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    • 1. 发明授权
    • Method of multi-processing object using polygon mirror
    • 使用多面镜的多处理对象的方法
    • US07713780B2
    • 2010-05-11
    • US11902602
    • 2007-09-24
    • Eun-Jeong HongHak-Yong LeeTae-Kyoung Ryoo
    • Eun-Jeong HongHak-Yong LeeTae-Kyoung Ryoo
    • H01L21/44
    • B23K26/082B23K26/0821B23K26/40B23K2103/172
    • A method of multi-processing an object using a polygon mirror according to an embodiment of the invention includes setting processing parameters for individual layers of an object having a multilayer structure, performing laser processing on exposed layers in a region to be processed of the object according to the processing parameters using a polygon mirror, determining whether or not all of the layers of the object having a multilayer structure are processed, and if it is determined in the determining that not all of the layers are processed, progressing the performing of laser processing. Therefore, efficiency in processing the object can be increased, and cracks that occur in the object during laser processing using a polygon mirror can be minimized.
    • 根据本发明的实施例的使用多面镜对物体进行多处理的方法包括设置具有多层结构的物体的各层的处理参数,对待处理的物体的区域中的暴露层进行激光处理, 涉及使用多面镜的处理参数,确定是否处理具有多层结构的对象的所有层,并且如果确定不是所有的层都被处理,则进行激光加工的执行 。 因此,能够提高加工对象物的效率,能够使使用多面镜的激光加工时的物体发生的裂缝最小化。