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    • 4. 发明授权
    • Method of manufacturing semiconductor device utilizing outdiffusion and
epitaxial deposition
    • 利用外扩散和外延沉积制造半导体器件的方法
    • US4379726A
    • 1983-04-12
    • US147334
    • 1980-05-06
    • Kuniaki KumamaruShunichi HirakiToshio Yonezawa
    • Kuniaki KumamaruShunichi HirakiToshio Yonezawa
    • H01L21/8222H01L21/22H01L21/331H01L21/74H01L21/761H01L27/082H01L29/73H01L21/76
    • H01L21/74H01L21/2205H01L21/761
    • A method of manufacturing a semiconductor device, which comprises the steps of forming a first high impurity concentration region of a conductivity type opposite to the conductivity type of a semiconductor substrate in the substrate along the principal surface thereof, depositing a first epitaxial layer of the same conductivity type as the substrate on the entire principal surface thereof, forming a low impurity concentration region of the opposite conductivity type to the substrate in the first epitaxial layer along a surface portion thereof corresponding to the first high impurity concentration region, forming a second high impurity concentration region of the opposite conductivity type to the substrate in the first epitaxial layer along a different surface portion thereof, forming a second epitaxial layer of the opposite conductivity type to the substrate on the first epitaxial layer, thermally treating the resultant intermediate device to cause diffusion of the impurities in the first and second high impurity concentration region into the respective first and second epitaxial layers and also causing diffusion of the impurity in the low impurity concentration region into the entire portion of the first epitaxial layer corresponding to the first high impurity concentration region, and forming an element isolation region of the same conductivity type as the substrate in the second epitaxial layer such that the element isolation region reaches the first epitaxial layer.
    • 一种制造半导体器件的方法,包括以下步骤:沿着其主表面在衬底中形成与半导体衬底的导电类型相反的导电类型的第一高杂质浓度区域,沉积其第一外延层 导电类型作为其整个主表面上的基板,沿着与第一高杂质浓度区域相对应的表面部分,在第一外延层中形成相反导电类型的低杂质浓度区域,形成第二高杂质 在与所述第一外延层不同的表面部分与所述第一外延层中的所述衬底相反的导电类型的浓度区域上形成与所述第一外延层上的所述衬底相反的导电类型的第二外延层,热处理所得到的中间器件以引起扩散 的杂质在fi 第一和第二高杂质浓度区域进入相应的第一和第二外延层,并且还引起低杂质浓度区域中的杂质扩散到对应于第一高杂质浓度区域的第一外延层的整个部分中,并且形成元素 隔离区域与第二外延层中的衬底具有相同的导电类型,使得元件隔离区域到达第一外延层。