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1. 发明申请

WO1993024268A1 WELDING STAINLESS MATERIAL, PROCESS APPARATUS, ULTRA-PURE WATER FEEDING APPARATUS, ULTRAHIGH-PURE GAS FEEDING PIPING SYSTEM, AND WELDING METHOD 审中-公开
标题翻译：焊接不良材料，工艺设备，超纯水输送装置，超高压气体输送管道系统和焊接方法
公开(公告)号：WO1993024268A1
公开(公告)日：1993-12-09
申请号：PCT/JP1993000719
申请日：1993-05-28
申请人： OSAKA SANSO KOGYO LTD. , OHMI, Tadahiro , NAKAMURA, Masakazu
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： B23K09/23
CPC分类号： B23K9/325 , B23K2101/06
摘要： This invention aims at providing a welding method capable of preventing generation and re-deposition of metallic fumes at portions near the surface of a weld portion and capable of reducing a deposition quantity of chromium carbides. The present invention further aims at providing a welding stainless material free from deposition of fumes, a semiconductor fabrication apparatus, an ultra-pure water feeding apparatus and an ultrahigh-pure gas feeding piping system. In a method of connecting a plurality of stainless members by fusing and solidifying predetermined portions (weld portions) of these stainless materials, the welding method of this invention is characterized in that heat input quantity to the weld portions is set below 600 joule/cm. Furthermore, the welding method is characterized in that the welding rate is set to below 20 cm/min. The stainless material is characterized in that when the welded body is washed with ultra-pure water (at flow rate of 15 l/hr for 6 hours) after welding, the sum of elution quantities of Fe, Ni, Cr and Mn is not greater than 0.1 mu g per cm of the weld length.
摘要翻译：本发明的目的在于提供一种焊接方法，其能够防止金属烟雾在焊接部的表面附近的部分的产生和再沉积，并能够减少碳化铬的沉积量。本发明还旨在提供一种不含烟雾沉积的焊接不锈钢材料，半导体制造装置，超纯水给料装置和超高纯气体供给管道系统。在通过熔融固化这些不锈钢材料的预定部分（焊接部分）来连接多个不锈钢构件的方法中，本发明的焊接方法的特征在于，将焊接部分的热量输入量设定在600焦耳/厘米3以下。此外，焊接方法的特征在于将焊接速度设定为低于20cm / min。不锈钢材料的特征在于，焊接后用超纯水（流量为15l / hr，6小时）进行焊接时，Fe，Ni，Cr，Mn的洗脱量之和不大超过0.1 g / cm的焊接长度。

2. 发明申请

WO1996013713A1 METHOD OF MEASURING THE DEW POINT AND/OR FROST POINT OF A GAZ HAVING LOW WATER CONTENT 审中-公开
标题翻译：测量具有低水含量的GAZ的DEW点和/或FROST点的方法
公开(公告)号：WO1996013713A1
公开(公告)日：1996-05-09
申请号：PCT/JP1995002229
申请日：1995-10-31
申请人： OSAKA SANSO KOGYO LTD. , KIJIMA, Takahiko , MAKIHARA, Akira , NAKAMURA, Hiroshi , KIKUCHI, Shigeru , HAYASHI, Shigeki
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： G01N25/68
CPC分类号： G01N25/68
摘要： A method of determining the dew point or frost point of a gas containing a very small amount of water using an optical dew point meter including a reflector mirror the temperature of which can be varied from room temperature to any point of -80 DEG C or below, a means of contacting said reflector mirror with the gas to be measured, a means of irradiating said reflector mirror with focused rays of light and/or laser light, and a means of detecting the change in scattered light and/or reflected light due to the dew and/or frost condensed on said reflector mirror, said method gradually reducing the temperature of said reflector mirror, either before or while said reflector mirror and said gas contact, thereby condensing dew and/or frost on said reflector mirror; and following the formation of dew and/or frost on said reflector mirror, adjusting the intensity of scattered light or reflected light from a maximum value to a constant level, at a controlled temperature and determining the temperature at that constant level of light intensity as the dew or frost point.
摘要翻译：一种使用含有反射镜的光学露点计测定含有非常少量水的气体的露点或霜点的方法，该反射镜的温度可以从室温至-80℃或更低的任何点变化，使所述反射镜与待测气体接触的手段，用聚焦光线和/或激光照射所述反射镜的装置，以及检测由于下述原因引起的散射光和/或反射光的变化的手段在所述反射镜上凝结的露水和/或霜，所述方法在所述反射镜和所述气体接触之前或之后逐渐降低所述反射镜的温度，由此在所述反射镜上凝结露水和/或霜; 并且在所述反射镜上形成露水和/或霜之后，在受控温度下将散射光或反射光的强度从最大值调节到恒定水平，并将该恒定水平的光强度的温度确定为露点或霜点。

3. 发明申请

WO1992018855A1 METHOD OF CLEANING REFLECTOR MIRROR IN OPTICAL DEW POINT METER AND AN OPTICAL DEW POINT METER EQUIPPED WITH A CLEANING DEVICE 审中-公开
标题翻译：清洁光学仪表中的反光镜的方法和装有清洁装置的光学测点仪
公开(公告)号：WO1992018855A1
公开(公告)日：1992-10-29
申请号：PCT/JP1992000493
申请日：1992-04-17
申请人： OSAKA SANSO KOGYO LTD. , NISHIZAWA, Junichi , KIJIMA, Takahiko , EZELL, Edward, F. , MAKIHARA, Akira
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： G01N25/68
CPC分类号： B08B7/0064 , G01N25/68
摘要： A method of cleaning a reflector mirror in an optical dew point meter that measures the dew point or frost point of a sample gas by a process including the steps of bringing the sample gas into contact with the reflector mirror whose temperature is variable, projecting condensed rays of light or laser light onto said reflector mirror, and detecting the change in the intensity of scattered light and/or reflected light on account of the dew or frost formed on said reflector mirror, characterized by bringing a CO2 gas or a CO2 containing gas into contact with the reflector while the latter is in a cooled state, thereby condensing CO2 on the surface of the reflector mirror, and the subsequent step of heating the reflector mirror to vaporize the CO2 is disclosed.
摘要翻译：一种清洗光学露点仪中的反射镜的方法，该方法通过以下步骤测量样品气体的露点或霜点，该方法包括使样品气体与温度可变的反射镜相接触，将光或激光照射到所述反射镜上，并且由于在所述反射镜上形成的露水或霜而检测散射光和/或反射光的强度的变化，其特征在于，将CO 2气体或含CO 2的气体与反射器接触，而后者处于冷却状态，从而在反射镜的表面上CO 2冷凝，并且公开了加热反射镜以蒸发CO2的后续步骤。

4. 发明申请

WO1992014540A1 METHOD FOR HOMOGENIZATION TREATMENT OF MIXED GASES 审中-公开
标题翻译：混合气体均质处理方法
公开(公告)号：WO1992014540A1
公开(公告)日：1992-09-03
申请号：PCT/JP1992000202
申请日：1992-02-25
申请人： OSAKA SANSO KOGYO LTD. , INOUE, Kazuya , OGAWA, Hiroshi , KIKUCHI, Susumu , SUDO, Takahiko
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： B01F03/02
CPC分类号： B01F11/0094
摘要： According to the present invention, two or more kinds of gases can be homogeneously mixed without generating dust. A method of homogeneously mixing at least two kinds of gases contained in a container, comprising the steps of: (a) inclining the container from an upright position to a substantially 90 DEG tilted position; (b) returning the container to the upright position from the substantially 90 DEG tilted position; and (c) repeating steps (a) and (b) at least one more time is disclosed.
摘要翻译：根据本发明，可以均匀混合两种以上的气体，而不产生粉尘。一种均匀混合包含在容器中的至少两种气体的方法，包括以下步骤：（a）将容器从直立位置倾斜到大致90°的倾斜位置; （b）从大致90°倾斜位置将容器返回到直立位置; 和（c）重复步骤（a）和（b）至少再多一次。

5. 发明申请

WO1990003875A1 COLD CONCRETE PRODUCTION APPARATUS 审中-公开
标题翻译：冷混合生产设备
公开(公告)号：WO1990003875A1
公开(公告)日：1990-04-19
申请号：PCT/JP1989001035
申请日：1989-10-07
申请人： OSAKA SANSO KOGYO LTD. , TSUBAKI, Kazuaki , HAMAGUCHI, Kazuo , NIKAIDO, Minoru , NAKAHARA, Yasushi , YURUGI, Masahiro
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： B28C05/46
CPC分类号： B28C5/468
摘要： This invention relates to an apparatus for cooling concrete under kneading and mixing by disposing a gas-liquid separator in a liquid nitrogen feed conduit communicating with a concrete mixer from a liquid nitrogen supply source in such a manner that the total self-weight of the gas-liquid separator can be measured, supplying liquid nitrogen separated from a gas by this gas-liquid separator into the concrete mixer, detecting and controlling the feed quantity of liquid nitrogen to the mixer from the weight change of the gas-liquid separator and cooling the concrete under kneading by supplying liquid nitrogen under a substantially liquid state to the concrete during kneading.
摘要翻译：本发明涉及一种通过在液氮分离器与液混氮气供液管连通的液氮分离器中，将气 - 液分离器设置在混合混合下来冷却混凝土的设备，其方法是使气体的总自重可以测量液体分离器，将通过该气液分离器从气体中分离的液氮供给到混凝土搅拌机中，根据气 - 液分离器的重量变化检测并控制混合器中液氮的进料量，并冷却混凝土在捏合过程中以基本液态的方式将混合物中的液态氮混合。

6. 发明申请

WO1993024267A1 METHOD OF FORMING OXIDE PASSIVATION FILM AT WELD PORTION AND PROCESS APPARATUS 审中-公开
标题翻译：在焊接部分形成氧化物钝化膜的方法和工艺装置
公开(公告)号：WO1993024267A1
公开(公告)日：1993-12-09
申请号：PCT/JP1993000720
申请日：1993-05-28
申请人： OSAKA SANSO KOGYO LTD. , OHMI, Tadahiro , NAKAMURA, Masakazu
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： B23K09/00
CPC分类号： B23K35/383 , C23C8/10
摘要： This invention provides a welding method capable of forming an oxide passivation film having corrosion resistance and an extremely small emission quantity of an outgas during welding at a weld portion and portions nearby, and a process apparatus requiring an ultrahigh-clean atmosphere. A back-seal gas comprising an inert gas contaning 1 ppb to 50 ppm of oxygen gas in caused to flow during a welding process and an oxide passivation film comprising chromium oxide as a principal component is formed on the surface of a weld portion. In a process apparatus using welding for installing the apparatus, a back-seal gas comprising an inert gas containing 1 ppb to 50 ppm of oxygen gas is caused to flow during a welding process and an oxide passivation film comprising chromium oxide as a principal component is formed on the surface of a weld portion.
摘要翻译：本发明提供一种能够形成氧化物钝化膜的焊接方法以及需要超高清洁气氛的处理装置，该氧化物钝化膜具有耐蚀性和在焊接部分附近的部分的焊接期间的排气量极少的排出量。在焊接部分的表面上形成背衬密封气体，该气体包含在焊接过程中引起流动的1ppb至50ppm的氧气的惰性气体和包含氧化铬作为主要成分的氧化物钝化膜。在使用焊接安装装置的处理装置中，在焊接过程中引起包含含有1ppb至50ppm的氧气的惰性气体的背封气体，并且包括以氧化铬为主要成分的氧化物钝化膜为形成在焊接部的表面上。

7. 发明申请

WO1992018854A1 METHOD OF MEASURING THE DEW POINT AND/OR FROST POINT OF A GAS HAVING LOW WATER CONTENT AND APPARATUS THEREFOR 审中-公开
标题翻译：测量具有低水含量的气体的DEW点和/或FROST点的方法及其装置
公开(公告)号：WO1992018854A1
公开(公告)日：1992-10-29
申请号：PCT/JP1992000492
申请日：1992-04-17
申请人： OSAKA SANSO KOGYO LTD. , NISHIZAWA, Junichi , KIJIMA, Takahiko , EZELL, Edward, F. , MAKIHARA, Akira
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： G01N25/68
CPC分类号： G01N25/68
摘要： A method of determining the dew point or frost point of a gas containing a very small amount of water using an optical dew point meter including a reflector mirror the temperature of which can be varied from room temperature to any point of -80 DEG C or below, a means of contacting said reflector mirror with the gas to be measured, a means of irradiating said reflector mirror with focused rays of light and/or laser light, and a means of detecting the change in scattered light and/or reflected light due to the dew and/or frost condensed on said reflector mirror, said method comprises detecting the temperature at which the scattered light has a maximum intensity and/or the temperature at which the reflected light has a minimum intensity and the temperature at which the scattered light has a minimum intensity and/or the temperature at which the reflected light has a maximum intensity by elevating and cooling the reflector mirror is disclosed.
摘要翻译：一种使用含有反射镜的光学露点计测定含有极少量水的气体的露点或霜点的方法，所述反射镜的温度可以从室温至-80℃或更低的任何点变化，将所述反射镜与待测气体接触的方法，用聚焦光线和/或激光照射所述反射镜的方法，以及检测由于下述原因引起的散射光和/或反射光的变化的手段在所述反射镜上凝结的露水和/或霜，所述方法包括检测散射光具有最大强度的温度和/或反射光具有最小强度的温度和散射光具有的温度公开了通过升高和冷却反射镜来反射光具有最大强度的最小强度和/或温度。

8. 发明申请

WO1991004350A1 STAINLESS STEEL MATERIAL FOR USE IN CLEAN SYSTEM 审中-公开
标题翻译：不锈钢材料用于清洁系统
公开(公告)号：WO1991004350A1
公开(公告)日：1991-04-04
申请号：PCT/JP1989000957
申请日：1989-09-21
申请人： OSAKA SANSO KOGYO LTD. , KABUSHIKI KAISHA KOBE SEIKO SHO , OHMI, Tadahiro , NAKAHARA, Yoshiyuki , TOMARI, Haruo , SATOH, Hiroshi , TERADA, Makoto , HAMADA, Hirohumi , TAKAISHI, Kazuhide
发明人： OSAKA SANSO KOGYO LTD. , KABUSHIKI KAISHA KOBE SEIKO SHO
IPC分类号： C23C08/18
CPC分类号： C23C8/18 , C23C8/14
摘要： A stainless steel material useful as a constituent member of semiconductor fabrication apparatuses or high vacuum apparatuses is disclosed. This material has good surface smoothness and cleanliness, does not cause leaching of metal ions, possesses excellent gas release resistance and surface stain resistance, and is scarcely stained due to the deposition of moisture or impurities. This material is prepared from a stainless steel material, having a surface roughness (Rmax) decreased below 1 νm by electrolytic polishing by oxidizing it in a high-temperature oxidative gas atmosphere to thereby form an amorphous oxide film of 75 Å or more in thickness while regulating the ratio of the number of the O-H bond oxygen atoms to that of the total oxygen atoms in said oxide film below 30 %.

9. 发明申请

WO1996026426A1 METHOD AND SYSTEM FOR MEASURING EXTERNAL LEAKAGE 审中-公开
标题翻译：测量外部泄漏的方法和系统
公开(公告)号：WO1996026426A1
公开(公告)日：1996-08-29
申请号：PCT/JP1995000284
申请日：1995-02-24
申请人： OSAKA SANSO KOGYO LTD. , OHMI, Tadahiro , OHKI, Atsushi , KANNO, Yohichi
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： G01M03/04
CPC分类号： G01M3/222 , G01M3/202
摘要： A method of measuring external leakage, which comprises the steps of introducing a first gas (405) different from main component gases of an external atmosphere into a pipe having a leak (402), adding H2 gas (or H2-containing gas) to the first gas (405) at a downstream point, and measuring gas components entering from the external atmosphere of the leak (402) by an atmospheric ionization mass spectrometer (APIMS) (404) at a further downstream point (for example, N2H is detected when the external atmosphere is the N2 gas). A method of measuring the external leakage of a gas supply piping line heaving a plurality of branch piping lines comprises the steps of introducing H2 gas (or a H2-containing gas) into at least one of the branch piping lines, introducing a first gas different from main component gases of an external atmosphere into the rest of the branch piping lines, and measuring gas components entering from the external atmosphere by the APIMS at a downstream point of the branch portion. The present invention can measure the external leakage very simply and with high levels of sensitivity and accuracy. Particularly, the present invention can be suitably applied to the cases where an inspection portion is elongated or branched such as a gas feed pipe of a semiconductor plant.
摘要翻译：一种测量外部泄漏的方法，包括以下步骤：将不同于外部气氛的主要组分气体的第一气体（405）引入到具有泄漏的管道（402）中，将H 2气体（或含H 2气体）加入到在下游点处的第一气体（405），以及通过大气电离质谱仪（APIMS）（404）在另外的下游点（例如，N2H +）测量从所述泄漏（402）的外部气氛进入的气体成分当外部气氛是N2气体时被检测）。一种测量多根分支管线的气体供给管道的外部泄漏的方法包括以下步骤：将H2气（或含H2气体）引入到至少一个分支管路中，引入不同的第一气体从外部气氛的主要组分气体进入分支管道的其余部分，并且在分支部分的下游点测量由APIMS从外部大气进入的气体组分。本发明可以非常简单地以高灵敏度和精确度测量外部泄漏。特别地，本发明可以适用于半导体装置的气体供给管等检查部是细长的或分支的情况。

10. 发明申请

WO1995020755A1 OXYGEN ANALYZER 审中-公开
标题翻译：氧气分析仪
公开(公告)号：WO1995020755A1
公开(公告)日：1995-08-03
申请号：PCT/JP1994000102
申请日：1994-01-26
申请人： OSAKA SANSO KOGYO LTD. , TANAKA, Yoshiyasu , MATSUMOTO, Yoshiro
发明人： OSAKA SANSO KOGYO LTD.
IPC分类号： G01N01/00
CPC分类号： G01N33/0011
摘要： This invention aims at providing an oxygen analyzer solving various problems arising when the oxygen in a gas containing a very small quantity of oxygen is analysed. The oxygen analyzer according to the present invention is suitable for the oxygen analysis of a gas containing a very small quantity of oxygen, in which various improvements have been made including a bypass pipe connecting a pipe for supplying a gas to a detector and a gas outlet pipe together, a check valve provided in an intermediate portion of the bybass pipe, and a means for detecting a difference between the pressure in the gas supply pipe and that in the gas outlet pipe.
摘要翻译：本发明的目的在于提供一种氧分析仪，其解析当分析含有非常少量氧气的气体中的氧气时产生的各种问题。根据本发明的氧分析器适用于含有非常少量氧的气体的氧分析，其中已经进行了各种改进，包括将用于向检测器供应气体的管连接的旁通管和气体出口管道连接在一起，设置在旁通管的中间部分的止回阀以及用于检测气体供给管中的压力与气体出口管中的压力差的装置。

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