专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

TW201414990A 基於壓力之質流控制器审中-公开
简体标题：基于压力之质流控制器
公开(公告)号：TW201414990A
公开(公告)日：2014-04-16
申请号：TW102132639
申请日：2013-09-10
申请人：穆德丹尼爾T , MUDD, DANIEL T. , 穆德派提J , MUDD, PATTI J
发明人：穆德丹尼爾T , MUDD, DANIEL T. , 穆德派提J , MUDD, PATTI J
IPC分类号： G01F1/34
CPC分类号： G05D7/0635 , Y10T137/776
摘要：本發明揭示一種質流控制器(MFC)，其具有擁有一外殼及一對應基底之一標準封套。一壓力傳感器在不實體耦合至該基底之情況下通信耦合至一比例入口閥中之一程序氣體。原本由該壓力傳感器佔據之空間可用於額外組件整合或標準封套大小之減小。一第二壓力傳感器定位於多個MFC之遠端且由該多個MFC共用。一釋放閥可快速釋放一P1體積之程序氣體之一P1壓力。一第一層流元件(LFE)及一第二LFE以及串聯之高傳導閥經並聯組態以產生維持準確度之一寬範圍MFC。
简体摘要：本发明揭示一种质流控制器(MFC)，其具有拥有一外壳及一对应基底之一标准封套。一压力传感器在不实体耦合至该基底之情况下通信耦合至一比例入口阀中之一进程气体。原本由该压力传感器占据之空间可用于额外组件集成或标准封套大小之减小。一第二压力传感器定位于多个MFC之远程且由该多个MFC共享。一释放阀可快速释放一P1体积之进程气体之一P1压力。一第一层流组件(LFE)及一第二LFE以及串联之高传导阀经并联组态以产生维持准确度之一宽范围MFC。

2. 发明申请

WO2003032101A1 SYSTEM AND METHOD FOR MAKING AND USING A MASS FLOW DEVICE 审中-公开
标题翻译：制造和使用大流量装置的系统和方法
公开(公告)号：WO2003032101A1
公开(公告)日：2003-04-17
申请号：PCT/US2002/032533
申请日：2002-10-11
申请人： FUGASITY CORPORATION , WHITE, William, W. , WHITE, William, H. , MUDD, Daniel, T. , DAVIS, Christopher, B. , FONTAINE, Benjamin
发明人： WHITE, William, W. , WHITE, William, H. , MUDD, Daniel, T. , DAVIS, Christopher, B. , FONTAINE, Benjamin
IPC分类号： G05D7/06
CPC分类号： G05D7/0635
摘要： A system and method for making a mass flow device (21) for use with one or more fluids is provided. The method includes obtaining fluid behavior of a fluid to be calculated for a given restrictor (114). Parameters for components used in the device (21), such as a processor (130), a restrictor (114) and one or more sensors (46, 48), are obtained to determine any needed corrections for calculations. The restrictor (114) and component parameters are processed with the fluid behavior data to determine operational parameters for the device (21). The operational data is downloaded into the device (21) to enable the processor (130) to monitor and control the flow of the fluid. A verification test may be performed to ensure that the device (21) is functioning correctly.
摘要翻译：提供一种用于制造与一种或多种流体一起使用的质量流量装置（21）的系统和方法。该方法包括获得要针对给定限制器（114）计算的流体的流体行为。获得装置（21）中使用的用于诸如处理器（130），节流器（114）和一个或多个传感器（46,48）的部件的参数以确定用于计算的任何需要的校正。利用流体行为数据处理限制器（114）和部件参数以确定装置（21）的操作参数。操作数据被下载到设备（21）中，以使处理器（130）能够监视和控制流体的流动。可以执行验证测试以确保设备（21）正常工作。

3. 发明申请

WO9621182A3 Flow controller, parts of low controller, and related method 审中-公开
标题翻译：流量控制器，低控制器部件及相关方法
公开(公告)号：WO9621182A3
公开(公告)日：1996-09-06
申请号：PCT/US9515157
申请日：1995-11-20
申请人： TYLAN GENERAL INC , MUDD DANIEL T , DUONG HAI
发明人： MUDD DANIEL T , DUONG HAI
IPC分类号： B23P11/00 , G01F1/684 , G01F5/00 , G01F15/00 , G05D7/06
CPC分类号： G01F5/00 , B23P11/005 , G01F1/6842 , G01F1/6847 , G01F15/00 , G01F15/005 , G05D7/0635 , Y10T29/49423 , Y10T29/49426 , Y10T137/0898 , Y10T137/7759 , Y10T137/7761 , Y10T137/87338 , Y10T137/87354
摘要： A mass fluid flow controller has a valve which is controlled by a controller rod structure which is substantially pivotally mounted on a metallic diaphragm which stretches and unstretches with the movement of the rod structure. The actuation of the rod structure is by the expansion and contraction of an actuator wire which is heated for the expansion and allowed to cool for the contraction. The primary fluid flow path through the controller is straight. A sensor conduit, provididng a parallel sensor fluid flow path, is connected in position using metallic sealer members which extend in openings to the primary fluid flow path and which are rounded along the direction through such openings. The pressure drop, along the primary fluid flow path, to create flow through the sensor conduit, is provided by a fluid flow restrictor having a core and having lengths of wire along the core which are squeezed between the core and a tapered fluid flow path wall in the vicinity of the sensor conduit input and output connections. A spherical or a conical shape may be used for the form of the core. A valve seat bushing is mounted in pipe structure providing the primary fluid flow path by applying a force against an end surface of the bushing, with movement of the bushing blocked, in order to deform the end surface, push the outer wall of the bushing against the inner wall of the pipe structure, and fix the bushing in the pipe structure. In the relationship between the controller rod structure and a ball which acts as a gate-member for the valve, an elongated stem rod having a sleeve about it may be used in fixing the ball to the controller rod structure. The stem rod may be mounted by fixing it to the elongated sleeve, a distance from the gate-member side of the controller rod structure that is substantially greater than the distance of the position of the ball from the gate-member side of the controller rod structure.

4. 发明申请

WO2004020956A3 HIGHER ACCURACY PRESSURE BASED FLOW CONTROLLER 审中-公开
标题翻译：基于高精度压力的流量控制器
公开(公告)号：WO2004020956A3
公开(公告)日：2005-05-19
申请号：PCT/US0327232
申请日：2003-08-28
申请人： HORIBA STEC INC , MUDD DANIEL T , WHITE WILLIAM W
发明人： MUDD DANIEL T , WHITE WILLIAM W
IPC分类号： G05D7/06 , F16K31/12
CPC分类号： G01F1/86 , G01F1/88 , G05D7/0635 , Y10T137/7761
摘要： A mass flow controller is disclosed and includes body portion having a first internal passage and at least second internal passage formed therein, a flow control valve coupled to the body portion and in communication with the first and second internal passages, at least one pressure transducer coupled to the body portion and in communication with at least one of the first internal passage, the second internal passage and the flow restrictor, a nonlinear flow restrictor configured to produce a high compressible laminar flow therethrough coupled to the second internal passage, a thermal sensor in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, and an exhaust vessel in communication with the flow restrictor.
摘要翻译：公开了质量流量控制器，并且包括主体部分，其具有第一内部通道和形成在其中的至少第二内部通道，流量控制阀，其联接到主体部分并与第一和第二内部通道连通，至少一个压力传感器耦合与所述主体部分连通并与所述第一内部通道，所述第二内部通道和所述限流器中的至少一个连通;非线性流量限制器，被配置为产生通过其耦合到所述第二内部通道的高可压缩层流;热传感器，与第一内部通道，第二内部通道和限流器中的至少一个连通，以及与限流器连通的排气容器。

5. 发明申请

WO2005086643A3 FLOW RESTRICTOR 审中-公开
标题翻译：流量限制器
公开(公告)号：WO2005086643A3
公开(公告)日：2006-04-27
申请号：PCT/US2005005653
申请日：2005-02-24
申请人： HORIBA STEC CO LTD , MUDD DANIEL T , WHITE WILLIAM W , MILLER VIRGINIA , DAVIS CHRISTOPHER , MIYOSHI KIMURA , YASUDA TADAHIRO
发明人： MUDD DANIEL T , WHITE WILLIAM W , MILLER VIRGINIA , DAVIS CHRISTOPHER , MIYOSHI KIMURA , YASUDA TADAHIRO
IPC分类号： G05D7/06 , F16K47/08
CPC分类号： F16K47/08
摘要： A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
摘要翻译：一种具有第一盘的限流器，其具有至少一个入口和至少一个出口以及流动通道和不具有流动路径的第二盘。第一个磁盘和第二个磁盘堆叠在一起。质量流量控制器，包括输入，输出，流路，压力传感器和上述限流器。

6. 发明申请

WO2005086643A2 FLOW RESTRICTOR 审中-公开
标题翻译：流量限制器
公开(公告)号：WO2005086643A2
公开(公告)日：2005-09-22
申请号：PCT/US2005/005653
申请日：2005-02-24
申请人： HORIBA STEC, CO., LTD. , MUDD, Daniel, T. , WHITE, William, W. , MILLER, Virginia , DAVIS, Christopher , MIYOSHI, Kimura , YASUDA, Tadahiro
发明人： MUDD, Daniel, T. , WHITE, William, W. , MILLER, Virginia , DAVIS, Christopher , MIYOSHI, Kimura , YASUDA, Tadahiro
IPC分类号： F16K47/08
CPC分类号： F16K47/08
摘要： A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
摘要翻译：一种具有第一盘的限流器，其具有至少一个入口和至少一个出口以及流动通道和不具有流动路径的第二盘。第一个磁盘和第二个磁盘堆叠在一起。质量流量控制器，包括输入，输出，流路，压力传感器和上述限流器。

7. 发明申请

WO2014040002A3 PRESSURE BASED MASS FLOW CONTROLLER 审中-公开
标题翻译：基于压力的质量流量控制器
公开(公告)号：WO2014040002A3
公开(公告)日：2014-05-30
申请号：PCT/US2013058828
申请日：2013-09-09
申请人： MUDD DANIEL T , MUDD PATTI J
发明人： MUDD DANIEL T , MUDD PATTI J
IPC分类号： G01P5/14
CPC分类号： G05D7/0635 , Y10T137/776
摘要： A mass flow controller (MFC) has a standard envelope with an enclosure and a corresponding base. A pressure transducer is communicatively coupled to a process gas in a proportional inlet valve without being physically coupled to the base. The space formerly occupied by the pressure transducer is available for additional component integration, or reduction of the standard envelope size. A second pressure transducer is located remotely and shared by multiple MFCs. A relief valve can quickly relieve a PI pressure of a PI volume of process gas. A first laminar flow element (LFE) and a second LFE and in series high conductance valve configured in parallel to produce a wide-range MFC that maintains accuracy.
摘要翻译：质量流量控制器（MFC）具有带外壳和相应底座的标准外壳。压力传感器在比例进气阀中与工艺气体通信连接，而没有物理连接到底座。先前由压力传感器占据的空间可用于额外的组件集成，或减小标准信封尺寸。第二个压力传感器位于远处并由多个MFC共享。安全阀可以快速减轻PI体积工艺气体的PI压力。第一个层流元件（LFE）和第二个LFE以及串联的高电导阀平行配置，以产生一个可以保持精度的宽范围MFC。

8. 发明申请

WO2004020956A9 HIGHER ACCURACY PRESSURE BASED FLOW CONTROLLER 审中-公开
标题翻译：更高精度的基于压力的流量控制器
公开(公告)号：WO2004020956A9
公开(公告)日：2004-06-17
申请号：PCT/US0327232
申请日：2003-08-28
申请人： HORIBA STEC INC , MUDD DANIEL T , WHITE WILLIAM W
发明人： MUDD DANIEL T , WHITE WILLIAM W
IPC分类号： G05D7/06 , G01F
CPC分类号： G01F1/86 , G01F1/88 , G05D7/0635 , Y10T137/7761
摘要： A mass flow controller is disclosed and includes body portion having a first internal passage and at least second internal passage formed therein, a flow control valve coupled to the body portion and in communication with the first and second internal passages, at least one pressure transducer coupled to the body portion and in communication with at least one of the first internal passage, the second internal passage and the flow restrictor, a nonlinear flow restrictor configured to produce a high compressible laminar flow therethrough coupled to the second internal passage, a thermal sensor in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, and an exhaust vessel in communication with the flow restrictor.
摘要翻译：公开了一种质量流量控制器，该质量流量控制器包括具有第一内部通道和形成于其中的至少第二内部通道的主体部分，连接到主体部分并与第一和第二内部通道连通的流量控制阀，至少一个压力传感器连接并且与第一内部通道，第二内部通道和限流器中的至少一个连通;非线性限流器，被配置为产生通过其耦合到第二内部通道的高可压缩层流;热传感器，与第一内部通道，第二内部通道和限流器中的至少一个连通，以及与限流器连通的排气容器。

9. 发明申请

WO2004020956A2 HIGHER ACCURACY PRESSURE BASED FLOW CONTROLLER 审中-公开
标题翻译：基于高精度压力的流量控制器
公开(公告)号：WO2004020956A2
公开(公告)日：2004-03-11
申请号：PCT/US2003/027232
申请日：2003-08-28
申请人： HORIBA STEC, INC. , MUDD, Daniel, T. , WHITE, William, W.
发明人： MUDD, Daniel, T. , WHITE, William, W.
IPC分类号： G01F
CPC分类号： G01F1/86 , G01F1/88 , G05D7/0635 , Y10T137/7761
摘要： A mass flow controller is disclosed and includes body portion having a first internal passage and at least second internal passage formed therein, a flow control valve coupled to the body portion and in communication with the first and second internal passages, at least one pressure transducer coupled to the body portion and in communication with at least one of the first internal passage, the second internal passage and the flow restrictor, a nonlinear flow restrictor configured to produce a high compressible laminar flow therethrough coupled to the second internal passage, a thermal sensor in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, and an exhaust vessel in communication with the flow restrictor.
摘要翻译：公开了质量流量控制器，并且包括主体部分，其具有第一内部通道和形成在其中的至少第二内部通道，流量控制阀，其联接到主体部分并与第一和第二内部通道连通，至少一个压力传感器耦合与所述主体部分连通并与所述第一内部通道，所述第二内部通道和所述限流器中的至少一个连通;非线性流量限制器，被配置为产生通过其耦合到所述第二内部通道的高可压缩层流;热传感器，与第一内部通道，第二内部通道和限流器中的至少一个连通，以及与限流器连通的排气容器。

10. 发明申请

WO2014040002A2 PRESSURE BASED MASS FLOW CONTROLLER 审中-公开
标题翻译：基于压力的流量控制器
公开(公告)号：WO2014040002A2
公开(公告)日：2014-03-13
申请号：PCT/US2013/058828
申请日：2013-09-09
申请人： MUDD, Daniel, T. , MUDD, Patti, J.
发明人： MUDD, Daniel, T. , MUDD, Patti, J.
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , Y10T137/776
摘要： A mass flow controller (MFC) has a standard envelope with an enclosure and a corresponding base. A pressure transducer is communicatively coupled to a process gas in a proportional inlet valve without being physically coupled to the base. The space formerly occupied by the pressure transducer is available for additional component integration, or reduction of the standard envelope size. A second pressure transducer is located remotely and shared by multiple MFCs. A relief valve can quickly relieve a PI pressure of a PI volume of process gas. A first laminar flow element (LFE) and a second LFE and in series high conductance valve configured in parallel to produce a wide-range MFC that maintains accuracy.
摘要翻译：质量流量控制器（MFC）具有带有外壳和相应底座的标准信封。压力传感器通信地耦合到比例入口阀中的处理气体，而不物理耦合到基座。以前由压力传感器占据的空间可用于额外的部件集成，或缩小标准包络尺寸。第二个压力传感器位于远程并由多个MFC共享。安全阀可以快速减轻PI体积的工艺气体的PI压力。第一层流元件（LFE）和第二LFE和串联高电导阀并联配置以产生保持精度的宽范围MFC。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式