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1. 发明申请

US20080076234A1 Method of multi-processing object using polygon mirror 有权
标题翻译：使用多面镜的多处理对象的方法
公开(公告)号：US20080076234A1
公开(公告)日：2008-03-27
申请号：US11902602
申请日：2007-09-24
申请人： Eun Jeong Hong , Hak Yong Lee , Tae Kyoung Ryoo
发明人： Eun Jeong Hong , Hak Yong Lee , Tae Kyoung Ryoo
IPC分类号： H01L21/78 , B23K26/40
CPC分类号： B23K26/082 , B23K26/0821 , B23K26/40 , B23K2103/172
摘要： A method of multi-processing an object using a polygon mirror according to an embodiment of the invention includes setting processing parameters for individual layers of an object having a multilayer structure, performing laser processing on exposed layers in a region to be processed of the object according to the processing parameters using a polygon mirror, determining whether or not all of the layers of the object having a multilayer structure are processed, and if it is determined in the determining that not all of the layers are processed, progressing the performing of laser processing. Therefore, efficiency in processing the object can be increased, and cracks that occur in the object during laser processing using a polygon mirror can be minimized.
摘要翻译：根据本发明的实施例的使用多面镜对物体进行多处理的方法包括设置具有多层结构的物体的各层的处理参数，对待处理的物体的区域中的暴露层进行激光处理，涉及使用多面镜的处理参数，确定是否处理具有多层结构的对象的所有层，并且如果确定不是所有的层都被处理，则进行激光加工的执行。因此，能够提高加工对象物的效率，能够使使用多面镜的激光加工时的物体发生的裂缝最小化。

2. 发明申请

US20080088900A1 Laser Processing Apparatus 有权
标题翻译：激光加工设备
公开(公告)号：US20080088900A1
公开(公告)日：2008-04-17
申请号：US11578373
申请日：2004-06-02
申请人： Han Hie , Eun Jeong Hong , Hak Yong Lee , Won Chul Jung
发明人： Han Hie , Eun Jeong Hong , Hak Yong Lee , Won Chul Jung
IPC分类号： H01L21/78
CPC分类号： B23K26/083 , B23K26/066 , B23K26/0736 , B23K26/082 , H01L21/78
摘要： Disclosed is a laser processing apparatus for minimizing generation of sludge and enhancing the processing efficiency while processing an object. The laser processing apparatus includes a beam irradiator for emitting a laser beam from a laser light source, a beam scanner for operating the laser beam emitted from the beam scanner, to be irradiated on a predetermined interval of a processing position of the object repeatedly on the straight, and a condensing lens for regulating a focus of the laser beam emitted from the beam irradiator The object is movable at least once along a processing direction during processing the object. According to the present invention, it is able to improve the processing efficiency and to work an object with a uniform morphology by using a mask filtering a laser beam irradiated at a rotation turning point of a beam scanning mirror, capable of continuously irradiating a laser beam by deforming the laser beam into an elliptical pattern.
摘要翻译：公开了一种用于在处理物体的同时最小化污泥的产生和提高处理效率的激光加工装置。激光加工装置包括用于从激光源发射激光束的光束照射器，用于操作从光束扫描器发射的激光束的光束扫描器，以在物体的反复处理位置的预定间隔上照射直线和用于调节从光束照射器发射的激光束的焦点的聚光透镜该物体在处理物体期间沿着处理方向可移动至少一次。根据本发明，通过使用照射在光束扫描镜的旋转转折点处的激光束进行掩模过滤，能够提高处理效率并且对具有均匀形态的物体进行加工，能够连续照射激光束通过使激光束变形为椭圆形图案。

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