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    • 3. 发明申请
    • METHOD AND APPARATUS FOR APPLYING A SHEET TO A SUBSTRATE
    • 用于将基片应用于基板的方法和装置
    • WO2008068701A3
    • 2008-10-30
    • PCT/IB2007054888
    • 2007-12-03
    • KONINKL PHILIPS ELECTRONICS NVVERSCHUUREN MARCUS AMEGENS MISCHA
    • VERSCHUUREN MARCUS AMEGENS MISCHA
    • B05D1/28
    • B05D1/28B05C1/027B82Y10/00B82Y40/00G03F7/0002
    • The invention provides a method and apparatus for laminating a sheet to a substrate in a stress free and distortion-less manner. The method comprises providing the sheet and substrate such that an attractive force between them exists that is capable of bringing the sheet and surface together at least when their distance is shorter than a critical distance. The method creates these conditions by locally making an initial contact between the sheet and substrate such that at a contact front, being the boundary between areas where the substrate and sheet are in contact and those where they are not in contact, these conditions exist. In a further step the sheet and substrate are allowed to gradually make contact such that the contact front advances along either of the substrate or sheet surface therewith increasing the contacting area between the substrate and the sheet. The method is advantages when used during imprint lithography or embossing processes or other processes where feature patterns need to be transferred from the substrate to the surface or vice versa.
    • 本发明提供了一种以无应力和无失真的方式将片层压到基片上的方法和装置。 该方法包括提供片材和基底,使得它们之间的吸引力存在,其能够使片材和表面至少当其距离短于临界距离时一起。 该方法通过局部地在片材和基底之间进行初始接触来产生这些条件,使得在作为基底和片材接触的区域与未接触的区域之间的边界的接触面处存在这些条件。 在另外的步骤中,允许片材和基底逐渐接触,使得接触前端沿着基底或片材表面前进,从而增加基底和片材之间的接触面积。 该方法是在压印光刻或压花加工或其他工艺中使用时的优点,其中特征图案需要从基底转移到表面,反之亦然。
    • 4. 发明申请
    • METHOD AND SYSTEM FOR CONTACTING OF A FLEXIBLE SHEET AND A SUBSTRATE
    • 用于接触柔性片和基片的方法和系统
    • WO2008087573A2
    • 2008-07-24
    • PCT/IB2008/050093
    • 2008-01-11
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.VERSCHUUREN, Marcus, A.MEGENS, Mischa
    • VERSCHUUREN, Marcus, A.MEGENS, Mischa
    • G03F7/0002B05D1/28B82Y10/00B82Y40/00Y10S438/973Y10S438/976
    • The invention relates to a method for contacting a flexible sheet to a first element with improved lateral alignment. The method includes a step of measuring a first lateral misalignment after establishing a first contact between the flexible sheet and either of the first element and a sheet parking surface called anchor in the first stage. If the 5 misalignment exceeds a predetermined threshold the flexible sheet is parked at the anchor such that it is not in contact with the first element, and the relative position of the first element and the anchor is altered during the second stage for correcting the mismatch during a contact between the flexible sheet and the first element to be established within the next step of the method. During the steps of shifting the contact point to obtain the second stage 10 the contacting process is more accurate and reproducible than the process for establishing the init ial contact. The invention also relates to an apparatus for executing the method, and the use of the method and apparatus for the manufacture of devices.
    • 本发明涉及一种使柔性片与第一元件接触的方法,该方法具有改进的横向对准。 该方法包括在第一阶段中建立柔性片与第一元件中的任一个和称为锚的片材停车面之间的第一接触之后,测量第一侧向偏移的步骤。 如果5个未对准超过预定阈值,则柔性片材停放在锚固件处,使得其不与第一元件接触,并且在第二阶段期间改变第一元件和锚的相对位置以纠正不匹配 在该方法的下一步骤中在柔性片和要建立的第一元件之间的接触。 在移动接触点以获得第二阶段10的步骤期间,接触过程比建立初始接触的过程更准确和可重现。 本发明还涉及一种用于执行该方法的装置,以及用于制造装置的方法和装置的使用。
    • 8. 发明申请
    • SENSOR DEVICE FOR TARGET PARTICLES IN A SAMPLE
    • 传感器装置在样品中的目标颗粒
    • WO2009053902A3
    • 2009-12-10
    • PCT/IB2008054329
    • 2008-10-21
    • KONINKL PHILIPS ELECTRONICS NVVERSCHUREN COEN AKAHLMAN JOSEPHUS A H MIMMINK ALBERT H JMEGENS MISCHAVEEN JEROENDE BOER BART MJANSEN THEODORUS P H G
    • VERSCHUREN COEN AKAHLMAN JOSEPHUS A H MIMMINK ALBERT H JMEGENS MISCHAVEEN JEROENDE BOER BART MJANSEN THEODORUS P H G
    • G01N15/06
    • G01N15/06G01N15/0656G01N2015/0693G01R33/1269
    • The invention relates to a sensor device(100) and a method for the determination of the amount of target particles(1) at a contact surface(112) adjacent to a sample chamber(2). Target particles(1) in the sample chamber are detected by a sensor element(SE) and at least one corresponding sensor-signal (s, s') is provided. An evaluation unit(EU) then determines the amount of target particles(1) in a first zone(Z1) immediately at the contracts surface(112) and a second zone(Z2) a distance(z) away from the contact surface based on this sensor-signal. In an optical measurement approach, frustrated total internal reflection taking place under different operating conditions (e.g. wavelength, angle of incidenceq) may be used to extract information about the first and second zones(Z1, Z2). In a magnetic measurement approach, different magnetic excitation fields may be used to excite magnetic target particles differently inthe first and second zone(Z2). Moreover, the temporalcourse of a sensor-signal(s, s') can be evaluated, particularly with respect to stochastic movements ofthe target particles(1).
    • 本发明涉及一种传感器装置(100)和用于确定在与样品室(2)相邻的接触表面(112)处的目标颗粒(1)的量的方法。 通过传感器元件(SE)检测样品室中的目标颗粒(1),并提供至少一个对应的传感器信号(s,s')。 然后,评估单元(EU)基于紧接表面(112)立即确定第一区域(Z1)中的目标颗粒(1)的数量和远离接触表面的距离(z)的第二区域(Z2),基于 这个传感器信号。 在光学测量方法中,可以使用在不同操作条件(例如,波长,入射角q)处发生的沮丧的全内反射来提取关于第一和第二区域(Z1,Z2)的信息。 在磁测量方法中,可以使用不同的磁激励场来在第一和第二区(Z2)中不同地激励磁性目标颗粒。 此外,可以评估传感器信号(s,s')的时间,特别是关于目标颗粒(1)的随机运动。
    • 10. 发明申请
    • METHOD AND SYSTEM FOR CONTACTING OF A FLEXIBLE SHEET AND A SUBSTRATE
    • 用于接触柔性板和基板的方法和系统
    • WO2008087573A3
    • 2008-10-30
    • PCT/IB2008050093
    • 2008-01-11
    • KONINKL PHILIPS ELECTRONICS NVVERSCHUUREN MARCUS AMEGENS MISCHA
    • VERSCHUUREN MARCUS AMEGENS MISCHA
    • B05D1/28
    • G03F7/0002B05D1/28B82Y10/00B82Y40/00Y10S438/973Y10S438/976
    • The invention relates to a method for contacting a flexible sheet to a first element with improved lateral alignment. The method includes a step of measuring a first lateral misalignment after establishing a first contact between the flexible sheet and either of the first element and a sheet parking surface called anchor in the first stage. If the 5 misalignment exceeds a predetermined threshold the flexible sheet is parked at the anchor such that it is not in contact with the first element, and the relative position of the first element and the anchor is altered during the second stage for correcting the mismatch during a contact between the flexible sheet and the first element to be established within the next step of the method. During the steps of shifting the contact point to obtain the second stage 10 the contacting process is more accurate and reproducible than the process for establishing the init ial contact. The invention also relates to an apparatus for executing the method, and the use of the method and apparatus for the manufacture of devices.
    • 本发明涉及一种用于使柔性片材与具有改进的横向对准的第一元件接触的方法。 该方法包括在第一阶段中在柔性片与第一元件和被称为锚的片材停放表面中的任一个之间建立第一接触之后测量第一侧向未对准的步骤。 如果所述未对准超过预定阈值,则将所述柔性片停放在所述锚上,使得所述柔性片不与所述第一元件接触,并且在所述第二阶段期间改变所述第一元件和所述锚的相对位置以校正所述不匹配期间 柔性片和第一元件之间的接触将在该方法的下一步骤中建立。 在移动接触点以获得第二阶段10的步骤期间,接触过程比用于建立初始接触的过程更准确和可再现。 本发明还涉及一种用于执行该方法的设备以及该设备制造方法和设备的使用。