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1. 发明授权

US08253930B2 Absorption spectrometric apparatus for semiconductor production process 失效
标题翻译：用于半导体生产过程的吸收光谱仪
公开(公告)号：US08253930B2
公开(公告)日：2012-08-28
申请号：US12707418
申请日：2010-02-17
申请人： Osamu Akiyama , Masashi Akimoto , Tsuyoshi Moriya , Jun Yamawaku
发明人： Osamu Akiyama , Masashi Akimoto , Tsuyoshi Moriya , Jun Yamawaku
IPC分类号： G01N21/00
CPC分类号： G01N21/3554 , G01N21/031 , G01N21/05 , G01N21/3504 , G01N21/9501 , H01L21/67253
摘要： This absorption spectrometric apparatus for semiconductor production process includes a flow passageway switching mechanism connected to a discharging flow passageway of a processing chamber for a semiconductor production process and a multiple reflection type moisture concentration measuring absorption spectrometric analyzer that allows a laser beam from a laser light source to undergo multiple reflection within a cell, detects a light absorbancy change by a gas within the cell, and measures a moisture concentration within the gas. The flow passageway switching mechanism connects the discharging flow passageway by switching between a measuring flow passageway through which the gas is discharged by passing through the cell and a bypass flow passageway through which the gas is discharged without passing through the cell.
摘要翻译：该半导体制造用吸收光谱测定装置包括与半导体制造工序的处理室的排出流路连接的流路切换机构以及多反射型水分浓度测定用吸收光谱分析装置，该分析装置允许来自激光光源在电池内进行多次反射，通过电池内的气体检测光吸收变化，并测量气体内的水分浓度。流动通道切换机构通过在通过电池的排出气体的测量流动通道和通过气体而不通过电池的旁路流动通道之间切换来连接排出流动通道。

2. 发明申请

US20100214557A1 ABSORPTION SPECTROMETRIC APPARATUS FOR SEMICONDUCTOR PRODUCTION PROCESS 失效
标题翻译：用于半导体生产工艺的吸收光谱仪器
公开(公告)号：US20100214557A1
公开(公告)日：2010-08-26
申请号：US12707418
申请日：2010-02-17
申请人： Osamu Akiyama , Masashi Akimoto , Tsuyoshi Moriya , Jun Yamawaku
发明人： Osamu Akiyama , Masashi Akimoto , Tsuyoshi Moriya , Jun Yamawaku
IPC分类号： G01N21/17
CPC分类号： G01N21/3554 , G01N21/031 , G01N21/05 , G01N21/3504 , G01N21/9501 , H01L21/67253
摘要： This absorption spectrometric apparatus for semiconductor production process includes a flow passageway switching mechanism connected to a discharging flow passageway of a processing chamber for a semiconductor production process and a multiple reflection type moisture concentration measuring absorption spectrometric analyzer that allows a laser beam from a laser light source to undergo multiple reflection within a cell, detects a light absorbancy change by a gas within the cell, and measures a moisture concentration within the gas. The flow passageway switching mechanism connects the discharging flow passageway by switching between a measuring flow passageway through which the gas is discharged by passing through the cell and a bypass flow passageway through which the gas is discharged without passing through the cell.
摘要翻译：该半导体制造用吸收光谱测定装置包括与半导体制造工序的处理室的排出流路连接的流路切换机构以及多反射型水分浓度测定用吸收光谱分析装置，该分析装置允许来自激光光源在电池内进行多次反射，通过电池内的气体检测光吸收变化，并测量气体内的水分浓度。流动通道切换机构通过在通过电池的排出气体的测量流动通道和通过气体而不通过电池的旁路流动通道之间切换来连接排出流动通道。

3. 发明申请

US20060250674A1 Optical scanning apparatus 审中-公开
标题翻译：光学扫描装置
公开(公告)号：US20060250674A1
公开(公告)日：2006-11-09
申请号：US11486236
申请日：2006-07-12
申请人： Osamu Akiyama
发明人： Osamu Akiyama
IPC分类号： G02B26/08
CPC分类号： G02B26/121 , G02B7/1821
摘要： An optical scanning apparatus includes: an optical deflector having a rotatable polygon mirror for reflecting a light beam projected thereon; an fθ lens for transmitting the light beam reflected on a light reflecting surface of the polygon mirror; a cylindrical lens for transmitting the light beam passing through the fθ lens; and a sound-insulating case for the fθ lens having an opening or for the cylindrical lens having an opening, wherein the sound-insulating case houses the optical deflector and the opening of the sound-insulating case is sealed hermetically with the fθ lens or the cylindrical lens.
摘要翻译：光学扫描装置包括：光学偏转器，具有用于反射投影在其上的光束的可旋转多面镜; 用于透射在多面镜的光反射表面上反射的光束的焦距透镜; 用于透射通过透镜的光束的柱面透镜; 以及用于具有开口或具有开口的柱面透镜的透镜的隔音盒，其中隔音壳容纳光学偏转器，并且隔音壳体的开口与透镜或密封件的密封密封柱面透镜

4. 发明申请

US20050270612A1 Optical scanning apparatus 审中-公开
标题翻译：光学扫描装置
公开(公告)号：US20050270612A1
公开(公告)日：2005-12-08
申请号：US11020849
申请日：2004-12-23
申请人： Osamu Akiyama
发明人： Osamu Akiyama
IPC分类号： G02B7/182 , G02B26/08 , G02B26/12
CPC分类号： G02B26/121 , G02B7/1821
摘要： An optical scanning apparatus includes: an optical deflector having a rotatable polygon mirror for reflecting a light beam projected thereon; an fθ lens for transmitting the light beam refelected on a light reflecting surface of the polygon mirror; a cylindrical lens for transmitting the light beam passing through the fθ lens; and a sound-insulating case for the fθ lens having an opening or for the cylindrical lens having an opening, wherein the sound-insulating case houses the optical deflector and the opening of the sound-insulating case is sealed hermetically with the fθ lens or the cylindrical lens.
摘要翻译：光学扫描装置包括：光学偏转器，具有用于反射投影在其上的光束的可旋转多面镜; 用于透射在多面镜的光反射表面上重新选择的光束的焦点透镜; 用于透射通过透镜的光束的柱面透镜; 以及用于具有开口或具有开口的柱面透镜的透镜的隔音盒，其中隔音壳容纳光学偏转器，并且隔音壳体的开口与透镜或密封件的密封密封柱面透镜

5. 发明授权

US06174419B1 Electrolytic water producing apparatus 失效
标题翻译：电解水生产设备
公开(公告)号：US06174419B1
公开(公告)日：2001-01-16
申请号：US09309897
申请日：1999-05-11
申请人： Osamu Akiyama
发明人： Osamu Akiyama
IPC分类号： B23H302
CPC分类号： A61L2/035 , A61L2/18 , C02F1/46104 , C02F1/4618 , C02F1/4674 , C02F2001/46185 , C02F2201/46115 , C02F2201/4612 , C02F2201/46125 , C02F2201/4613 , C02F2201/46145 , C02F2201/4618 , C25B15/00
摘要： In an electrolytic water producing apparatus, an anode and a cathode in an electrolytic cell are periodically switched to reduce degradation thereof. The concentration of hypochlorous acid formed in the strong acidic liquid is measured through a concentration sensor, and a concentration variation pattern varying in a sawteeth pattern according to the switching of the anode and cathode is taken into a control device. A control pattern inversely corresponding to the sawteeth pattern is calculated by the controlling device. Electrolytic current or voltage to be supplied to the electrodes may be controlled according to the control pattern, or supply quantities of raw water or a chloride solution may be controlled by a flow rate controlling valve and a metering pump. Thus, although the polarities of the electrodes are switched, the strong acidic liquid containing hypochlorous acid with a constant concentration can be obtained.
摘要翻译：在电解水生产装置中，周期性地切换电解槽中的阳极和阴极，以减少其劣化。通过浓度传感器测量在强酸性液体中形成的次氯酸的浓度，并且根据阳极和阴极的切换以锯齿状图案变化的浓度变化图案被带入控制装置。通过控制装置计算与锯齿图案相反对应的控制图案。可以根据控制图案来控制供给电极的电解电流或电压，或者可以通过流量控制阀和计量泵来控制原水或氯化物溶液的供给量。因此，尽管电极的极性被切换，但是可以获得含有恒定浓度的次氯酸的强酸性液体。

6. 发明授权

US4484815A Spectrophotometer 失效
标题翻译：分光光度计
公开(公告)号：US4484815A
公开(公告)日：1984-11-27
申请号：US361145
申请日：1982-03-24
申请人： Osamu Akiyama , Tetsuo Ichikawa , Yoshio Tsunazawa
发明人： Osamu Akiyama , Tetsuo Ichikawa , Yoshio Tsunazawa
IPC分类号： G01J1/36 , G01J3/42
CPC分类号： G01J1/36 , G01J3/42
摘要： A double-beam spectrophotometer comprising a light source, a monochromator, optical means for causing the monochromatic light beam from the monochromator to alternately advance along a pair of optical paths, the axes of which intersect generally perpendicularly to each other, a pair of cells each disposed in one of the two optical paths, and a photoelectric detector disposed at or adjacent the point of intersection of the pair of optical paths.
摘要翻译：一种双光束分光光度计，包括光源，单色仪，用于使来自单色仪的单色光束沿着一对光路交替前进的光学装置，所述一对光路的轴线大致垂直相交，一对单元每个设置在两个光路中的一个光路中，以及光电检测器，设置在该光路的交点处或邻近。

7. 发明申请

US20110103821A1 Image Forming Apparatus Having a Detachable Toner Particle Collecting Unit 有权
标题翻译：具有可拆卸调色剂颗粒收集单元的图像形成装置
公开(公告)号：US20110103821A1
公开(公告)日：2011-05-05
申请号：US12912619
申请日：2010-10-26
申请人： Osamu Akiyama
发明人： Osamu Akiyama
IPC分类号： G03G21/20
CPC分类号： G03G21/206 , G03G2221/1645
摘要： An image forming apparatus including, a first air flow duct for guiding air including flying toner particles created in the image forming apparatus, a second air flow duct having a fan for exhausting cleaned air to an exterior of the image forming apparatus, and a toner particle collecting unit arranged between the first air flow duct and the second air flow duct, the toner particle collecting unit includes a cyclone separator including a cyclone main body, an air flow inlet, and an outlet tube, wherein the cyclone separator centrifuges the toner particles from the air including toner particles and exhausts the cleaned air through the outlet tube, a toner particle collection box, mounted under the cyclone separator, and an air channel section for guiding the cleaned air from the outlet tube to the second air flow duct, wherein the toner particle collecting unit is detachable.
摘要翻译：一种图像形成装置，包括：用于引导空气的第一空气流动管道，包括在图像形成装置中产生的浮动调色剂颗粒;具有用于将清洁的空气排出到图像形成装置的外部的风扇的第二气流管道和调色剂颗粒所述调色剂颗粒收集单元包括旋风分离器，所述旋风分离器包括旋风分离器主体，空气流入口和出口管，其中所述旋风分离器将调色剂颗粒从所述第一气流导管和所述第二气流导管包括调色剂颗粒的空气并且通过出口管排出经清洁的空气，安装在旋风分离器下方的调色剂颗粒收集箱，以及用于将清洁的空气从出口管引导到第二空气流动管道的空气通道部分，其中调色剂颗粒收集单元是可拆卸的。

8. 发明申请

US20100238446A1 OPTICAL GAS-ANALYSIS SYSTEM AND A GAS FLOW CELL 有权
标题翻译：光学气体分析系统和气体流动池
公开(公告)号：US20100238446A1
公开(公告)日：2010-09-23
申请号：US12724034
申请日：2010-03-15
申请人： Osamu AKIYAMA , Tsuyoshi MORIYA , Jun YAMAWAKU
发明人： Osamu AKIYAMA , Tsuyoshi MORIYA , Jun YAMAWAKU
IPC分类号： G01N21/01 , G01N21/59
CPC分类号： G01N21/05 , G01N21/031 , G01N21/09 , G01N21/15 , G01N2021/8578
摘要： A gas flow cell for an optical gas-analysis system encompasses a T-shaped configuration, the configuration is implemented by a single sample-gas introduction port provided at a location of a substantial center in a long axis direction, and the single sample-gas introduction port is aligned along a direction orthogonal to the long axis direction.
摘要翻译：用于光学气体分析系统的气体流通池包括T形构造，该构造由设置在长轴方向的大致中心的位置处的单个样品气体导入口和单个样品气体引入口沿着与长轴方向正交的方向排列。

9. 发明授权

US6093292A Electrolyte producing apparatus with monitoring device 失效
标题翻译：具有监控装置的电解液生产装置
公开(公告)号：US6093292A
公开(公告)日：2000-07-25
申请号：US84977
申请日：1998-05-28
申请人： Osamu Akiyama
发明人： Osamu Akiyama
IPC分类号： C02F1/461 , C02F1/467 , C25B1/26 , C25B15/02 , G01N21/33 , C25B9/00
CPC分类号： C02F1/4618 , C02F1/4674 , C25B1/26 , C25B15/02 , G01N21/33 , C02F1/46104 , C02F2201/46115 , C02F2201/46145 , C02F2209/06 , C02F2303/04
摘要： An electrolyte producing apparatus is formed of an electrolyzing device for producing a strong acidic liquid on an anode side and a strong alkaline liquid on a cathode side through electrolyzing a basic liquid, a mixing device connected to the electrolyzing device for mixing a part of the acidic liquid and a part of the alkaline liquid to form a mixture of the acidic and alkaline liquids, and a measuring device including a light ejecting device for ejecting light to the mixture, and a light receiving device for receiving the light passing through the mixture. A light absorbance of the mixture is measured in an area of wavelengths of about 260 nm to 330 nm. A concentration of hypochlorous acid in the produced strong acidic liquid can be accurately monitored without using a coloring reagent to thereby obtain a pH value of the strong acidic liquid.
摘要翻译：电解液制造装置由电解装置形成，该电解装置通过电解碱液体，在阳极侧产生强酸性液体和阴极侧的强碱性液体，连接到电解装置的混合装置，用于混合部分酸性液体和一部分碱性液体以形成酸性和碱性液体的混合物，以及包括用于向混合物喷射光的光弹射装置的测量装置和用于接收通过混合物的光的光接收装置。在约260nm至330nm的波长区域中测量该混合物的吸光度。可以在不使用着色试剂的情况下精确地监测所生产的强酸性液体中的次氯酸浓度，从而得到强酸性液体的pH值。

10. 发明授权

US5600251A Surface electric potential sensor drive and induction noise cancellation circuit 失效
标题翻译：表面电位传感器驱动和感应噪声消除电路
公开(公告)号：US5600251A
公开(公告)日：1997-02-04
申请号：US398997
申请日：1995-03-06
申请人： Osamu Akiyama
发明人： Osamu Akiyama
IPC分类号： G01R29/12 , G01R5/28
CPC分类号： G01R29/12
摘要： Surface potential is detected with high precision by removing induction noise generated by a drive circuit and transmitted to a detection electrode. Induction noise imparted by a drive circuit to an A.C. voltage signal is cancelled out by supplying an output of a pre-amplifier for amplifying the A.C. voltage signal derived from a detection electrode and an output of the drive circuit for applying a drive signal to a chopper portion to a differential amplifier and differentially amplifying them. Particularly, an attenuator for making a level of the amplified A.C. voltage signal substantially coincident with a level of a signal from the drive circuit and an inverter/amplifier for making phase deviation coincident are provided in an output portion of the pre-amplifier circuit.
摘要翻译：通过去除由驱动电路产生的感应噪声并传输到检测电极，以高精度检测表面电位。通过提供用于放大从检测电极导出的AC电压信号的前置放大器的输出和用于将驱动信号施加到斩波器的驱动电路的输出来抵消由驱动电路对AC电压信号施加的感应噪声部分到差分放大器并对其进行差分放大。特别地，用于使放大的交流电压信号的电平基本上与来自驱动电路的信号电平和用于使相位偏差一致的逆变器/放大器一致的衰减器设置在前置放大器电路的输出部分中。

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