专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US4041414A Multiple arc radiation preionizer for gas lasers 失效
标题翻译：用于气体激光器的多弧辐射去离子机
公开(公告)号：US4041414A
公开(公告)日：1977-08-09
申请号：US453517
申请日：1974-03-21
申请人： Martin C. Richardson , Kurt Leopold
发明人： Martin C. Richardson , Kurt Leopold
IPC分类号： H01S3/038 , H01S3/0971 , H01S3/097
CPC分类号： H01S3/09716 , H01S3/038 , H01S3/0384
摘要： A multiple arc radiation preionizer for gas lasers formed of a metal electrical conductor with the conductor having formed over a portion of its length, a series of gaps to form a series of intervening discharge electrodes such that on energization of the conductor, a multiplicity of arc discharges is obtained. In a first embodiment the conductor is formed or positioned over the surface of a dielectric sheet such that arcs formed between electrodes are conducted over the surface of the sheet. The discharge electrodes are capacitively connected to ground or the low voltage side of the input via individual low-valued capacitors or by means of a conductor positioned in spaced relation to said electrodes. In the preferred embodiment, the preionizer is formed of a multiplicity of parallel conductors mounted on a dielectric sheet with the conductors each having a multiplicity of gaps therein forming a series of discharge electrodes each of which is connected through a capacitance to ground or a common voltage level such that on energization of the conductors from a high voltage pulse source, a two-dimensional array of a large number of arc discharges is obtained.
摘要翻译：一种用于由金属电导体形成的气体激光器的多弧辐射预除器，其中导体已经形成在其长度的一部分上，一系列间隙以形成一系列中间放电电极，使得在导体通电时，多个弧得到放电。在第一实施例中，导体形成或定位在电介质片的表面上，使得形成在电极之间的电弧在片材的表面上导电。放电电极通过单独的低电压电容器或通过与所述电极间隔开的导体电容地连接到输入的地或低压侧。在优选实施例中，预除电器由安装在电介质片上的多个平行导体形成，导电体各自具有多个间隙，形成一系列放电电极，每个放电电极通过电容连接到地或公共电压电平，使得在从高压脉冲源导通导体时，获得大量电弧放电的二维阵列。

2. 发明授权

US06998785B1 Liquid-jet/liquid droplet initiated plasma discharge for generating useful plasma radiation 失效
标题翻译：喷液/液滴引发等离子体放电产生有用的等离子体辐射
公开(公告)号：US06998785B1
公开(公告)日：2006-02-14
申请号：US10194387
申请日：2002-07-12
申请人： William T. Silfvast , Martin C. Richardson
发明人： William T. Silfvast , Martin C. Richardson
IPC分类号： H01J7/24 , H05B31/26
CPC分类号： H05G2/003
摘要： Plasma discharge sources for generating emissions in the VUV, EUV and X-ray spectral regions. Embodiments can include running a current through liquid jet streams within space to initiate plasma discharges. Additional embodiments can include liquid droplets within the space to initiate plasma discharges. One embodiment can form a substantially cylindrical plasma sheath. Another embodiment can form a substantially conical plasma sheath. Another embodiment can form bright spherical light emission from a cross-over of linear expanding plasmas. All the embodiments can generate light emitting plasmas within a space by applying voltage to electrodes adjacent to the space. All the radiative emissions are characteristic of the materials comprising the liquid jet streams or liquid droplets.
摘要翻译：用于在VUV，EUV和X射线光谱区域产生发射的等离子体放电源。实施例可以包括在空间内运行通过液体喷射流的电流以启动等离子体放电。另外的实施例可以包括空间内的液滴以启动等离子体放电。一个实施例可以形成基本上圆柱形的等离子体护套。另一实施例可以形成基本上圆锥形的等离子体护套。另一个实施例可以形成来自线性膨胀等离子体的交叉的亮球形光发射。所有实施例都可以通过向与该空间相邻的电极施加电压而在空间内产生发光等离子体。所有的辐射发射是包括液体射流或液滴的材料的特征。

3. 发明申请

US20110064096A1 Mid-IR laser employing Tm fiber laser and optical parametric oscillator 审中-公开
标题翻译：采用Tm光纤激光器和光参量振荡器的中红外激光器
公开(公告)号：US20110064096A1
公开(公告)日：2011-03-17
申请号：US12586011
申请日：2009-09-16
申请人： Lawrence Shah , Martin C. Richardson
发明人： Lawrence Shah , Martin C. Richardson
IPC分类号： H01S3/30
CPC分类号： G02F1/39 , H01S3/08004 , H01S3/0809 , H01S3/09415 , H01S3/117 , H01S3/1616
摘要： A laser system that generates light in the mid-infrared (mid-IR) wavelength range is disclosed. The laser system includes an optical fiber laser having a thulium-doped optical fiber gain medium and that is configured to generate pump light having an optical power of greater than 50 W. The laser system also includes an optical parametric oscillator (OPO) arranged to receive the pump light and configured to generate therefrom, via spontaneous parametric downconversion, mid-IR-wavelength output light. A phase-matching tuning curve is used to select the pump wavelength that provides desired signal and idler wavelengths for the outputted signal and idler light. The laser system is capable of generating high-mode-quality 100 ns optical pulses with about 400 μJ energy at an average power greater than 5 W, in some cases up to several tens of Watts, and in some cases greater than 50 W at the pump wavelength.
摘要翻译：公开了一种在中红外（中红外）波长范围内产生光的激光系统。该激光系统包括具有ium掺杂光纤增益介质的光纤激光器，其被配置为产生光功率大于50W的泵浦光。激光系统还包括光学参量振荡器（OPO），其被配置为接收泵浦光并经配置以通过自发参数下变频产生中红外波长输出光。使用相位匹配调谐曲线来选择为输出信号和空闲光提供期望信号和惰性波长的泵浦波长。激光系统能够产生大约400μJ能量的高模式质量的100 ns光脉冲，平均功率大于5 W，在某些情况下可达几十瓦，在某些情况下，大于50 W 泵浦波长。

4. 发明授权

US5577092A Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources 失效
标题翻译：用于激光等离子体的紫外线和软X射线源的聚束束目标
公开(公告)号：US5577092A
公开(公告)日：1996-11-19
申请号：US378426
申请日：1995-01-25
申请人： Glenn D. Kublak , Martin C. Richardson
发明人： Glenn D. Kublak , Martin C. Richardson
IPC分类号： G03F7/20 , H05G2/00 , H05H1/22 , H01J35/26
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916 , G21B1/19 , H05G2/008 , Y02E30/16
摘要： Method and apparatus for producing extreme ultra violet (EUV) and soft x-ray radiation from an ultra-low debris plasma source are disclosed. Targets are produced by the free jet expansion of various gases through a temperature controlled nozzle to form molecular clusters. These target clusters are subsequently irradiated with commercially available lasers of moderate intensity (10.sup.11 -10.sup.12 watts/cm.sup.2) to produce a plasma radiating in the region of 0.5 to 100 nanometers. By appropriate adjustment of the experimental conditions the laser focus can be moved 10-30 mm from the nozzle thereby eliminating debris produced by plasma erosion of the nozzle.
摘要翻译：公开了用于生产来自超低碎片等离子体源的极紫外（EUV）和软X射线辐射的方法和装置。目标通过各种气体通过温度控制的喷嘴的自由射流膨胀产生以形成分子簇。随后用中等强度的市售激光器（1011-1012瓦特/平方厘米）对这些目标簇进行照射，以产生在0.5至100纳米范围内的等离子体辐射。通过适当调整实验条件，激光焦点可以从喷嘴移动10-30 mm，从而消除喷嘴等离子体侵蚀产生的碎屑。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式