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    • 3. 发明申请
    • SCANNING MICROMIRROR
    • 扫描微型计算机
    • WO2011037327A3
    • 2011-06-30
    • PCT/KR2010005749
    • 2010-08-26
    • LG ELECTRONICS INCCHOI DONG JUNELEE BYUNG GOOKIM TAE SIKLIM TAE SUN
    • CHOI DONG JUNELEE BYUNG GOOKIM TAE SIKLIM TAE SUN
    • G02B26/08G02B26/10
    • G02B26/0841G02B26/105
    • The present invention relates to a scanning micromirror which forms images or reads data by scanning beams outputted from a light source onto a one-dimensional area or two-dimensional area. The scanning micromirror comprises: a substrate having an open area; a mirror plate positioned in the open area; a first gimbal having a first bent portion which is positioned in an open area between the substrate and the mirror plate and is bent in the mirror plate direction along the X-axis of the open area; a second gimbal having a second bent portion which is positioned in the open area between the first gimbal and the mirror plate and is formed along the first bent portion of the first gimbal; a first elastic body for connecting the substrate with the first bent portion of the first gimbal; a second elastic body for connecting the first gimbal with the second gimbal along the Y-axis of the open area; and a third elastic body for connecting the second gimbal with the mirror plate along the Y-axis of the open area.
    • 本发明涉及通过将从光源输出的光束扫描到一维区域或二维区域来形成图像或读取数据的扫描微镜。 扫描微镜包括:具有开放区域的基板; 位于开放区域的镜板; 第一万向架具有第一弯曲部分,其位于基板和反射镜板之间的开放区域中,并沿着开放区域的X轴在镜板方向上弯曲; 具有第二弯曲部分的第二万向架,所述第二弯曲部分位于所述第一万向架和所述反射镜板之间的所述开放区域中并沿着所述第一万向架的所述第一弯曲部分形成; 第一弹性体,用于将基板与第一万向架的第一弯曲部分连接; 第二弹性体,用于沿着所述开放区域的Y轴连接所述第一万向架与所述第二万向架; 以及第三弹性体,用于沿着开放区域的Y轴将第二万向架与镜板连接。