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1. 发明授权

US06781218B1 Method and apparatus for accessing internal nodes of an integrated circuit using IC package substrate 有权
标题翻译：使用IC封装基板访问集成电路的内部节点的方法和装置
公开(公告)号：US06781218B1
公开(公告)日：2004-08-24
申请号：US10382343
申请日：2003-03-04
申请人： Kenneth Wilsher
发明人： Kenneth Wilsher
IPC分类号： H01L3900
CPC分类号： H01L22/32 , H01L2224/16225 , H01L2924/00014 , H01L2924/15174 , H01L2924/15311 , H01L2924/3011 , H01L2224/0401
摘要： A method and apparatus for accessing internal nodes of an integrated circuit using a package substrate are provided. Embodiments of the present invention include an integrated circuit comprising an integrated circuit die comprising a principal side; a conductive element formed on the principal side of the integrated circuit die; a package substrate comprising a principal side facing the principal side of the integrated circuit die; a conductive element located on the principal side of the package substrate; a transmission path wherein a first end of the transmission path is coupled to the conductive element of the integrated circuit die and wherein a second end of the transmission path is coupled to the conductive element of the package substrate.
摘要翻译：提供一种用于访问使用封装衬底的集成电路的内部节点的方法和装置。本发明的实施例包括集成电路，其包括：包括主侧的集成电路管芯; 形成在集成电路管芯的主面上的导电元件; 封装基板，其包括面向所述集成电路管芯的主面的主面; 位于所述封装基板的所述主面上的导电元件; 传输路径，其中传输路径的第一端耦合到集成电路管芯的导电元件，并且其中传输路径的第二端耦合到封装衬底的导电元件。

2. 发明授权

US07616312B2 Apparatus and method for probing integrated circuits using laser illumination 有权
标题翻译：使用激光照明探测集成电路的装置和方法
公开(公告)号：US07616312B2
公开(公告)日：2009-11-10
申请号：US11169423
申请日：2005-06-29
申请人： Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
发明人： Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
IPC分类号： G01B11/00
CPC分类号： G01R31/308 , G01R31/311
摘要： An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
摘要翻译：公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。光束光学器件定义了共路径偏振微分探测（PDP）光学器件。公共路径PDP光学将激光束分成两束正交极化。由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。可以研究这种差异来研究DUT对刺激信号的响应。

3. 发明授权

US07450245B2 Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system 有权
标题翻译：用于在光学探测系统中使用调制测量高带宽电信号的方法和装置
公开(公告)号：US07450245B2
公开(公告)日：2008-11-11
申请号：US11436267
申请日：2006-05-17
申请人： Gary Woods , Steven Kasapi , Kenneth Wilsher
发明人： Gary Woods , Steven Kasapi , Kenneth Wilsher
IPC分类号： G01B9/02
CPC分类号： G01R31/308
摘要： A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.
摘要翻译：提供了一种用于探测DUT的系统，该系统包括可调谐或CW激光源，用于调制激光源的输出的调制器，被设计为将探测光束指向DUT上的指定位置的光束光学器件，用于检测反射光束，采集和信号处理电子元件。系统通过检测DUT的工作频率和调制频率之间的拍频来破译反射光束的扰动。在替代实施例中，激光是CW并且调制被应用于光学检测器。

4. 发明申请

US20050160331A1 PICA system timing measurement and calibration 有权
标题翻译： PICA系统时序测量和校准
公开(公告)号：US20050160331A1
公开(公告)日：2005-07-21
申请号：US10974464
申请日：2004-10-26
申请人： Kenneth Wilsher
发明人： Kenneth Wilsher
IPC分类号： G01R31/311 , G01R35/00 , G05F1/10 , G05F3/02 , G06K5/04 , G11B5/00 , G11B20/20
CPC分类号： G01R35/005 , G01R31/311
摘要： PICA probe system methods and apparatus are described, including methods and apparatus for calibrating an event timer having a coarse measurement capability in which time intervals defined by clock boundaries are counted and a fine measurement capability in which time between boundaries is interpolated using a voltage ramp.
摘要翻译：描述了PICA探针系统方法和装置，包括用于校准具有粗略测量能力的事件定时器的方法和装置，其中对由时钟边界定义的时间间隔进行计数，并且使用电压斜坡插入边界之间的时间的精细测量能力。

5. 发明申请

US20050128471A1 Optical coupling for testing integrated circuits 有权
标题翻译：用于测试集成电路的光耦合器
公开(公告)号：US20050128471A1
公开(公告)日：2005-06-16
申请号：US11042288
申请日：2005-01-24
申请人： Kenneth Wilsher , Steven Kasapi
发明人： Kenneth Wilsher , Steven Kasapi
IPC分类号： G01R1/06 , G01R31/302 , G01R31/311 , G01R31/319 , H01L21/66 , G01N21/00
CPC分类号： G01R31/311 , G01R31/31905
摘要： A method and system of testing integrated circuits (IC) via optical coupling. The optical system includes an optical fiber, fixture and focussing element. In addition, channels are provided in the fixture mounted on the integrated circuit to accommodate the optical system. The fixture acts as a heat sink. As such, one or more photosensitive elements/targets on the integrated circuit are probed using light that is brought to a focus on each target site. The light causes latching of data into the integrated circuit (which is operating under influence of a test program) and formation of a test pattern output from the integrated circuit that is used to confirm proper functioning of the IC.
摘要翻译：一种通过光耦合测试集成电路（IC）的方法和系统。光学系统包括光纤，夹具和聚焦元件。此外，在安装在集成电路上的灯具中提供通道以容纳光学系统。夹具用作散热器。因此，使用聚焦在每个目标位置的光来探测集成电路上的一个或多个感光元件/靶。光引起数据锁存到集成电路中（其在测试程序的影响下运行），并形成用于确认IC正常工作的集成电路输出的测试图案。

6. 发明申请

US20050109956A1 Precise, in-situ endpoint detection for charged particle beam processing 审中-公开
标题翻译：用于带电粒子束处理的精确的原位端点检测
公开(公告)号：US20050109956A1
公开(公告)日：2005-05-26
申请号：US10984096
申请日：2004-11-09
申请人： Theodore Lundquist , Kenneth Wilsher
发明人： Theodore Lundquist , Kenneth Wilsher
IPC分类号： H01J37/304 , H01J37/305 , H01J27/00
CPC分类号： H01J37/304 , H01J37/3056
摘要： A system and method for determining precisely in-situ the endpoint of halogen-assisted charged particle beam milling of a hole or trench in the backside of the substrate of a flipchip packaged IC. The backside of the IC is mechanically thinned. Optionally, a coarse trench is then milled in the thinned backside of the IC using either laser chemical etching or halogen-assisted charged particle beam milling. A further small trench is milled using a halogen-assisted charged-particle beam (electron or ion beam). The endpoint for milling this small trench is determined precisely by monitoring the power supply leakage current of the IC induced by electron-hole pairs created by the milling process. A precise in-situ endpoint detection signal is generated by modulating the beam at a reference frequency and then amplifying that frequency component in the power supply leakage current with an amplifier, narrow-band amplifier or lock-in amplifier. The precise, in-situ, endpoint signal is processed and displayed for manual or automatic precise in-situ endpoint detection. This approach avoids or minimizes unintentional damage or perturbation of the active diffusion regions in the IC. A range of further operations on the IC can then be performed.
摘要翻译：用于准确地确定倒装芯片封装IC的衬底的背面中的空穴或沟槽的卤素辅助带电粒子束铣削的终点的系统和方法。 IC的背面机械变薄。可选地，使用激光化学蚀刻或卤素辅助带电粒子束研磨，在IC的薄化背面中研磨粗沟槽。使用卤素辅助带电粒子束（电子或离子束）研磨另外的小沟槽。通过监测由铣削过程产生的电子 - 空穴对引起的IC的电源漏电流，精确地确定了用于铣削该小沟槽的端点。通过以参考频率调制光束然后用放大器，窄带放大器或锁定放大器放大该电源漏电流中的该频率分量来产生精确的原位端点检测信号。精确的原位端点信号被处理和显示用于手动或自动精确的原位端点检测。该方法避免或最小化IC中的有源扩散区域的无意的损坏或扰动。然后可以执行IC上的一系列进一步的操作。

7. 发明申请

US20050051726A1 Superconducting single photon detector 有权
标题翻译：超导单光子检测器
公开(公告)号：US20050051726A1
公开(公告)日：2005-03-10
申请号：US10969315
申请日：2004-10-19
申请人： Roman Sobolewski , Grigory Gol'tsman , Alexey Semenov , Oleg Okunev , Kenneth Wilsher , Steven Kasapi
发明人： Roman Sobolewski , Grigory Gol'tsman , Alexey Semenov , Oleg Okunev , Kenneth Wilsher , Steven Kasapi
IPC分类号： G01J1/02 , G01J1/00 , G01J1/42 , H01L31/101 , H01L31/18 , H01L39/00 , H01L39/10 , H01L39/16 , H01L39/18 , H01L39/22
CPC分类号： H01L39/10 , G01J1/0209 , G01J1/0252 , G01J1/0411 , G01J1/42 , H01L31/101
摘要： A single-photon detector includes a superconductor strip biased near its critical current. The superconductor strip provides a discernible output signal upon absorption of a single incident photon. In one example, the superconductor is a strip of NbN (niobium nitride). In another example, the superconductor strip meanders to increase its probability of receiving a photon from a light source. The single-photon detector is suitable for a variety of applications including free-space and satellite communications, quantum communications, quantum cryptography, weak luminescence, and semiconductor device testing.
摘要翻译：单光子检测器包括在其临界电流附近偏置的超导体带。超导体条在吸收单个入射光子时提供可辨别的输出信号。在一个实例中，超导体是NbN（氮化铌）的条带。在另一个示例中，超导体条弯曲以增加其从光源接收光子的概率。单光子检测器适用于自由空间和卫星通信，量子通信，量子加密，弱发光和半导体器件测试等各种应用。

8. 发明申请

US20050006602A1 Spatial and temporal selective laser assisted fault localization 有权
公开(公告)号：US20050006602A1
公开(公告)日：2005-01-13
申请号：US10888840
申请日：2004-07-09
申请人： Philippe Perdu , Romain Desplats , Felix Beaudoin , Praveen Vedagarbha , Martin Leibowitz , Kenneth Wilsher
发明人： Philippe Perdu , Romain Desplats , Felix Beaudoin , Praveen Vedagarbha , Martin Leibowitz , Kenneth Wilsher
IPC分类号： G01R31/26 , G01R31/302 , G01R31/311 , G03C5/00 , G06F17/50 , G21K5/10 , H01J37/08 , H01S20060101
CPC分类号： G01R31/31816 , G01R31/311
摘要： A method and apparatus for laser-assisted fault mapping which synchronizes the laser control with the tester unit. The inventive method provides for laser-assisted pseudo-static fault mapping to localize defects in a device whose inputs are being stimulated dynamically by a tester. It further provides for laser-assisted dynamic soft error mapping, to localize in terms of location and to correlate with respect to a specific test vector, sensitive areas in a device by utilizing device performance criteria such as pass-fail status outputs. The apparatus includes a fully controllable dynamic laser stimulation apparatus connected to a control unit that provides complete synchronization with a tester unit.

9. 发明申请

US20070046947A1 Laser probing system for integrated circuits 有权
标题翻译：集成电路激光探测系统
公开(公告)号：US20070046947A1
公开(公告)日：2007-03-01
申请号：US11261996
申请日：2005-10-27
申请人： William Lo , Kenneth Wilsher , Nagamani Nataraj , Nina Boiadjieva
发明人： William Lo , Kenneth Wilsher , Nagamani Nataraj , Nina Boiadjieva
IPC分类号： G01B9/02
CPC分类号： G01R31/307
摘要： A system for probing a DUT is disclosed, the system having a pulsed laser source, a CW laser source, beam optics designed to point a reference beam and a probing beam at the same location on the DUT, optical detectors for detecting the reflected reference and probing beams, and a collection electronics. The beam optics is a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the incident laser beam into two beams of orthogonal polarization - one beam simulating a reference beam while the other simulating a probing beam. Both reference and probing beams are pointed to the same location on the DUT. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the reference and probing beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
摘要翻译：公开了一种用于探测DUT的系统，该系统具有脉冲激光源，CW激光源，设计用于将DUT上的相同位置处的参考光束和探测光束指向的光束光学元件，用于检测反射参考的光学检测器和探测梁和收集电子设备。光束光学器件是公共路径偏振微分探测（PDP）光学器件。公共路径PDP光学器件将入射激光束分成两束正交偏振光束 - 一个模拟参考光束的光束，另一个模拟探测光束。参考和探测光束都指向DUT上相同的位置。由于CMOS晶体管的固有不对称性，参考光束和探测光束与DUT的相互作用导致每个光束中的不同相位调制。可以研究这种差异来研究DUT对刺激信号的响应。

10. 发明申请

US20070002329A1 Laser probing system for integrated circuits 有权
标题翻译：集成电路激光探测系统
公开(公告)号：US20070002329A1
公开(公告)日：2007-01-04
申请号：US11169423
申请日：2005-06-29
申请人： Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
发明人： Steven Kasapi , Kenneth Wilsher , Gary Woods , William Lo , Radu Ispasoiu , Nagamani Nataraj , Nina Boiadjieva
IPC分类号： G01B9/02
CPC分类号： G01R31/308 , G01R31/311
摘要： An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
摘要翻译：公开了一种以非常高的时间分辨率激光探测DUT的装置和方法。该系统包括CW激光源，设计用于在DUT上的相同位置处指向两个正交偏振光束的光束光学元件，用于检测反射光束的光学检测器，收集电子器件和示波器。光束光学器件定义了共路径偏振微分探测（PDP）光学器件。公共路径PDP光学将激光束分成两束正交极化。由于CMOS晶体管的固有不对称性，光束与DUT的相互作用在每个光束中产生不同的相位调制。可以研究这种差异来研究DUT对刺激信号的响应。

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