专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08354652B2 Ion source including separate support systems for accelerator grids 有权
标题翻译：离子源包括加速器网格的单独支撑系统
公开(公告)号：US08354652B2
公开(公告)日：2013-01-15
申请号：US12309460
申请日：2007-07-12
申请人： Gary Proudfoot , Gordon Robert Green , Robert Kenneth Trowell
发明人： Gary Proudfoot , Gordon Robert Green , Robert Kenneth Trowell
IPC分类号： G21K1/08 , H01J3/14 , H01J49/42 , F03H1/00
CPC分类号： H01J27/18 , H01J27/024 , H01J37/04 , H01J37/08 , H01J2237/04735 , H01J2237/083
摘要： This invention relates to an Ion gun (10) which comprises of plasma generator (11) driven from an RF source (12), a plasma or source chamber (13), having an outlet (14), across which is mounted an accelerator grid (15). The accelerator grid (15) comprises four individual grids. The first grid (16), which is closest to the outlet (14), is maintained at a positive voltage by a DC source (16a), the second grid (17) is maintained strongly negative by DC source (17a). The third grid (18) is maintained at a negative voltage, which is much lower than that of the second grid (17), by DC source (18a) and the fourth grid is grounded. Means of mounting these grids are also described.
摘要翻译：本发明涉及一种离子枪（10），其包括从RF源（12）驱动的等离子体发生器（11），具有出口（14）的等离子体或源室（13），其上安装有加速器格栅（15）。加速器网格（15）包括四个单独的网格。最靠近出口（14）的第一栅极（16）通过直流源（16a）保持在正电压，第二栅极（17）被直流源（17a）强烈地保持为负。第三栅极（18）通过直流源（18a）保持在比第二栅极（17）的负电压低得多的负电压，第四栅极接地。还描述了安装这些网格的方法。

2. 发明申请

US20100084569A1 ION DEPOSITION APPARATUS 有权
标题翻译：离子沉积装置
公开(公告)号：US20100084569A1
公开(公告)日：2010-04-08
申请号：US12309464
申请日：2007-07-06
申请人： Gary Proudfoot , Christopher David George , Paulo Edurado Lima , Gordon Robert Green , Robert Kenneth Trowell
发明人： Gary Proudfoot , Christopher David George , Paulo Edurado Lima , Gordon Robert Green , Robert Kenneth Trowell
IPC分类号： H01J37/30 , H01J27/02 , H01J37/20 , H01J37/08
CPC分类号： C23C14/46 , H01J27/18 , H01J37/20 , H01J37/3178 , H01J2237/024 , H01J2237/3146
摘要： This invention relates to a broad beam ion deposition apparatus (100) including an ion source (101), a target (102), a tillable substrate table (103) and an auxiliary port (104). The target (102) is in the form of a carousel which carries a number of targets and the ion source (101) is configured to produce a substantially rectangular section beam (105).
摘要翻译：本发明涉及一种包括离子源（101），靶（102），可耕化基板台（103）和辅助端口（104）的宽束离子沉积装置（100）。目标（102）是携带多个目标的转盘的形式，并且离子源（101）被配置为产生基本上矩形的截面梁（105）。

3. 发明申请

US20080063038A1 Transfer of Error-Analysis and Statistical Data in a Fibre Channel Input/Output System 有权
标题翻译：在光纤通道输入/输出系统中传输误差分析和统计数据
公开(公告)号：US20080063038A1
公开(公告)日：2008-03-13
申请号：US11940345
申请日：2007-11-15
申请人： Robert Dugan , John Flanagan , Giles Frazier , Matthew Kalos , Louis Ricci , Kenneth Trowell , Harry Yudenfriend
发明人： Robert Dugan , John Flanagan , Giles Frazier , Matthew Kalos , Louis Ricci , Kenneth Trowell , Harry Yudenfriend
IPC分类号： H04L5/16
CPC分类号： H04L41/0677 , H04L1/20 , H04L43/0811
摘要： A computer Input/Output system having a fabric, a control unit (CU) and a host computer including a channel, the channel having a channel port connected by a first link to a channel neighbor port of the fabric, and the control unit having a CU port connected by a second link to a CU neighbor port on the fabric. Then an error is detected in the link or protocol between the channel and the control unit, error data are reported to the channel by the channel, the channel port, the channel neighbor port, the control unit, the CU port and the CU neighbor port and sent to the channel. The error data are provided to the host computer for analysis.
摘要翻译：一种具有结构的计算机输入/输出系统，控制单元（CU）和包括通道的主机，所述通道具有通过第一链路连接到所述结构的通道相邻端口的通道端口，并且所述控制单元具有 CU端口通过第二个链路连接到Fabric上的CU邻居端口。然后在通道和控制单元之间的链路或协议中检测到错误，通道，通道端口，通道邻居端口，控制单元，CU端口和CU相邻端口向通道报告错误数据并发送到频道。将错误数据提供给主计算机进行分析。

4. 发明授权

US08425741B2 Ion deposition apparatus having rotatable carousel for supporting a plurality of targets 有权
标题翻译：离子沉积设备具有可旋转的转盘，用于支撑多个靶
公开(公告)号：US08425741B2
公开(公告)日：2013-04-23
申请号：US12309464
申请日：2007-07-06
申请人： Gary Proudfoot , Christopher David George , Paulo Edurado Lima , Gordon Robert Green , Robert Kenneth Trowell
发明人： Gary Proudfoot , Christopher David George , Paulo Edurado Lima , Gordon Robert Green , Robert Kenneth Trowell
IPC分类号： C25B9/00 , C25B13/00 , B05B5/025
CPC分类号： C23C14/46 , H01J27/18 , H01J37/20 , H01J37/3178 , H01J2237/024 , H01J2237/3146
摘要： This invention relates to a broad beam ion deposition apparatus (100) including an ion source (101), a target (102), a tillable substrate table (103) and an auxiliary port (104). The target (102) is in the form of a carousel which carries a number of targets and the ion source (101) is configured to produce a substantially rectangular section beam (105).
摘要翻译：本发明涉及一种包括离子源（101），靶（102），可耕化基板台（103）和辅助端口（104）的宽束离子沉积装置（100）。目标（102）是携带多个目标的转盘的形式，并且离子源（101）被配置为产生基本上矩形的截面梁（105）。

5. 发明申请

US20080245770A1 Positive Displacement Pumping Chamber 审中-公开
标题翻译：正位移泵房
公开(公告)号：US20080245770A1
公开(公告)日：2008-10-09
申请号：US12089899
申请日：2006-10-11
申请人： Carl David M. Brancher , John MacNeil , Robert Kenneth Trowell
发明人： Carl David M. Brancher , John MacNeil , Robert Kenneth Trowell
IPC分类号： C23C16/00 , H01L21/306 , B44C1/22
CPC分类号： H01L21/306 , B44C1/227 , C23C16/455 , C23C16/45544 , C23C16/45589 , H01L21/6719 , H01L21/67207
摘要： A substrate processing system as illustrated at (1). A substrate (2) lies upon a piston (3) shown in both the loading position (3a) and in a processing position (3b). The substrate is loaded via a port (4) through a door (5). The loading area (7a), and/or the hole chamber (7) may be pumped out via a vacuum exhaust pipe (6) connected to a pump (not shown). A linear drive mechanism shown diagrammatically at (8) lifts the piston and the substrate in the chamber such that a process volume (7b) of the chamber is defined with poor gas conduction between the piston and the walls of the chamber.
摘要翻译：（1）所示的基板处理系统。基板（2）位于在装载位置（3a）和加工位置（3b）中示出的活塞（3）上。基板通过端口（4）通过门（5）装载。可以通过连接到泵（未示出）的真空排气管（6）将装载区域（7a）和/或孔室（7）泵出。在（8）处示意地示出的线性驱动机构将活塞和基板提升到室中，使得腔室的处理体积（7b）被限定为在活塞和室壁之间的差的气体传导。

6. 发明申请

US20080034250A1 Transfer of Error-Analysis and Statistical Data After Retry in a Fibre Channel Input/Output System 有权
标题翻译：在光纤通道输入/输出系统中重试之后传输错误分析和统计数据
公开(公告)号：US20080034250A1
公开(公告)日：2008-02-07
申请号：US11869173
申请日：2007-10-09
申请人： Robert Dugan , John Flanagan , Giles Frazier , Mathew Kalos , Louis Ricci , Kenneth Trowell , Harry Yudenfriend
发明人： Robert Dugan , John Flanagan , Giles Frazier , Mathew Kalos , Louis Ricci , Kenneth Trowell , Harry Yudenfriend
IPC分类号： G06F11/00
CPC分类号： H04L41/0677 , H04L1/20 , H04L43/0811
摘要： A computer Input/Output system having a fabric, a control unit (CU) and a host computes including a channel, the channel having a channel port connected by a first link to a channel neighbor port of the fabric, and the control unit having a CU port connected by a second link to a CU neighbor port on the fabric. When an error is detected in the link or protocol between the channel and the control unit, after a retry of the failing operation is performed, error data are reported to the channel by the channel, the channel port, the channel neighbor port, the control unit, the Cu port and the CU neighbor port and sent to the channel. The error data are provided to the host computer for analysis.
摘要翻译：具有结构，控制单元（CU）和主机的计算机输入/输出系统计算包括通道，所述通道具有通过第一链接连接到所述结构的通道相邻端口的通道端口，并且所述控制单元具有 CU端口通过第二个链路连接到Fabric上的CU邻居端口。当在通道和控制单元之间的链路或协议中检测到错误时，在执行故障操作的重试之后，通过信道，信道端口，信道相邻端口，控制信道向信道报告错误数据单元，Cu端口和CU邻居端口，并发送到通道。将错误数据提供给主计算机进行分析。

7. 发明授权

US06929724B2 Shutter 有权
标题翻译：快门
公开(公告)号：US06929724B2
公开(公告)日：2005-08-16
申请号：US10434190
申请日：2003-05-09
申请人： Gordon Robert Green , Robert Kenneth Trowell
发明人： Gordon Robert Green , Robert Kenneth Trowell
IPC分类号： C23C14/22 , C23C14/00
CPC分类号： C23C14/22
摘要： This invention relates to a shutter for use in physical vapour deposition apparatus having a chamber. The shutter, generally indicated at 5, is located in a side housing 6 of the vacuum chamber 7, whilst sputtering is taking place. Once the substrate 2 is treated, the substrate is removed from the chamber and the shutter is brought in to an operative position above a wafer pedestal or support 1. The shutter is mounted on an arm 8 using a fixing boss 10, the arm and the boss being magnetically coupled.
摘要翻译：本发明涉及一种用于具有室的物理气相沉积设备的快门。通常以5表示的快门位于真空室7的侧壳体6中，同时进行溅射。一旦处理了基板2，就将基板从腔室中取出，并将挡板带入晶片基座或支撑件1上方的操作位置。闸板使用固定凸台10，臂和老板被磁耦合。

8. 发明申请

US20070136552A1 Assigning alias addresses to base addresses 有权
标题翻译：为基地址分配别名地址
公开(公告)号：US20070136552A1
公开(公告)日：2007-06-14
申请号：US11299089
申请日：2005-12-08
申请人： Harry Yudenfriend , Matthew Kalos , Richard Ripberger , Kenneth Trowell , Dale Riedy , Juan Coronado
发明人： Harry Yudenfriend , Matthew Kalos , Richard Ripberger , Kenneth Trowell , Dale Riedy , Juan Coronado
IPC分类号： G06F12/00
CPC分类号： G06F3/0662 , G06F3/0617 , G06F3/0683
摘要： Provided are a method, system, and article of manufacture for assigning alias addresses to base addresses. An assignment is provided of base addresses to the devices, wherein the base addresses are used to access the devices assigned to the base addresses. An assignment is provided of a plurality of alias addresses to an alias address pool. The alias addresses in the alias address pool are capable of being dynamically assigned to the devices to service I/O requests to the devices. An Input/Output (I/O) request to access one target device comprising one of the devices is processed. A determination is made as to whether the base address assigned to the target device is available. One alias address is assigned to the target device in response to determining that the base address is not available. The I/O request is issued to the assigned alias address to transmit the request to the target device.
摘要翻译：提供了一种用于将别名地址分配给基地址的方法，系统和制品。向设备提供基地址的分配，其中基地址用于访问分配给基地址的设备。向别名地址池提供多个别名地址的分配。别名地址池中的别名地址能够被动态分配给设备，以便为设备提供I / O请求。处理包括其中一个设备的访问一个目标设备的输入/输出（I / O）请求。确定分配给目标设备的基地址是否可用。响应于确定基地址不可用，将一个别名地址分配给目标设备。 I / O请求被发送到指定的别名地址，以将请求发送到目标设备。

9. 发明申请

US20060242156A1 Communication path management system 审中-公开
标题翻译：通信路径管理系统
公开(公告)号：US20060242156A1
公开(公告)日：2006-10-26
申请号：US11110553
申请日：2005-04-20
申请人： Thomas Bish , Joseph Hyde , Matthew Kalos , Richard Ripberger , John Staubi , Kenneth Trowell , Harry Yudenfriend
发明人： Thomas Bish , Joseph Hyde , Matthew Kalos , Richard Ripberger , John Staubi , Kenneth Trowell , Harry Yudenfriend
IPC分类号： G06F17/30 , G06F7/00
CPC分类号： H04L67/1097 , H04L69/14
摘要： A communication-path management system includes a path-detection component for identifying all communications paths between a host computer, through a controller, to a data storage device. Once identified, the communication paths are incorporated into a logical-path mask. The path-detection component recognizes each path as either preferred or non-preferred based on latency, bandwidth, availability, or other user-defined criteria and divides the logical-path mask into a preferred path subset and a non-preferred path subset. If a valid path exists in the preferred path subset, all communications from the host computer to the data storage device transit paths belonging to this subset. Otherwise, active control is given to the non-preferred path subset. A channel subsystem manages actual communication based on resource allocation and contention using the currently active subset.
摘要翻译：通信路径管理系统包括用于识别通过控制器的主机与数据存储设备之间的所有通信路径的路径检测组件。一旦识别，通信路径被合并到逻辑路径掩码中。路径检测组件基于延迟，带宽，可用性或其他用户定义的标准将每个路径识别为优选的或不优选的，并将逻辑路径掩码划分成优选的路径子集和非优选的路径子集。如果优选路径子集中存在有效的路径，则从主计算机到数据存储设备的所有通信都将传输属于此子集的路径。否则，给予非优选路径子集的主动控制。信道子系统使用当前活动的子集来管理基于资源分配和争用的实际通信。

10. 发明申请

US20090309042A1 ION SOURCES 有权
标题翻译：离子源
公开(公告)号：US20090309042A1
公开(公告)日：2009-12-17
申请号：US12309460
申请日：2007-07-12
申请人： Gary Proudfoot , Gordon Robert Green , Robert Kenneth Trowell
发明人： Gary Proudfoot , Gordon Robert Green , Robert Kenneth Trowell
IPC分类号： H01J27/00
CPC分类号： H01J27/18 , H01J27/024 , H01J37/04 , H01J37/08 , H01J2237/04735 , H01J2237/083
摘要： This invention relates to an Ion gun (10) which comprises of plasma generator (11) driven from an RF source (12), a plasma or source chamber (13), having an outlet (14), across which is mounted an accelerator grid (15). The accelerator grid (15) comprises four individual grids. The first grid (16), which is closest to the outlet (14), is maintained at a positive voltage by a DC source (16a), the second grid (17) is maintained strongly negative by DC source (17a). The third grid (18) is maintained at a negative voltage, which is much lower than that of the second grid (17), by DC source (18a) and the fourth grid is grounded. Means of mounting these grids are also described.
摘要翻译：本发明涉及一种离子枪（10），其包括从RF源（12）驱动的等离子体发生器（11），具有出口（14）的等离子体或源室（13），其上安装有加速器格栅（15）。加速器网格（15）包括四个单独的网格。最靠近出口（14）的第一栅极（16）通过直流源（16a）保持在正电压，第二栅极（17）被直流源（17a）强烈地保持为负。第三栅极（18）通过直流源（18a）保持在比第二栅极（17）的负电压低得多的负电压，第四栅极接地。还描述了安装这些网格的方法。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式