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1. 发明申请

US20070024864A1 Position measurement apparatus and method and pattern forming apparatus and writing method 有权
标题翻译：位置测量装置和方法以及图案形成装置和书写方法
公开(公告)号：US20070024864A1
公开(公告)日：2007-02-01
申请号：US11492843
申请日：2006-07-26
申请人： Yuichi Tachikawa , Kazumichi Yasui , Kiyoshi Nakaso , Kiyoshi Hattori , Tsugiyuki Okuya , Makoto Mita
发明人： Yuichi Tachikawa , Kazumichi Yasui , Kiyoshi Nakaso , Kiyoshi Hattori , Tsugiyuki Okuya , Makoto Mita
IPC分类号： G01B11/02
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G03F9/7092 , H01J2237/31793
摘要： A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by said measurement unit, a second filter connected in parallel with said first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by said measurement unit, a third filter connected in series to said second filter with the series connection of said second and third filters connected in parallel with the first filter, configured to attenuate the first component of said certain frequency region of the measured value outputted by said measurement unit, and a synthetic unit configured to combine an output of said first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.
摘要翻译：位置测量装置包括可移动平台结构，使用激光测量台的移动位置并输出相应测量值的测量单元，被配置为衰减测量值的某个频率区域的第一分量的第一滤波器由所述测量单元输出的与所述第一滤波器并联连接的第二滤波器被配置为衰减由所述测量单元输出的测量值的特定频率区域以外的第二分量;第三滤波器，其与所述第二滤波器串联连接，与所述第一滤波器并联连接的所述第二和第三滤波器的串联连接，被配置为衰减由所述测量单元输出的测量值的所述特定频率区域的第一分量;以及合成单元，被配置为将所述第一滤波器的输出以及第二和第三滤波器的串联连接的输出，从而输出第一个合并价值。

2. 发明授权

US06711321B2 Mechanical optical switch and method for manufacturing the same 失效
标题翻译：机械光学开关及其制造方法
公开(公告)号：US06711321B2
公开(公告)日：2004-03-23
申请号：US09926152
申请日：2001-09-13
申请人： Philippe Helin , Makoto Mita , Hiroyuki Fujita
发明人： Philippe Helin , Makoto Mita , Hiroyuki Fujita
IPC分类号： G02B626
CPC分类号： G02B6/3584 , G02B6/3514 , G02B6/3546 , G02B6/3562 , G02B6/3566 , G02B6/357 , G02B6/3572 , G02B6/3576
摘要： A mechanical optic switch is disclosed that is of high mirror quality, high in the accuracy of opto-axial alignment between a mirror and a fiber aligning structure and yet of low insertion loss, permitting fiber optic switching by an electromagnetic force. It is made by a crystallographically oriented face dependent etching process, which simultaneously forms in a Si (100) crystallographically faced single crystal substrate (1), V-grooves (3) for fixing optical fibers (2, 2a, 2b, 2c, 2d) with the V-groove's longitudinal axes oriented in the crystallographic direction or in a direction equivalent thereto; and a resilient support beam (5) and a mirror (4, 6) with the longitudinal axis of the resilient support beam and the mirror surface of the mirror oriented in the direction or in a direction equivalent thereto. Slitting into the substrate from a rear surface thereof by etching renders the support beam resilient and flexible.
摘要翻译：公开了一种机械光学开关，其具有高镜面质量，反射镜和光纤对准结构之间的光轴对准精度高，而且具有低插入损耗，允许通过电磁力进行光纤切换。它是通过晶体取向的面依赖蚀刻工艺制成的，其同时形成在Si（100）晶面上的单晶衬底（1）中，用于固定光纤（2,2a，2b，2c，2d）的V形槽），其中V形槽的纵向轴线在<110>结晶方向或与其等同的方向上取向; 以及弹性支撑梁（5）和反射镜（4,6），其具有弹性支撑梁的纵向轴线并且反射镜的镜面在<100>方向上或沿与其等同的方向上定向。通过蚀刻从其后表面切入衬底使得支撑梁具有弹性和柔性。

3. 发明授权

US07640142B2 Position measurement apparatus and method and pattern forming apparatus and writing method 有权
标题翻译：位置测量装置和方法以及图案形成装置和书写方法
公开(公告)号：US07640142B2
公开(公告)日：2009-12-29
申请号：US11492843
申请日：2006-07-26
申请人： Yuichi Tachikawa , Kazumichi Yasui , Kiyoshi Nakaso , Kiyoshi Hattori , Tsugiyuki Okuya , Makoto Mita
发明人： Yuichi Tachikawa , Kazumichi Yasui , Kiyoshi Nakaso , Kiyoshi Hattori , Tsugiyuki Okuya , Makoto Mita
IPC分类号： H04B15/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G03F9/7092 , H01J2237/31793
摘要： A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by the measurement unit, a second filter connected in parallel with the first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by the measurement unit, a third filter connected in series to the second filter with the series connection of the second and third filters connected in parallel with the first filter, configured to attenuate the first component of the certain frequency region of the measured value outputted by the measurement unit, and a processing unit configured to combine an output of the first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.
摘要翻译：位置测量装置包括可移动平台结构，使用激光测量台的移动位置并输出相应测量值的测量单元，被配置为衰减测量值的某个频率区域的第一分量的第一滤波器由所述测量单元输出的与所述第一滤波器并联连接的第二滤波器，被配置为衰减由所述测量单元输出的测量值的所述特定频率区域以外的第二分量;第三滤波器，其与所述第二滤波器串联连接，与第一滤波器并联连接的第二和第三滤波器的串联连接，被配置为衰减由测量单元输出的测量值的特定频率区域的第一分量;以及处理单元，被配置为组合第一滤波器的输出以及第二和第三滤波器的串联连接的输出，从而输出第一滤波器综合价值。

4. 发明授权

US06774533B2 Electrostatic impact driving microactuator 失效
标题翻译：静电冲击驱动微型致动器
公开(公告)号：US06774533B2
公开(公告)日：2004-08-10
申请号：US10221151
申请日：2002-09-13
申请人： Hiroyuki Fujita , Dai Kobayashi , Makoto Mita , Shouichi Tensaka
发明人： Hiroyuki Fujita , Dai Kobayashi , Makoto Mita , Shouichi Tensaka
IPC分类号： H02N100
CPC分类号： H02N1/008
摘要： An extremely small, self-moved, impact driven microactuator is disclosed that has a movable mass member electrostatically driven and which eliminates the need for it to be assembled individually. The microactuator includes a fixing member (1) securely connected to a pedestal part (14), an elastic support beam member (2) having one end securely connected to the fixing member, a movable mass member (3) fastened to the other end of the elastic support beam member, a driving electrode and a stopper member (4, 5) each securely connected to the pedestal part and spacedly juxtaposed with the movable mass member, and a power supply circuit (9) for applying a voltage between the movable mass and driving electrode members. In operation, turning the power supply circuit ON generates electrostatic attraction between the driving electrode member and movable mass members, thereby bringing the movable member into collision with the stopper member, followed by the transmission of a kinetic energy then produced to the outer frame part, and subsequently turning the power supply circuit OFF removes the electrostatic attraction, thereby permitting the movable mass member to return to its original position under an elastic force exerted by the elastic support beam member, followed by the transmission of a reaction force then produced to outer frame part, whereby the microactuator is bodily moved in a given direction.
摘要翻译：公开了一种非常小的，自移动的冲击驱动微型致动器，其具有静电驱动的可移动质量部件，并且不需要单独组装。微致动器包括牢固地连接到基座部分（14）的固定构件（1），具有与固定构件牢固连接的一端的弹性支撑梁构件（2），固定到另一端的可移动质量构件所述弹性支撑梁构件，驱动电极和止动构件（4,5），其均牢固地连接到所述基座部分并与所述可移动质量构件间隔地并置;以及电源电路（9），用于在所述可移动质量块和驱动电极部件。在操作中，使电源电路接通，在驱动电极构件和可移动质量构件之间产生静电吸引，从而使可动构件与止动构件碰撞，然后将产生的动能传递到外框架部分，并且随后关闭电源电路去除静电引力，从而允许可动质量构件在由弹性支撑梁构件施加的弹力下返回其初始位置，随后传递反作用力，然后产生到外框部分，从而使微型致动器沿给定的方向身体移动。

5. 发明授权

US06259548B1 Micro-mirror device 失效
标题翻译：微镜装置
公开(公告)号：US06259548B1
公开(公告)日：2001-07-10
申请号：US09401947
申请日：1999-09-23
申请人： Masahiro Tsugai , Nobuaki Konno , Hiroyuki Fujita , Makoto Mita , Hiroshi Toshiyoshi , Yoshio Mita
发明人： Masahiro Tsugai , Nobuaki Konno , Hiroyuki Fujita , Makoto Mita , Hiroshi Toshiyoshi , Yoshio Mita
IPC分类号： G02B2608
CPC分类号： B81B3/004 , B81B2201/042 , G02B26/0841
摘要： A micro-mirror device includes a mirror forming substrate on which a mirror is disposed. A pair of torsion beams are disposed on opposing sides of the mirror forming substrate. An anchor projects from a supporting substrate, supporting the ends of the torsion beams. A driving frame surrounds at least one side of the torsion beams and is connected to the mirror forming substrate through a link beam. A drive force generator drives the driving frame.
摘要翻译：微镜装置包括其上配置有反射镜的反射镜形成基板。一对扭转梁设置在反射镜形成基板的相对侧上。锚固件从支撑基底突出，支撑扭转梁的端部。驱动框架围绕扭转梁的至少一侧，并且通过连杆梁连接到反射镜形成基板。驱动力发生器驱动驱动框架。

6. 发明授权

US4831538A Hand-held navigation and flight performance computer 失效
标题翻译：手持导航和飞行性能计算机
公开(公告)号：US4831538A
公开(公告)日：1989-05-16
申请号：US938869
申请日：1986-12-08
申请人： Joseph Cucchiari, deceased , James J. Lilje , Makoto Mita
发明人： Joseph Cucchiari, deceased , James J. Lilje , Makoto Mita
IPC分类号： G06F15/02
CPC分类号： G06F15/025
摘要： A menu-driven, hand-held navigation and flight performance computer having a keyboard, display, and CPU. The display includes a menu region for displaying the names of navigation and flight performance functions, one or more parameter name regions and a data region. The keyboard includes a first cursor key for selecting among the navigation and flight performance functions on the menu portion of the display. The keyboard additionally includes a key for triggering the start of a specific function selected by the cursor key, a plurality of arithmetic operator keys, a plurality of number keys, and a conversion key for converting data from one unit of measure to another. A timer is included for upcounting and downcounting and for triggering the automatic shut-off of the computer after a specific period of time expires since the last keyboard entry. The CPU retains outputs of select programs to be used as default inputs to select subsequently executed programs. The computer generates sequential prompts for required inputs to programs, leaving the prompt and input display during the program.
摘要翻译：具有键盘，显示器和CPU的菜单驱动的手持导航和飞行性能计算机。显示器包括用于显示导航和飞行性能功能的名称的菜单区域，一个或多个参数名称区域和数据区域。键盘包括用于在显示器的菜单部分上的导航和飞行执行功能之间进行选择的第一光标键。键盘还包括用于触发由光标键选择的特定功能的开始的键，多个算术运算符键，多个数字键以及用于将数据从一个测量单位转换为另一个单位的转换键。包含计时器和计数器的计时器，并且在上一个键盘输入后一段特定的时间到期后触发计算机的自动关闭。 CPU保留要用作默认输入的选择程序的输出，以选择随后执行的程序。计算机生成程序所需输入的顺序提示，在程序中保留提示和输入显示。

7. 发明授权

US08213945B2 Mobile communication system, and method for controlling channel connection and control station in mobile communication system 失效
标题翻译：移动通信系统，移动通信系统中控制信道连接和控制站的方法
公开(公告)号：US08213945B2
公开(公告)日：2012-07-03
申请号：US12825921
申请日：2010-06-29
申请人： Asuka Jonishi , Makoto Mita
发明人： Asuka Jonishi , Makoto Mita
IPC分类号： H04W72/00
CPC分类号： H04W24/02 , H04W28/10 , H04W48/08 , H04W48/16 , H04W48/20 , H04W72/04 , H04W72/1252 , H04W76/10 , Y02D70/00
摘要： A mobile communication system can predict a temporary access concentration to a particular wireless base station, select an appropriate wireless base station and assign down channels for each mobile terminal. In respective wireless base stations, switching scheduling to a channel congestion avoidance mode is performed by checking the obtained use history of respective wireless base stations to determine the periodicity regarding the channel congestion of the respective wireless base stations. Once switched to the channel congestion avoidance mode, a wireless base station for each mobile terminal is selected based on idle channel conditions of surrounding wireless base stations and moving direction characteristics of mobile terminals currently connected to the wireless base station. The only down channel of each mobile terminal is connected to the selected wireless base station, and the wireless communication is established.
摘要翻译：移动通信系统可以预测到特定无线基站的临时访问集中，选择合适的无线基站并为每个移动终端分配下行信道。在各个无线基站中，通过检查所获得的各无线基站的使用历史来确定关于各个无线基站的信道拥塞的周期来执行切换调度到信道拥塞避免模式。一旦切换到信道拥塞避免模式，则基于周围无线基站的空闲信道条件和当前连接到无线基站的移动终端的移动方向特性来选择每个移动终端的无线基站。每个移动终端的唯一下行信道连接到所选择的无线基站，建立无线通信。

8. 发明申请

US20110086455A1 GYROSCOPE 有权
公开(公告)号：US20110086455A1
公开(公告)日：2011-04-14
申请号：US12904104
申请日：2010-10-13
申请人： Makoto Mita , Hirobumi Saito , Hiroshi Toshiyoshi
发明人： Makoto Mita , Hirobumi Saito , Hiroshi Toshiyoshi
IPC分类号： H01L21/3065
CPC分类号： G01C19/574 , Y10T74/1282
摘要： To provide a compact and high performance gyroscope.A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.
摘要翻译：提供一种紧凑，高性能的陀螺仪。陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

9. 发明申请

US20090090200A1 GYROSCOPE 有权
公开(公告)号：US20090090200A1
公开(公告)日：2009-04-09
申请号：US11914127
申请日：2005-05-24
申请人： Makoto Mita , Hirobumi Saito , Hiroshi Toshiyoshi
发明人： Makoto Mita , Hirobumi Saito , Hiroshi Toshiyoshi
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , Y10T74/1282
摘要： A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.
摘要翻译：陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

10. 发明授权

US07090781B2 Micro-actuator and method making the same 失效
标题翻译：微致动器和方法制作相同
公开(公告)号：US07090781B2
公开(公告)日：2006-08-15
申请号：US10875215
申请日：2004-06-25
申请人： Hiroyuki Fujita , Dai Kobayashi , Makoto Mita , Shouichi Tensaka
发明人： Hiroyuki Fujita , Dai Kobayashi , Makoto Mita , Shouichi Tensaka
IPC分类号： H01L21/00
CPC分类号： H02N1/008
摘要： An extremely small, self-moved, impact driven microactuator is disclosed that has a movable mass member electrostatically driven and which eliminates the need for it to be assembled individually. The microactuator includes a fixing member (1) securely connected to a pedestal part (14), an elastic support beam member (2) having one end securely connected to the fixing member, a movable mass member (3) fastened to the other end of the elastic support beam member, a driving electrode and a stopper member (4, 5) each securely connected to the pedestal part and spacedly juxtaposed with the movable mass member, and a power supply circuit (9) for applying a voltage between the movable mass and driving electrode members. In operation, turning the power supply circuit ON generates electrostatic attraction between the driving electrode member and movable mass members, thereby bringing the movable member into collision with the stopper member, followed by the transmission of a kinetic energy then produced to the outer frame part, and subsequently turning the power supply circuit OFF removes the electrostatic attraction, thereby permitting the movable mass member to return to its original position under an elastic force exerted by the elastic support beam member, followed by the transmission of a reaction force then produced to outer frame part, whereby the microactuator is bodily moved in a given direction.
摘要翻译：公开了一种非常小的，自移动的冲击驱动微型致动器，其具有静电驱动的可移动质量部件，并且不需要单独组装。微致动器包括牢固地连接到基座部分（14）的固定构件（1），具有与固定构件牢固连接的一端的弹性支撑梁构件（2），固定到另一端的可移动质量构件所述弹性支撑梁构件，驱动电极和止动构件（4,5），其均牢固地连接到所述基座部分并与所述可移动质量构件间隔地并置;以及电源电路（9），用于在所述可移动质量块和驱动电极部件。在操作中，使电源电路接通，在驱动电极构件和可移动质量构件之间产生静电吸引，从而使可动构件与止动构件碰撞，然后将产生的动能传递到外框架部分，并且随后关闭电源电路去除静电引力，从而允许可动质量构件在由弹性支撑梁构件施加的弹力下返回其初始位置，随后传递反作用力，然后产生到外框部分，从而使微型致动器沿给定的方向身体移动。

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