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1. 发明申请

US20060251815A1 Atomic layer deposition methods 审中-公开
标题翻译：原子层沉积法
公开(公告)号：US20060251815A1
公开(公告)日：2006-11-09
申请号：US11484978
申请日：2006-07-11
申请人： Kevin Hamer , Philip Campbell , Danny Dynka , Matthew Meyers
发明人： Kevin Hamer , Philip Campbell , Danny Dynka , Matthew Meyers
IPC分类号： C23C16/00
CPC分类号： C23C16/45544 , C23C16/52
摘要： The invention includes atomic layer deposition methods and apparatus. In one implementation, an atomic layer deposition apparatus includes a processing chamber, the chamber having an inlet and an outlet; a vacuum source in fluid communication with the outlet; a final valve moveable between an open position and a closed position and having an outlet in fluid communication with the inlet of the chamber and having an inlet; a dump line having an inlet in fluid communication with the inlet of the final valve, the dump line further having an outlet; a safety valve having an outlet in fluid communication with the inlet of the dump line and the inlet of the final valve, the safety valve having an inlet configured to be placed in fluid communication with a fluid source; and an automatic pressure controller in the dump line, between the inlet of the dump line and the outlet of the dump line, and configured to maintain pressure in the dump line at a predetermined pressure at least during a time when the final valve is in the closed position. Other methods and apparatus are provided.
摘要翻译：本发明包括原子层沉积方法和装置。在一个实施方案中，原子层沉积设备包括处理室，所述室具有入口和出口; 与出口流体连通的真空源; 最终阀可在打开位置和关闭位置之间移动并且具有与所述室的入口流体连通并具有入口的出口; 倾倒线，其具有与最终阀的入口流体连通的入口，所述倾倒线还具有出口; 安全阀，其具有与所述倾倒管线的入口和所述最终阀的入口流体连通的出口，所述安全阀具有被配置为与流体源流体连通的入口; 以及卸料管线中的自动压力控制器，在转储管线的入口和倾倒管线的出口之间，并且构造成至少在最终阀门处于关闭位置。提供其他方法和装置。

2. 发明申请

US20060027326A1 Semiconductor substrate processing chamber and substrate transfer chamber interfacial structure 审中-公开
标题翻译：半导体衬底处理室和衬底转移室界面结构
公开(公告)号：US20060027326A1
公开(公告)日：2006-02-09
申请号：US11208964
申请日：2005-08-22
申请人： Craig Carpenter , Ross Dando , Allen Mardian , Kevin Hamer , Raynald Cantin , Philip Campbell , Kimberly Tschepen , Randy Mercil
发明人： Craig Carpenter , Ross Dando , Allen Mardian , Kevin Hamer , Raynald Cantin , Philip Campbell , Kimberly Tschepen , Randy Mercil
IPC分类号： C23F1/00
CPC分类号： H01L21/67126 , C23C16/4409 , C23C16/54 , Y10S414/139
摘要： A semiconductor substrate processor includes a substrate transfer chamber and a plurality of substrate processing chambers connected therewith. An interfacial structure is received between at least one of the processing chambers and the transfer chamber. The interfacial structure includes a substantially non-metallic, thermally insulative mass of material interposed between the one processing chamber and the transfer chamber. The mass is of sufficient volume to effectively reduce heat transfer from the processing chamber to the transfer chamber than would otherwise occur in the absence of said mass of material. An interfacial structure includes a body having a substrate passageway extending therethrough. The passageway includes walls at least a portion of which are substantially metallic. The body includes material peripheral of the walls which is substantially non-metallic and thermally insulative. The substantially non-metallic material has mounting openings extending at least partially therein.
摘要翻译：半导体衬底处理器包括衬底传送室和与之连接的多个衬底处理室。在至少一个处理室和传送室之间接收界面结构。界面结构包括插入在一个处理室和传送室之间的基本上非金属的绝热材料块。质量足够的体积以有效地减少从处理室到传送室的传热比否则不存在所述材料块的情况。界面结构包括具有延伸穿过其中的基底通道的主体。该通道包括其至少一部分基本上是金属的壁。主体包括基本上非金属和热绝缘的壁的材料周边。基本上非金属材料具有其中至少部分延伸的安装开口。

3. 发明申请

US20070047080A1 METHODS OF PRODUCING MULTILAYER REFLECTIVE POLARIZER 审中-公开
标题翻译：生产多层反射极化器的方法
公开(公告)号：US20070047080A1
公开(公告)日：2007-03-01
申请号：US11467181
申请日：2006-08-25
申请人： Carl Stover , Eileen Haus , George Jones , Kristopher Derks , Timothy Hebrink , Kevin Hamer , William Merrill , Terence Neavin , Jeffrey Peterson , Mark Pellerite , James Lockridge , Richard Thompson , Barry Rosell , Bert Chien , Gregg Pritchard , Tammy Borges
发明人： Carl Stover , Eileen Haus , George Jones , Kristopher Derks , Timothy Hebrink , Kevin Hamer , William Merrill , Terence Neavin , Jeffrey Peterson , Mark Pellerite , James Lockridge , Richard Thompson , Barry Rosell , Bert Chien , Gregg Pritchard , Tammy Borges
IPC分类号： G02B5/30 , G02B27/28
CPC分类号： G02B5/305
摘要： Methods of forming multilayer reflective polarizers are described. One method includes providing a multilayer polymer film having a plurality of alternating polymeric optical layer pairs, heating the multilayer polymer film to a temperature of about or greater than both polymers layer glass transition temperatures to from a heated multilayer film, and stretching the heated multilayer polymer film in an in-plane direction to form a multilayer reflective polarizer. Each first polymer layer includes a first polyester material and each second polymer layer includes a second polyester material that has a different polymer composition than the first polymer layer composition. The stretching includes a uniaxial stretch.
摘要翻译：描述形成多层反射偏振器的方法。一种方法包括提供具有多个交替的聚合物光学层对的多层聚合物膜，将多层聚合物膜加热到约或大于聚合物层玻璃化转变温度至加热的多层膜的温度，以及拉伸加热的多层聚合物膜在面内方向上以形成多层反射偏振器。每个第一聚合物层包括第一聚酯材料，并且每个第二聚合物层包括具有与第一聚合物层组合物不同的聚合物组成的第二聚酯材料。拉伸包括单轴拉伸。

4. 发明申请

US20060285041A1 POLYMERIC OPTICAL FILM 审中-公开
标题翻译：聚合物光膜
公开(公告)号：US20060285041A1
公开(公告)日：2006-12-21
申请号：US11463428
申请日：2006-08-09
申请人： Matthew Johnson , Richard Allen , Fred Roska , Steven Rhyner , William Merrill , Joan Strobel , Kevin Hamer
发明人： Matthew Johnson , Richard Allen , Fred Roska , Steven Rhyner , William Merrill , Joan Strobel , Kevin Hamer
IPC分类号： G02F1/1335
CPC分类号： G02F1/133634 , B29C55/165 , G02B5/3083
摘要： An optical film includes a layer of simultaneous biaxially stretched polyolefin film that is substantially non-absorbing and non-scattering for at least one polarization state of visible light. The layer has x, y, and z orthogonal indices of refraction where at least two of the orthogonal indices of refraction are not equal. The layer has an in-plane retardance of 100 nm or less and an absolute value of an out-of-plane retardance being 55 nm or greater.
摘要翻译：光学膜包括同时双轴拉伸聚烯烃膜的层，其对于可见光的至少一种极化状态基本上不吸收和非散射。该层具有x，y和z正交的折射率，其中至少两个正交折射率不相等。该层的面内延迟为100nm以下，平面外延迟的绝对值为55nm以上。

5. 发明申请

US20060093809A1 Optical bodies and methods for making optical bodies 审中-公开
标题翻译：光学体及其制造方法
公开(公告)号：US20060093809A1
公开(公告)日：2006-05-04
申请号：US10977211
申请日：2004-10-29
申请人： Timothy Hebrink , Joan Strobel , Barry Rosell , John Purcell , Kevin Hamer , Kristopher Derks , Robert Taylor , William Black , Gregory Bluem
发明人： Timothy Hebrink , Joan Strobel , Barry Rosell , John Purcell , Kevin Hamer , Kristopher Derks , Robert Taylor , William Black , Gregory Bluem
IPC分类号： B32B5/16
CPC分类号： B32B7/06 , B29C55/023 , B32B3/30 , B32B5/14 , B32B27/14 , B32B27/325 , B32B27/36 , B32B27/365 , B32B2260/025 , B32B2260/046 , B32B2307/71 , B32B2307/7246 , B32B2307/7265 , B32B2457/202 , C09D5/20 , G02B5/00 , Y10T428/25
摘要： Optical bodies are disclosed that include an optical film and at least one rough strippable skin layer operatively connected to a surface of the optical film. The at least one rough strippable skin layer can include a continuous phase and a disperse phase. Alternatively, the at least one rough strippable skin layer can include a first polymer, a second polymer different from the first polymer and an additional material that is substantially immiscible in at least one of the first and second polymers. In some exemplary embodiments, a surface of the at least one rough strippable skin layer adjacent to the optical film comprises a plurality of protrusions and the adjacent surface of the optical film comprises a plurality of asymmetric depressions substantially corresponding to said plurality of protrusions. In addition, optical bodies are disclosed that include an optical film having a surface with asymmetric depressions, the asymmetric depressions having a major dimension substantially collinear with a major axis of the optical film and a minor direction substantially collinear with a minor axis of the optical film. Methods of making such exemplary optical bodies are also disclosed.
摘要翻译：公开了包括光学膜和可操作地连接到光学膜的表面的至少一个粗糙可剥离表皮层的光学体。至少一个粗糙的可剥离表皮层可以包括连续相和分散相。或者，至少一个粗糙的可剥离表皮层可以包括第一聚合物，不同于第一聚合物的第二聚合物和在第一和第二聚合物中的至少一种中基本上不混溶的附加材料。在一些示例性实施例中，与光学膜相邻的至少一个粗糙可剥离表皮层的表面包括多个突起，并且光学膜的相邻表面包括基本对应于所述多个突起的多个不对称凹部。此外，公开了包括具有具有不对称凹陷的表面的光学膜的光学体，所述非对称凹陷具有与光学膜的长轴基本共线的主要尺寸和与光学膜的短轴基本共线的次要方向。还公开了制造这种示例性光学体的方法。

6. 发明申请

US20050098105A1 Chemical vapor deposition apparatus and methods 有权
标题翻译：化学气相沉积装置及方法
公开(公告)号：US20050098105A1
公开(公告)日：2005-05-12
申请号：US10704315
申请日：2003-11-06
申请人： Jeff Fuss , Kevin Hamer , Zhiping Yin
发明人： Jeff Fuss , Kevin Hamer , Zhiping Yin
IPC分类号： C23C16/44 , C23C16/00 , H05H1/24
CPC分类号： H01J37/3244 , C23C16/4404 , C23C16/4405
摘要： This invention includes chemical vapor deposition apparatus, methods of chemical vapor depositing an amorphous carbon comprising layer on a substrate, and methods of chemical vapor depositing at least one of Si3N4 and SixOyNz on a substrate. In certain implementations, a gas output manifold having at least one gas output to a deposition chamber and at least three gas inputs is utilized. In certain implementations, a remote plasma generator is utilized. In certain implementations, at least one cleaning gas input line feeds the remote plasma generator. In certain implementations, the at least one cleaning gas input line includes an amorphous carbon cleaning gas input and an Si3N4 or SixOyNz cleaning gas input.
摘要翻译：本发明包括化学气相沉积装置，在衬底上化学气相沉积无定形碳的层的方法，以及化学气相沉积Si 3 N 4 N 3中的至少一种的方法，和基底上的Si x O x N z N z z。在某些实施方案中，利用具有至少一个气体输出到沉积室和至少三个气体输入的气体输出歧管。在某些实施方案中，利用远程等离子体发生器。在某些实施方案中，至少一个清洁气体输入管线馈送远程等离子体发生器。在某些实施方案中，所述至少一个清洁气体输入管线包括无定形碳清洁气体输入端和Si 3 N 4 N 4或Si x O 清洁气体输入。

7. 发明申请

US20050011449A1 Gas delivery system for deposition processes, and methods of using same 审中-公开
标题翻译：用于沉积工艺的气体输送系统及其使用方法
公开(公告)号：US20050011449A1
公开(公告)日：2005-01-20
申请号：US10916918
申请日：2004-08-12
申请人： Weimin Li , Neal Rueger , Li Li , Ross Dando , Kevin Hamer , Allen Mardian , Gurtej Sandhu
发明人： Weimin Li , Neal Rueger , Li Li , Ross Dando , Kevin Hamer , Allen Mardian , Gurtej Sandhu
IPC分类号： C23C16/44 , C23C16/455 , C23C16/507 , C23C16/00
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/507
摘要： The present invention is generally directed to a novel gas delivery system for various deposition processes, and various methods of using same. In one illustrative embodiment, a deposition tool comprises a process chamber, a wafer stage adapted for holding a wafer positioned therein, and a gas delivery system positioned in the chamber above a position where a plasma will be generated in the chamber, wherein substantially all of a reactant gas is delivered into the chamber via the gas delivery system. In another illustrative embodiment, the reactant gas exiting the gas delivery system is directed so as to cover substantially all of an area defined by an upper surface of the wafer. In one illustrative embodiment, the method comprises positioning a wafer in a process chamber of a deposition tool, generating a plasma within the process chamber above the wafer, and forming a layer of material above the wafer by introducing substantially all of a reactant gas used to form the layer of material into the process chamber above the plasma via a gas delivery system positioned above the plasma. In another illustrative embodiment, the reactant gas exiting the gas delivery system is directed to cover substantially all of an area defined by an upper surface of the wafer.
摘要翻译：本发明一般涉及用于各种沉积工艺的新型气体输送系统及其使用方法。在一个说明性实施例中，沉积工具包括处理室，适于保持位于其中的晶片的晶片台，以及定位在室中的气体输送系统，其位于室内将产生等离子体的位置，其中基本上全部反应气体通过气体输送系统输送到室中。在另一说明性实施例中，离开气体输送系统的反应物气体被引导以覆盖由晶片的上表面限定的基本上所有的区域。在一个示例性实施例中，该方法包括将晶片定位在沉积工具的处理室中，在晶片上方的处理室内产生等离子体，并且通过将基本上所有的反应气体基本上引入到通过位于等离子体上方的气体输送系统将材料层形成在等离子体上方的处理室中。在另一示例性实施例中，离开气体输送系统的反应物气体被引导以覆盖由晶片的上表面限定的基本上所有的区域。

8. 发明申请

US20060272778A1 PROCESS FOR MANUFACTURING POLYMERIC OPTICAL FILM 审中-公开
标题翻译：制造聚合物薄膜的方法
公开(公告)号：US20060272778A1
公开(公告)日：2006-12-07
申请号：US11464516
申请日：2006-08-15
申请人： Richard Allen , Matthew Johnson , Fred Roska , Steven Rhyner , William Merrill , Joan Strobel , Kevin Hamer , John Klaeser , Sebastian Zehentmaier
发明人： Richard Allen , Matthew Johnson , Fred Roska , Steven Rhyner , William Merrill , Joan Strobel , Kevin Hamer , John Klaeser , Sebastian Zehentmaier
IPC分类号： B32B37/00
CPC分类号： B29C55/165
摘要： A process for making an optical film includes stretching a polyolefin film in a first direction and stretching the polyolefin film in a second direction different than the first direction forming a biaxially stretched polyolefin film. At least a portion of the stretching of the polyolefin film in the second direction occurs simultaneous with the stretching of the polyolefin film in the first direction. The biaxially stretched polyolefin film has a length and a width and substantially non-absorbing and non-scattering for at least one polarization state of visible light. The biaxially stretched polyolefin film has x, y, and z orthogonal indices of refraction where at least two of the orthogonal indices of refraction are not equal, an in-plane retardance being 100 nm or less and an out-of-plane retardance being 50 nm or greater.
摘要翻译：制造光学膜的方法包括在第一方向拉伸聚烯烃膜并沿与第一方向不同的第二方向拉伸聚烯烃膜形成双轴向拉伸的聚烯烃膜。聚烯烃膜在第二方向的拉伸的至少一部分与聚烯烃膜沿第一方向的拉伸同时发生。双轴拉伸聚烯烃膜具有长度和宽度，并且对于至少一种可见光的偏振状态具有基本上不吸收和非散射性。双轴拉伸聚烯烃膜具有x，y和z正交折射率，其中至少两个正交折射率不相等，面内延迟为100nm以下，面外延迟为50 nm以上。

9. 发明申请

US20060240188A1 Chemical vapor deposition apparatus 审中-公开
标题翻译：化学气相沉积装置
公开(公告)号：US20060240188A1
公开(公告)日：2006-10-26
申请号：US11472180
申请日：2006-06-20
申请人： Jeff Fuss , Kevin Hamer , Zhiping Yin
发明人： Jeff Fuss , Kevin Hamer , Zhiping Yin
IPC分类号： C23C16/00
CPC分类号： H01J37/3244 , C23C16/4404 , C23C16/4405
摘要： This invention includes chemical vapor deposition apparatus, methods of chemical vapor depositing an amorphous carbon comprising layer on a substrate, and methods of chemical vapor depositing at least one of Si3N4 and SixOyNz on a substrate. In certain implementations, a gas output manifold having at least one gas output to a deposition chamber and at least three gas inputs is utilized. In certain implementations, a remote plasma generator is utilized. In certain implementations, at least one cleaning gas input line feeds the remote plasma generator. In certain implementations, the at least one cleaning gas input line includes an amorphous carbon cleaning gas input and an Si3N4 or SixOyNz cleaning gas input.
摘要翻译：本发明包括化学气相沉积装置，在衬底上化学气相沉积无定形碳的层的方法，以及化学气相沉积Si 3 N 4 N 3中的至少一种的方法，和基底上的Si x O x N z N z z。在某些实施方案中，利用具有至少一个气体输出到沉积室和至少三个气体输入的气体输出歧管。在某些实施方案中，利用远程等离子体发生器。在某些实施方案中，至少一个清洁气体输入管线馈送远程等离子体发生器。在某些实施方案中，所述至少一个清洁气体输入管线包括无定形碳清洁气体输入口和Si 3 N 4 N 4 Si 3 O 4 清洁气体输入。

10. 发明申请

US20060228592A1 Optical bodies including rough strippable boundary layers 有权
标题翻译：光学体包括粗糙的可剥离边界层
公开(公告)号：US20060228592A1
公开(公告)日：2006-10-12
申请号：US11100191
申请日：2005-04-06
申请人： Carl Stover , Timothy Hebrink , Martin Denker , Jeffery Jackson , Kristopher Derks , Michael Weber , Anna Kobilansky , Joan Strobel , Barry Rosell , John Purcell , Kevin Hamer , Robert Taylor , William Black , Richard Thompson , Gregory Bluem
发明人： Carl Stover , Timothy Hebrink , Martin Denker , Jeffery Jackson , Kristopher Derks , Michael Weber , Anna Kobilansky , Joan Strobel , Barry Rosell , John Purcell , Kevin Hamer , Robert Taylor , William Black , Richard Thompson , Gregory Bluem
IPC分类号： B29D11/00
CPC分类号： G02B1/04 , B32B27/32 , Y10T428/24372 , Y10T428/25 , Y10T428/31507 , Y10T428/31739 , Y10T428/31786 , Y10T428/31935 , Y10T428/31938
摘要： Optical bodies are disclosed that include a first optical film, a second optical film and at least one rough strippable boundary layer disposed between the first and second optical films. Also disclosed are optical bodies including a strippable boundary layer disposed between the first and second optical films and including a first polymer and a second polymer that is substantially immiscible in the first polymer. The present disclosure also provides methods of processing optical bodies that include stretching the optical bodies.
摘要翻译：公开了包括第一光学膜，第二光学膜和设置在第一和第二光学膜之间的至少一个粗糙可剥离边界层的光学体。还公开了包括设置在第一和第二光学膜之间的可剥离边界层的光学体，并且包括在第一聚合物中基本上不混溶的第一聚合物和第二聚合物。本公开还提供了处理包括拉伸光学体的光学体的方法。

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