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    • 10. 发明授权
    • Lateral gate, vertical drift region transistor
    • 横向栅极,垂直漂移区晶体管
    • US6146926A
    • 2000-11-14
    • US136492
    • 1998-08-19
    • Mohit BhatnagarCharles E. Weitzel
    • Mohit BhatnagarCharles E. Weitzel
    • H01L21/04H01L21/336H01L29/10H01L29/12H01L29/20H01L29/24H01L29/78H01L21/332
    • H01L29/7828H01L29/1095H01L29/66068H01L29/66666H01L29/66712H01L29/7802H01L29/1608H01L29/20H01L29/2003
    • A lateral gate, vertical drift region transistor including a drain positioned on one surface of a substrate and a doped structure having a buried region therein positioned on the other surface of the substrate. The buried region defining a drift region in the doped structure extending vertically from the substrate and further defining a doped region in communication with the drift region and adjacent the surface of the doped structure. A source positioned on the doped structure in communication with the doped region and an implant region positioned in the doped region adjacent the surface and in communication with the source and buried region. An insulating layer positioned on the doped structure with a metal gate positioned on the insulating layer so as to define an inversion region in the implant region extending laterally adjacent the control terminal and communicating with the drift region and the source.
    • 横向栅极,垂直漂移区晶体管,其包括位于衬底的一个表面上的漏极和其中位于衬底的另一表面上的埋入区的掺杂结构。 所述掩埋区域限定在所述掺杂结构中的漂移区域,所述漂移区域从所述衬底垂直延伸,并进一步限定与所述漂移区域相邻并且与所述掺杂结构的表面相邻的掺杂区域。 位于与掺杂区域连通的掺杂结构上的源极和位于邻近表面并与源极和掩埋区域连通的掺杂区域中的注入区域。 绝缘层,其位于所述掺杂结构上,金属栅极位于所述绝缘层上,以便在所述注入区域中限定反向区域,所述反转区域横向延伸延伸到所述控制端子并且与所述漂移区域和所述源极连通。