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    • 3. 发明授权
    • Pressure sensor
    • 压力传感器
    • US4672411A
    • 1987-06-09
    • US681026
    • 1984-12-13
    • Isao ShimizuKazuo Hoya
    • Isao ShimizuKazuo Hoya
    • H01L29/84G01L9/00H01L27/20
    • G01L9/0054G01L9/0042
    • Disclosed is a pressure sensor having a diaphragm formed in a semiconductor body, the diaphragm having at least one pair of pressure sensing semiconductor strips in a major surface thereof. One end of each of the strips is connected to each other by a semiconductor region. The semiconductor region is formed in a direction of small piezoresistive coefficients, and the strips are formed in a direction of great piezoresistive coefficients. Also, the region has a smaller resistance than the resistance of the strips. Also, electrode lead-out regions are provided at the other ends of the strips, which regions have low resistance, extend in a direction of small piezoresistive coefficients, and extend beyond the edge of the diaphram so the electrodes contact the semiconductor body outside the diaphragm. According to the present invention, a pressure sensor of high sensitivity and high precision can be provided.
    • 公开了一种具有形成在半导体本体中的隔膜的压力传感器,所述隔膜在其主表面中具有至少一对压力感测半导体条。 每个条带的一端通过半导体区域相互连接。 半导体区域形成在小的压阻系数的方向上,并且条带形成在大的压阻系数的方向上。 此外,该区域的电阻比条的电阻小。 此外,电极引出区域设置在条带的另一端,该区域具有低电阻,沿小的压阻系数的方向延伸,并且延伸超过膜的边缘,使得电极与隔膜外部的半导体本体接触 。 根据本发明,可以提供高灵敏度和高精度的压力传感器。