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1. 发明授权

US08340800B2 Monitoring a process sector in a production facility 有权
标题翻译：监控生产设备中的过程部门
公开(公告)号：US08340800B2
公开(公告)日：2012-12-25
申请号：US12175018
申请日：2008-07-17
申请人： William Cote , Michael P. Guse , Mark E. Lagus , James Rice , Yunsheng Song
发明人： William Cote , Michael P. Guse , Mark E. Lagus , James Rice , Yunsheng Song
IPC分类号： G06F19/00
CPC分类号： G05B19/4184 , Y02P90/14
摘要： Monitoring a process sector in a production facility includes establishing a tool defect index associated with a process sector in the production facility. The tool defect index includes a signal representing a defect factor associated with a tool in the process sector. Monitoring the process also requires determining whether the defect factor is a known defect factor or an unknown defect factor, and analyzing a unit from the tool if the defect factor is an unknown defect factor. Monitoring the process further requires identifying at least one defect on the unit from the tool, establishing that the at least one defect is a significant defect, determining cause of the significant defect, and creating an alert indicating that the tool associated with the process sector is producing units having significant defects.
摘要翻译：监控生产设备中的过程部门包括建立与生产设备中的过程部门相关联的工具缺陷指数。工具缺陷指数包括表示与处理扇区中的工具相关联的缺陷因子的信号。监测过程还需要确定缺陷因子是否是已知缺陷因子或未知缺陷因子，以及如果缺陷因子是未知缺陷因子，则从工具分析单位。监视过程还需要从工具识别单元上的至少一个缺陷，确定至少一个缺陷是重大缺陷，确定重大缺陷的原因，以及创建指示与处理扇区相关联的工具的警报生产单位有重大缺陷。

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