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1. 发明专利

JP2013041842A Heater control method of duplex heater control system including extendable module function 有权
标题翻译：包括可扩展模块功能的双重加热器控制系统的加热器控制方法
公开(公告)号：JP2013041842A
公开(公告)日：2013-02-28
申请号：JP2012229253
申请日：2012-10-16
申请人： Mks Instruments Inc , エムケイエスインストゥルメンツ, インコーポレイテッド , Watlow Electric Manufacturing Co , ワトロウエレクトリックマニュファクチュアリングカンパニー
发明人： GU YOUFAN , JEFFREY D KIERNAN , RORHEAD CHARLES C , WORRINGER WILLIAM C , ERIC E ELLIS , FOSTER CURTIS A , JAMES P HENGHES , HOVEN MARK LOUIS GUILMER , JAMES H KREISEL , SEAN REININGER , MORRAN ROBERT O , PETERSON KURT W , JASON R POWEL , DALE T WOLFE
IPC分类号： H05B3/00
CPC分类号： H05B1/0244 , G05D23/1928 , G05D23/1935 , G05D23/22 , Y10T307/469 , Y10T307/484
摘要： PROBLEM TO BE SOLVED: To provide a more flexible heater control method of a heater control system which can be configured simply, orderly, and efficiently so as to suit a wide range of operator requirements.SOLUTION: The heater control method of a heater control system includes a step for disposing an upper limit switch which turns AC power to a heater 16 on/off in an AC power circuit, the upper limit switch includes a normally open relay switch which closes to turn on AC power when power is supplied from a coil, and opens when power is not supplied to the coil, and a step for providing a drain circuit which supplies power to the coil from a current flowing through a PTC thermistor, by disposing the PTC thermistor in the heater so as to feed a current through a PTC resistor connected in series with a coil power circuit, closes when the flow of a current through the PTC thermistor stops, and does not feed a current to the coil when a current begins to flow again through the PTC resistor by maintaining the closed state.
摘要翻译：要解决的问题：提供一种加热器控制系统的更灵活的加热器控制方法，其可以简单，有序和有效地配置，以适应广泛的操作者要求。解决方案：加热器控制系统的加热器控制方法包括在交流电源电路中设置将加热器16的交流电力接通/断开的上限开关的步骤，上限开关包括常开继电器开关其在从线圈供电时闭合以接通AC电力，并且当不向线圈供电时打开AC电力;以及用于提供从流过PTC热敏电阻的电流向线圈供电的漏极电路的步骤，通过将PTC热敏电阻设置在加热器中，以便通过与线圈电源电路串联的PTC电阻器馈送电流，当通过PTC热敏电阻的电流流动停止时闭合，并且当a 通过保持关闭状态，电流开始再次通过PTC电阻。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2013038084A Multiple heater control system with expandable modular functionality 有权
标题翻译：具有可扩展模块化功能的多重加热器控制系统
公开(公告)号：JP2013038084A
公开(公告)日：2013-02-21
申请号：JP2012229233
申请日：2012-10-16
申请人： Mks Instruments Inc , エムケイエスインストゥルメンツ, インコーポレイテッド , Watlow Electric Manufacturing Co , ワトロウエレクトリックマニュファクチュアリングカンパニー
发明人： GU YOUFAN , JEFFREY D KIERNAN , RORHEAD CHARLES C , WORRINGER WILLIAM C , ERIC E ELLIS , FOSTER CURTIS A , JAMES P HENGHES , HOVEN MARK LOUIS GUILMER , JAMES H KREISEL , SEAN REININGER , MORRAN ROBERT O , PETERSON KURT W , JASON R POWEL , DALE T WOLFE
IPC分类号： H05B3/00 , F16L53/00
CPC分类号： H05B1/0244 , G05D23/1928 , G05D23/1935 , G05D23/22 , Y10T307/469 , Y10T307/484
摘要： PROBLEM TO BE SOLVED: To provide a heater control apparatus of a more flexible heater control system that can be configured easily, neatly, and effectively to meet a wider variety of operator requirements.SOLUTION: A heater control apparatus comprises first and second temperature sensors and a heater controller. The heater controller has: an AC power circuit supplying an AC power to a heating element via an AC power circuit extending between an inlet connector connected to an AC power source and an outlet connector connected to the heating element; an upper-limit power switch opening and closing the AC power circuit; an upper-limit control circuit making the upper-limit power switch open and close the AC power circuit depending on a detection temperature of the first temperature sensor; a process power switch opening and closing the AC power circuit to control the AC power supplied at an outlet; and a process control circuit making the process power switch open and close the AC power circuit according to comparison between a detection temperature of the second temperature sensor and a desired setting point temperature.
摘要翻译：要解决的问题：提供一种更灵活的加热器控制系统的加热器控制装置，其可以容易地，整齐地和有效地配置以满足更多种类的操作者要求。解决方案：加热器控制装置包括第一和第二温度传感器和加热器控制器。所述加热器控制器具有：交流电源电路，其经由在连接到AC电源的入口连接器和连接到所述加热元件的出口连接器之间延伸的AC电力电路向加热元件提供AC电力; 一个上限电源开关，用于打开和关闭交流电源电路; 使上限电源开关根据第一温度传感器的检测温度而开闭AC电路的上限控制电路; 处理电源开关，用于打开和关闭所述交流电源电路，以控制在出口处提供的AC电力; 以及过程控制电路，使得处理电源开关根据第二温度传感器的检测温度和期望的设定点温度之间的比较来打开和关闭交流电源电路。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2013020646A Heater control method for multiple heater control system with expandable modular functionality 有权
标题翻译：具有可扩展模块功能的多加热器控制系统的加热器控制方法
公开(公告)号：JP2013020646A
公开(公告)日：2013-01-31
申请号：JP2012229248
申请日：2012-10-16
申请人： Mks Instruments Inc , エムケイエスインストゥルメンツ, インコーポレイテッド , Watlow Electric Manufacturing Co , ワトロウエレクトリックマニュファクチュアリングカンパニー
发明人： GU YOUFAN , JEFFREY D KIERNAN , RORHEAD CHARLES C , WORRINGER WILLIAM C , ERIC E ELLIS , FOSTER CURTIS A , JAMES P HENGHES , HOVEN MARK LOUIS GUILMER , JAMES H KREISEL , SEAN REININGER , MORRAN ROBERT O , PETERSON KURT W , JASON R POWEL , DALE T WOLFE
IPC分类号： G05B9/02 , H05B3/00
CPC分类号： H05B1/0244 , G05D23/1928 , G05D23/1935 , G05D23/22 , Y10T307/469 , Y10T307/484
摘要： PROBLEM TO BE SOLVED: To provide a heater control method for a more flexible heater control system that can be configured easily, neatly, and effectively to meet a wide variety of operator requirements.SOLUTION: The method includes: placing in an AC power circuit a high-limit switch which can turn on and off AC power to a heater; and controlling the high-limit switch by a high-limit control circuit which receives low-voltage DC power from a DC power supply. The high-limit control circuit is programmed as follows: when the temperature sensed by a temperature sensor placed adjacently to the heater exceeds a preset high-limit temperature, the high-limit switch turns off the AC power to the heater; when the low-voltage DC power to the high-limit control circuit is being stopped, the high-limit switch turns on the AC power to the heater, and then restarts the heater if the sensed temperature does not exceed the preset limit temperature.
摘要翻译：要解决的问题：提供一种更灵活的加热器控制系统的加热器控制方法，其可以容易地，整齐地和有效地配置，以满足各种操作者的要求。
解决方案：该方法包括：将交流电源电路放置在可以接通和断开加热器的交流电源的高限位开关; 以及通过从直流电源接收低压直流电力的高限制控制电路来控制上限开关。上限控制电路如下编程：当与加热器相邻放置的温度传感器检测到的温度超过设定的上限温度时，上限开关关闭加热器的交流电源; 当上限控制电路的低压直流电源停止运行时，上限开关接通加热器的交流电源，如果检测到的温度不超过预设极限温度，则重启加热器。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2009101361A Liquid cooled trap 有权
标题翻译：液体冷藏夹
公开(公告)号：JP2009101361A
公开(公告)日：2009-05-14
申请号：JP2009026060
申请日：2009-02-06
申请人： Mks Instruments Inc , エムケイエスインストゥルメンツインク
发明人： GU YOUFAN , HAUSCHULTZ DANA S
IPC分类号： B01D7/02 , B01D5/00 , B01D8/00 , B01D53/00 , C23C16/44 , H01L21/3065 , H01L21/31
CPC分类号： B01D8/00 , B01D5/0006 , B01D5/0036 , B01D7/02 , B01D53/002 , Y10S55/15
摘要： PROBLEM TO BE SOLVED: To provide a liquid cooled trap for effectively and efficiently collecting condensable vapor in a chemical vapor reaction system. SOLUTION: A gas byproduct G enters a trap 30 from an inlet 32, and temperature distribution is caused in the gas byproduct G flowing in the trap 30. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供液体冷却的捕集器，用于在化学气相反应系统中有效和高效地收集可冷凝的蒸气。解决方案：气体副产物G从入口32进入捕集器30，并且在捕集阱30中流动的气体副产物G中引起温度分布。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2004132698A Differential pressure/absolute pressure converter for load lock control 有权
标题翻译：差压/绝对压力转换器，用于负载锁定控制
公开(公告)号：JP2004132698A
公开(公告)日：2004-04-30
申请号：JP2002228745
申请日：2002-08-06
申请人： Mks Instruments Inc , エムケーエスインストゥルメンツインコーポレーテッド
发明人： GU YOUFAN , HOLCOMB GARRY , WENZEL OLE
IPC分类号： G01L13/06 , C23C14/56 , C23C16/44 , G01L11/00 , G01L21/12 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a differential pressure/absolute pressure converter for accurately and rapidly performing load lock control. SOLUTION: In the converter 10 and its conversion method, where an absolute pressure sensor for detecting an absolute pressure in a load lock chamber 60 and a differential pressure sensor for detecting the differential pressure between the surrounding atmospheric pressure and pressure in the load lock chamber 60 are combined, a control signal for opening an internal door 62 from the load lock chamber 60 to a vacuum treatment chamber 70, and a control signal for opening an external door 64 between the peripheral atmosphere and the load lock chamber 60 are provided. The converter 10 generates a signal for controlling the transition from a state for evacuating the pressure of the load lock chamber slowly by a pump to a state for evacuating the pressure of the load lock chamber rapidly by the pump at a pressure setting point that is determined in advance. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供用于精确和快速地执行加载锁定控制的差压/绝对压力转换器。解决方案：在转换器10及其转换方法中，用于检测负载锁定室60中的绝对压力的绝对压力传感器和用于检测周围大气压力和负载压力之间的压差的压差传感器组合了锁定室60，用于将内门62从负载锁定室60打开到真空处理室70的控制信号和用于打开周围大气和负载锁定室60之间的外部门64的控制信号。转换器10产生一个信号，用于控制从用于将负载锁定室的压力排出的状态缓慢地由泵转移到用于在确定的压力设定点处由泵快速抽出负载锁定室的压力的状态的转变的信号提前。版权所有（C）2004，JPO

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