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    • 4. 发明授权
    • Scanning tunneling microscope, its probe, processing method for the probe and production method for fine structure
    • 扫描隧道显微镜,其探头,探针加工方法及精细结构的生产方法
    • US06608306B1
    • 2003-08-19
    • US09743202
    • 2001-01-08
    • Masakazu AonoTomonobu NakayamaKazuya Terabe
    • Masakazu AonoTomonobu NakayamaKazuya Terabe
    • G01N1312
    • B82B3/00G01Q60/16Y10S977/861Y10S977/869Y10S977/875Y10S977/879
    • The invention provides a probe for use with a scanning tunneling microscope, a method of treating the probe, and a method of fabricating a nano-structure, which facilitates formation of a continuous nano-structure. The probe for the scanning tunneling microscope is formed of an Ag2S crystal having both ion conductivity and electron conductivity. Voltage and tunnel current are applied between the probe and a substrate in order to move movable Ag ions to thereby grow, on the tip end of the probe, a projection (mini chip) composed of Ag ions or Ag atoms. The polarity of the applied voltage is reversed after the growth of the projection in order to return the Ag ions or Ag atoms constituting the grown projection (mini chip) into the Ag2S crystal to thereby contract the projection. Thus, the probe can have a projection composed of Ag ions or Ag atoms and a regulated shape. Further, the movable ions or atoms of the mixed-conductive material are transferred onto the substrate so as to form a nano-structure on the substrate.
    • 本发明提供了一种用于扫描隧道显微镜的探针,一种处理该探针的方法,以及一种有助于形成连续纳米结构的纳米结构的制造方法。 用于扫描隧道显微镜的探针由具有离子传导性和电子传导性的Ag 2 S晶体形成。 电压和隧道电流施加在探针和衬底之间,以移动可移动的Ag离子,从而在探针的尖端上生长由Ag离子或Ag原子组成的突起(微型芯片)。 在投影生长之后,施加电压的极性反转,以将构成生长的突起(微型芯片)的Ag离子或Ag原子返回到Ag2S晶体中,从而使投影收缩。 因此,探针可以具有由Ag离子或Ag原子组成的突起和调节形状。 此外,将混合导电材料的可移动离子或原子转移到衬底上,以在衬底上形成纳米结构。