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2. 发明申请

US20070166657A1 Heat treatment system and method therefore 有权
标题翻译：热处理系统和方法因此
公开(公告)号：US20070166657A1
公开(公告)日：2007-07-19
申请号：US11705443
申请日：2007-02-13
申请人： Kazunari Sakata , Koyu Hasegawa , Keiichi Katabuchi , Shingo Watanabe , Shinya Mochizuki , Motoki Akimoto , Hiroshi Motono
发明人： Kazunari Sakata , Koyu Hasegawa , Keiichi Katabuchi , Shingo Watanabe , Shinya Mochizuki , Motoki Akimoto , Hiroshi Motono
IPC分类号： F27D1/18
CPC分类号： H01L21/67373 , F27B5/04 , F27B17/0025 , F27D3/0084 , F27D5/0037 , H01L21/67017 , H01L21/67109 , H01L21/67379 , H01L21/67389 , H01L21/67393 , H01L21/67739 , H01L21/67769 , H01L21/67772 , H01L21/67775 , H01L21/67778 , H01L21/68707 , Y10S269/903 , Y10S414/135 , Y10S414/137
摘要： There is provided a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a housing-box transfer area from a treating-object transfer area (a wafer transfer area), and of contributing to space saving, when an object to be treated is carried in the vertical heat treatment system through the opening to carry out a predetermined treatment. In a vertical heat treatment system for carrying an object W to be treated, which is housed in a treating-object housing box 2 closed by an opening/closing lid 10, in a treating-object transfer area 46 via an opening 28, which is formed in a partition wall 26 separating a housing-box transfer area 44 for transferring the treating-object housing box from the treating-object transfer area 46 in an atmosphere of an inert gas, to carry out a predetermined treatment, a standby box transfer means 60 is provided in the housing-box transfer area for holding a treating-object housing box, which houses therein the next object to be carried in the treating-object transfer area, in the vicinity of the opening to cause the treating-object housing box to stand by. Thus, when the object to be treated is carried in via the opening of the partition wall, which separates the housing-box transfer area from the treating-object transfer area (wafer transfer area), to carry out a predetermined treatment, the structure of various mechanisms in the vicinity of the opening is simplified, and the space is saved.
摘要翻译：提供了一种垂直式热处理系统，其能够简化形成在将箱体搬送区域从处理对象搬送区域（晶片转移区域）分离的分隔壁的开口附近的各种机构的结构，并且当通过开口在垂直热处理系统中承载待处理物体时，有助于节省空间，以进行预定处理。在用于承载被打开/关闭盖10封闭的处理对象收纳箱2中的待处理对象物W的立式热处理系统经由开口28在处理对象转移区域46中形成在隔离壁26中，隔离箱26分离用于在惰性气体气氛中将处理对象收纳箱从处理对象转移区域46传送的收纳箱传送区域44，以执行预定处理;待机箱传送装置 60设置在用于保持处理对象收纳箱的收纳箱传送区域中，处理对象收纳箱在其内容纳有待处理对象转移区域中的下一个物体的开口附近，从而使处理对象收纳箱待命因此，当待处理物体经由将箱体转移区域从处理对象转移区域（晶片转移区域）分离的分隔壁的开口进行预定处理时，结构简化了开口附近的各种机构，节省了空间。

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