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1. 发明申请

WO2012087620A2 CARBON CONTAINING LOW-K DIELECTRIC CONSTANT RECOVERY USING UV TREATMENT 审中-公开
标题翻译：含有紫外线处理的含有低K介电常数恢复的碳
公开(公告)号：WO2012087620A2
公开(公告)日：2012-06-28
申请号：PCT/US2011/064246
申请日：2011-12-09
申请人： NOVELLUS SYSTEMS, INC. , VARADARAJAN, Bhadri N. , MCLAUGHLIN, Kevin M. , VAN SCHRAVENDIJK, Bart
发明人： VARADARAJAN, Bhadri N. , MCLAUGHLIN, Kevin M. , VAN SCHRAVENDIJK, Bart
IPC分类号： A61K47/34
CPC分类号： H01L21/3105 , H01L21/67115 , H01L21/76813 , H01L21/76814 , H01L21/76825
摘要： A method for the ultraviolet (UV) treatment of carbon-containing low-k dielectric and associated apparatus enables process induced damage repair. The methods of the invention are particularly applicable in the context of damascene processing to recover lost low-k property of a dielectric damaged during processing, either pre-metallization, post-planarization, or both. UV treatments can include an exposure of the subject low-k dielectric to a constrained UV spectral profile and/or chemical silylating agent, or both.
摘要翻译：一种用于含碳低k电介质和相关设备的紫外（UV）处理方法使得能够进行过程诱导的损伤修复。本发明的方法特别适用于在加工期间损坏的电介质，预金属化，后平面化或两者中损耗的损耗的低k特性的镶嵌加工的背景。紫外线治疗可以包括受试者低k电介质暴露于约束的紫外光谱分布和/或化学甲硅烷基化试剂，或两者。

2. 发明申请

WO2006099483A1 METHOD AND APPARATUS FOR CONTROLLING AN ELECTRIC ASSIST STEERING SYSTEM USING AN ADAPTIVE BLENDING TORQUE FILTER AND ROAD FEEL FILTER 审中-公开
标题翻译：用于控制电动辅助转向系统的方法和装置，使用自适应混合扭矩过滤器和道路感应过滤器
公开(公告)号：WO2006099483A1
公开(公告)日：2006-09-21
申请号：PCT/US2006/009313
申请日：2006-03-14
申请人： TRW AUTOMOTIVE U.S. LLC , MCLAUGHLIN, Kevin M.
发明人： MCLAUGHLIN, Kevin M.
IPC分类号： B62D6/00 , B62D5/04
CPC分类号： B62D5/0463 , B62D6/008
摘要： An apparatus is provided for controlling a steering assist system that includes a torque sensing system operatively connected to a vehicle hand wheel for providing a torque signal indicative of an applied steering torque. A blending filter connected to the torque sensing system provides a blended torque signal. An adaptive torque filter filters the blended torque signal for maintaining stability at all vehicle speeds. A road feel filter connected to the adaptive torque filter removes a lag-lead induced by an interaction of the adaptive torque filter and the blending filter at substantially zero gain. A steering assist device provides steering assist in response to a control signal. A controller provides the control signal to the steering assist device in response to a modified adaptive torque signal. The road feel filter filters the lag-lead from the adaptive torque signal for allowing road feel to be transmitted through the hand wheel at substantially zero gain.
摘要翻译：提供了一种用于控制转向辅助系统的装置，其包括可操作地连接到车辆手轮的扭矩感测系统，用于提供指示施加的转向扭矩的扭矩信号。连接到转矩传感系统的混合滤波器提供混合转矩信号。自适应扭矩滤波器对混合扭矩信号进行滤波，以保持所有车辆速度下的稳定性。连接到自适应扭矩滤波器的道路感应滤波器消除由基本上零增益的自适应扭矩滤波器和混合滤波器的相互作用引起的滞后引线。转向辅助装置响应于控制信号提供转向辅助。控制器响应于修改的自适应扭矩信号向控制辅助装置提供控制信号。道路感应过滤器从自适应扭矩信号中滤除滞后引线，以允许路面感觉以基本上零增益通过手轮传递。

3. 发明申请

WO2012087620A3 CARBON CONTAINING LOW-K DIELECTRIC CONSTANT RECOVERY USING UV TREATMENT 审中-公开
标题翻译：含有紫外线处理的低K介电常数回收碳
公开(公告)号：WO2012087620A3
公开(公告)日：2013-02-28
申请号：PCT/US2011064246
申请日：2011-12-09
申请人： NOVELLUS SYSTEMS INC , VARADARAJAN BHADRI N , MCLAUGHLIN KEVIN M , VAN SCHRAVENDIJK BART
发明人： VARADARAJAN BHADRI N , MCLAUGHLIN KEVIN M , VAN SCHRAVENDIJK BART
IPC分类号： H01L21/31 , H01L21/26 , H01L21/324
CPC分类号： H01L21/3105 , H01L21/67115 , H01L21/76813 , H01L21/76814 , H01L21/76825
摘要： A method for the ultraviolet (UV) treatment of carbon-containing low-k dielectric and associated apparatus enables process induced damage repair. The methods of the invention are particularly applicable in the context of damascene processing to recover lost low-k property of a dielectric damaged during processing, either pre-metallization, post-planarization, or both. UV treatments can include an exposure of the subject low-k dielectric to a constrained UV spectral profile and/or chemical silylating agent, or both.
摘要翻译：一种用于含碳低k电介质和相关装置的紫外（UV）处理方法使得能够进行过程诱导的损伤修复。本发明的方法特别适用于在镶嵌处理中恢复在加工期间损坏的电介质损失的低k特性，预金属化，后平面化或两者。 UV处理可以包括将受试者低k电介质暴露于约束的紫外光谱分布和/或化学甲硅烷基化试剂，或两者。

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