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1. 发明申请

WO2004020956A2 HIGHER ACCURACY PRESSURE BASED FLOW CONTROLLER 审中-公开
标题翻译：基于高精度压力的流量控制器
公开(公告)号：WO2004020956A2
公开(公告)日：2004-03-11
申请号：PCT/US2003/027232
申请日：2003-08-28
申请人： HORIBA STEC, INC. , MUDD, Daniel, T. , WHITE, William, W.
发明人： MUDD, Daniel, T. , WHITE, William, W.
IPC分类号： G01F
CPC分类号： G01F1/86 , G01F1/88 , G05D7/0635 , Y10T137/7761
摘要： A mass flow controller is disclosed and includes body portion having a first internal passage and at least second internal passage formed therein, a flow control valve coupled to the body portion and in communication with the first and second internal passages, at least one pressure transducer coupled to the body portion and in communication with at least one of the first internal passage, the second internal passage and the flow restrictor, a nonlinear flow restrictor configured to produce a high compressible laminar flow therethrough coupled to the second internal passage, a thermal sensor in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, and an exhaust vessel in communication with the flow restrictor.
摘要翻译：公开了质量流量控制器，并且包括主体部分，其具有第一内部通道和形成在其中的至少第二内部通道，流量控制阀，其联接到主体部分并与第一和第二内部通道连通，至少一个压力传感器耦合与所述主体部分连通并与所述第一内部通道，所述第二内部通道和所述限流器中的至少一个连通;非线性流量限制器，被配置为产生通过其耦合到所述第二内部通道的高可压缩层流;热传感器，与第一内部通道，第二内部通道和限流器中的至少一个连通，以及与限流器连通的排气容器。

2. 发明申请

WO2003032101A1 SYSTEM AND METHOD FOR MAKING AND USING A MASS FLOW DEVICE 审中-公开
标题翻译：制造和使用大流量装置的系统和方法
公开(公告)号：WO2003032101A1
公开(公告)日：2003-04-17
申请号：PCT/US2002/032533
申请日：2002-10-11
申请人： FUGASITY CORPORATION , WHITE, William, W. , WHITE, William, H. , MUDD, Daniel, T. , DAVIS, Christopher, B. , FONTAINE, Benjamin
发明人： WHITE, William, W. , WHITE, William, H. , MUDD, Daniel, T. , DAVIS, Christopher, B. , FONTAINE, Benjamin
IPC分类号： G05D7/06
CPC分类号： G05D7/0635
摘要： A system and method for making a mass flow device (21) for use with one or more fluids is provided. The method includes obtaining fluid behavior of a fluid to be calculated for a given restrictor (114). Parameters for components used in the device (21), such as a processor (130), a restrictor (114) and one or more sensors (46, 48), are obtained to determine any needed corrections for calculations. The restrictor (114) and component parameters are processed with the fluid behavior data to determine operational parameters for the device (21). The operational data is downloaded into the device (21) to enable the processor (130) to monitor and control the flow of the fluid. A verification test may be performed to ensure that the device (21) is functioning correctly.
摘要翻译：提供一种用于制造与一种或多种流体一起使用的质量流量装置（21）的系统和方法。该方法包括获得要针对给定限制器（114）计算的流体的流体行为。获得装置（21）中使用的用于诸如处理器（130），节流器（114）和一个或多个传感器（46,48）的部件的参数以确定用于计算的任何需要的校正。利用流体行为数据处理限制器（114）和部件参数以确定装置（21）的操作参数。操作数据被下载到设备（21）中，以使处理器（130）能够监视和控制流体的流动。可以执行验证测试以确保设备（21）正常工作。

3. 发明申请

WO2005086643A2 FLOW RESTRICTOR 审中-公开
标题翻译：流量限制器
公开(公告)号：WO2005086643A2
公开(公告)日：2005-09-22
申请号：PCT/US2005/005653
申请日：2005-02-24
申请人： HORIBA STEC, CO., LTD. , MUDD, Daniel, T. , WHITE, William, W. , MILLER, Virginia , DAVIS, Christopher , MIYOSHI, Kimura , YASUDA, Tadahiro
发明人： MUDD, Daniel, T. , WHITE, William, W. , MILLER, Virginia , DAVIS, Christopher , MIYOSHI, Kimura , YASUDA, Tadahiro
IPC分类号： F16K47/08
CPC分类号： F16K47/08
摘要： A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
摘要翻译：一种具有第一盘的限流器，其具有至少一个入口和至少一个出口以及流动通道和不具有流动路径的第二盘。第一个磁盘和第二个磁盘堆叠在一起。质量流量控制器，包括输入，输出，流路，压力传感器和上述限流器。

4. 发明授权

EP1442343B1 SYSTEM AND METHOD FOR MAKING AND USING A MASS FLOW DEVICE 有权
标题翻译：系统和方法的生产和使用大流量标准装置
公开(公告)号：EP1442343B1
公开(公告)日：2008-05-14
申请号：EP02778519.5
申请日：2002-10-11
申请人： Horiba Stec, Inc.
发明人： WHITE, William, W. , WHITE, William, H. , MUDD, Daniel, T. , DAVIS, Christopher, B. , FONTAINE, Benjamin
IPC分类号： G05D7/06
CPC分类号： G05D7/0635
摘要： A system and method for making a mass flow device (21) for use with one or more fluids is provided. The method includes obtaining fluid behavior of a fluid to be calculated for a given restrictor (114). Parameters for components used in the device (21), such as a processor (130), a restrictor (114) and one or more sensors (46, 48), are obtained to determine any needed corrections for calculations. The restrictor (114) and component parameters are processed with the fluid behavior data to determine operational parameters for the device (21). The operational data is downloaded into the device (21) to enable the processor (130) to monitor and control the flow of the fluid. A verification test may be performed to ensure that the device (21) is functioning correctly.

5. 发明申请

WO2014040002A2 PRESSURE BASED MASS FLOW CONTROLLER 审中-公开
标题翻译：基于压力的流量控制器
公开(公告)号：WO2014040002A2
公开(公告)日：2014-03-13
申请号：PCT/US2013/058828
申请日：2013-09-09
申请人： MUDD, Daniel, T. , MUDD, Patti, J.
发明人： MUDD, Daniel, T. , MUDD, Patti, J.
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , Y10T137/776
摘要： A mass flow controller (MFC) has a standard envelope with an enclosure and a corresponding base. A pressure transducer is communicatively coupled to a process gas in a proportional inlet valve without being physically coupled to the base. The space formerly occupied by the pressure transducer is available for additional component integration, or reduction of the standard envelope size. A second pressure transducer is located remotely and shared by multiple MFCs. A relief valve can quickly relieve a PI pressure of a PI volume of process gas. A first laminar flow element (LFE) and a second LFE and in series high conductance valve configured in parallel to produce a wide-range MFC that maintains accuracy.
摘要翻译：质量流量控制器（MFC）具有带有外壳和相应底座的标准信封。压力传感器通信地耦合到比例入口阀中的处理气体，而不物理耦合到基座。以前由压力传感器占据的空间可用于额外的部件集成，或缩小标准包络尺寸。第二个压力传感器位于远程并由多个MFC共享。安全阀可以快速减轻PI体积的工艺气体的PI压力。第一层流元件（LFE）和第二LFE和串联高电导阀并联配置以产生保持精度的宽范围MFC。

6. 发明公开

EP1552200A2 HIGHER ACCURACY PRESSURE BASED FLOW CONTROLLER 审中-公开
标题翻译：与精度更高的基于压力的流量控制
公开(公告)号：EP1552200A2
公开(公告)日：2005-07-13
申请号：EP03749272.5
申请日：2003-08-28
申请人： Horiba Stec, Inc.
发明人： MUDD, Daniel, T. , WHITE, William, W.
IPC分类号： F16K31/12
CPC分类号： G01F1/86 , G01F1/88 , G05D7/0635 , Y10T137/7761
摘要： A mass flow controller is disclosed and includes body portion having a first internal passage and at least second internal passage formed therein, a flow control valve coupled to the body portion and in communication with the first and second internal passages, at least one pressure transducer coupled to the body portion and in communication with at least one of the first internal passage, the second internal passage and the flow restrictor, a nonlinear flow restrictor configured to produce a high compressible laminar flow therethrough coupled to the second internal passage, a thermal sensor in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, and an exhaust vessel in communication with the flow restrictor.

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