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1. 发明授权

US08368474B2 Surface acoustic wave oscillator 失效
标题翻译：表面声波振荡器
公开(公告)号：US08368474B2
公开(公告)日：2013-02-05
申请号：US13110990
申请日：2011-05-19
申请人： Kazuki Arakawa , Kazuhiko Kano
发明人： Kazuki Arakawa , Kazuhiko Kano
IPC分类号： H03B9/12
CPC分类号： H03B5/326
摘要： In a SAW oscillator, each of a first SAW element and a second SAW element includes interdigital electrodes and a reflector formed on a piezoelectric material. A first oscillating circuit part forms an oscillating loop including the first SAW element. A second oscillating circuit part forms an oscillating loop including the second SAW element. The first and second oscillating circuit parts have an identical admittance property. The first and second SAW elements are configured that an electrode pitch is identical and an admittance property indicating a relation between a frequency and an admittance value is different therebetween. Further, a first intersection point between the admittance property of the first SAW element and the admittance property of the first oscillating circuit part and a second intersection point between the admittance property of the second SAW element and the admittance property of the second oscillating circuit part are at different frequencies.
摘要翻译：在SAW振荡器中，第一SAW元件和第二SAW元件中的每一个包括叉指电极和形成在压电材料上的反射器。第一振荡电路部分形成包括第一SAW元件的振荡回路。第二振荡电路部分形成包括第二SAW元件的振荡回路。第一和第二振荡电路部件具有相同的导纳特性。第一和第二SAW元件被构造成电极间距相同，并且指示频率和导纳值之间的关系的导纳特性在它们之间是不同的。此外，第一SAW元件的导纳特性和第一振荡电路部分的导纳特性与第二SAW元件的导纳特性与第二振荡电路部分的导纳特性之间的第二交点之间的第一交点是在不同的频率。

2. 发明申请

US20110285470A1 SURFACE ACOUSTIC WAVE OSCILLATOR 失效
标题翻译：表面声波振荡器
公开(公告)号：US20110285470A1
公开(公告)日：2011-11-24
申请号：US13110990
申请日：2011-05-19
申请人： Kazuki ARAKAWA , Kazuhiko KANO
发明人： Kazuki ARAKAWA , Kazuhiko KANO
IPC分类号： H03B1/00
CPC分类号： H03B5/326
摘要： In a SAW oscillator, each of a first SAW element and a second SAW element includes interdigital electrodes and a reflector formed on a piezoelectric material. A first oscillating circuit part forms an oscillating loop including the first SAW element. A second oscillating circuit part forms an oscillating loop including the second SAW element. The first and second oscillating circuit parts have an identical admittance property. The first and second SAW elements are configured that an electrode pitch is identical and an admittance property indicating a relation between a frequency and an admittance value is different therebetween. Further, a first intersection point between the admittance property of the first SAW element and the admittance property of the first oscillating circuit part and a second intersection point between the admittance property of the second SAW element and the admittance property of the second oscillating circuit part are at different frequencies.
摘要翻译：在SAW振荡器中，第一SAW元件和第二SAW元件中的每一个包括叉指电极和形成在压电材料上的反射器。第一振荡电路部分形成包括第一SAW元件的振荡回路。第二振荡电路部分形成包括第二SAW元件的振荡回路。第一和第二振荡电路部件具有相同的导纳特性。第一和第二SAW元件被构造成电极间距相同，并且指示频率和导纳值之间的关系的导纳特性在它们之间是不同的。此外，第一SAW元件的导纳特性和第一振荡电路部分的导纳特性与第二SAW元件的导纳特性与第二振荡电路部分的导纳特性之间的第二交点之间的第一交点是在不同的频率。

3. 发明授权

US06624038B2 Capacitor electrode having uneven surface formed by using hemispherical grained silicon 失效
公开(公告)号：US06624038B2
公开(公告)日：2003-09-23
申请号：US09908958
申请日：2001-07-19
申请人： Kazuki Arakawa
发明人： Kazuki Arakawa
IPC分类号： H01L2120
CPC分类号： H01L28/84
摘要： A lower electrode of a capacitor which has uneven surface formed by using HSG-Si (hemispherical grained silicon) and which is used, for example, in a semiconductor device such as DRAM device. Such lower electrode is fabricated as follows. An insulating film is formed on a semiconductor substrate, and a silicon film is formed on the insulating film. Then, the silicon film is selectively patterned to pattern it. The semiconductor substrate is heated to remove moisture in the insulating film. An oxide film on the surface of the silicon film is then removed. Thereafter, silicon nuclei are formed on the surface of the silicon film by heating the semiconductor substrate in atmosphere containing silicon compound gas. The silicon nuclei are then grown and thereby a lower electrode is formed which has hemispherical grains on the surface thereof.

4. 发明授权

US07900512B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US07900512B2
公开(公告)日：2011-03-08
申请号：US11878441
申请日：2007-07-24
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01P9/04
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

5. 发明申请

US20110041605A1 Angular rate sensor 有权
公开(公告)号：US20110041605A1
公开(公告)日：2011-02-24
申请号：US12923971
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

6. 发明申请

US20110041604A1 Angular rate sensor 审中-公开
公开(公告)号：US20110041604A1
公开(公告)日：2011-02-24
申请号：US12923970
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

7. 发明申请

US20100201458A1 Surface acoustic wave element, method of producing the same, and method of changing resonation frequency of the same 失效
标题翻译：表面声波元件及其制造方法以及改变其谐振频率的方法
公开(公告)号：US20100201458A1
公开(公告)日：2010-08-12
申请号：US12656523
申请日：2010-02-02
申请人： Kazuki Arakawa , Kazuhiko Kano , Shingo Jinno
发明人： Kazuki Arakawa , Kazuhiko Kano , Shingo Jinno
IPC分类号： H03H9/02
CPC分类号： H03H9/02645 , H03H9/02685 , H03H9/02708 , H03H9/02724 , H03H9/02748 , H03H9/02803
摘要： A surface acoustic wave element includes a piezoelectric member, a comb-teeth electrode, and a reflector. The comb-teeth electrode is arranged on the piezoelectric member. The reflector is arranged on the piezoelectric member. The reflector reflects a surface acoustic wave transmitted from the comb-teeth electrode. The reflector has a plurality of areas, and each of the areas has a frequency to make a reflection efficiency the largest. At least two of the frequencies of the areas are made different from each other.
摘要翻译：表面声波元件包括压电元件，梳齿电极和反射器。梳齿电极配置在压电元件上。反射器设置在压电元件上。反射器反射从梳齿电极传播的表面声波。反射器具有多个区域，并且每个区域具有使反射效率最大的频率。这些区域的至少两个频率彼此不同。

8. 发明申请

US20090133495A1 Yaw rate sensor using surface acoustic wave 失效
标题翻译：偏航速率传感器采用表面声波
公开(公告)号：US20090133495A1
公开(公告)日：2009-05-28
申请号：US12292709
申请日：2008-11-25
申请人： Kazuki Arakawa , Kazuhiko Kano , Akihiko Teshigahara
发明人： Kazuki Arakawa , Kazuhiko Kano , Akihiko Teshigahara
IPC分类号： G01P3/00 , G01C19/56
CPC分类号： G01C19/5698
摘要： A yaw rate sensor has two sets of exciting electrodes, perturbative weights and two sets of detecting electrodes on a surface of a piezoelectric substrate. The exciting electrodes excite first surface acoustic waves transmitted through the surface of the substrate in a propagation direction. The weights are oscillated by the waves and excite a second surface acoustic wave, transmitted through the surface of the substrate in a detection direction orthogonal to the propagation direction, in response to a yaw applied to the weights. The detecting electrodes measure an intensity of the second surface acoustic wave to detect the yaw rate. The sets of exciting electrodes are symmetrically placed with respect to a driving axis extending straight along the propagation direction. The group of weights is symmetric with respect to the driving axis.
摘要翻译：横摆率传感器在压电基板的表面上具有两组激励电极，扰动重量和两组检测电极。励磁电极在传播方向上激发透过基板表面的第一表面声波。权重由波振荡，并且响应于施加到权重的偏航，激发在与传播方向正交的检测方向上透射通过基板的表面的第二表面声波。检测电极测量第二声表面波的强度以检测横摆率。激励电极组相对于沿着传播方向直线延伸的驱动轴对称地放置。重量组相对于驱动轴对称。

9. 发明申请

US20080028855A1 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US20080028855A1
公开(公告)日：2008-02-07
申请号：US11878441
申请日：2007-07-24
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01C19/00
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

10. 发明授权

US08256289B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US08256289B2
公开(公告)日：2012-09-04
申请号：US12923971
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01P9/04
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

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