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    • 7. 发明授权
    • Lateral heterojunction bipolar transistor
    • 横向异质结双极晶体管
    • US06927428B2
    • 2005-08-09
    • US10818931
    • 2004-04-06
    • Jeffrey A. BabcockAngelo PintoGregory E. Howard
    • Jeffrey A. BabcockAngelo PintoGregory E. Howard
    • H01L21/84H01L27/12H01L29/423H01L29/73H01L29/737
    • H01L21/84H01L27/1203H01L29/42304H01L29/7317
    • A heterojunction bipolar transistor (30) in a silicon-on-insulator (SOI) structure is disclosed. The transistor collector (28), heterojunction base region (20), and intrinsic emitter region (25) are formed in the thin film silicon layer (6) overlying the buried insulator layer (4). A base electrode (10) is formed of polysilicon, and has a polysilicon filament (10f) that extends over the edge of an insulator layer (8) to contact the silicon layer (6). After formation of insulator filaments (12) along the edges of the base electrode (10) and insulator layer (8), the thin film silicon layer (6) is etched through, exposing an edge. An angled ion implantation then implants the heterojunction species, for example germanium and carbon, into the exposed edge of the thin film silicon layer (6), which after anneal forms the heterojunction base region (20). Polysilicon plugs for the emitter (24e) and collector (24c) are then formed, from which dopant diffuses to form the intrinsic emitter (25) and subcollector (22) of the device.
    • 公开了一种绝缘体上硅(SOI)结构中的异质结双极晶体管(30)。 在覆盖在掩埋绝缘体层(4)上的薄膜硅层(6)中形成晶体管集电极(28),异质结基极区(20)和本征发射极区(25)。 基极(10)由多晶硅形成,并且具有在绝缘体层(8)的边缘上延伸以接触硅层(6)的多晶硅细丝(10f)。 沿着基极(10)和绝缘体层(8)的边缘形成绝缘体细丝(12)之后,将薄膜硅层(6)蚀刻通过边缘露出。 然后,成角度的离子注入将异质结物质(例如锗和碳)注入到薄膜硅层(6)的暴露边缘中,其在退火后形成异质结基极区域(20)。 然后形成用于发射极(24e)和集电极(24c)的多晶硅插头,掺杂剂从该多晶硅插塞扩散以形成器件的本征发射极(25)和子集电极(22)。
    • 8. 发明授权
    • Method for constructing a metal oxide semiconductor field effect transistor
    • 金属氧化物半导体场效应晶体管的构成方法
    • US06905932B2
    • 2005-06-14
    • US10719198
    • 2003-11-21
    • Gregory E. HowardJeffrey BabcockAngelo Pinto
    • Gregory E. HowardJeffrey BabcockAngelo Pinto
    • H01L21/336H01L29/161H01L21/331H01L21/44H01L21/4763
    • H01L29/66583H01L29/161H01L29/66651
    • A semiconductor device (100) and a method for constructing a semiconductor device (100) are disclosed. A trench isolation structure (112) and an active region (110) are formed proximate an outer surface of a semiconductor layer (108). An epitaxial layer (111) is deposited outwardly from the trench isolation structure (112). A first insulator layer (116) and a second insulator layer (118) are grown proximate to the epitaxial layer (111). A gate stack (123) that includes portions of the first insulator layer (116 and the second insulator layer (118) is formed outwardly from the epitaxial layer (111). The gate stack (123) also includes a gate (122) with a narrow region (130) and a wide region (132) formed proximate the second insulator layer (118. The epitaxial layer (111) is heated to a temperature sufficient to allow for the epitaxial layer (111) to form a source/drain implant region (126) in the active region (110).
    • 公开了半导体器件(100)和构造半导体器件(100)的方法。 在半导体层(108)的外表面附近形成沟槽隔离结构(112)和有源区(110)。 外延层(111)从沟槽隔离结构(112)向外沉积。 在外延层(111)附近生长第一绝缘体层(116)和第二绝缘体层(118)。 包括第一绝缘体层(116和第二绝缘体层118的部分)的栅极叠层(123)从外延层(111)向外形成,栅极叠层(123)还包括具有栅极 窄区域(130)和形成在第二绝缘体层(118)附近的宽区域(132)。外延层(111)被加热到足以允许外延层(111)形成源极/漏极注入区域 (126)在有源区(110)中。
    • 10. 发明授权
    • Method for constructing a metal oxide semiconductor field effect transistor
    • 金属氧化物半导体场效应晶体管的构成方法
    • US06680504B2
    • 2004-01-20
    • US10020604
    • 2001-12-14
    • Gregory E. HowardJeffrey BabcockAngelo Pinto
    • Gregory E. HowardJeffrey BabcockAngelo Pinto
    • H01L27108
    • H01L29/66583H01L29/161H01L29/66651
    • A semiconductor device (100) and a method for constructing a semiconductor device (100) are disclosed. A trench isolation structure (112) and an active region (110) are formed proximate an outer surface of a semiconductor layer (108). An epitaxial layer (111) is deposited outwardly from the trench isolation structure (112). A first insulator layer (116) and a second insulator layer (118) are grown proximate to the epitaxial layer (111). A gate stack (123) that includes portions of the first insulator layer (116 and the second insulator layer (118) is formed outwardly from the epitaxial layer (111). The gate stack (123) also includes a gate (122) with a narrow region (130) and a wide region (132) formed proximate the second insulator layer (118. The epitaxial layer (111) is heated to a temperature sufficient to allow for the epitaxial layer (111) to form a source/drain implant region (126) in the active region (110).
    • 公开了半导体器件(100)和构造半导体器件(100)的方法。 在半导体层(108)的外表面附近形成沟槽隔离结构(112)和有源区(110)。 外延层(111)从沟槽隔离结构(112)向外沉积。 在外延层(111)附近生长第一绝缘体层(116)和第二绝缘体层(118)。 包括第一绝缘体层(116和第二绝缘体层118的部分)的栅极叠层(123)从外延层(111)向外形成,栅极叠层(123)还包括具有栅极 窄区域(130)和形成在第二绝缘体层(118)附近的宽区域(132)。外延层(111)被加热到足以允许外延层(111)形成源极/漏极注入区域 (126)在有源区(110)中。