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    • 2. 发明专利
    • Method and device for producing carbon nanowall
    • 用于生产碳纳米管的方法和装置
    • JP2005097113A
    • 2005-04-14
    • JP2004343214
    • 2004-11-26
    • Mineo HiramatsuMasaru Hori勝 堀美根男 平松
    • HIRAMATSU MINEOHORI MASARU
    • C01B31/02
    • PROBLEM TO BE SOLVED: To provide a new method for producing carbon nanowalls, and to provide a device suitable for performing the method.
      SOLUTION: A gaseous starting material 32 at least comprising carbon as a constitutive element is introduced into a reaction chamber 10. The reaction chamber 10 is provided with a diode parallel plate capacitive coupling plasma (CCP)-generating mechanism 20 including a first electrode 22 and a second electrode 24. In this way, electromagnetic waves such as RF (Radio Frequency) waves are applied to form a plasma atmosphere 34 in which the gaseous starting material 32 is converted into plasma. On the other hand, in a radical generation chamber 41 provided at the outside of the reaction chamber 10, a radical source gas 36 at least comprising hydrogen is cracked by RF waves, or the like, to generate a hydrogen radical 38. The hydrogen radical 38 is injected inside the plasma atmosphere 34, and carbon nanowalls are formed on the surface of a substrate 5 arranged on the second electrode 24.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种生产碳纳米壁的新方法,并提供适合于执行该方法的装置。 解决方案:将至少包含碳作为组成元素的气态原料32引入反应室10.反应室10设置有二极管平行板电容耦合等离子体(CCP)生成机构20,其包括第一 电极22和第二电极24.以这种方式,施加诸如RF(射频)波的电磁波以形成其中气态原料32被转换成等离子体的等离子体气氛34。 另一方面,在设置在反应室10的外侧的自由基生成室41中,至少含有氢的自由基源气体36被RF波等破裂,生成氢基38.氢原子 38被注入到等离子体气氛34内,并且在布置在第二电极24上的基板5的表面上形成碳纳米壁。(C)2005年,JPO和NCIPI
    • 3. 发明专利
    • Carbon nanowall
    • 碳纳米线
    • JP2007230863A
    • 2007-09-13
    • JP2007080332
    • 2007-03-26
    • Mineo HiramatsuMasaru HoriNu Eco Engineering KkNuエコ・エンジニアリング株式会社勝 堀美根男 平松
    • HIRAMATSU MINEOHORI MASARU
    • C01B31/02B82B1/00H01M4/96
    • Y02E60/50
    • PROBLEM TO BE SOLVED: To provide a novel method for producing carbon nanowalls and an apparatus suitable for carrying out the method. SOLUTION: A source gas 32 containing at least carbon as a constituent element is introduced into a reaction chamber 10. The reaction chamber 10 includes a parallel plate-type capacitively coupled plasma (CCP) generator 20 including a first electrode 22 and a second electrode 24. The irradiation of an electromagnetic wave such as an RF wave plasmatizes the source material 32 to form a plasma atmosphere 34. In a radical-generating chamber 41 disposed outside the reaction chamber 10, hydrogen radicals 38 are generated by decomposing a radical source gas 36 containing hydrogen using an RF wave and the like. The hydrogen radicals 38 are introduced into the plasma atmosphere 34, whereby the carbon nanowalls are formed on a substrate 5 disposed on the second electrode 24. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种生产碳纳米管的新方法和适用于实施该方法的装置。 解决方案:将至少含有碳作为组成元素的源气体32引入反应室10.反应室10包括平行板式电容耦合等离子体(CCP)发生器20,其包括第一电极22和 第二电极24.诸如RF波之类的电磁波的照射等离子体化源材料32以形成等离子体气氛34.在设置在反应室10外部的自由基产生室41中,氢自由基38通过分解自由基 使用RF波等含有氢的源气体36。 将氢自由基38引入等离子体气氛34中,由此在设置在第二电极24上的基板5上形成碳纳米壁。(C)2007,JPO&INPIT
    • 5. 发明专利
    • Field emitter using carbon nanotube
    • 使用碳纳米管的场发射体
    • JP2007095580A
    • 2007-04-12
    • JP2005285524
    • 2005-09-29
    • Mineo HiramatsuMasaru HoriNu Eco Engineering KkNuエコ・エンジニアリング株式会社勝 堀美根男 平松
    • HORI MASARUHIRAMATSU MINEOKANO HIROYUKI
    • H01J1/304H01J9/02
    • PROBLEM TO BE SOLVED: To decrease threshold value of an electron emission field of a field emitter. SOLUTION: A silicon substrate (Sub) formed with carbon nanotube is mounted on a susceptor 110 having a micro heater in a reaction tank 100 and the reaction tank 100 is filled with supercritical CO 2 of 100°C. Next, trimethyl (methyl-cyclo-pentadienyl) platinum dissolved in hexane is added in a mixing vessel 200 which can be cut off and connected to the reaction tank 200 by a valve 210, and dissolved into the supercritical CO 2 . Then, after making the pressure in the mixing vessel 200 larger than that of inside the reaction tank 100, the valve 210 is opened and the supercritical CO 2 dissolved with a platinum compound in the mixing vessel 200 is introduced to the reaction tank 100 and the silicon substrate (Sub) is heated for a prescribed time up to 150°C, and platinum is deposited. Thereby, a carbon nanotube field emitter carrying platinum can be constructed. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:降低场致发射体的电子发射场的阈值。 解决方案:将形成有碳纳米管的硅衬底(Sub)安装在具有微加热器的基座110上,并在反应罐100中填充超临界CO 2 SB C。 接下来,将溶解在己烷中的三甲基(甲基 - 环戊二烯基)铂加入到混合容器200中,混合容器200可以通过阀210切断并连接到反应罐200,并溶解到超临界CO 2, SB>。 然后,在使混合容器200中的压力大于反应槽100内部的压力之后,打开阀210,并且在混合容器200中引入用铂化合物溶解的超临界CO 2 SB 2 在反应槽100和硅基板(Sub))中加热至150℃的规定时间,并沉积铂。 由此,可以构成携带铂的碳纳米管场发射体。 版权所有(C)2007,JPO&INPIT
    • 8. 发明专利
    • Field emitter using carbon nano wall
    • 使用碳纳米管的场发射体
    • JP2007095579A
    • 2007-04-12
    • JP2005285503
    • 2005-09-29
    • Mineo HiramatsuMasaru HoriNu Eco Engineering KkNuエコ・エンジニアリング株式会社勝 堀美根男 平松
    • HORI MASARUHIRAMATSU MINEOKANO HIROYUKI
    • H01J1/304
    • PROBLEM TO BE SOLVED: To decrease threshold value of an electron emission field of a field emitter. SOLUTION: A silicon substrate (Sub) formed with carbon nano wall is mounted on a susceptor 110 having a micro heater in a reaction tank 100 and the reaction tank 100 is filled with supercritical CO 2 of 100°C. Next, trimethyl (methyl-cyclo-pentadienyl) platinum dissolved in hexane is added in a mixing vessel 200 which can be cut off and connected to the reaction tank 100 by a valve 210, and dissolved into the supercritical CO 2 . Then, after making the pressure in the mixing vessel 200 larger than that of inside the reaction tank 100, the valve 210 is opened and the supercritical CO 2 dissolved with a platinum compound in the mixing vessel 200 is introduced to the reaction tank 100 and the silicon substrate (Sub) is heated for a prescribed time up to 150°C, and platinum is deposited. Therefore, a carbon nano wall field emitter carrying platinum can be constructed. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:降低场致发射体的电子发射场的阈值。 解决方案:将形成有碳纳米壁的硅衬底(Sub)安装在具有微加热器的基座110上,并在反应槽100中填充超临界CO 2 SB 100℃。 接下来,将溶解在己烷中的三甲基(甲基 - 环戊二烯基)铂加入到混合容器200中,混合容器200可以通过阀210切断并连接到反应罐100,并溶解到超临界CO 2, SB>。 然后,在使混合容器200中的压力大于反应槽100内部的压力之后,打开阀210,并且在混合容器200中引入用铂化合物溶解的超临界CO 2 SB 2 在反应槽100和硅基板(Sub))中加热至150℃的规定时间,并沉积铂。 因此,可以构建携带铂的碳纳米壁场发射体。 版权所有(C)2007,JPO&INPIT
    • 9. 发明专利
    • Method for producing carbon nanowall, carbon nanowall and apparatus for producing the same
    • 生产碳纳米管的方法,用于生产碳纳米管的装置及其制造方法
    • JP2006069816A
    • 2006-03-16
    • JP2004252698
    • 2004-08-31
    • Mineo HiramatsuMasaru Hori勝 堀美根男 平松
    • HIRAMATSU MINEOHORI MASARU
    • C01B31/02B82B3/00H05H1/00H05H1/46
    • PROBLEM TO BE SOLVED: To provide a new method for producing carbon nanowalls, and an apparatus suitable for practicing the method. SOLUTION: The method for producing the carbon nanowalls comprises following steps. A raw material gas 32 comprising at least carbon as a constituting element is introduced into a reaction chamber 10 provided with a parallel plate-type capacitively-coupled plasma (CCP) generation mechanism 20 comprising a first electrode 22 and a second electrode 24, from which an electromagnetic wave such as an RF wave is irradiated to form a plasma atmosphere 34 where the raw material gas 32 is converted into plasma. On the other hand, in a radical generating chamber 41 installed outside of the reaction chamber 10, a radical source gas 36 containing at least hydrogen is decomposed by an RF wave or the like to generate a hydrogen radical 38. The hydrogen radical 38 is injected into the plasma atmosphere 34 to form carbon nanowalls on the surface of a substrate 5 arranged on the second electrode 24. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种生产碳纳米壁的新方法,以及适用于该方法的设备。 解决方案:制备碳纳米管的方法包括以下步骤。 将包含至少碳作为构成元素的原料气体32引入到具有平行板型电容耦合等离子体(CCP)产生机构20的反应室10中,该平行板型电容耦合等离子体(CCP)产生机构20包括第一电极22和第二电极24, 照射诸如RF波之类的电磁波,以形成原料气体32转换为等离子体的等离子体气氛34。 另一方面,在安装在反应室10外部的自由基产生室41中,至少含有氢的自由基源气体36被RF波等分解,生成氢基38.注入氢根38 进入等离子体气氛34以在布置在第二电极24上的基板5的表面上形成碳纳米壁。(C)2006年,JPO和NCIPI