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    • 4. 发明授权
    • Method for producing a solar cell
    • 太阳能电池的制造方法
    • US07556740B2
    • 2009-07-07
    • US10648429
    • 2003-08-26
    • Yosuke InomataKatsuhiko Shirasawa
    • Yosuke InomataKatsuhiko Shirasawa
    • H01L21/306
    • H01J37/32623H01J37/32082
    • A substrate processing apparatus that roughens the surface of a substrate through a dry etching method by covering the surface of the substrate to be processed with a plate provided with a number of opening portions. The plate is provided with the opening portions in such a manner that an open area ratio of the opening portions on the peripheral side is smaller than an open area ratio of the opening portions in the central portion when the plate is viewed in a plane. It is thus possible to form textures on the surface of the substrate efficiently and homogenously, which in turn makes it possible to manufacture highly efficient solar cells or the like at a low cost.
    • 一种基板处理装置,其通过用设置有多个开口部的板覆盖被处理基板的表面,通过干法蚀刻法使基板的表面粗糙化。 该板以这样一种方式设置开口部分,使得当在平面中观察板时,周边侧的开口部分的开口面积比小于中心部分中的开口部分的开口面积比。 因此,可以有效且均匀地在基板的表面上形成纹理,这又可以以低成本制造高效率的太阳能电池等。