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1. 发明授权

US08880374B2 Charged particle beam device 有权
标题翻译：带电粒子束装置
公开(公告)号：US08880374B2
公开(公告)日：2014-11-04
申请号：US13001532
申请日：2009-06-18
申请人： Masaki Mizuochi
发明人： Masaki Mizuochi
IPC分类号： G06F19/00 , H01J37/28 , H01J37/26
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/2817 , H01J2237/2826
摘要： Provided is a charged particle beam device wherein a secondary signal generated from an alignment pattern having known coordinate values in a sample coordinate system is detected, and a positional deviation quantity between the coordinate system of a sample (10) and the coordinate system of a stage (21) is calculated so as to generate coordinate correction data. At the time of observing a sample image, the secondary signal generated from the alignment pattern is detected at least once so as to perform realignment, and the coordinate correction data is updated. Thus, the charged particle beam device performs long-time inspection at a high observation magnification by accurately correcting the sample coordinate information obtained by temperature change, while suppressing device cost increase and throughput deterioration.
摘要翻译：提供了一种带电粒子束装置，其中检测从具有样本坐标系中已知坐标值的对准图案产生的二次信号，以及样本（10）的坐标系与阶段的坐标系之间的位置偏差量（21），以产生坐标校正数据。在观察样本图像时，从对准图案生成的次要信号被检测至少一次，以便执行重新对准，并且更新坐标校正数据。因此，带电粒子束装置通过精确地校正由温度变化获得的样本坐标信息，同时抑制器件成本增加和吞吐量恶化，从而在高观察倍率下进行长时间检查。

2. 发明授权

US09093890B2 Linear motor, movable stage and electron microscope 有权
标题翻译：线性电机，活动台和电子显微镜
公开(公告)号：US09093890B2
公开(公告)日：2015-07-28
申请号：US13489522
申请日：2012-06-06
申请人： Hideki Tanaka , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
发明人： Hideki Tanaka , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
IPC分类号： H01J37/20 , H02K41/03 , H02K41/035 , H01J37/28 , H02K1/02 , H02K1/17
CPC分类号： H02K41/0356 , H01J37/20 , H01J37/28 , H01J2237/0264 , H01J2237/20228 , H02K1/02 , H02K1/17 , H02K41/031
摘要： It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.
摘要翻译：目的是平衡泄漏磁场的抑制和驱动性能。在包括定子的线性电动机中，该定子包括具有开放面的第一磁轭和在第一磁轭内线性排列的两行永磁体，使得S极和N极交替，并且可移动元件布置在两排永磁体之间并且线性移动时，第二磁轭连接到第一磁轭的开口端，从而当从第一磁轭的开放面观察时，覆盖第一磁轭和永磁体的开口端。

3. 发明申请

US20130284924A1 CHARGED PARTICLE BEAM APPARATUS 审中-公开
标题翻译：充电颗粒光束装置
公开(公告)号：US20130284924A1
公开(公告)日：2013-10-31
申请号：US13997941
申请日：2011-11-09
申请人： Masaki Mizuochi , Tetsuya Niibori
发明人： Masaki Mizuochi , Tetsuya Niibori
IPC分类号： G01N23/22
CPC分类号： G01N23/2206 , H01J37/20 , H01J37/21 , H01J37/28 , H01J2237/216 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： There is provided an apparatus which can accurately carry out focusing of an optical microscope mounted on a charged particle beam apparatus while restraining an increase in an apparatus cost and a reduction in a throughput. An approximate polynomial is formed based on a focus map of the optical microscope which is previously measured, and a control amount which adds a difference between a piece of wafer height information at that occasion and a piece of wafer height information in actual observation to the approximate polynomial is inputted as a focus control value of the optical microscope.
摘要翻译：提供了一种能够在抑制装置成本增加和生产量降低的同时，准确地进行安装在带电粒子束装置上的光学显微镜的聚焦的装置。基于预先测量的光学显微镜的焦点图形成近似多项式，并且将在该场合的一片晶片高度信息与实际观测中的晶片高度信息之间的差加上近似值的控制量输入多项式作为光学显微镜的聚焦控制值。

4. 发明授权

US07763863B2 Charged particle beam application apparatus 失效
标题翻译：带电粒子束施加装置
公开(公告)号：US07763863B2
公开(公告)日：2010-07-27
申请号：US12137128
申请日：2008-06-11
申请人： Masaki Mizuochi , Shoji Tomida
发明人： Masaki Mizuochi , Shoji Tomida
IPC分类号： G01F23/00 , G21K5/08 , G21K5/10
CPC分类号： H01L21/6831 , H01J37/20 , H01J2237/2008 , H01J2237/28 , H01J2237/2811 , H01J2237/3174 , H01J2237/31749
摘要： An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding means is an electrostatic chuck, a master flat plane part surrounding a specimen of the largest size of specimen sizes, and an opening surrounding a specimen size except for the largest specimen size are included at an outer peripheral portion of the electrostatic chuck, a dummy specimen attachable to and detachable from the electrostatic chuck is included, and at a time of switching the specimen size, a dummy specimen is selected (or may be prevented from being used).
摘要翻译：提供了一种能够通过静电吸取不同尺寸的试样来提高图像质量并且同时抑制原始成本增加的同时使试样边缘部分的电场均匀化的装置。样本保持装置是静电卡盘，围绕最大尺寸样本尺寸的样本的主平面部分和围绕最大样本尺寸的样本尺寸的开口包括在静电卡盘的外周部分，包含可静电卡盘可拆卸的虚拟试样，在切换试样尺寸的情况下，选择虚拟试样（或者可以防止使用）。

5. 发明授权

US06794665B2 Electron beam drawing apparatus 失效
标题翻译：电子束描绘装置
公开(公告)号：US06794665B2
公开(公告)日：2004-09-21
申请号：US10356505
申请日：2003-02-03
申请人： Masaki Kurihara , Toshihiko Horiuchi , Yoshimasa Fukushima , Masaki Mizuochi
发明人： Masaki Kurihara , Toshihiko Horiuchi , Yoshimasa Fukushima , Masaki Mizuochi
IPC分类号： H01J3720
CPC分类号： H01J37/023 , B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/0216
摘要： An electron beam drawing apparatus has a sample chamber having a bottom plate, a side wall, and a top plate. Pillar members are disposed at four corners of the sample chamber and a frame is fixed to the pillar members. A plurality of supporting apparatuses for positioning a column mounted on the top plate to the frame are arranged around the column, thereby suppressing vibration of the column at the time of movement of a stage.
摘要翻译：电子束描绘装置具有一个具有底板，侧壁和顶板的样品室。支柱构件设置在样品室的四个角处，并且框架固定到柱构件。用于将安装在顶板上的柱定位到框架上的多个支撑装置围绕柱布置，从而在台架移动时抑制柱的振动。

6. 发明授权

US06659441B2 Travelling worktable apparatus 失效
公开(公告)号：US06659441B2
公开(公告)日：2003-12-09
申请号：US10206343
申请日：2002-07-29
申请人： Masaki Mizuochi , Yoshimasa Fukushima , Masami Katsuyama , Toshinori Kobayashi
发明人： Masaki Mizuochi , Yoshimasa Fukushima , Masami Katsuyama , Toshinori Kobayashi
IPC分类号： G02B718
CPC分类号： H01L21/68 , B23Q1/58 , B23Q1/621 , B23Q17/2495
摘要： In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables and are linked with each other by an elastic body.

7. 发明授权

US06446950B2 Travelling worktable apparatus 有权
标题翻译：旅行工作台设备
公开(公告)号：US06446950B2
公开(公告)日：2002-09-10
申请号：US09793941
申请日：2001-02-27
申请人： Masaki Mizuochi , Yoshimasa Fukushima , Masami Katsuyama , Toshinori Kobayashi
发明人： Masaki Mizuochi , Yoshimasa Fukushima , Masami Katsuyama , Toshinori Kobayashi
IPC分类号： G02B718
CPC分类号： H01L21/68 , B23Q1/58 , B23Q1/621 , B23Q17/2495
摘要： In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables aid are linked with each other by an elastic body.
摘要翻译：一种行进工作台装置，包括：引导单元，用于引导行进台。在保持滚子引导件的刚性的同时，防止与引导单元的精度相关的样品台的变形，例如轨道安装的精度偏差和辊的精度。这样可以在样品台上的条形镜单元和样品之间保持一定的距离。为此，现有技术的Y台（上表）被细分为行进台以保持滚子引导件和样品台以将样品安装在其上。这些表由一个销固定，该销可以比通过弹性体彼此连接的工作台更容易变形。

8. 发明申请

US20110098960A1 CHARGED PARTICLE BEAM DEVICE 有权
标题翻译：充电颗粒光束装置
公开(公告)号：US20110098960A1
公开(公告)日：2011-04-28
申请号：US13001532
申请日：2009-06-18
申请人： Masaki Mizuochi
发明人： Masaki Mizuochi
IPC分类号： G06F19/00
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/2817 , H01J2237/2826
摘要： Provided is a charged particle beam device wherein a secondary signal generated from an alignment pattern having known coordinate values in a sample coordinate system is detected, and a positional deviation quantity between the coordinate system of a sample (10) and the coordinate system of a stage (21) is calculated so as to generate coordinate correction data. At the time of observing a sample image, the secondary signal generated from the alignment pattern is detected at least once so as to perform realignment, and the coordinate correction data is updated. Thus, the charged particle beam device performs long-time inspection at a high observation magnification by accurately correcting the sample coordinate information obtained by temperature change, while suppressing device cost increase and throughput deterioration.
摘要翻译：提供了一种带电粒子束装置，其中检测从具有样本坐标系中已知坐标值的对准图案产生的二次信号，以及样本（10）的坐标系与阶段的坐标系之间的位置偏差量（21），以产生坐标校正数据。在观察样本图像时，从对准图案生成的次要信号被检测至少一次，以便执行重新对准，并且更新坐标校正数据。因此，带电粒子束装置通过精确地校正由温度变化获得的样本坐标信息，同时抑制器件成本增加和吞吐量恶化，从而在高观察倍率下进行长时间检查。

9. 发明申请

US20120305766A1 LINEAR MOTOR, MOVABLE STAGE AND ELECTRON MICROSCOPE 有权
标题翻译：线性电机，可移动级和电子显微镜
公开(公告)号：US20120305766A1
公开(公告)日：2012-12-06
申请号：US13489522
申请日：2012-06-06
申请人： Hideki TANAKA , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
发明人： Hideki TANAKA , Masahiro Koyama , Masaki Mizuochi , Hiroshi Tsuji
IPC分类号： H02K41/03 , H01J37/26 , H01J37/20
CPC分类号： H02K41/0356 , H01J37/20 , H01J37/28 , H01J2237/0264 , H01J2237/20228 , H02K1/02 , H02K1/17 , H02K41/031
摘要： It is an object to balance suppression of a leakage magnetic field and driving performance. In a linear motor including a stator including a first yoke having an open face and two rows of permanent magnets linearly arrayed inside the first yoke so that S-poles and N-poles are alternate and a movable element arranged between the two rows of permanent magnets and linearly moving, a second yoke is connected to an open end of the first yoke so as to cover the open end of the first yoke and the permanent magnets when viewed from the open face of the first yoke.
摘要翻译：目的是平衡泄漏磁场的抑制和驱动性能。在包括定子的线性电动机中，该定子包括具有开放面的第一磁轭和在第一磁轭内线性排列的两行永磁体，使得S极和N极交替，并且可移动元件布置在两排永磁体之间并且线性移动时，第二磁轭连接到第一磁轭的开口端，从而当从第一磁轭的开放面观察时，覆盖第一磁轭和永磁体的开口端。

10. 发明申请

US20080308743A1 CHARGED PARTICLE BEAM APPLICATION APPARATUS 失效
标题翻译：充电颗粒光束应用设备
公开(公告)号：US20080308743A1
公开(公告)日：2008-12-18
申请号：US12137128
申请日：2008-06-11
申请人： Masaki Mizuochi , Shoji Tomida
发明人： Masaki Mizuochi , Shoji Tomida
IPC分类号： G21K5/08 , H01L21/683
CPC分类号： H01L21/6831 , H01J37/20 , H01J2237/2008 , H01J2237/28 , H01J2237/2811 , H01J2237/3174 , H01J2237/31749
摘要： An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding means is an electrostatic chuck, a master flat plane part surrounding a specimen of the largest size of specimen sizes, and an opening surrounding a specimen size except for the largest specimen size are included at an outer peripheral portion of the electrostatic chuck, a dummy specimen attachable to and detachable from the electrostatic chuck is included, and at a time of switching the specimen size, a dummy specimen is selected (or may be prevented from being used).
摘要翻译：提供了一种能够通过静电吸取不同尺寸的试样来提高图像质量并且同时抑制原始成本增加的同时使试样边缘部分的电场均匀化的装置。样本保持装置是静电卡盘，围绕最大尺寸样本尺寸的样本的主平面部分和围绕最大样本尺寸的样本尺寸的开口包括在静电卡盘的外周部分，包含可静电卡盘可拆卸的虚拟试样，在切换试样尺寸的情况下，选择虚拟试样（或者可以防止使用）。

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