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    • 2. 发明申请
    • Tunnel field-effect transistor
    • 隧道场效应晶体管
    • WO2013014547A1
    • 2013-01-31
    • PCT/IB2012/053088
    • 2012-06-19
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONMOSELUND, Kirsten EmilieSTANLEY-MARBELL, PhillipDOERING, Andreas ChristianBJOERK, Mikael T.
    • MOSELUND, Kirsten EmilieSTANLEY-MARBELL, PhillipDOERING, Andreas ChristianBJOERK, Mikael T.
    • H01L29/739H01L29/423
    • H01L29/7391H01L29/42312
    • The present invention relates to a tunnel field-effect transistor (1) comprising: at least a source region (2) comprising a corresponding source semiconductor material; at least a drain region (3) comprising a corresponding drain semiconductor material, and at least a channel region (4) comprising a corresponding channel semiconductor material, which is arranged between the source region (2) and the drain region(3), the tunnel field-effect transistor (1)further comprising: at least a source-channel gate electrode (5) provided on at least an interface (5') between the source region (2) and the channel region (4); at least an insulator (5") corresponding to the source-channel gate electrode (5) that is provided between the source-channel gate electrode (5) and at least the interface (5') between the source region (2) and the channel region (4), at least a drain-channel gate electrode (6) provided on at least an interface(6') between the drain region (3) and the channel region(4), and at least an insulator(6") corresponding to the drain-channel gate electrode (6) that is provided between the drain-channel gate electrode (6) and at least the interface (6) between the drain region (3) and the channel region(4).
    • 隧道场效应晶体管技术领域本发明涉及一种隧道场效应晶体管(1),包括:至少源极区(2),其包括相应的源半导体材料; 至少包括相应的漏极半导体材料的漏极区域(3),以及至少包括布置在源极区域(2)和漏极区域(3)之间的相应沟道半导体材料的沟道区域(4), 隧道场效应晶体管(1)还包括:至少设置在源区(2)和沟道区(4)之间的至少界面(5')上的源沟道栅电极(5); 至少一个与源极沟道栅电极(5)相对应的绝缘体(5“),该绝缘体设置在源极栅电极(5)和至少源极区(2)和 沟道区域(4),至少设置在漏极区域(3)和沟道区域(4)之间的界面(6')上的漏极 - 沟道栅电极(6),以及至少一个绝缘体(6“ )设置在漏极沟道栅电极(6)与至少漏极区(3)与沟道区(4)之间的界面(6)之间的漏极沟道栅电极(6)。