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    • 1. 发明授权
    • Foil trap device with improved heat resistance
    • 具有改善的耐热性的箔陷阱装置
    • US08721778B2
    • 2014-05-13
    • US13395450
    • 2010-09-14
    • Christof MetzmacherMichael SchaafPeter Klaus Bachmann
    • Christof MetzmacherMichael SchaafPeter Klaus Bachmann
    • B01D49/00G03F7/20
    • G03F7/70916G03F7/70166G03F7/70883G03F7/70958G03F7/70983Y10S977/778
    • The present invention relates to a foil trap device for debris mitigation, in particular in an EUV system. The foil trap comprises a plurality of spaced apart foils (4) extending from an entrance side towards an exit side of the foil trap, said foils (4) being arranged to allow a straight pass of radiation between the entrance side and the exit side. The foils (4) are coated at least at entrance side edges with a layer (8, 11) of a carbon material containing a fraction of at least 60% of sp3-hybridized carbon atoms, or with a layer (8, 11) of carbon nanotubes. As an alternative, the foils (4) are made of a bulk carbon material of the above composition. The proposed foil trap offers the combination of a high thermal conductivity, a high thermo-chemical resistance against Sn and other liquid metals and a high mechanical stiffness.
    • 本发明涉及一种用于碎片减轻的箔捕获装置,特别是在EUV系统中。 箔捕获器包括从箔捕获器的入口侧朝向出口侧延伸的多个间隔开的箔片(4),所述箔片(4)布置成允许入射侧和出射侧之间的直线辐射通过。 至少在入口侧缘处,将箔(4)涂覆至含有至少60%的sp 3杂化碳原子的分数的碳材料层(8,11),或者涂覆有层(8,11) 碳纳米管。 作为替代,箔(4)由上述组成的块状碳材料制成。 所提出的箔夹具提供高导热性,对Sn和其他液态金属的高耐热化学性和高机械刚度的组合。