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    • 1. 发明授权
    • Inductor-capacitor resonant RF switch
    • 电感 - 电容谐振射频开关
    • US06472962B1
    • 2002-10-29
    • US09858583
    • 2001-05-17
    • Lihui GuoJoseph Xie
    • Lihui GuoJoseph Xie
    • H01P110
    • H01P1/127H01G5/16H01H59/0009Y10T29/49105
    • A new inductor-capacitor resonance RF (LCR-RF) switching device is achieved. The device comprises a microelectronic mechanical switch and a spiral inductor. The microelectronic mechanical switch comprises, first, a first dielectric layer overlying a substrate. A down electrode overlies the first dielectric layer. A second dielectric layer overlies the down electrode. An up electrode overlies the down electrode with the second dielectric layer therebetween. A bridge post overlies the first dielectric layer and does not contact the down electrode or the up electrode. Multiple bridge posts may be used. Finally, a membrane is suspended over said down electrode. One end of the membrane is fixed to the top of the bridge post. An electrostatic potential between the membrane and the down electrode will cause the membrane to flex down toward the down electrode. This flexing of the membrane will cause the capacitance of the switching device to vary. The spiral inductor comprises a metal line configured in a spiraling pattern with a first end connected to the bridge post and a second end forming an output node. A dual damascene method to form the LCR-RF switch is also achieved.
    • 实现了新的电感 - 电容谐振RF(LCR-RF)开关器件。 该装置包括微电子机械开关和螺旋电感器。 微电子机械开关首先包括覆盖衬底的第一电介质层。 下电极覆盖在第一电介质层上。 第二电介质层覆盖在下电极上。 上电极覆盖下电极,其间具有第二电介质层。 桥接柱覆盖在第一电介质层上,并且不接触向下电极或向上电极。 可以使用多个桥柱。 最后,将膜悬挂在所述下电极上。 膜的一端固定在桥柱的顶部。 膜和下降电极之间的静电势将导致膜向下弯曲向下电极。 膜的弯曲将导致开关装置的电容变化。 螺旋电感器包括以螺旋形图案配置的金属线,第一端连接到桥柱,第二端形成输出节点。 还实现了形成LCR-RF开关的双镶嵌方法。