译：用于处理液体的瓶顶分配器
公开(公告)号：US08142738B2
公开(公告)日：2012-03-27
申请号：US12518199
申请日：2007-12-06
申请人： Dieter Boehm , Wolfgang Ettig , Peter Mahler , Juergen Schraut , Roland Wohner
发明人： Dieter Boehm , Wolfgang Ettig , Peter Mahler , Juergen Schraut , Roland Wohner
IPC分类号： B01L3/00
CPC分类号： B01L3/0206 , B01L2200/087 , B01L2200/141 , B01L2200/146 , B01L2300/024 , B01L2300/027 , B01L2300/048 , B01L2300/0627
摘要： A bottle top dispenser for handling liquids having a piston-cylinder arrangement in an outside housing. At least one actuating button (49) that can be pressed downwards is arranged on the upper side of the outside housing. The outside housing (2) can be provided with ventilation openings (48) that can be hidden beneath the actuating button (49). The bottle arrangement is also characterized by a specific arrangement of a sensor system (65) in relation to a measuring strip (64) on a piston rod (28). The path measuring signal can be evaluated by means of a magnetoresistive sensor system, especially such a system based on the AMR effect. The arrangement of the measuring strip (64) in relation to the longitudinal central axis of the piston rod (28) is of considerable importance.
摘要翻译：一种用于处理在外部壳体中具有活塞 - 气缸装置的液体的瓶顶分配器。至少一个能够被向下按压的致动按钮（49）布置在外壳的上侧。外壳体（2）可设置有可隐藏在致动按钮（49）下方的通气开口（48）。瓶装置的特征还在于传感器系统（65）相对于活塞杆（28）上的测量条（64）的具体布置。路径测量信号可以通过磁阻传感器系统来评估，特别是基于AMR效应的系统。测量条（64）相对于活塞杆（28）的纵向中心轴线的布置是非常重要的。

2. 发明授权

US06739480B1 Dosing device for liquids 失效
标题翻译：液体给药装置
公开(公告)号：US06739480B1
公开(公告)日：2004-05-25
申请号：US10149254
申请日：2002-06-10
申请人： Eberhard Albrecht , Thomas Beeh , Peter Mahler
发明人： Eberhard Albrecht , Thomas Beeh , Peter Mahler
IPC分类号： B67D552
CPC分类号： B67D1/1288 , B67D1/105
摘要： A dosing device with which several, preferably two, liquids can be measured and dispensed in precise quantities. In this dosing device, two bottle-top dispensers with integrated suction valves, discharge valves and a bottle-top mechanism are attached in a housing. A liquid-reservoir bottle can be affixed to the bottle-top mechanism of each bottle-top dispenser. In particular, affixing of the respectively associated reservoir bottles is ensured without confusion. Activation of the pistons of the bottle-top dispensers takes place with working strokes which differ depending on the spacing. In addition, the housing comprises a blow-out device by means of which, after each dispensing procedure, the discharge device for the liquids can be blown out and cleared of any liquid residues.
摘要翻译：可以精确量测量和分配几种，优选两种液体的计量装置。在这种配料装置中，具有集成吸入阀，排放阀和瓶盖机构的两个瓶顶分配器附接在壳体中。每个瓶顶分配器的瓶顶机构可以固定液体储存瓶。特别地，确保分别相关联的储存瓶的固定而不会混淆。瓶顶分配器的活塞的激活是根据间隔而不同的工作冲程发生的。此外，壳体包括吹出装置，通过该吹出装置，在每个分配程序之后，用于液体的排出装置可被吹出并清除任何液体残留物。

3. 发明授权

US06593146B1 Metering device and method for operating a metering device 有权
标题翻译：用于操作计量装置的计量装置和方法
公开(公告)号：US06593146B1
公开(公告)日：2003-07-15
申请号：US09673530
申请日：2000-10-17
申请人： Andreas Lang , Hubert Kunze , Eberhard Albrecht , Peter Mahler
发明人： Andreas Lang , Hubert Kunze , Eberhard Albrecht , Peter Mahler
IPC分类号： G01N110
CPC分类号： G01N35/1002 , B01L3/0206 , Y10T436/2575
摘要： A dosing device is provided and comprises a withdrawal container and a dosing means comprising at least one dosing unit which is a piston-cylinder unit designed as a disposable member. The piston-cylinder unit discharges into a receiving container and valve means is provided to control flow into and out of the piston-cylinder unit.
摘要翻译：提供了一种定量给料装置，其包括取出容器和一个计量装置，该装置包括至少一个计量单元，该计量单元是设计为一次性构件的活塞 - 气缸单元。活塞缸单元排放到接收容器中，并且设置阀装置以控制流入和流出活塞 - 气缸单元的流体。

4. 发明授权

US5922182A Apparatus for coating substrates especially with magnetizable materials 失效
标题翻译：用于涂覆基材，特别是可磁化材料的设备
公开(公告)号：US5922182A
公开(公告)日：1999-07-13
申请号：US960386
申请日：1997-10-29
申请人： Wolfram Maass , Peter Mahler , Michael Scherer
发明人： Wolfram Maass , Peter Mahler , Michael Scherer
IPC分类号： C23C14/35 , C23C14/50 , H01F41/18 , H01J37/34 , C23C14/34
CPC分类号： H01J37/3266 , C23C14/505 , H01F41/18 , H01J37/3402 , H01J37/3426
摘要： In an apparatus for coating substrates (9), especially with magnetizable materials such as NiFe, with a circular, disk-shaped, rotatably supported substrate holder (3), which is subjected to an HF bias voltage, which is provided around its circumference and on the back with dark-space shield (1), and which rotates under at least one opposing cathode (7), and with a device for generating a magnetic field (13) parallel to the plane of the substrate (9), the magnetic field is generated by an electromagnet, the exciter coil of which, together with the lower part of the yoke (10), is housed in the dark-space shield (1), whereas the extended pole pieces (12, 12'), which are electrically insulated from the coil yoke (10) via the dark space gap (2), are housed in the substrate holder (3) in proximity to the substrate (9).
摘要翻译：在用于涂覆基板（9）的装置中，特别是用可磁化材料（例如NiFe）涂覆圆形盘形可旋转支撑的基板保持器（3），该基板保持器（3）在其周围设置有HF偏置电压，在具有暗空间屏蔽（1）的背面上，并且在至少一个相对的阴极（7）下方旋转，并且与用于产生平行于衬底（9）的平面的磁场（13）的装置，磁性磁场由电磁体产生，其激励线圈与轭（10）的下部一起被容纳在暗空间屏蔽（1）中，而延伸极片（12,12'），其中经由暗空间间隙（2）与线圈轭（10）电绝缘，容纳在靠近基板（9）的基板保持器（3）中。

5. 发明授权

US5468362A Apparatus for treating substrates in a vacuum chamber 失效
标题翻译：用于在真空室中处理基板的装置
公开(公告)号：US5468362A
公开(公告)日：1995-11-21
申请号：US185095
申请日：1994-01-21
申请人： Peter Mahler , Wolfgang Stang
发明人： Peter Mahler , Wolfgang Stang
IPC分类号： C23C14/34 , C23C14/50 , C23C14/56 , C23F4/00 , H01J37/30 , H01J37/32
CPC分类号： H01J37/3441 , C23C14/34 , C23C14/50 , C23C14/564
摘要： A vacuum chamber houses a rotatable substrate holder next to a door having a cathode target mounted therein. A plate-like mask is movable to a position between the substrate holder and the door so that the target can be cleaned without contaminating the substrate. The mask is preferably moved by a screw jack including a tube driven through a sealed hole in the chamber wall.
摘要翻译：真空室在其上安装有阴极靶的门的旁边容纳可旋转的基板保持器。板状掩模可移动到基板保持器和门之间的位置，使得可以清洁目标而不污染基板。掩模优选地由包括通过室壁中的密封孔驱动的管的螺旋千斤顶移动。

6. 发明授权

US06740295B2 Method and device for detecting the type of replaceable piston-cylinder units for pipetting or dosing apparatus 有权
标题翻译：用于检测用于移液或给药装置的可更换活塞 - 气缸单元类型的方法和装置
公开(公告)号：US06740295B2
公开(公告)日：2004-05-25
申请号：US09780678
申请日：2001-02-12
申请人： Ralf Braun , Peter Mahler , Jürgen Schraut
发明人： Ralf Braun , Peter Mahler , Jürgen Schraut
IPC分类号： B01L302
CPC分类号： B01L3/0234 , G01F23/242 , G01F23/243 , G01N35/00732 , G01N2035/00772
摘要： A method for detecting the type of replaceable piston-cylinder unit mounted in pipetting or dosing apparatus with the help of a code marking on the piston rod head, so as to eliminate the influence of the chain of tolerances piston rod head/piston rod/piston/cylinder bottom/cylinder flange so that, to a certain extent, larger tolerances may be tolerated for the parts of the piston-cylinder units involves generating relative movement between the piston rod head and a detection device, and thereby detecting a reference point on the piston head with the detection device from laterally of the piston head, and generating relative movement between the piston rod head and the detection device and thereby detecting a code marking of the piston rod head in order to determine the type of piston-cylinder unit mounted. Apparatus is provided with which relative movement is produced between the piston rod head and the detection device by a drive device, and during this movement, a reference point on the side of the piston head as well as the code marking are detected by the detection device, and the code marking is evaluated with respect to the reference point. Also, a replaceable piston-cylinder unit for a pipetting or dosing system is provided which has a code marking on the piston rod head by which the type of the piston-cylinder unit is identifiable, the code marking being detectable by a detector positioned laterally of the piston rod head when the the piston-cylinder unit is mounted in a pipetting or dosing apparatus.
摘要翻译：一种用于通过活塞杆头上的代码标记来检测安装在移液器或计量装置中的可更换活塞 - 气缸单元的类型的方法，以消除公差链的影响活塞杆头/活塞杆/活塞 /气缸底部/气缸凸缘，使得在一定程度上，活塞 - 气缸单元的部件可能容许产生更大的公差，从而产生活塞杆头和检测装置之间的相对运动，从而检测在活塞头与活塞头侧面具有检测装置，并且在活塞杆头和检测装置之间产生相对运动，从而检测活塞杆头的代码标记，以便确定安装的活塞 - 气缸单元的类型。设置有通过驱动装置在活塞杆头和检测装置之间产生相对运动的装置，并且在该运动期间，活塞头侧的参考点以及代码标记由检测装置检测并且相对于参考点评估代码标记。此外，提供了一种用于移液或定量给料系统的可更换的活塞 - 气缸单元，其在活塞杆头上具有代码标记，活塞 - 气缸单元的类型可通过该代码标记识别，代码标记可由位于当活塞 - 气缸单元安装在移液器或计量装置中时，活塞杆头。

7. 发明授权

US5658114A Modular vacuum system for the treatment of disk-shaped workpieces 失效
标题翻译：用于处理盘形工件的模块化真空系统
公开(公告)号：US5658114A
公开(公告)日：1997-08-19
申请号：US388923
申请日：1995-02-15
申请人： Peter Mahler
发明人： Peter Mahler
IPC分类号： C23C14/56 , H01J37/32 , H01L21/00 , F16J12/00
CPC分类号： H01L21/67173 , C23C14/566 , C23C14/568 , H01J37/32733 , H01L21/67178 , Y10S414/139
摘要： Modular vacuum system includes functional units arranged in tandem to form two parallel transport paths which connect at one end of the system. Each unit includes a housing milled from a single block of metal having external walls, an internal wall, and side-by-side openings which align with side-by-side openings in an adjacent unit.
摘要翻译：模块化真空系统包括串联布置的功能单元，以形成在系统的一端连接的两个并行输送路径。每个单元包括从具有外壁的单个金属块铣削的壳体，内壁和在相邻单元中与并排开口对准的并排开口。

8. 发明授权

US5429705A Apparatus for coating and/or etching substrates in a vacuum chamber 失效
标题翻译：用于在真空室中涂覆和/或蚀刻基底的装置
公开(公告)号：US5429705A
公开(公告)日：1995-07-04
申请号：US160923
申请日：1993-12-01
申请人： Peter Mahler , Wolfgang Stang
发明人： Peter Mahler , Wolfgang Stang
IPC分类号： C23C14/34 , C23C14/50 , C23F4/00 , H01L21/205 , H01L21/302 , C23F1/02
CPC分类号： H01J37/32743 , C23C14/3464 , C23C14/50 , H01J37/34
摘要： Apparatus for the coating and etching of substrates in a vacuum chamber (4), includes a cathode (17, 17') having a target (18, 18'), and a rotatable structure (8) shaped as an essentially cylindrical hollow body having circular disk-shaped end faces provided with pivot shafts (10, 10') held for rotation about a horizontal axis (r) in bearings (11, 11') disposed on the side walls (12, 12') of the vacuum chamber (4). Mountings (19, 19') for holding the substrates in place are provided on the circumference of the hollow body, the cathode (17, 17') and the etching anode (16) being disposed opposite the rotatable structure (8) in a plane (E) running horizontally and approximately in the plane of the axis of rotation (r).
摘要翻译：用于在真空室（4）中涂覆和蚀刻衬底的设备包括具有靶（18,18'）的阴极（17,17'）和形状为基本上圆柱形的中空体的可旋转结构（8），其具有圆盘形端面设置有枢转轴（10,10'），所述枢转轴（10,10'）保持用于围绕设置在真空室的侧壁（12,12'）上的轴承（11,11'）中的水平轴线（r）旋转 4）。在中空体的圆周上设置用于将基板保持在适当位置的安装件（19,19'），阴极（17,17'）和蚀刻阳极（16）在平面内与可旋转结构（8）相对设置（E）水平地并且大致在旋转轴线（r）的平面内运行。

9. 发明授权

US5097794A Apparatus for transporting substrates in a vacuum coating system 失效
标题翻译：用于在真空涂料系统中运输基材的装置
公开(公告)号：US5097794A
公开(公告)日：1992-03-24
申请号：US616342
申请日：1990-11-21
申请人： Peter Mahler , Klaus Michael , Rainer Gegenwart , Michael Scherer
发明人： Peter Mahler , Klaus Michael , Rainer Gegenwart , Michael Scherer
IPC分类号： B65G49/07 , C23C14/50 , C23C14/56 , H01L21/677
CPC分类号： H01L21/67706 , C23C14/50 , C23C14/568 , H01L21/67712
摘要： In a device for transporting substrates in vacuum coating systems with several stations, comprising several substrate holders 16 of plate-like configurations which can e moved across the stations along a prescribed path of transportation in a vertical position and which interact with rails 13, 14 being provided in the area of their foot part 15 below the substrates 22, 23 to be mounted to the substrate holders 16, the foot part 15 of the substrate holder 16 has a pair of rails 13, 14 spaced parallel apart and disposed in a vertical plane. The smaller sides thereof, which face one another, have longitudinal grooves 13a, 14 which correspond with rollers 7, 8 or sliding pads being disposed stationary on the bottom part of the device and being provided in rows corresponding to the course of the grooves and in planes that are on top of each other and spaced vertically apart. The substrate holder 16 has a shaft-like recess 24 which extends from the top downward into the area of the foot part 15 parallel to the rails and into which, while passing the station, extends a flat heating device 11 extending vertically toward the bottom and disposed above the substrate holder 16 at the top wall part 4a. The substrate holder 16 surrounds the heating device 11 in a U-shaped manner.
摘要翻译：在用于在具有多个工位的真空涂覆系统中传送衬底的装置中，包括几个板状构造的衬底保持器16，其可以沿着垂直位置的规定的运输路径跨过工位移动，并且与轨道13,14相互作用设置在其底部22,23下方的要安装到基板保持器16的底部部分15的区域中，基板保持器16的底部15具有平行间隔开并且设置在垂直平面中的一对导轨13,14 。其彼此面对的较小侧面具有纵向槽13a，14，其对应于辊7,8或滑动垫片固定地设置在装置的底部上并且设置成与槽的过程相对应的行，并且相互垂直分开的平面。衬底保持器16具有轴状凹部24，其从顶部向下延伸到平行于轨道的脚部15的区域中，并且在通过所述工位的同时延伸朝向底部垂直延伸的平坦加热装置11，设置在顶壁部4a的基板保持件16的上方。基板保持件16以U形的方式围绕加热装置11。

10. 发明授权

US4338883A Vacuum vapor-deposition installation with a vacuum chamber, a vaporizing chamber and an evaporizing chamber 失效
标题翻译：具有真空室，蒸发室和蒸发室的真空蒸镀装置
公开(公告)号：US4338883A
公开(公告)日：1982-07-13
申请号：US181456
申请日：1980-08-25
申请人： Peter Mahler
发明人： Peter Mahler
IPC分类号： C23C14/32 , C23C14/00 , C23C14/24 , C23C14/56 , C23C13/08
CPC分类号： C23C14/24 , C23C14/56 , Y10S414/139
摘要： A vacuum vapor-deposition installation for batchwise operation has a horizontal valve chamber which is arranged in the middle and on which are fitted, by way of suitable openings, a top vaporizing chamber and a lower evaporizing chamber. The two openings are aligned with each other and can be sealed simultaneously in a vacuum-tight manner by a two-way valve movable horizontally in the valve chamber. For the purpose of charging the vaporizing chamber with substrates, this chamber can be lifted from the valve chamber. To solve the problem of increasing the number of production cycles per unit of time, the interior of the evaporizing chamber is accessible from the exterior without interrupting the vacuum in the valve chamber. This measure renders it unnecessary to charge the evaporizer in the evaporizing chamber through the valve chamber, for which purpose the entire chamber would have to admit air.
摘要翻译：用于间歇操作的真空气相沉积设备具有设置在中间的水平阀室，并且通过合适的开口装配有顶部蒸发室和下部蒸发室。两个开口彼此对准，并且可以通过在阀室中水平移动的双向阀以真空密封的方式同时密封。为了将蒸发室与基板一起充电，该室可以从阀室提升。为了解决增加每单位时间的生产周期数量的问题，蒸发室的内部可从外部进入，而不会中断阀室内的真空。该措施使得不需要通过阀室对蒸发室中的蒸发器进行充电，为此，整个室将不得不承认空气。

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